{"id":62593,"date":"2017-01-21T06:30:03","date_gmt":"2017-01-20T22:30:03","guid":{"rendered":"\/\/m.iemloyee.com\/?p=62593"},"modified":"2017-01-20T23:27:51","modified_gmt":"2017-01-20T15:27:51","slug":"%e5%8c%97%e5%a4%a7%e5%bd%ad%e7%bb%83%e7%9f%9b-%e5%bc%a0%e5%bf%97%e5%8b%87science%e9%87%8d%e7%a3%85%ef%bc%9a%e9%a6%96%e6%ac%a1%e5%ae%9e%e7%8e%b05nm%e7%a2%b3%e7%ba%b3%e7%b1%b3%e7%ae%a1cmos%e5%99%a8","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=62593","title":{"rendered":"\u5317\u5927\u5f6d\u7ec3\u77db-\u5f20\u5fd7\u52c7Science\u91cd\u78c5\uff1a\u9996\u6b21\u5b9e\u73b05nm\u78b3\u7eb3\u7c73\u7ba1CMOS\u5668\u4ef6 \u6253\u7834\u4f20\u7edf\u7845\u57fa\u6781\u9650"},"content":{"rendered":"

\u3010\u5f15\u8bed\u3011<\/strong><\/p>\n

\u4f20\u7edf\u7845\u57fa\u4e92\u8865\u91d1\u5c5e-\u6c27\u5316\u7269\u534a\u5bfc\u4f53\uff08CMOS\uff09\u6280\u672f\u5728\u6b2110\u7eb3\u7c73\u6280\u672f\u8282\u70b9\u6b63\u9010\u6e10\u63a5\u8fd1\u5176\u6027\u80fd\u6781\u9650\uff0c\u540e\u7eed\u7531\u4e8e\u6765\u81ea\u7269\u7406\u5b9a\u5f8b\u548c\u5236\u9020\u6210\u672c\u7684\u9650\u5236\uff0c\u6027\u80fd\u96be\u4ee5\u7ee7\u7eed\u63d0\u5347\u3002\u800c\u57fa\u4e8e\u534a\u5bfc\u4f53\u5355\u58c1\u78b3\u7eb3\u7c73\u7ba1\uff08s-SWCNT\uff09\u7684 \u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff08FETs\uff09\u5de5\u827a\u6b63\u9010\u6b65\u63a5\u8fd1\u6b2110\u7eb3\u7c73\u6280\u672f\u8282\u70b9\uff0c\u7531\u4e8e\u5176\u5177\u6709\u7eb3\u7c73\u7ef4\u5ea6\u5c3a\u5bf8\u3001\u9ad8\u8fc1\u79fb\u7387\u548c\u9ad8\u7a33\u5b9a\u6027\u7b49\u4f18\u70b9\uff0c\u4ece\u7406\u8bba\u4e0a\u8bb2\uff0c\u78b3\u7eb3\u7c73\u7ba1\u6bd4\u7845\u6750\u6599\u4ee5\u53ca\u5176\u4ed6\u4f20\u7edf\u534a\u5bfc\u4f53\u6750\u6599\uff08Ge \u548cInGaAs\u7b49\uff09\u5177\u6709\u66f4\u597d\u7684\u5c3a\u5bf8\u6027\u8d28\uff0c\u5728CMOS-FETs\u5e94\u7528\u65b9\u9762\u5177\u6709\u66f4\u597d\u7684\u5f00\u6001\u6027\u80fd\uff0c\u662f\u6709\u671b\u66ff\u4ee3\u7845\u6750\u6599\u7684\u201c\u5019\u9009\u8005\u201d\u3002\u800c\u76ee\u524d\u4e3a\u6b62\uff0c\u57fa\u4e8e\u78b3\u7eb3\u7c73\u7ba1\u7684CMOS FETs\u572850\u7eb3\u7c73\u6805\u957f\u548c20\u7eb3\u7c73\u56f4\u6805\u5c3a\u5bf8\uff0c\u5747\u4f18\u4e8e\u7845\u57faCMOS-FETs\u3002\u800c\u6b2110\u7eb3\u7c73\u78b3\u7eb3\u7c73\u7ba1\u7684CMOS FET\u7531\u4e8e\u5de5\u827a\u548c\u6280\u672f\u539f\u56e0\u5c1a\u672a\u6709\u62a5\u9053\u3002<\/p>\n

\u3010\u6210\u679c\u7b80\u4ecb\u3011<\/strong><\/p>\n

\u5317\u4eac\u5927\u5b66\u5f6d\u7ec3\u77db\u548c\u5f20\u5fd7\u52c7\uff08\u5171\u540c\u901a\u8baf\u4f5c\u8005\uff09\u7b49\u4eba\u5236\u5907\u4e8610\u7eb3\u7c73\u6805\u957f\uff08\u5bf9\u5e945\u7eb3\u7c73\u6280\u672f\u8282\u70b9\uff09\u7684\u9876\u6805\u78b3\u7eb3\u7c73\u7ba1\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff0c\u5728\u76f8\u540c\u5c3a\u5bf8\u4e0b\uff0c\u5176\u6027\u80fd\u5df2\u7ecf\u8d85\u8d8a\u7845\u57fa\u4e92\u8865\u91d1\u5c5e-\u6c27\u5316\u7269\u534a\u5bfc\u4f53\uff08CMOS\uff09FETs\u3002\u901a\u8fc7\u5bf9\u6805\u957f\u5c3a\u5bf8\u7f29\u5c0f\u5f71\u54cd\u5668\u4ef6\u6027\u80fd\u7684\u7814\u7a76\u53d1\u73b0\uff0c\u76f8\u6bd4\u7845\u57fa\u5668\u4ef6\uff0c\u4f7f\u7528\u77f3\u58a8\u70ef\u63a5\u89e6\u7684\u78b3\u7eb3\u7c73\u7ba1\u573a\u6548\u5e94\u6676\u4f53\u7ba1\u8868\u73b0\u51fa\u66f4\u4f18\u7684\u6027\u80fd\uff0c\u5305\u62ec\u66f4\u5feb\u7684\u54cd\u5e94\u901f\u5ea6\u3001\u66f4\u4f4e\u7684\u9a71\u52a8\u7535\u538b\uff08\u78b3\u7eb3\u7c73\u7ba10.4 V\uff0c\u78450.7 V\uff09\u3001\u4e9a\u9608\u503c\u6446\u5e45\u66f4\u5c0f\uff0873 mV\/decade\uff09\u3002p\u578b\u548cn\u578b\u5668\u4ef6\u7684\u4e9a\u9608\u503c\u6446\u5e45\u5747\u4e3a70 mV\/DEC\uff08DEC\u8868\u793a\u500d\u9891\u7a0b\uff09\uff1b\u5668\u4ef6\u6027\u80fd\u4e0d\u4ec5\u8fdc\u8fdc\u8d85\u8fc7\u5df2\u53d1\u5e03\u7684\u6240\u6709\u78b3\u7ba1\u5668\u4ef6\uff0c\u5e76\u4e14\u5728\u66f4\u4f4e\u7684\u5de5\u4f5c\u7535\u538b\uff080.4 V\uff09\u4e0bp\u578b\u548cn\u578b\u6676\u4f53\u7ba1\u7684\u5de5\u4f5c\u6027\u80fd\u5747\u8d85\u8fc7\u4e86\u76ee\u524d\u6700\u597d\u7684\u7845\u57faCMOS\u5668\u4ef6\u57280.7 V\u7535\u538b\u4e0b\u7684\u6027\u80fd\uff08\u82f1\u7279\u5c14\u516c\u53f8\u768414 nm\u8282\u70b9\uff09\uff1b\u7279\u522b\u662f\u78b3\u7ba1CMOS\u6676\u4f53\u7ba1\u672c\u5f81\u95e8\u5ef6\u65f6\u4ec50.062 ps\uff0c\u76f8\u5f53\u4e8e14 nm\u7845\u57faCMOS\u5668\u4ef6\uff080.22 ps\uff09\u76841\/3\u30025\u7eb3\u7c73CNT FETs\u5df2\u7ecf\u63a5\u8fd1\u573a\u6548\u5e94\u6676\u4f53\u7ba1\u7684\u91cf\u5b50\u6781\u9650\uff0c\u5b9e\u73b0\u573a\u6548\u5e94\u6676\u4f53\u7ba1\u7684\u5355\u7535\u5b50\u5f00\u5173\u64cd\u4f5c\u3002\u4e0e\u6b64\u540c\u65f6\uff0c\u8bfe\u9898\u7ec4\u7814\u7a76\u63a5\u89e6\u5c3a\u5bf8\u7f29\u51cf\u5bf9\u5668\u4ef6\u6027\u80fd\u7684\u5f71\u54cd\uff0c\u63a2\u7d22\u5668\u4ef6\u6574\u4f53\u5c3a\u5bf8\u7684\u7f29\u51cf\uff0c\u5c06\u78b3\u7ba1\u5668\u4ef6\u7684\u63a5\u89e6\u7535\u6781\u957f\u5ea6\u7f29\u51cf\u81f325 nm\uff0c\u5728\u4fdd\u8bc1\u5668\u4ef6\u6027\u80fd\u7684\u524d\u63d0\u4e0b\uff0c\u5b9e\u73b0\u4e86\u6574\u4f53\u5c3a\u5bf8\u4e3a60 nm\u7684\u78b3\u7ba1\u6676\u4f53\u7ba1\uff0c\u5e76\u4e14\u6210\u529f\u6f14\u793a\u4e86\u6574\u4f53\u957f\u5ea6\u4e3a240 nm\u7684\u78b3\u7ba1CMOS\u53cd\u76f8\u5668\uff0c\u8fd9\u662f\u76ee\u524d\u6240\u5b9e\u73b0\u7684\u6700\u5c0f\u7684\u7eb3\u7c73\u53cd\u76f8\u5668\u7535\u8def\u3002<\/p>\n

\u3010\u56fe\u6587\u5bfc\u8bfb\u3011<\/strong><\/p>\n

\u56fe1 10-nm CNT CMOS FETs\u7684\u7ed3\u6784\u548c\u6027\u80fd<\/strong><\/p>\n

\"\"<\/p>\n

A\u3001P\u578b\u3001N\u578b\u548c\u6805\u5806\u53e0\u578b\u78b3\u7ba1\u6676\u4f53\u7ba1\u622a\u9762\u900f\u5c04\u7535\u955c\u56fe\uff0c\u6805\u957f10\u7eb3\u7c73\uff0c\u6c9f\u9053\u957f\u5ea620\u7eb3\u7c73\uff1bB\u3001\u8f6c\u79fb\u7279\u6027\u66f2\u7ebf\uff1bC-D 10\u7eb3\u7c73\u6805\u957fCNT CMOS FETs\u548c\u5546\u4e1a\u7845\u57faCMOS\u6676\u4f53\u7ba1\uff08\u82f1\u7279\u5c1414\u7eb3\u7c73-\u9ed1\u8272\u5b9e\u7ebf\u300122\u7eb3\u7c73-\u68d5\u8272\u5b9e\u7ebf\uff09\u7684\u8f93\u51fa\u7279\u6027\u6bd4\u8f83\u3002<\/p>\n

\u56fe2 5-nm CNT FETs\u7684\u7ed3\u6784\u548c\u6027\u80fd<\/strong><\/p>\n

\"\"<\/p>\n

A\u3001\u5e38\u89c4Pd-\u63a5\u89e6\u7684CNT FET\uff08\u4e0a\uff09\u548c\u77f3\u58a8\u70ef\u63a5\u89e6\uff08\u4e0b\uff09\u7684CNT FET\u7684SEM\u56fe\u50cf\uff1bB\u3001\u77f3\u58a8\u70ef\u63a5\u89e6CNT FET\u7684\u7ed3\u6784\u793a\u610f\u56fe\uff1bC\u3001\u77f3\u58a8\u70ef\u63a5\u89e6CNT FET\u5728\u5f00\u6001\u548c\u5173\u6001\u65f6\u7684\u80fd\u5e26\u7ed3\u6784\u793a\u610f\u56fe\uff1bD\u3001\u4e09\u4e2a\u5178\u578b\u77f3\u58a8\u70ef\u63a5\u89e6CNT FET\u7684\u8f6c\u79fb\u7279\u5f81\u66f2\u7ebf\uff0c\u6805\u957f10\u7eb3\u7c73\uff0c\u4e9a\u9608\u503c\u6446\u5e45\u4e3a60 mV\/decade\uff1bE\u3001\u4e09\u4e2a\u5178\u578b\u77f3\u58a8\u70ef\u63a5\u89e6CNT FET\u7684\u8f6c\u79fb\u7279\u5f81\u66f2\u7ebf\uff0c\u6805\u957f5\u7eb3\u7c73\uff0c\u4e9a\u9608\u503c\u6446\u5e45\u4e3a73 mV\/decade.<\/p>\n

\u56fe3 CNT CMOS FETs\u548c\u4f20\u7edf\u7845\u57faCMOS FET\u7684\u6027\u80fd\u5bf9\u6bd4<\/strong><\/p>\n

\"\"<\/p>\n

A\u3001\u4e0d\u540c\u7684\u6b21100\u7eb3\u7c73CNT FET\u7684\u5668\u4ef6\u5f00\u6001\u7535\u6d41\u6bd4\u8f83\uff1bB\u3001CNT FET\u548cSi FET\u7684\u4e9a\u9608\u503c\u6446\u5e45\u548c\u6805\u6781\u5c3a\u5bf8\u7684\u5173\u7cfb\uff1bC-D\u3001\u76f8\u6bd4Si MOS FET\uff0cCNT CMOS FET\u7684EDP\u548c\u54cd\u5e94\u5ef6\u8fdf\u4e0e\u6805\u6781\u5c3a\u5bf8\u7684\u5173\u7cfb\uff1bE\u300110\u7eb3\u7c73n\u578bCNT FET\uff08\u7eff\u8272\u7ebf\uff09\u548c14\u7eb3\u7c73n\u578bSi FET\uff08\u6a58\u9ec4\u8272\u7ebf\uff09\u7684\u5f00\u5173\u6bd4\u548c\u6805\u6781\u5ef6\u8fdf\u7684\u5173\u7cfb\uff1bF\u300110\u7eb3\u7c73\u6805\u957f\u548c25\u7eb3\u7c73\u63a5\u89e6\u957f\u5ea6\u7684\u5668\u4ef6\u7ed3\u6784\u3002<\/p>\n

\u56fe4 \u63a5\u89e6\u957f\u5ea6\u4f9d\u8d56\u5173\u7cfb\u7684CNT CMOS FET\u7684\u6027\u80fd\u7814\u7a76<\/strong><\/p>\n

\"\"<\/p>\n

A\u3001\u63a5\u89e6\u957f\u5ea6\u5206\u522b\u4e3a100\uff0c60\u548c25\u7eb3\u7c73\u7684CNT n\u578bFET\u7684\u8f6c\u79fb\u7279\u5f81\u66f2\u7ebf\uff08\u6e90\u6f0f\u7535\u538b\u4e3a0.1V\u65f6\uff09\uff1bB\u3001p\u578b\uff08\u84dd\u661f\uff09\u548cN\u578b\uff08\u6a44\u6984\u8272\uff09CNT FET\u7684\u63a5\u89e6\u7535\u963b\u548c\u6805\u6781\u5c3a\u5bf8\u7684\u5173\u7cfb\uff1bC\u3001CNT CMOS\u53cd\u76f8\u5668\u7684SEM\u56fe\u50cf\uff1bCNT CMOS\u53cd\u76f8\u5668\u7684\u8f6c\u79fb\u7279\u5f81\u66f2\u7ebf\u3002<\/p>\n

\u3010\u5c0f\u7ed3\u3011<\/strong><\/p>\n

\u8be5\u7814\u7a76\u6210\u679c\u4e0d\u4ec5\u8868\u660e\u572810 nm\u4ee5\u4e0b\u7684\u6280\u672f\u8282\u70b9\uff0c\u78b3\u7eb3\u7c73\u7ba1CMOS\u5668\u4ef6\u8f83\u7845\u57faCMOS\u5668\u4ef6\u5177\u6709\u660e\u663e\u4f18\u52bf\uff0c\u4e14\u6709\u671b\u8fbe\u5230\u7531\u6d4b\u4e0d\u51c6\u539f\u7406\u548c\u70ed\u529b\u5b66\u5b9a\u5f8b\u6240\u51b3\u5b9a\u7684\u4e8c\u8fdb\u5236\u7535\u5b50\u5f00\u5173\u7684\u6027\u80fd\u6781\u9650\uff0c\u66f4\u5c55\u73b0\u51fa\u78b3\u7eb3\u7c73\u7ba1\u7535\u5b50\u5b66\u7684\u5de8\u5927\u6f5c\u529b\uff0c\u4e3a2020\u5e74\u4e4b\u540e\u7684\u96c6\u6210\u7535\u8def\u6280\u672f\u53d1\u5c55\u548c\u9009\u62e9\u63d0\u4f9b\u4e86\u91cd\u8981\u53c2\u8003\u3002<\/p>\n

\u3010\u6587\u732e\u94fe\u63a5\u3011<\/strong><\/p>\n

Scaling carbon nanotube complementary transistors to 5-nm gate lengths<\/a>\uff08Science, 2017, DOI: 10.1126\/science.aaj1628\uff09<\/p>\n

\u672c\u6587\u7531\u6750\u6599\u4eba\u7f16\u8f91\u90e8\u7075\u5bf8\u4f9b\u7a3f\uff0c\u6750\u6599\u725b\u7f16\u8f91\u6574\u7406\u3002<\/p>\n

\u3010\u76f8\u5173\u9605\u8bfb\u3011<\/strong><\/p>\n

\u7845\u65f6\u4ee3\u5373\u5c06\u7ec8\u7ed3\uff01\u4f2f\u514b\u5229\u7528\u78b3\u7eb3\u7c73\u7ba1\u548c\u4e8c\u786b\u5316\u94bc\u5236\u5907\u51fa1nm\u6676\u4f53\u7ba1<\/a><\/p>\n

\u6750\u6599\u4eba\u7f51\u4e13\u6ce8\u4e8e\u8ddf\u8e2a\u6750\u6599\u9886\u57df\u79d1\u6280\u53ca\u884c\u4e1a\u8fdb\u5c55\uff0c\u8fd9\u91cc\u6c47\u96c6\u4e86\u5404\u5927\u9ad8\u6821\u7855\u535a\u751f\u3001\u4e00\u7ebf\u79d1\u7814\u4eba\u5458\u4ee5\u53ca\u884c\u4e1a\u4ece\u4e1a\u8005\uff0c\u5982\u679c\u60a8\u5bf9\u4e8e\u8ddf\u8e2a\u6750\u6599\u9886\u57df\u79d1\u6280\u8fdb\u5c55\uff0c\u89e3\u8bfb\u9ad8\u6c34\u5e73\u6587\u7ae0\u6216\u662f\u8bc4\u8ff0\u884c\u4e1a\u6709\u5174\u8da3\uff0c\u70b9\u6211\u52a0\u5165\u7f16\u8f91\u90e8<\/a>\u3002<\/p>\n

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