{"id":55711,"date":"2016-12-14T06:30:35","date_gmt":"2016-12-13T22:30:35","guid":{"rendered":"\/\/m.iemloyee.com\/?p=55711"},"modified":"2016-12-12T22:35:15","modified_gmt":"2016-12-12T14:35:15","slug":"nano-lett-%ef%bc%9a%e7%ba%b3%e7%b1%b3%e7%95%8c%e7%9a%84%e5%a4%b9%e5%bf%83-inassb-gasb%e6%a0%b8%e5%a3%b3%e7%ba%b3%e7%b1%b3%e7%ba%bf%e7%9a%84mocvd%e9%80%89%e5%8c%ba%e7%94%9f%e9%95%bf","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=55711","title":{"rendered":"Nano Lett.\uff1a\u7eb3\u7c73\u754c\u7684\u5939\u5fc3\u2014InAs(Sb) \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u7684MOCVD\u9009\u533a\u751f\u957f\u548c\u8f7d\u6d41\u5b50\u4f20\u8f93\u578b\u63a7\u5236"},"content":{"rendered":"

\u3010\u5f15\u8a00\u3011<\/strong><\/p>\n

\u7531\u4e8e\u70ed\u8f7d\u6d41\u5b50\u6ce8\u5165\u6548\u5e94\uff0c\u5e38\u6e29\u4e0b\uff0c\u8981\u4f7f\u4f20\u7edf\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff08MOS-FETs\uff09\u7684\u4e9a\u9608\u503c\u6446\u5e45\uff08SS\uff09\u4f4e\u4e8e60mV\/ decade\u662f\u6bd4\u8f83\u56f0\u96be\u7684\u3002\u4e0d\u8fc7\uff0c\u57fa\u4e8e\u5e26\u5e26\u96a7\u7a7f\u673a\u5236\uff0c\u96a7\u9053\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff08TFETs\uff09\u53ef\u4ee5\u5f88\u597d\u7684\u7a81\u7834\u9650\u5236\uff0c\u5b9e\u73b0\u4f4e\u4e8e60mV\/ decade\u7684\u4e9a\u9608\u503c\u6446\u5e45\u3002\u4e5f\u6b63\u56e0\u5982\u6b64\uff0cTFETs\u6709\u671b\u4e3a\u65b0\u4e00\u4ee3\u4f4e\u529f\u7387\u4e14\u9ad8\u901f\u7684\u7535\u5b50\u8bbe\u5907\u6548\u529b\u3002<\/p>\n

\u5728III\u2212V\u578b\u6750\u6599\u4e2d\uff0cInAs\u548cGaSb\u8f7d\u6d41\u5b50\u8fc1\u79fb\u901f\u5ea6\u5feb\uff0c\u540c\u65f6\uff0c\u4e24\u8005\u6784\u6210\u7684\u5f02\u8d28\u7ed3\u6676\u683c\u5931\u914d\u7387\u975e\u5e38\u4f4e\uff0c\u8fd8\u6709\u72ec\u7279\u7684II\u578b\u80fd\u5e26\u6392\u5217\uff0c\u56e0\u6b64\uff0cInAs-GaSb\u5f02\u8d28\u7ed3\u975e\u5e38\u9002\u4e8e\u5236\u5907TFETs\u3002\u5176\u4e2d\uff0cInAs \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u5f62\u6001\u66f4\u9002\u4e8e\u8be5\u9886\u57df\u3002\u8981\u8bf4\u6700\u5927\u7684\u6311\u6218\uff0c\u5219\u5728\u4e8eInAs \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u7684\u5236\u5907\u3002\u76ee\u524d\uff0c\u8fd9\u7c7b\u7eb3\u7c73\u7ebf\u4e3b\u8981\u5728Au\u50ac\u5316\u9897\u7c92\u4e0b\u8f85\u52a9\u751f\u957f\uff0c\u4f46Au\u5374\u4f1a\u5f71\u54cdIII\u2212V\u578b\u7eb3\u7c73\u7ebf\u7684\u6027\u80fd\uff0c\u4ee5\u81f4\u4e8e\u5728Si\u5e26\u9699\u4e2d\u51fa\u73b0\u5e76\u4e0d\u9700\u8981\u7684\u590d\u5408\u4e2d\u5fc3\u3002\u5bf9\u4e8e\u65e0Au\u5408\u6210\u7684\u65b9\u6cd5\u76ee\u524d\u9c9c\u6709\u62a5\u9053\uff0c\u57fa\u4e8e\u81ea\u7ec4\u88c5\u673a\u5236\u5408\u6210\u4e5f\u5728\u7814\u7a76\u4e4b\u4e2d\uff0c\u56e0\u6b64\u4ecd\u7136\u9700\u8981\u63a2\u8ba8\u65b0\u65b9\u6cd5\uff0c\u6765\u83b7\u5f97\u9ad8\u8d28\u91cf\u7684InAs \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u3002<\/p>\n

\u3010\u6210\u679c\u7b80\u4ecb\u3011<\/strong><\/p>\n

\u4e2d\u79d1\u9662\u534a\u5bfc\u4f53\u7814\u7a76\u6240\u6768\u6d9b\u7814\u7a76\u5458\uff08\u901a\u8baf\u4f5c\u8005\uff09<\/strong>\u7b49\u4eba\u62a5\u9053\u4e86\u4e00\u79cd\u65e0\u9700\u50ac\u5316\u5242\uff0c\u5728Si\u57fa\u5e95\u5229\u7528MOCVD\u5b9e\u73b0\u9ad8\u8d28\u91cfInAs(Sb) \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u9009\u533a\u751f\u957f\u7684\u5236\u5907\u65b9\u6cd5\u3002\u900f\u5c04\u7535\u5b50\u663e\u5fae\u955c\uff08TEM\uff09\u5206\u6790\u8868\u660e\uff0cGaSb\u58f3\u7684\u751f\u957f\u4e0eInAs(Sb)\u6838\u7684\u751f\u957f\u9ad8\u5ea6\u534f\u8c03\u4e00\u81f4\uff0c\u4e14\u6ca1\u6709\u51fa\u73b0\u4e0d\u9002\u4f4d\u9519\u3002\u4e3a\u63a7\u5236\u81ea\u50ac\u5316\u7684InAs\u6838\u7eb3\u7c73\u7ebf\u7684\u7ed3\u6784\u6027\u8d28\u5e76\u964d\u4f4e\u9762\u7f3a\u9677\uff0c\u5728\u7eb3\u7c73\u7ebf\u751f\u957f\u8fc7\u7a0b\u4e2d\uff0c\u53ef\u52a0\u5165\u5fae\u91cf\u7684Sb\u8fdb\u884c\u8c03\u63a7\u3002\u540c\u65f6\uff0c\u7535\u5b66\u6d4b\u91cf\u7ed3\u679c\u4e5f\u663e\u793a\uff0cn\u578b\u7684InAs(Sb)\u6838\u4e0ep\u578b\u7684GaSb\u58f3\u5747\u53ef\u4f5c\u4e3a\u4f20\u8f93\u901a\u9053\u7684\u6d3b\u6027\u8f7d\u4f53\uff0c\u800c\u6838\u58f3\u7eb3\u7c73\u7ebf\u7684\u4f20\u8f93\u578b\u5219\u53ef\u901a\u8fc7\u8c03\u8282GaSb\u58f3\u7684\u539a\u5ea6\u548c\u80cc\u6805\u7535\u538b\u6765\u5b9e\u73b0\u3002<\/p>\n

\u3010\u56fe\u6587\u5bfc\u8bfb\u3011<\/strong><\/p>\n

\u56fe\u4e00\u3001InAs \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u751f\u957f\u56fe\u793a<\/strong><\/p>\n

\"1\"<\/p>\n

InAs \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u7684\u9009\u533a\u751f\u957f\u793a\u610f\u56fe\u53ca\u4e3a\u7eb3\u7c73\u7ebf\u751f\u957f\u7684\u6e90\u6781\u5217<\/p>\n

\u56fe\u4e8c\u3001\u7eb3\u7c73\u7ebf\u7684\u5f62\u8c8c\u53ca\u5c3a\u5bf8\u8868\u5f81<\/strong><\/p>\n

\"2\"<\/p>\n

(a) InAs\u768430\u659c\u89d2SEM\u56fe\u3002<\/p>\n

(b) InAs \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u768430\u659c\u89d2SEM\u56fe\u3002<\/p>\n

(c) InAs\uff08\u7ea2\u8272\u67f1\u72b6\u56fe\uff09\u53caInAs \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\uff08\u84dd\u8272\u67f1\u72b6\u56fe\uff09\u7684\u76f4\u5f84\u5206\u5e03\u3002<\/p>\n

\u56fe\u4e09\u3001InAs \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u7684\u5f62\u8c8c\u548c\u7ed3\u6784\u8868\u5f81<\/strong><\/p>\n

\"3\"<\/p>\n

(a) InAs \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u7684\u4f4e\u500dTEM\u56fe\u3002<\/p>\n

(b) (a)\u56fe\u7ea2\u7ebf\u6240\u793a\u7684EDS\u7ebf\u626b\u63cf\u56fe\u8c31\u3002<\/p>\n

(c) InAs \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u6cbf<211>\u6676\u5e26\u8f74\u83b7\u5f97\u7684HRTEM\u56fe\u3002<\/p>\n

(d) (c)\u56fe\u793a\u84dd\u8272\u8fb9\u6846\u533a\u57df\u7684\u5feb\u901f\u5085\u91cc\u53f6\u9006\u53d8\u6362\uff08IFFT\uff09\u56fe\u3002<\/p>\n

(e) InAs \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u9876\u7aefHRTEM\u56fe\u3002<\/p>\n

(f) (e)\u56fe\u84dd\u8272\u9009\u533a\u7684IFFT\u56fe\u3002<\/p>\n

\u7ea2\u8272\u865a\u7ebf\u8868\u660e\u4e86(c, d)\u56fe\u4e2dInAs\u6838\u4e0eGaSb\u58f3\u7684\u5206\u754c\u9762\u3002(c, e)\u7684\u5185\u5d4c\u56fe\u5206\u522b\u4e3a\u7eff\u8272\u9009\u533a\u7684FFT\u56fe\u3002<\/p>\n

\u56fe\u56db\u3001\u4e0d\u540cSb\u63ba\u7387\u7684InAs1-x<\/sub>Sbx<\/sub>\u8868\u5f81<\/strong><\/p>\n

\"4\"<\/p>\n

\u4e0d\u540cSb\u63ba\u6742\u542b\u91cf\u7684InAs1-x<\/sub>Sbx<\/sub>\u7684HRTEM\u56fe\uff1a<\/p>\n

(a) 0%\uff0c(b) 4.6%\uff0c(c) 6.8%\uff0c(d) 7.9%\uff0c(e) 9.4%\u3002<\/p>\n

(f) \u968fSb\u542b\u91cf\u589e\u52a0\uff0c\u7eb3\u7c73\u7ebf\u7684\u7f3a\u9677\u5bc6\u5ea6\u53d8\u5316\u3002<\/p>\n

\u56fe\u4e94\u3001\u4e0d\u540cSb\u63ba\u7387\u7684InAs1-x<\/sub>Sbx<\/sub> \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u8868\u5f81<\/strong><\/p>\n

\"5\"<\/p>\n

(a, d, g) \u5206\u522b\u4e3aSb\u542b\u91cf6.8%(a)\uff0c7.9%(d)\uff0c9.4%(g)\u65f6\uff0cInAs1-x<\/sub>Sbx<\/sub> \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u768430\u659c\u89d2SEM\u56fe\u3002<\/p>\n

(b, e, h) \u548c (c, f, i) \u5206\u522b\u4e3a\u76f8\u5e94(a, d, g)Sb\u542b\u91cfInAs1-x<\/sub>Sbx<\/sub> \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u5728<211>\u6676\u5e26\u8f74\u548c<110>\u6676\u5e26\u8f74\u7684HRTEM\u56fe\u3002<\/p>\n

\u5185\u5d4c\u56fe\u4e3a\u76f8\u5e94HRTEM\u56fe\u7684FFTs\u56fe\u3002<\/p>\n

\u56fe\u516d\u3001InAs1-x<\/sub>Sbx<\/sub> \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u7684\u7535\u5b66\u8868\u5f81<\/strong><\/p>\n

\"6\"<\/p>\n

(a) \u5355\u4e2a\u7eb3\u7c73\u7ebf\u80cc\u6805FET\u7684\u793a\u610f\u56fe\u53ca\u8bbe\u5907\u7684\u4fef\u89c6SEM\u56fe\u3002<\/p>\n

(b-d) \u4e0d\u540c\u65bd\u52a0\u7535\u538b\uff08Vds<\/sub>=50-200 mV\uff0c\u4ee550mV\u9010\u7ea7\u6539\u53d8\uff09\u4e0b\uff0cInAs1-x<\/sub>Sbx<\/sub> \u548cGaSb\u58f3\u539a\u5ea6\u5927\u7ea6\u57286nm\u548c13nm\u65f6InAs1-x<\/sub>Sbx<\/sub> \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebfFETs\u7684\u4f20\u8f93\u7279\u6027\u3002<\/p>\n

\u3010\u5c0f\u7ed3\u3011<\/strong><\/p>\n

\u672c\u6587\u9996\u6b21\u62a5\u9053\u4e86\u5229\u7528MOCVD\u8fdb\u884c\u65e0\u5916\u6765\u50ac\u5316\u5242\u7684InAs1-x<\/sub>Sbx<\/sub> \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u5728Si\u57fa\u5e95\u4e0a\u7684\u9009\u533a\u751f\u957f\uff0c\u4eceTEM\u5f62\u8c8c\u8868\u5f81\u53ca\u7535\u5b66\u6d4b\u8bd5\u6765\u770b\uff0c\u8fd9\u79cd\u65b9\u5f0f\u83b7\u5f97\u7684InA(Sb) \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u7ed3\u6784\u5747\u4e00\uff0c\u7f3a\u9677\u8f83\u5c11\uff0c\u4e14\u5176\u7535\u5b66\u6027\u80fd\u5b9e\u73b0\u53ef\u63a7\u3002\u8fd9\u9879\u7814\u7a76\u4e5f\u6269\u5bbd\u4e86\u5229\u7528Sb\u63ba\u6742\u8fdb\u884c\u7eb3\u7c73\u7ebf\u6676\u76f8\u63a7\u5236\u7684\u7406\u89e3\uff0c\u540c\u65f6\u8fd9\u79cd\u539f\u751f\u751f\u957f\u7684\u9ad8\u8d28\u91cfInAs1-x<\/sub>Sbx<\/sub> \/ GaSb\u6838\u58f3\u7eb3\u7c73\u7ebf\u5728\u672a\u6765\u7eb3\u7c73\u7ebf\u57fa\u8bbe\u5907\u53ca\u57fa\u7840\u91cf\u5b50\u7269\u7406\u7814\u7a76\u65b9\u9762\u90fd\u6709\u7740\u5f88\u597d\u7684\u5e94\u7528\u524d\u666f\u3002<\/p>\n

\u6587\u732e\u94fe\u63a5<\/strong>\uff1aSelective-Area MOCVD Growth and Carrier-Transport-Type Control of InAs(Sb)\/GaSb Core\u2212Shell Nanowires<\/a>\uff08Nano Lett.\uff0c2016\uff0cDOI\uff1a10.1021\/acs.nanolett.6b03429\uff09<\/p>\n

\u672c\u6587\u7531\u6750\u6599\u4eba\u7f16\u8f91\u90e8\u7535\u5b50\u7535\u5de5\u5b66\u672f\u7ec4\u5927\u9ed1\u5929\u4f9b\u7a3f\uff0c\u6750\u6599\u725b\u7f16\u8f91\u6574\u7406\u3002<\/p>\n

\u6750\u6599\u725b\u7f51\u4e13\u6ce8\u4e8e\u8ddf\u8e2a\u6750\u6599\u9886\u57df\u79d1\u6280\u53ca\u884c\u4e1a\u8fdb\u5c55\uff0c\u5982\u679c\u60a8\u5bf9\u4e8e\u8ddf\u8e2a\u6750\u6599\u9886\u57df\u79d1\u6280\u8fdb\u5c55\uff0c\u89e3\u8bfb\u9ad8\u6c34\u5e73\u6587\u7ae0\u6216\u662f\u8bc4\u8ff0\u884c\u4e1a\u6709\u5174\u8da3\uff0c\u70b9\u6211\u52a0\u5165\u6750\u6599\u4eba\u7f16\u8f91\u90e8<\/a>\u3002\u5982\u679c\u4f60\u5bf9\u7535\u5b50\u6750\u6599\u611f\u5174\u8da3\uff0c\u613f\u610f\u4e0e\u7535\u5b50\u7535\u5de5\u9886\u57df\u4eba\u624d\u4ea4\u6d41\uff0c\u8bf7\u52a0\u5165\u6750\u6599\u4eba\u7535\u5b50\u7535\u5de5\u6750\u6599\u5b66\u4e60\u5c0f\u7ec4\uff08QQ\u7fa4\uff1a482842474\uff09<\/p>\n

\u6750\u6599\u4eba\u7f51\u5c0a\u91cd\u6240\u6709\u8fdb\u884c\u77e5\u8bc6\u4f20\u64ad\u7684\u5a92\u4f53\uff0c\u8f6c\u8f7d\u8bf7\u8054\u7cfbtougao@cailiaoren.com\u3002<\/p>\n

\u6750\u6599\u6d4b\u8bd5\uff0c\u6570\u636e\u5206\u6790\uff0c\u4e0a\u6d4b\u8bd5\u8c37<\/a>\uff01<\/p>\n

 <\/p>\n

 <\/p>\n","protected":false},"excerpt":{"rendered":"

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