{"id":47844,"date":"2016-10-23T14:00:46","date_gmt":"2016-10-23T06:00:46","guid":{"rendered":"\/\/m.iemloyee.com\/?p=47844"},"modified":"2017-03-18T21:40:00","modified_gmt":"2017-03-18T13:40:00","slug":"adv-mater-%e7%9b%b4%e6%8e%a5cvd%e8%b7%af%e7%ba%bf%e5%90%88%e6%88%90%e7%9f%b3%e5%a2%a8%e7%83%af%e7%8e%bb%e7%92%83%ef%bc%9a%e7%94%9f%e4%ba%a7%e5%92%8c%e5%ba%94%e7%94%a8","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=47844","title":{"rendered":"Adv. Mater. \u76f4\u63a5CVD\u8def\u7ebf\u5408\u6210\u77f3\u58a8\u70ef\u73bb\u7483\uff1a\u751f\u4ea7\u548c\u5e94\u7528"},"content":{"rendered":"

\u3010\u5f15\u8bed\u3011<\/strong><\/p>\n

2016\u5e749\u670828\u65e5\uff0cAdv. Mater.\u7f51\u7ad9\u5728\u7ebf\u53d1\u8868\u4e86\u9898\u4e3a\u201cGraphene Glass from Direct CVD Routes: Production and Applications\u201d\u7684\u6587\u7ae0\u3002\u8be5\u6587\u7ae0\u7684\u7b2c\u4e00\u4f5c\u8005\u662f\u6765\u81ea\u5317\u4eac\u5927\u5b66\u7684Jingyu Sun\uff0c\u901a\u8baf\u4f5c\u8005\u662f\u5317\u4eac\u5927\u5b66\u5f20\u8273\u950b\u6559\u6388\u548c\u5218\u5fe0\u8303\u9662\u58eb<\/strong>\u3002\u5728\u8fd9\u7bc7\u5feb\u8baf\uff08Research News\uff09\u6587\u7ae0\u4e2d\uff0c\u7814\u7a76\u4eba\u5458\u62a5\u9053\u4e86\u901a\u8fc7\u76f4\u63a5CVD\u5de5\u827a\u5408\u6210\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u6700\u65b0\u7814\u7a76\u8fdb\u5c55\u3002<\/p>\n

\u3010\u6210\u679c\u7b80\u4ecb\u3011<\/strong><\/p>\n

\u73bb\u7483\u662f\u4e00\u79cd\u5e7f\u6cdb\u4f7f\u7528\u7684\u3001\u900f\u660e\u7684\u65e0\u5b9a\u5f62\u6c27\u5316\u7269\uff0c\u901a\u5e38\u5177\u6709\u9ad8\u4eb2\u6c34\u6027\u7684\u7edd\u7f18\u8868\u9762\u548c\u4f4e\u70ed\u5bfc\u7387\u3002\u800c\u77f3\u58a8\u70ef\u662f\u7531\u78b3\u539f\u5b50\u516d\u65b9\u6392\u5217\u6240\u5f62\u6210\u7684\u4ec5\u6709\u5355\u539f\u5b50\u539a\u5ea6\u7684\u4e8c\u7ef4\u8584\u819c\u6750\u6599\uff0c\u7531\u4e8e\u5176\u5177\u6709\u72ec\u7279\u7684\u5f62\u8c8c\u548c\u826f\u597d\u7684\u7535\u3001\u70ed\u3001\u5149\u548c\u529b\u5b66\u6027\u80fd\uff0c\u88ab\u8bc1\u660e\u662f\u4e00\u79cd\u4f18\u8d8a\u7684\u6d82\u5c42\u6750\u6599\u7528\u5728\u521a\u6027\u6216\u67d4\u6027\u57fa\u677f\u8868\u9762\u3002\u503c\u5f97\u6ce8\u610f\u7684\u662f\uff0c\u5c06\u77f3\u58a8\u70ef\u6d82\u6577\u5728\u73bb\u7483\u8868\u9762\u5f62\u6210\u7684\u77f3\u58a8\u70ef\u73bb\u7483\u590d\u5408\u6750\u6599\u5177\u6709\u591a\u79cd\u6027\u80fd\uff0c\u5728\u667a\u80fd\u7a97\u6237\u548c\u900f\u660e\u7535\u5b50\u6750\u6599\u65b9\u9762\u5177\u6709\u5de8\u5927\u7684\u53d1\u5c55\u6f5c\u529b\u3002<\/p>\n

\u73b0\u6709\u7684\u5408\u6210\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u5de5\u827a\u8def\u7ebf\u901a\u5e38\u662f\u7531\u6db2\u76f8\u5265\u79bb\u7684\u77f3\u58a8\u70ef\u5728\u6eb6\u6db2\u4e2d\u94f8\u819c\u6216\u662f\u5229\u7528\u6c14\u76f8\u5316\u5b66\u6c89\u79ef\uff08CVD\uff09\u7684\u77f3\u58a8\u70ef\u5728\u91d1\u5c5e\u4e0a\u8f6c\u79fb\u6d82\u8986\u3002\u5c3d\u7ba1\u8fd9\u4e9b\u5de5\u827a\u5728\u8fd1\u5e74\u6765\u6709\u6240\u8fdb\u6b65\uff0c\u4f46\u662f\u5728\u5b9e\u73b0\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u8d28\u91cf\u3001\u8fde\u7eed\u6027\u548c\u5b8c\u6574\u6027\u4e0a\u4ecd\u7136\u662f\u5177\u6709\u6311\u6218\u6027\u3002\u56e0\u6b64\uff0c\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u9ad8\u6210\u672c\u3001\u8fc7\u7a0b\u7684\u590d\u6742\u6027\u548c\u6709\u9650\u7684\u53ef\u4f38\u7f29\u6027\u6210\u4e3a\u8fdb\u5165\u65e5\u5e38\u751f\u6d3b\u5e94\u7528\u548c\u4ea7\u54c1\u7684\u969c\u788d\u3002\u6700\u8fd1\uff0c\u4e00\u79cd\u5b9e\u7528\u3001\u7ecf\u6d4e\u7684\u5de5\u827a\uff0c\u901a\u8fc7\u5728\u73bb\u7483\u57fa\u677f\u4e0a\u76f4\u63a5\u5f62\u6210\u77f3\u58a8\u70ef\u6765\u5408\u6210\u4e00\u4f53\u5316\u7684\u77f3\u58a8\u70ef\u73bb\u7483\uff0c\u5373\u514d\u8f6c\u79fbCVD\u5408\u6210\u5de5\u827a\uff0c\u5f15\u8d77\u4e86\u6781\u5927\u7684\u5173\u6ce8\u3002\u8fd9\u79cd\u76f4\u63a5\u7684\u5de5\u827a\u4e0d\u4ec5\u80fd\u751f\u4ea7\u51fa\u8d28\u91cf\u53ef\u63a7\u3001\u5747\u5300\u6027\u597d\u3001\u5177\u53ef\u4f38\u7f29\u6027\u7684\u77f3\u58a8\u70ef\uff0c\u800c\u4e14\u7ed5\u8fc7\u4e86\u5177\u6709\u7834\u574f\u6027\u7684\u8f6c\u79fb\u8fc7\u7a0b\u3002\u6587\u4e2d\u4f5c\u8005\u603b\u7ed3\u4e86\u901a\u8fc7\u76f4\u63a5CVD\u8def\u7ebf\u751f\u4ea7\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u6700\u65b0\u8fdb\u5c55\u3002<\/p>\n

\u3010\u56fe\u6587\u5bfc\u8bfb\u3011<\/strong><\/p>\n

\u56fe<\/strong>1<\/strong>\uff1a\u901a\u8fc7\u76f4\u63a5CVD\u5408\u6210\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u53ef\u9009\u5de5\u827a\u8def\u7ebf<\/strong><\/p>\n

\"\u56fe5\"<\/a><\/p>\n

(a) \u5229\u7528\u76f4\u63a5PECVD\u5de5\u827a\u5728\u4e0d\u540c\u79cd\u7c7b\u73bb\u7483\u57fa\u5e95\u8868\u9762\u751f\u957f\u77f3\u58a8\u70ef\u7684\u793a\u610f\u56fe\uff1b<\/p>\n

(b) \u5229\u7528\u76f4\u63a5PECVD\u5de5\u827a\u751f\u4ea7\u7684\u77f3\u58a8\u70ef\u73bb\u7483\u76844\u82f1\u5bf8\u7167\u7247\uff1b<\/p>\n

(c) \u5728\u76f8\u540c\u6761\u4ef6\u4e0b\u5229\u7528PECVD\u5de5\u827a\u5728\u4e0d\u540c\u73bb\u7483\u57fa\u5e95\u8868\u9762\u751f\u957f\u7684\u77f3\u58a8\u70ef\u7684\u62c9\u66fc\u5149\u8c31\uff1b<\/p>\n

(d) \u7ecf\u4e0d\u540c\u751f\u957f\u65f6\u95f4(2-6 h)\u5728\u84dd\u5b9d\u77f3\u73bb\u7483\u8584\u819c(6 cm\u00d711 cm)\u8868\u9762\u751f\u957f\u7684\u77f3\u58a8\u70ef\u8584\u819c\u7684\u7167\u7247\uff1b<\/p>\n

(e) APCVD\u77f3\u58a8\u70ef(\u751f\u957f\u5728\u77f3\u82f1\u73bb\u7483\u8868\u9762)\u8f6c\u79fb\u5230SiO2<\/sub>\/Si\u57fa\u5e95\u8868\u9762\u7684\u5149\u5b66\u7167\u7247\uff1b<\/p>\n

(f) \u76f4\u63a5\u5728\u84dd\u5b9d\u77f3\u73bb\u7483\u57fa\u5e95\u8868\u9762\u751f\u957f\u7684\u77f3\u58a8\u70ef\u8584\u819cI2D<\/sub>\/IG<\/sub>\u6bd4\u7684\u62c9\u66fc\u7684\u6620\u5c04\u6620\u50cf\uff1b<\/p>\n

(g) \u5728\u7194\u878d\u94a0\u9499\u73bb\u7483\u8868\u9762\u751f\u957f\u7684\u77f3\u58a8\u70ef\u7684\u793a\u610f\u56fe\uff1b<\/p>\n

(h) \u5747\u5300\u77f3\u58a8\u70ef\u76d8\u4e0a\u6837\u54c1\u7684SEM\u56fe\uff1b<\/p>\n

(i) 5 cm\u76f4\u5f84\u7684\u77f3\u58a8\u70ef\u73bb\u7483\u5706\u7247\u3002<\/p>\n

\u56fe<\/strong>2<\/strong>\uff1a\u5229\u7528\u51e0\u79cd\u6d41\u884c\u5de5\u827a\u5927\u89c4\u6a21\u751f\u4ea7\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u7814\u7a76\u8def\u7ebf\u56fe<\/strong><\/p>\n

\"\u56fe6\"<\/p>\n

\u76f4\u63a5CVD\u5de5\u827a\u8def\u7ebf\u80fd\u5728\u77f3\u58a8\u70ef\u8d28\u91cf\u3001\u751f\u4ea7\u6210\u672c\u548c\u5728\u65e5\u5e38\u751f\u6d3b\u4e2d\u7684\u4f7f\u7528\u6210\u672c\u4e4b\u95f4\u53d6\u5f97\u5e73\u8861\u3002<\/p>\n

\u56fe<\/strong>3<\/strong>\uff1a<\/strong>\u76f4\u63a5CVD\u6cd5\u751f\u4ea7\u7684\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u591a\u79cd\u5e94\u7528<\/p>\n

\"\u56fe7\"<\/p>\n

(a) PECVD\u77f3\u58a8\u70ef\/\u5546\u7528\u94a0\u9499\u73bb\u7483(\u5c3a\u5bf8\uff1a1 cm\u00d73 cm)\u7684\u56fe\u7247\uff0c\u663e\u793a\u80fd\u70b9\u4eae\u7eff\u8272LED\u6307\u793a\u5668\u900f\u660e\u5bfc\u7535\u6027\uff1b<\/p>\n

(b) \u77f3\u58a8\u70ef\u548cITO\u57fa\u8bbe\u5907\u7535\u6d41\u7684\u7535\u6d41\u5bc6\u5ea6\u4e0e\u7535\u538b\u7279\u5f81\uff0c\u63d2\u56fe\u4e3a\u70b9\u71c3OLED\u77f3\u58a8\u70ef\u7535\u6781\u7684\u7167\u7247\uff1b<\/p>\n

(c) \u77f3\u58a8\u70ef\u73bb\u7483\u955c(\u5de6)\u53ca\u5176\u826f\u597d\u7684\u955c\u9762\u53cd\u5c04\u548c\u9632\u96fe\u6027\u80fd(\u53f3)\u793a\u610f\u56fe\uff1b<\/p>\n

(d) \u77f3\u58a8\u70ef\u73bb\u7483\u57fa\u7535\u81f4\u53d8\u8272\u8bbe\u5907\u767d\u8272\u548c\u5f69\u8272\u7684\u5149\u5b66\u900f\u8fc7\u7387\u5149\u8c31 (\u6027\u80fd\u76f8\u5f53\u4e0e\u4e00\u4e2aITO\u57fa\u8bbe\u5907)\uff1b<\/p>\n

(e,f) \u77f3\u58a8\u70ef\u73bb\u7483\u57fa\u7535\u81f4\u53d8\u8272\u7a97\u6237\u5728\u767d\u8272\u548c\u5f69\u8272\u72b6\u6001\u4e0b\u7684\u7167\u7247\uff1b<\/p>\n

(g,h)\u5728\u77f3\u58a8\u70ef\u73bb\u7483\u57f9\u517b72 h\u7684\u5149\u5b66\u56fe\u50cf(g)\u548c\u8367\u5149\u56fe\u50cf(h)\uff1b<\/p>\n

(i) 3T3\u7ec6\u80de\u5728\u77f3\u58a8\u70ef\u73bb\u7483\u57f9\u517b\u7684\u8367\u5149\u7ec6\u80de\u9aa8\u67b6\u56fe\u8c31(\u7ea2\u8272)\uff1b<\/p>\n

(j) \u5177\u6709\u826f\u597d\u751f\u7269\u76f8\u5bb9\u6027\u7684\u77f3\u58a8\u70ef\u73bb\u7483\u4e2d\u7ec6\u80de\u589e\u6b96\u7684\u7edf\u8ba1\u76f4\u65b9\u56fe\uff1b<\/p>\n

(k,l) \u77f3\u58a8\u70ef\u548c\u7eaf\u73bb\u7483\u758f\u6c34\u6027\u548c\u4eb2\u6c34\u6027\u7684\u793a\u610f\u56fe(k)\u548c\u7167\u7247(l)\uff1b<\/p>\n

(m) CA\u548c\u73bb\u7483\u8868\u9762\u77f3\u58a8\u70ef\u6d82\u5c42\u76f8\u5e94\u7684SA\uff0c\u663e\u793a\u4e86\u4f9d\u8d56\u5408\u6210\u8def\u7ebf\u7684\u8868\u9762\u758f\u6c34\u6027\uff1b<\/p>\n

(n)\u7eaf\u73bb\u7483\u548c\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u96c6\u6c34\u6548\u7387(\u56fe\u7247\u4e3a\u6c34\u63a5\u89e6\u89d2)\u3002<\/p>\n

\u3010\u5c0f\u7ed3\u3011<\/strong><\/p>\n

\u901a\u8fc7\u77f3\u58a8\u70ef\u73bb\u7483\u7684\u5408\u6210\uff0c\u76f4\u63a5CVD\u5408\u6210\u8def\u7ebf\u88ab\u8bc1\u660e\u662f\u901a\u5411\u7814\u7a76\u73bb\u7483\u4e0e\u77f3\u58a8\u70ef\u5982\u4f55\u7ed3\u5408\u7684\u5173\u952e\u70b9\u3002\u5b83\u4f7f\u5f97\u5728\u5177\u6709\u7075\u5de7\u7684\u53ef\u4f38\u7f29\u6027\u3001\u9ad8\u539a\u5ea6\/\u8986\u76d6\u5747\u5300\uff0c\u5177\u6709\u7d27\u5bc6\u548c\u5e72\u51c0\u754c\u9762\u7684\u4e0d\u540c\u73bb\u7483\u8868\u9762\u751f\u4ea7\u77f3\u58a8\u70ef\u6210\u4e3a\u53ef\u80fd\u3002\u6240\u6709\u8fd9\u4e9b\u4f7f\u77f3\u58a8\u70ef\u73bb\u7483\u5e7f\u6cdb\u5e94\u7528\u5728\u65e5\u5e38\u751f\u6d3b\u4e2d\u3002CVD\u7684\u7075\u6d3b\u6027\u53ef\u9002\u5e94\u591a\u79cd\u7c7b\u578b\u7684\u73bb\u7483\uff0c\u8fdb\u4e00\u6b65\u663e\u793a\u4e86\u8fd9\u9879\u6280\u672f\u7684\u5b9e\u8d28\u6027\u548c\u591a\u529f\u80fd\u6027\u3002\u66f4\u91cd\u8981\u7684\u662f\uff0c\u77f3\u58a8\u70ef\u7684\u73bb\u7483\u5df2\u7ecf\u88ab\u8bc1\u660e\u5177\u6709\u5bbd\u9891\u8c31\uff0c\u53ef\u5229\u7528\u5728\u5305\u62ec\u4f46\u4e0d\u9650\u4e8e\u900f\u660e\u7535\u6781\uff0c\u667a\u80fd\u7a97\u6237\uff0c\u751f\u7269\u53cb\u597d\u578b\u5b9e\u9a8c\u5ba4\u5668\u76bf\u548c\u5438\u6c34\u673a\u7b49\u9886\u57df\u3002<\/p>\n

\u3010\u6587\u732e\u94fe\u63a5\u3011<\/strong>Graphene Glass from Direct CVD Routes: Production and Applications<\/a> (Adv. Mater.\uff0c2016,<\/p>\n

DOI: 10.1002\/adma.201602247)<\/p>\n

\u672c\u6587\u7531\u6750\u6599\u4eba\u7f16\u8f91\u90e8\u7eb3\u7c73\u7ec4Jun han Kong\u4f9b\u7a3f\uff0c\u6750\u6599\u725b\u7f16\u8f91\u6574\u7406\u3002<\/p>\n

\u6750\u6599\u725b\u7f51\u4e13\u6ce8\u4e8e\u8ddf\u8e2a\u6750\u6599\u9886\u57df\u79d1\u6280\u53ca\u884c\u4e1a\u8fdb\u5c55\uff0c\u8fd9\u91cc\u6c47\u96c6\u4e86\u5404\u5927\u9ad8\u6821\u7855\u535a\u751f\u3001\u4e00\u7ebf\u79d1\u7814\u4eba\u5458\u4ee5\u53ca\u884c\u4e1a\u4ece\u4e1a\u8005\uff0c\u5982\u679c\u60a8\u5bf9\u4e8e\u8ddf\u8e2a\u6750\u6599\u9886\u57df\u79d1\u6280\u8fdb\u5c55\uff0c\u89e3\u8bfb\u9ad8\u6c34\u5e73\u6587\u7ae0\u6216\u662f\u8bc4\u8ff0\u884c\u4e1a\u6709\u5174\u8da3\uff0c\u70b9\u6211\u52a0\u5165\u6750\u6599\u4eba\u7f16\u8f91\u90e8<\/a>\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

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