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\u4e8c\u3001\u7269\u76f8\u5206\u6790\u90e8\u5206<\/strong><\/p>\n

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X-<\/strong>\u5c04\u7ebf\u884d\u5c04<\/strong> (XRD)<\/strong>\u00a0 \u4efb\u4f55\u7ed3\u6676\u7269\u8d28\u90fd\u5177\u6709\u5176\u7279\u5b9a\u7684\u5316\u5b66\u7ec4\u6210\u548c\u7ed3\u6784\u53c2\u6570\uff08\u5305\u62ec\u70b9\u9635\u7c7b\u578b\u3001\u6676\u80de\u5927\u5c0f\u3001\u6676\u80de\u4e2d\u7684\u8d28\u70b9\u6570\u76ee\u53ca\u5750\u6807\u7b49\uff09\u3002\u5f53X\u5c04\u7ebf\u7167\u5c04\u5230\u6676\u4f53\u4e0a\u65f6\uff0c\u4f1a\u4ea7\u751f\u5177\u6709\u4e00\u5b9a\u7279\u5f81\u7684\u884d\u5c04\u56fe\u5f62\uff0c\u5bf9\u5e94\u4e00\u7cfb\u5217\u7279\u5b9a\u7684\u6676\u9762\u95f4\u8ddd\u548c\u76f8\u5bf9\u5f3a\u5ea6\u3002\u6839\u636e\u4e0e\u6676\u4f53\u6837\u54c1\u4ea7\u751f\u884d\u5c04\u540e\u7684X\u5c04\u7ebf\u4fe1\u53f7\u7684\u7279\u5f81\u53bb\u5206\u6790\u8ba1\u7b97\u51fa\u6837\u54c1\u7684\u6676\u4f53\u7ed3\u6784\u4e0e\u6676\u683c\u53c2\u6570<\/strong>\u3002<\/p>\n

XRD\u7684\u5206\u6790\u7cbe\u5ea6\u9ad8\uff0c\u4f46\u65e0\u6cd5\u628a\u5f62\u8c8c\u4e0e\u6676\u4f53\u7ed3\u6784\u5fae\u89c2\u540c\u4f4d\u7ed3\u5408\uff1b\u5b9a\u6027\u5206\u6790\u65f6\uff0c\u4e00\u822c\u7528\u6765\u5206\u6790\u5408\u91d1\u7684\u76f8\u6210\u5206\u548c\u542b\u91cf\uff1b\u5b9a\u91cf\u5206\u6790\u65f6\uff0c\u6837\u54c1\u7ec6\u5ea6\u5e94\u5728\u5fae\u7c73\u7ea7\u5c3a\u5ea6\uff0c\u5373\u8fc7320\u76ee\u7b5b\u3002<\/p>\n

<\/p>\n

XRD\u539f\u7406\u56fe<\/p>\n

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\u5982\u679c\u8981\u4e25\u683c\u5730\u7406\u89e3\u7535\u5b50\u884d\u5c04\u7684\u5f62\u6210\u539f\u7406\uff0c\u5c31\u6709\u5fc5\u8981\u641e\u6e05\u695a\u4e24\u4e2a\u6982\u5ff5\uff1aFresnel\uff08\u83f2\u6d85\u5c14\uff09\u884d\u5c04\u548cFraunhofer\uff08\u592b\u6717\u548c\u8d39\uff09\u884d\u5c04\u3002\u6240\u8c13Fresnel\u884d\u5c04\u53c8\u79f0\u4e3a\u8fd1\u573a\u884d\u5c04\uff0c\u800cFraunhofer\u884d\u5c04\u53c8\u79f0\u4e3a\u8fdc\u573a\u884d\u5c04\u3002\u5728\u900f\u5c04\u7535\u5b50\u663e\u5fae\u5206\u6790\u4e2d\uff0c\u540c\u65f6\u5b58\u5728\u8fd9\u4e24\u79cd\u884d\u5c04\u73b0\u8c61\u3002 Fresnel\u884d\u5c04\u73b0\u8c61\u4e3b\u8981\u5728\u56fe\u50cf\u6a21\u5f0f\u4e0b\u51fa\u73b0\uff0c\u800cFraunhofer\u884d\u5c04\u4e3b\u8981\u662f\u5728\u884d\u5c04\u60c5\u51b5\u4e0b\u51fa\u73b0\u3002\u7535\u5b50\u884d\u5c04\u662f\u6709\u900f\u955c\u53c2\u4e0e\u7684Fraunhofer\u884d\u5c04\uff0c\u6240\u4ee5\u4e0eX\u5c04\u7ebf\u884d\u5c04\u7684\u76f8\u6bd4\uff0cFraunhofer\u884d\u5c04\u624d\u662f\u4e25\u683c\u7684\u8fdc\u573a\u884d\u5c04\u3002<\/p>\n

\"\u5c0f\u5b54\u7684\u76f4\u63a5\u884d\u5c04\u6210\u50cf\uff08\u4e0d\u52a0\u900f\u955c\uff09\u5c31\u662f\u4e00\u4e2a\u5178\u578b\u7684Fresnel\u884d\u5c04\u73b0\u8c61\u3002\u5728\u7535\u955c\u7684\u56fe\u50cf\u6a21\u5f0f\u4e0b\uff0c\u7ecf\u5e38\u53ef\u4ee5\u89c2\u5bdf\u5230\u5706\u5b54\u7684\u83f2\u6d85\u5c14\u73af\u3002\"<\/p>\n

\u5c0f\u5b54\u7684\u76f4\u63a5\u884d\u5c04\u6210\u50cf\uff08\u4e0d\u52a0\u900f\u955c\uff09\u5c31\u662f\u4e00\u4e2a\u5178\u578b\u7684Fresnel\u884d\u5c04\u73b0\u8c61\u3002\u5728\u7535\u955c\u7684\u56fe\u50cf\u6a21\u5f0f\u4e0b\uff0c\u7ecf\u5e38\u53ef\u4ee5\u89c2\u5bdf\u5230\u5706\u5b54\u7684\u83f2\u6d85\u5c14\u73af\u3002<\/p>\n

\u4e2d\u5b50\u884d\u5c04<\/strong> (ND)<\/strong>\u00a0 \u70ed\u4e2d\u5b50\u6d41\u88ab\u56fa\u4f53\u3001\u6db2\u4f53\u6216\u6c14\u4f53\u4e2d\u7684\u539f\u5b50\u6563\u5c04\u5f15\u8d77\u7684\u884d\u5c04\u73b0\u8c61\uff0c\u7528\u4e8e\u7814\u7a76\u7269\u8d28<\/strong>(<\/strong>\u91d1\u5c5e<\/strong>)<\/strong>\u7684\u5fae\u89c2\u7ed3\u6784<\/strong>\u3002\u4e2d\u5b50\u884d\u5c04\u7684\u57fa\u672c\u539f\u7406\u548cX\u5c04\u7ebf\u884d\u5c04\u5341\u5206\u76f8\u4f3c\uff0c\u4f46\u5728\u4e2d\u5b50\u884d\u5c04\u4e2d\uff0c\u4e2d\u5b50\u662f\u4e0e\u539f\u5b50\u6838\u76f8\u4e92\u4f5c\u7528\u3001\u80fd\u533a\u522b\u4e0d\u540c\u7684\u540c\u4f4d\u7d20\uff0c\u800c\u4e14\u4e00\u822c\u8bf4\u6765\u4e2d\u5b50\u6bd4X \u5c04\u7ebf\u5177\u6709\u9ad8\u5f97\u591a\u7684\u7a7f\u900f\u6027\uff0c\u56e0\u800c\u4e5f\u66f4\u9002\u7528\u4e8e\u9700\u7528\u539a\u5bb9\u5668\u7684\u9ad8\u4f4e\u6e29\u3001\u9ad8\u538b\u7b49\u6761\u4ef6\u4e0b\u7684\u7ed3\u6784\u7814\u7a76\u3002<\/p>\n

\u5728\u91d1\u5c5e\u7814\u7a76\u4e2d\u4e2d\u5b50\u884d\u5c04\u7684\u6700\u4e3b\u8981\u7684\u5e94\u7528\u9886\u57df\u4e3a\uff1a\u542b\u6709\u91cd\u539f\u5b50\u7684\u5316\u5408\u7269\u4e2d\u8f7b\u539f\u5b50\u7684\u4f4d\u7f6e\u7684\u6d4b\u5b9a\uff1b\u539f\u5b50\u5e8f\u6570\u76f8\u8fd1\u7684\u539f\u5b50\u76f8\u5bf9\u4f4d\u7f6e\u7684\u786e\u5b9a\uff1b\u94c1\u78c1\u3001\u53cd\u94c1\u78c1\u548c\u987a\u78c1\u7269\u8d28\u7684\u7814\u7a76\u3002<\/p>\n

\u4e09\u3001\u6210\u5206\u5206\u6790\u90e8\u5206<\/strong><\/p>\n

\u80fd\u8c31\u5206\u6790\u4eea<\/strong>(EDS)<\/strong>\u00a0 EDS\u662f\u80fd\u5feb\u901f\u5206\u6790\u5404\u79cd\u8bd5\u6837\u5fae\u533a\u5185<\/strong>Be-U<\/strong>\u7684\u6240\u6709\u5143\u7d20<\/strong>\u7684\u4e00\u79cd\u8bbe\u5907\u3002EDS\u53ef\u4ee5\u4e0eSEM\u3001TEM\u3001XPS\u7b49\u7ec4\u5408\u4f7f\u7528\uff0c\u5176\u4e2dSEM-EDS\u7ec4\u5408\u662f\u5e94\u7528\u6700\u5e7f\u7684\u663e\u5fae\u5206\u6790\u4eea\u5668\u3002EDS\u7684\u5de5\u4f5c\u539f\u7406\u662f\u5229\u7528\u7535\u5b50\u663e\u5fae\u955c\u7684\u9ad8\u80fd\u7535\u5b50\u675f\u4e0e\u88ab\u89c2\u5bdf\u8bd5\u6837\u76f8\u4e92\u4f5c\u7528\u4ea7\u751f\u7279\u5f81X\u5c04\u7ebf\uff0c\u80fd\u8c31\u4eea\u5c06\u8fd9\u4e9b\u4fe1\u606f\u6355\u83b7\u3001\u5904\u7406\u53ca\u5206\u6790\uff0c\u4ece\u800c\u80fd\u83b7\u5f97\u8bd5\u6837\u6210\u5206\u7684\u5b9a\u6027\u3001\u534a\u5b9a\u91cf\u751a\u81f3\u5168\u5b9a\u91cf\u7ed3\u679c\u3002\u5bf9\u4e8e\u8bd5\u6837\u4ea7\u751f\u7684\u7279\u5f81X-\u5c04\u7ebf\uff0c\u6709\u4e24\u79cd\u5c55\u6210\u8c31\u7684\u65b9\u6cd5\uff1aX-\u5c04\u7ebf\u80fd\u91cf\u8272\u6563\u8c31\u65b9\u6cd5\uff08EDS\uff1aEnergy Dispersive X-ray Spectroscopy\uff09\u548cX-\u5c04\u7ebf\u6ce2\u957f\u8272\u6563\u8c31\u65b9\u6cd5\uff08WDS\uff1aWavelength Dispersive X-ray Spectroscopy\uff09\u3002\u5728\u5206\u6790\u7535\u5b50\u663e\u5fae\u955c\u4e2d\u5747\u91c7\u7528\u63a2\u6d4b\u6548\u7387\u9ad8\u7684EDS\u3002<\/p>\n

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\"SEM&EDS\u5206\u6790\u539f\u7406\u56fe_\u526f\u672c\"<\/p>\n

SEM&EDS\u5206\u6790\u539f\u7406\u56fe<\/p>\n

X<\/strong>\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31\u4eea<\/strong>(XPS) <\/strong>\u00a0XPS\u662f\u4e00\u79cd\u65e0\u635f\u5206\u6790\u6280\u672f\uff0c\u4e3b\u8981\u7528\u4e8e\u5206\u6790\u8868\u9762\u5143\u7d20\u7ec4\u6210\u548c\u5316\u5b66\u72b6\u6001\uff0c\u539f\u5b50\u5468\u56f4\u7684\u7535\u5b50\u5bc6\u5ea6\uff0c\u7279\u522b\u662f\u539f\u5b50\u4ef7\u6001\u53ca\u8868\u9762\u539f\u5b50\u7535\u5b50\u4e91\u548c\u80fd\u7ea7\u7ed3\u6784<\/strong>\u3002\u7528X\u5c04\u7ebf\u53bb\u8f90\u5c04\u6837\u54c1\uff0c\u4f7f\u539f\u5b50\u6216\u5206\u5b50\u7684\u5185\u5c42\u7535\u5b50\u6216\u4ef7\u7535\u5b50\u53d7\u6fc0\u53d1\u5c04\u51fa\u6765\u3002\u88ab\u5165\u5c04\u7684\u7279\u5f81X\u5c04\u7ebf\u6fc0\u53d1\u7535\u79bb\u7684\u7535\u5b50\u79f0\u4e3a\u5149\u7535\u5b50\u3002\u6d4b\u91cf\u5149\u7535\u5b50\u7684\u52a8\u80fd\u53ef\u4ee5\u9274\u5b9a\u6837\u54c1\u6240\u542b\u5143\u7d20\u53ca\u5176\u5316\u5b66\u72b6\u6001\u3002\u5b83\u4e0d\u4f46\u7528\u4e8e\u5316\u5b66\u5143\u7d20\u5206\u6790\uff0c\u800c\u4e14\u66f4\u5e7f\u6cdb\u5730\u5e94\u7528\u4e8e\u8868\u9762\u79d1\u5b66\u548c\u6750\u6599\u79d1\u5b66\u3002<\/p>\n

XPS\u7684\u5206\u6790\u8303\u56f4\u8f83\u5bbd\uff0c\u539f\u5219\u4e0a\u53ef\u4ee5\u5206\u6790\u9664\u6c22\u4ee5\u5916\u7684\u6240\u6709\u5143\u7d20\uff1b\u5206\u6790\u6df1\u5ea6\u8f83\u6d45\uff0c\u5927\u7ea6\u5728\u8868\u9762\u4ee5\u4e0b25~100 \u00c5\u8303\u56f4\uff1b\u7edd\u5bf9\u7075\u654f\u5ea6\u9ad8\uff0c\u6d4b\u91cf\u7cbe\u5ea6\u53ef\u8fbe10nm\u5de6\u53f3\u3002<\/p>\n

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<\/p>\n

\u4fc4\u6b47\u7535\u5b50\u80fd\u8c31\u4eea<\/strong>(AES)<\/strong>\u00a0 \u662f\u4e00\u79cd\u8868\u9762\u79d1\u5b66\u548c\u6750\u6599\u79d1\u5b66\u7684\u5206\u6790\u6280\u672f\u3002\u56e0\u6b64\u6280\u672f\u4e3b\u8981\u501f\u7531\u4fc4\u6b47\u6548\u5e94\u8fdb\u884c\u5206\u6790\u800c\u547d\u540d\u4e4b\u3002<\/p>\n

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