{"id":264680,"date":"2025-01-25T07:48:40","date_gmt":"2025-01-24T23:48:40","guid":{"rendered":"\/\/m.iemloyee.com\/?p=264680"},"modified":"2025-01-24T21:50:46","modified_gmt":"2025-01-24T13:50:46","slug":"%e5%8d%97%e4%ba%ac%e5%a4%a7%e5%ad%a6%e4%bd%99%e6%9e%97%e8%94%9a%e6%95%99%e6%8e%88%e5%9b%a2%e9%98%9f%e5%9f%ba%e4%ba%8e%e6%b6%b2%e6%bb%b4%e9%98%b6%e8%b7%83%e7%94%9f%e9%95%bf%e5%8a%a8","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=264680","title":{"rendered":"\u5357\u4eac\u5927\u5b66\u4f59\u6797\u851a\u6559\u6388\u56e2\u961f\u57fa\u4e8e\u201c\u6db2\u6ef4\u9636\u8dc3\u201d\u751f\u957f\u52a8\u6001\u53ef\u9760\u5236\u5907\u8d85\u7ec6-\u8d85\u77ed\u6676\u7845\u7eb3\u7c73\u7ebf\u6c9f\u9053\u9ad8\u6027\u80fd\u8584\u819c\u6676\u4f53\u7ba1\u5668\u4ef6"},"content":{"rendered":"

\u5177\u6709\u9ad8\u5f00\u5173\u6bd4\u3001\u4f4e\u4e9a\u9608\u503c\u6446\u5e45\u7684\u9ad8\u6027\u80fd\u8584\u819c\u6676\u4f53\u7ba1\u00a0(TFT)\u5668\u4ef6\uff0c\u662f\u5f00\u62d3\u65b0\u4e00\u4ee3\u5927\u9762\u79ef\u9ad8\u6e05\u663e\u793a\u3001\u67d4\u6027\u7535\u5b50\/\u4f20\u611f\u548c\u8111\u673a\u63a5\u53e3\u5e94\u7528\u7684\u6280\u672f\u5173\u952e\u3002\u5176\u4e2d\uff0c\u8d85\u7ec6\u3001\u8d85\u77ed\u6676\u7845\u7eb3\u7c73\u7ebf\u6c9f\u9053\uff0c\u7531\u4e8e\u5177\u6709\u826f\u597d\u7684\u6805\u63a7\u548c\u5927\u7535\u6d41\u9a71\u52a8\u80fd\u529b\uff0c\u6210\u4e3a\u6784\u5efa\u9ad8\u6027\u80fdTFT\u5668\u4ef6\u7684\u7406\u60f3\u7ed3\u6784\u3002\u867d\u7136\u6b64\u7c7b\u7cbe\u7ec6\u6c9f\u9053\u7ed3\u6784\u5728\u201c\u5fae\u201d\u7535\u5b50\u5668\u4ef6\u5de5\u827a\u4e2d\u5df2\u6210\u4e3a\u4e3b\u6d41\uff0c\u4f46\u5374\u4f9d\u8d56\u5728\u7845\u6676\u5706\u4e0a\u7684\u8d85\u9ad8\u7cbe\u5ea6\u6df1\u7d2b\u5916\/\u6781\u7d2b\u5916\u5149\u523b (D\/EUV)\u548c\u523b\u8680\u6280\u672f\uff0c\u56e0\u6b64\u65e0\u6cd5\u5728\u5927\u9762\u79ef\u201c\u5b8f\u201d\u7535\u5b50\u5668\u4ef6\u7684\u5927\u5c3a\u5bf8\u73bb\u7483\u6216\u805a\u5408\u7269\u886c\u5e95\u4e0a\u5e94\u7528\u3002\u5982\u4f55\u57fa\u4e8e\u6709\u9650\u7684\u70ed\u9884\u7b97(<500\u2103)\u548c\u8f83\u4f4e\u7684\u5149\u523b\u7cbe\u5ea6(>1.5 \u03bcm)\uff0c\u96c6\u6210\u5236\u5907\u76f4\u5f84\u5c0f\u4e8e30 nm\u3001\u957f\u5ea6\u5c0f\u4e8e100 nm\u7684\u7cbe\u7ec6\u7eb3\u7c73\u6c9f\u9053\uff0c\u6210\u4e3a\u5f00\u62d3\u65b0\u4e00\u4ee3\u9ad8\u6027\u80fdTFT\u5668\u4ef6\u6240\u9762\u4e34\u7684\u5173\u952e\u6280\u672f\u74f6\u9888\u3002<\/p>\n

\u9488\u5bf9\u8fd9\u4e00\u6311\u6218\uff0c\u5357\u4eac\u5927\u5b66\u4f59\u6797\u851a\u6559\u6388\u3001\u738b\u519b\u8f6c\u6559\u6388\u548c\u626c\u5dde\u5927\u5b66\u80e1\u745e\u91d1\u8001\u5e08\u56e2\u961f\uff0c\u57fa\u4e8e\u81ea\u4e3b\u521b\u65b0\u7684\u9762\u5185\u56fa-\u6db2-\u56fa(IPSLS) \u7eb3\u7c73\u7ebf\u751f\u957f\u6a21\u5f0f\uff0c\u9996\u6b21\u63d0\u51fa\u5229\u7528\u50ac\u5316\u201c\u6db2\u6ef4\u9636\u8df3\u201d\u751f\u957f\u52a8\u6001\uff0c\u6210\u529f\u5b9e\u73b0\u8d85\u7ec6\u3001\u8d85\u77ed\u6676\u7845\u7eb3\u7c73\u7ebf\u6c9f\u9053\u9635\u5217\u7684\u53ef\u9760\u96c6\u6210\u5236\u5907\u3002\u5177\u4f53\u800c\u8a00\uff0c\u57fa\u4e8eIPSLS\u751f\u957f\u6a21\u5f0f\u7684\u4f4e\u6e29\u5b9a\u4f4d\u751f\u957f(<350\u2103)\u80fd\u529b\uff0c\u5c06\u50ac\u5316\u6db2\u6ef4\u7cbe\u786e\u5f15\u5bfc\u751f\u957f\u5230\u8df3\u8dc3\u4ea4\u53c9\u53f0\u9636\u8fb9\u7f18\uff0c\u901a\u8fc7\u63a7\u5236\u67d4\u6027\u6db2\u6ef4\u8de8\u8d8a\u53f0\u9636\u7684\u201cStep-Necking\u6536\u7f29\u201d\u6548\u5e94\uff0c\u5728\u53f0\u9636\u8fb9\u7f18\u4e00\u6b65\u6210\u5f62\u5730\u751f\u957f\u51fa\u6240\u9700\u7684Thick(45nm)\/Thin(25nm)\/Thick(45nm)\u8d85\u7cbe\u7ec6\u6c9f\u9053\u7ed3\u6784\uff0c\u5176\u4e2d\u8d85\u7ec6\u6c9f\u9053\u957f\u5ea6\u4ec5\u4e3aLg~90 nm\uff0c\u5e76\u4e14\u5728\u4e24\u7aef\u7c97\u7ebf\u63d0\u4f9b\u4e86\u81ea\u7136\u7684\u7406\u60f3S\/D\u63a5\u89e6\u2014\u5b8c\u5168\u7c7b\u4f3c\u4e8e\u4e0e\u5148\u8fdb\u9ccd\u6805\u6676\u4f53\u7ba1 (Fin-FET) \u4e2d\u7406\u60f3\u6c9f\u9053\u548cS\/D\u63a5\u89e6\u67b6\u6784\u3002<\/p>\n

\"\" \u00a0<\/p>\n

\u56fe1 \u9888\u7f29\u751f\u957f\u7845\u7eb3\u7c73\u7ebf\u9635\u5217\u539f\u7406\u53ca\u6d41\u7a0b\u3002<\/p>\n

\u00a0\"\"<\/b><\/strong><\/p>\n

\u56fe2 \u7845\u7eb3\u7c73\u7ebf\u9635\u5217\u5f62\u8c8c\u53ca\u5176\u76f4\u5f84\u7edf\u8ba1\u3002<\/p>\n

 <\/p>\n

\u53d7\u76ca\u4e8e\u6b64\uff0cStep-Necking\u00a0\u7eb3\u7c73\u7ebfTFT\u5668\u4ef6\u5c55\u793a\u4e86\u4f18\u5f02\u7684\u6805\u63a7\u6548\u679c\u548c\u5927\u5e45\u6539\u5584\u7684\u8f93\u8fd0\u7279\u6027\uff0c\u5b9e\u73b0\u4e868\u00d7107<\/sup>\u9ad8\u5f00\u5173\u6bd4\u548c\u4e9a\u9608\u503c\u6446\u5e45\u4ec5\u4e3aSS=70 mV\/dec\u7684\u9ad8\u6027\u80fd\u6676\u4f53\u7ba1TFT\u5668\u4ef6\u3002\u57fa\u4e8e\u6b64\u201c\u6db2\u6ef4\u9636\u8dc3\u201d\u6240\u5e26\u6765\u7684\u7cbe\u7ec6\u6c9f\u9053\u5236\u5907\u7b56\u7565\uff0c\u53ef\u4ee5\u5c06\u6700\u524d\u6cbf\u7684\u201c\u5fae\u7535\u5b50\u201d\u5668\u4ef6\u7684\u5fae\u7eb3\u5668\u4ef6\u7ed3\u6784\u548c\u4f18\u5f02\u8f93\u8fd0\u7279\u6027\u201c\u76f4\u63a5\u690d\u5165\u201d\u5230\u5927\u9762\u79ef\u201c\u5b8f\u7535\u5b50\u201d\u9886\u57df\uff0c\u4e3a\u6253\u9020\u65b0\u4e00\u4ee3\u9ad8\u6027\u80fd\u663e\u793a\u9a71\u52a8\u903b\u8f91\u3001\u67d4\u6027\u4f20\u611f\u548c\u8111\u673a\u63a5\u53e3\u7b49\u65b0\u5174\u5e94\u7528\uff0c\u5f00\u8f9f\u4e00\u6761\u9ad8\u6027\u80fd\u6676\u7845\u5668\u4ef6\u96c6\u6210\u5236\u5907\u6280\u672f\u65b0\u8def\u5f84\uff01<\/p>\n

\u8be5\u5de5\u4f5c\u8fd1\u671f\u4ee5\u201cStep-necking growth of silicon nanowire channels for high performance field effect transistors\u201d\u4e3a\u9898\u53d1\u8868\u5728\u81ea\u7136-\u901a\u8baf\u300aNature Communications\u300b\u671f\u520a\u4e0a\u3002\u6587\u7ae0\u7b2c\u4e00\u4f5c\u8005\u4e3a\u5357\u4eac\u5927\u5b66\u7535\u5b50\u79d1\u5b66\u4e0e\u5de5\u7a0b\u5b66\u9662\u7684\u535a\u58eb\u751f\u5434\u78ca\uff0c\u4f59\u6797\u851a\u6559\u6388\u3001\u80e1\u745e\u91d1\u8001\u5e08\u3001\u738b\u519b\u8f6c\u6559\u6388\u4e3a\u6587\u7ae0\u5171\u540c\u901a\u8baf\u4f5c\u8005\u3002\u8be5\u5de5\u4f5c\u7684\u5f00\u5c55\u5f97\u5230\u4e86\u5357\u4eac\u5927\u5b66\u9648\u5764\u57fa\u6559\u6388\u3001\u5f90\u9a8f\u6559\u6388\u3001\u65bd\u6bc5\u6559\u6388\u652f\u6301\u548c\u6307\u5bfc\uff0c\u53d7\u5230\u56fd\u5bb6\u91cd\u70b9\u7814\u53d1\u8ba1\u5212\u3001\u56fd\u5bb6\u81ea\u7136\u79d1\u5b66\u57fa\u91d1\u6770\u51fa\u9752\u5e74\u5b66\u8005\u9879\u76ee\u4ee5\u53ca\u56fd\u5bb6\u81ea\u7136\u79d1\u5b66\u57fa\u91d1\u91cd\u70b9\u9879\u76ee\u7684\u8d44\u52a9\u3002<\/p>\n

 <\/p>\n

\u56fe\u6587\u89e3\u8bfb\uff1a<\/b><\/strong>\u00a0<\/p>\n

\"\"<\/p>\n

\u56fe3 \u57fa\u4e8e\u9888\u7f29\u7845\u7eb3\u7c73\u7ebf\u7684\u9ad8\u6027\u80fd\u6676\u4f53\u7ba1\u5668\u4ef6\u3002<\/p>\n

 <\/p>\n

\u8bba\u6587\u4fe1\u606f\uff1a<\/b><\/strong><\/p>\n

Step-necking growth of silicon nanowire channels for high performance field effect transistors. Lei Wu, Zhiyan Hu, Lei Liang, Ruijin Hu*<\/sup>, Junzhuan Wang*<\/sup>, and Linwei Yu*<\/sup>.<\/p>\n

Nature<\/i><\/b><\/em><\/strong>\u00a0Communications <\/i><\/b><\/em><\/strong>16<\/b><\/strong>, 965 (2025)<\/p>\n

https:\/\/doi.org\/10.1038\/s41467-025-56376-x<\/u><\/a>\u00a0<\/p>\n

 <\/p>\n

\u524d\u671f\u76f8\u5173\u5de5\u4f5c<\/b><\/strong>\uff1a<\/b><\/strong><\/p>\n

    \n
  1. Channel-bias-controlled reconfigurable silicon nanowire transistors via an asymmetric electrode contact strategy. Wentao Qian, Junzhuan Wang*<\/sup>, Jun Xu, Linwei Yu*<\/sup>. Chip<\/b><\/strong>. 2024, 3(3), 100098.<\/li>\n
  2. Ultracompact single-nanowire-morphed grippers driven by vectorial Lorentz forces for dexterous robotic manipulations, Jiang Yan, Ying Zhang, Zongguang Liu*, Junzhuan Wang, Jun Xu and Linwei Yu*, Nature Communications <\/b><\/strong>14, 3786 (2023)<\/li>\n
  3. 3. Highly Stretchable High-Performance Silicon Nanowire Field Effect Transistors Integrated on Elastomer Substrates. Xiaopan Song, Ting Zhang, Lei Wu, Ruijin Hu, Wentao Qian, Zongguang Liu*<\/sup>, Junzhuan Wang, Yi Shi, Jun Xu, Kunji Chen, and Linwei Yu*<\/sup>.\u00a0Advanced Science<\/b><\/strong>. 2022, 2105623.<\/li>\n
  4. Unprecedented Uniform 3D Growth Integration of 10-Layer Stacked Si Nanowires on Tightly Confined Sidewall Grooves. Ruijin Hu, Shun Xu, Junzhuan Wang*<\/sup>,Yi Shi, Jun Xu, Kunji Chen, and Linwei Yu*<\/sup>.\u00a0Nano Letters<\/b><\/strong>, 2020, 20 (10), 7489-7497.<\/li>\n
  5. An in-plane solid-liquid-solid growth mode for self-avoiding lateral silicon nanowires<\/li>\n<\/ol>\n

    Linwei Yu,* Pierre-Jean Alet, Gennaro Picardi and Pere Roca i Cabarrocas, Physical Review Letters,<\/b><\/strong>\u00a0102, 125501 (2009)<\/p>\n

    \u00a0<\/b><\/strong><\/p>\n

    \u8bfe\u9898\u7ec4\u7b80\u4ecb<\/b><\/strong>\uff1ahttps:\/\/ese.nju.edu.cn\/ylw<\/i><\/u><\/em><\/a><\/p>\n

     <\/p>\n","protected":false},"excerpt":{"rendered":"

    \u5177\u6709\u9ad8\u5f00\u5173\u6bd4\u3001\u4f4e\u4e9a\u9608\u503c\u6446\u5e45\u7684\u9ad8\u6027\u80fd\u8584\u819c\u6676\u4f53\u7ba1\u00a0(TFT)\u5668\u4ef6\uff0c\u662f\u5f00\u62d3\u65b0\u4e00\u4ee3\u5927\u9762\u79ef\u9ad8\u6e05\u663e\u793a\u3001\u67d4\u6027\u7535\u5b50\/\u4f20\u611f\u548c\u8111\u673a\u63a5\u53e3\u5e94\u7528\u7684\u6280\u672f\u5173\u952e\u3002\u5176\u4e2d\uff0c\u8d85\u7ec6\u3001\u8d85\u77ed\u6676\u7845\u7eb3\u7c73\u7ebf\u6c9f\u9053…<\/p>\n","protected":false},"author":14360,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[],"class_list":["post-264680","post","type-post","status-publish","format-standard","hentry","category-keji"],"_links":{"self":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts\/264680"}],"collection":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/users\/14360"}],"replies":[{"embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=264680"}],"version-history":[{"count":1,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts\/264680\/revisions"}],"predecessor-version":[{"id":264684,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts\/264680\/revisions\/264684"}],"wp:attachment":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=264680"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=264680"},{"taxonomy":"post_tag","embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=264680"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}