{"id":264293,"date":"2025-01-02T09:09:41","date_gmt":"2025-01-02T01:09:41","guid":{"rendered":"\/\/m.iemloyee.com\/?p=264293"},"modified":"2025-01-02T09:09:41","modified_gmt":"2025-01-02T01:09:41","slug":"%e6%af%94%e5%88%a9%e6%97%b6%e5%be%ae%e7%94%b5%e5%ad%90%e7%a0%94%e7%a9%b6%e4%b8%ad%e5%bf%83imec%e6%9c%80%e6%96%b0nature-%e7%a1%85%e5%9f%ba%e5%85%89%e7%94%b5%e6%8a%80%e6%9c%af%e6%9c%80%e6%96%b0","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=264293","title":{"rendered":"\u6bd4\u5229\u65f6\u5fae\u7535\u5b50\u7814\u7a76\u4e2d\u5fc3IMEC\u6700\u65b0Nature: \u7845\u57fa\u5149\u7535\u6280\u672f\u6700\u65b0\u7a81\u7834"},"content":{"rendered":"<p style=\"text-align: center;\">01\u3010\u79d1\u5b66\u80cc\u666f\u3011<\/p>\n<p>\u7845\u5149\u5b50\u5b66\u662f\u4e00\u9879\u8fc5\u901f\u53d1\u5c55\u7684\u6280\u672f\uff0c\u6709\u671b\u5f7b\u5e95\u6539\u53d8\u6211\u4eec\u901a\u4fe1\u3001\u8ba1\u7b97\u548c\u611f\u77e5\u4e16\u754c\u7684\u65b9\u5f0f\u3002\u7136\u800c\uff0c\u7f3a\u4e4f\u9ad8\u5ea6\u53ef\u6269\u5c55\u7684\u3001\u539f\u751f\u4e92\u8865\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53\uff08CMOS\uff09\u96c6\u6210\u5149\u6e90\u662f\u963b\u788d\u5176\u5e7f\u6cdb\u5e94\u7528\u7684\u4e3b\u8981\u969c\u788d\u4e4b\u4e00\u3002\u5c3d\u7ba1\u5728\u7845\u4e0a\u96c6\u6210 III-V \u65cf\u5149\u6e90\u65b9\u9762\u53d6\u5f97\u4e86\u663e\u8457\u8fdb\u5c55\uff0c\u4f46\u901a\u8fc7\u76f4\u63a5\u5916\u5ef6 III-V \u6750\u6599\u5b9e\u73b0\u5355\u7247\u96c6\u6210\u4ecd\u662f\u6210\u672c\u6548\u76ca\u8f83\u9ad8\u7684\u7247\u4e0a\u5149\u6e90\u7684\u9876\u5cf0\u3002\u5728\u4eca\u5929\u7684\u8bb8\u591a\u6570\u636e\u901a\u4fe1\u4ea7\u54c1\u4e2d\uff0c\u6fc0\u5149\u5668\u662f\u5728\u5176\u539f\u751fIII-V\u57fa\u677f\u4e0a\u5355\u72ec\u5236\u9020\u548c\u6d4b\u8bd5\u7684\uff0c\u7136\u540e\u5728\u5fae\u7ec4\u88c5\u6fc0\u5149\u5c01\u88c5\u4e2d\u6df7\u5408\u96c6\u6210\u5728\u7845\u5149\u5b50\u7247\u4e0a\u6216\u901a\u8fc7\u9ad8\u7cbe\u5ea6\u5012\u88c5\u82af\u7247\u96c6\u6210\u3002\u7531\u4e8e\u6b64\u7c7b\u88c5\u914d\u8fc7\u7a0b\u7684\u987a\u5e8f\u6027\u548c\u9ad8\u7cbe\u5ea6\u8981\u6c42\uff0c\u8fd9\u4e9b\u96c6\u6210\u89e3\u51b3\u65b9\u6848\u7684\u5236\u9020\u541e\u5410\u91cf\u53ef\u80fd\u65e0\u6cd5\u6269\u5c55\u4ee5\u6ee1\u8db3\u672a\u6765\u4ea7\u54c1\u7684\u9ad8\u5bc6\u5ea6\u3001\u6210\u672c\u548c\u4f53\u79ef\u76ee\u6807\u3002\u4e3a\u4e86\u5e94\u5bf9\u8fd9\u4e9b\u6311\u6218\uff0c\u76ee\u524d\u5404\u79cd\u6df7\u5408\u548c\u5f02\u8d28III-V\u96c6\u6210\u6280\u672f\u6b63\u5728\u5f00\u53d1\u548c\u5546\u4e1a\u5316\uff0c\u4f8b\u5982\u5fae\u8f6c\u79fb\u5370\u5237\u6216\u5f02\u8d28III-V\u96c6\u6210\uff0c\u6d89\u53ca\u76f4\u63a5\u5728\u7845\u5149\u5b50\u5b66\u6676\u5706\u4e0a\u8fdb\u884c\u65e0\u56fe\u6848III-V\u5c42\u5806\u53e0\u7684\u6676\u5706\u952e\u5408\uff0c\u8fd9\u79cd\u6280\u672f\u5728\u8fc7\u53bb\u51e0\u5e74\u4e2d\u5df2\u7ecf\u5f97\u5230\u4e86\u5f7b\u5e95\u7684\u53d1\u5c55\uff0c\u73b0\u5728\u81f3\u5c11\u6709\u4e24\u6761\u5546\u4e1a\u751f\u4ea7\u7ebf\u3002\u7136\u800c\uff0c\u8fd9\u79cd\u6280\u672f\u5728\u4e3b\u6d41\u4e92\u8865\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53\uff08CMOS\uff09\u4ee3\u5de5\u5382\u7684\u6df1\u5ea6\u6210\u672c\u964d\u4f4e\u548c\u5e7f\u6cdb\u91c7\u7528\uff0c\u53ef\u80fd\u4f1a\u53d7\u5230\u82af\u7247\u5230\u6676\u5706\u952e\u5408\u7684\u5269\u4f59\u9700\u6c42\u548c\u7528\u4e8e\u5916\u5ef6III-V\u751f\u957f\u7684\u6602\u8d35III-V\u4f9b\u4f53\u886c\u5e95\u7684\u963b\u788d\uff0c\u5728\u5236\u9020\u8fc7\u7a0b\u4e2d\u4ea7\u751f\u5e9f\u7269\uff0c\u8fdb\u4e00\u6b65\u5f15\u8d77\u5bf9\u5065\u5eb7\u3001\u5b89\u5168\u548c\u73af\u5883\u53ef\u6301\u7eed\u6027\u7684\u62c5\u5fe7\u3002<\/p>\n<p>\u7531\u4e8e\u8fd9\u4e9b\u539f\u56e0\uff0c\u9ad8\u8d28\u91cfIII-V\u6750\u6599\u7684\u76f4\u63a5\u5916\u5ef6\u9009\u62e9\u6027\u5730\u5728\u5927\u5c3a\u5bf8\u7845\u5149\u5b50\u7247\u7684\u6240\u9700\u4f4d\u7f6e\u4ecd\u7136\u662f\u4e00\u4e2a\u975e\u5e38\u53d7\u6b22\u8fce\u7684\u76ee\u6807\u3002\u4f46\u662f\uff0cIII-V\u6750\u6599\u548cSi\u6750\u6599\u4e4b\u95f4\u7684\u6676\u683c\u53c2\u6570\u548c\u70ed\u81a8\u80c0\u7cfb\u6570\u7684\u5de8\u5927\u4e0d\u5339\u914d\u4e0d\u53ef\u907f\u514d\u5730\u5f15\u53d1\u6676\u4f53\u4e0d\u5339\u914d\u7f3a\u9677\u7684\u5f62\u6210\uff0c\u4f1a\u964d\u4f4e\u6fc0\u5149\u5668\u7684\u6027\u80fd\u548c\u53ef\u9760\u6027\u3002\u4e3a\u4e86\u51cf\u5c11III-V\u5c42\u7684\u7f3a\u9677\uff0c\u8bb8\u591a\u7814\u7a76\u5c0f\u7ec4\u5df2\u7ecf\u6210\u529f\u5730\u5f00\u53d1\u4e86\u539a\u7f13\u51b2\u5c42\u548c\u5e94\u53d8\u8d85\u6676\u683c\u5c42\u3002\u4ee5\u7837\u5316\u94df\uff08InAs\uff09\u91cf\u5b50\u70b9\u589e\u76ca\u533a\u4e3a\u7279\u5f81\u7684\u7837\u5316\u9553\uff08GaAs\uff09\u57fa\u5806\u53e0\uff0c\u5728\u7845\u5355\u7247\u96c6\u6210\u6fc0\u5149\u5668\u7684\u6027\u80fd\u548c\u53ef\u9760\u6027\u65b9\u9762\u53d6\u5f97\u4e86\u5de8\u5927\u8fdb\u6b65\uff0c\u5229\u7528\u4e86\u91cf\u5b50\u70b9\u5bf9\u6b8b\u4f59\u6676\u4f53\u7f3a\u9677\u7684\u6539\u8fdb\u5bb9\u9650\u3002\u7136\u800c\uff0c\u8fd9\u4e9b\u7ed3\u679c\u4ec5\u9650\u4e8e\u6a21\u7ea7\u6f14\u793a\u3002\u7531\u4e8e\u70ed\u81f4\u5e94\u529b\u5f15\u8d77\u7684\u5c42\u88c2\u548c\u5176\u4ed6\u7f3a\u9677\uff0c\u5728\u5927\u76f4\u5f84\u6676\u5706\u4e0a\u96be\u4ee5\u5b9e\u73b0\u539a\u7684\u7f13\u51b2\u5c42\u3002<\/p>\n<p>\u901a\u8fc7\u91d1\u5c5e-\u6709\u673a\u6c14\u76f8\u5916\u5ef6\uff08MOVPE\uff09\u5728\u56fe\u50cf\u5316\u7845\u6676\u7247\u4e0a\u5b9e\u73b0III-V\u6750\u6599\u7684\u9009\u62e9\u6027\u9762\u79ef\u751f\u957f\u4ee3\u8868\u4e86\u4e00\u79cd\u5f15\u4eba\u6ce8\u76ee\u7684\u96c6\u6210\u65b9\u6cd5\uff0c\u53ef\u4ee5\u8bf4\u6bd4\u5206\u5b50\u675f\u5916\u5ef6\u5177\u6709\u66f4\u597d\u7684\u53ef\u6269\u5c55\u6027\u6f5c\u529b\u3002\u5728\u6c14\u76f8\u5916\u5ef6\u4e2d\u53ef\u4ee5\u5f88\u5bb9\u6613\u5730\u5b9e\u73b0\u9009\u62e9\u6027\uff0c\u56e0\u6b64\uff0cIII-V\u6750\u6599\u53ef\u4ee5\u4ec5\u5728\u9700\u8981\u7684\u5730\u65b9\u6c89\u79ef\u3002\u4e0d\u5339\u914d\u7f3a\u9677\u7684\u9650\u5236\u662f\u901a\u8fc7\u5728\u7845\u6676\u7247\u4e0a\u7684\u4ecb\u7535\u5c4f\u853d\u5c42\u4e2d\u8680\u523b\u7684\u6df1\u800c\u7a84\u7684\u6c9f\u69fd\u4e2d\u5f00\u59cbIII-V\u5c42\u7684\u751f\u957f\u6765\u5b9e\u73b0\u7684\uff0c\u8fd9\u79cd\u6280\u672f\u79f0\u4e3a\u5bbd\u9ad8\u6bd4\u6355\u83b7\uff08ART\uff09\u3002\u76ee\u524d\uff0c\u4eba\u4eec\u6b63\u5728\u63a2\u7d22\u5404\u79cdART\u67b6\u6784\uff0c\u636e\u62a5\u9053\uff0c\u5728\u4e0d\u9700\u8981\u539a\u7f13\u51b2\u5c42\u7684\u60c5\u51b5\u4e0b\uff0c\u6709\u6548\u5730\u51cf\u5c11\u4e86\u7f3a\u9677\uff0c\u4ece\u800c\u51cf\u8f7b\u4e86\u6676\u5706\u7fd8\u66f2\u548c\u6676\u5706\u7ea7\u6c89\u79efIII-V\u5c42\u4e2d\u88c2\u7eb9\u5f62\u6210\u7684\u95ee\u9898\u3002\u8fd1\u5e74\u6765\uff0c\u6bd4\u5229\u65f6\u5fae\u7535\u5b50\u7814\u7a76\u4e2d\u5fc3imec\u63d0\u51fa\u4e86\u7eb3\u7c73\u810a\uff08NR\uff09\u5de5\u7a0b\uff08NRE\uff09\u7684\u6982\u5ff5\uff0c\u8fd9\u662f\u4e00\u79cd\u57fa\u4e8e\u9009\u62e9\u6027\u9762\u79ef\u589e\u957f\u7684\u96c6\u6210\u65b9\u6cd5\uff0c\u5e94\u7528ART\u6765\u51cf\u5c11\u7f3a\u9677\uff0c\u7136\u540e\u5728\u6c9f\u69fd\u5916\u751f\u957f\u4f4e\u7f3a\u9677\u7684III-V\u7ea7\u7eb3\u7c73\u810a\u3002\u901a\u8fc7\u4ed4\u7ec6\u8c03\u6574MOVPE\u5de5\u827a\u53c2\u6570\uff0c\u53ef\u4ee5\u7cbe\u786e\u5730\u8bbe\u8ba1NR\u7684\u5c3a\u5bf8\uff0c\u5f62\u72b6\u548c\u6210\u5206\u3002\u4f18\u5316\u7684NR\u7ed3\u6784\u901a\u5e38\u5177\u6709\u8fdc\u4f4e\u4e8e105 cm<sup>\u22122<\/sup>\u7684\u87ba\u7eb9\u4f4d\u9519\u5bc6\u5ea6\uff08TDD\uff09\uff0c\u6bd4\u4f18\u5316\u7684\u6bef\u5b50\u7f13\u51b2\u5c42\u4f4e100\u500d\u3002\u5728\u6b64\u4e4b\u524d\uff0c\u4ed6\u4eec\u6210\u529f\u5730\u5c06NRE\u5e94\u7528\u4e8eIII-V\u6750\u6599\u4f53\u7cfb\uff08\u5982GaAs\u3001InAs\u3001GaSb\u548cInGaAs\uff09\u4e2d\u5b9e\u73b0\u4e86\u5404\u79cd\u5f02\u8d28\u7ed3\u6784\u3001\u539f\u4f4d\u63ba\u6742\u5206\u5e03\u548c\u8868\u9762\u949d\u5316\u5c42\uff0c\u4ece\u800c\u5b9e\u73b0\u4e86\u7b2c\u4e00\u6279\u5668\u4ef6\u6f14\u793a\uff0c\u5305\u62ec\u5149\u6cf5\u6d66\u6fc0\u5149\u5668\u3001\u5f02\u8d28\u7ed3\u53cc\u6781\u6676\u4f53\u7ba1\u548c\u5177\u6709\u521b\u7eaa\u5f55\u4f4e\u6697\u7535\u6d41\u7684\u6676\u7247\u7ea7GaAs-on- si\u5149\u7535\u63a2\u6d4b\u5668\u3002<\/p>\n<p style=\"text-align: center;\">02\u3010\u521b\u65b0\u6210\u679c\u3011<\/p>\n<p>\u9488\u5bf9\u4ee5\u4e0a\u95ee\u9898\uff0c\u8fd1\u65e5\uff0c\u6bd4\u5229\u65f6\u5fae\u7535\u5b50\u7814\u7a76\u4e2d\u5fc3\uff08imec \uff09Joris Van Campenhout\uff0cBernardette Kunert\uff0cCharles Caer\u548c Didit Yudistira\u7814\u7a76\u56e2\u961f\u5728Nature\u4e0a\u53d1\u8868\u4e86\u9898\u4e3a\u201cGaAs nano-ridge laser diodes fully fabricated in a 300-mm CMOS pilot line\u201d\u7684\u6587\u7ae0\uff0c\u62a5\u544a\u4e86\u57fa\u4e8e\u7eb3\u7c73\u810a\u5de5\u7a0b\u7684\u65b0\u96c6\u6210\u65b9\u6cd5\uff0c\u5728CMOS\u8bd5\u751f\u4ea7\u7ebf\u4e0a\uff0c\u5c55\u793a\u4e86\u5728\u6807\u51c6300\u6beb\u7c73Si\uff08001\uff09\u6676\u5706\u4e0a\u7684\u5168\u6676\u5706\u7ea7\u751f\u957f\u548c\u7535\u6cf5\u6d66\u7837\u5316\u9553\uff08GaAs\uff09\u57fa\u6fc0\u5149\u5668\u7684\u5236\u9020\u3002\u5d4c\u5165p-i-n\u4e8c\u6781\u7ba1\u548cInGaAs\u91cf\u5b50\u9631\u7684GaAs\u7eb3\u7c73\u810a\u6ce2\u5bfc\u5728\u6676\u5706\u5c3a\u5ea6\u4e0a\u9ad8\u8d28\u91cf\u751f\u957f\u3002\u5728\u6676\u5706\u4e0a\u7684300\u591a\u4e2a\u5668\u4ef6\u4e2d\u8fdb\u884c\u4e86\u6f14\u793a\uff0c\u5ba4\u6e29\u8fde\u7eed\u6ce2\u6fc0\u5149\u7684\u6ce2\u957f\u7ea6\u4e3a1020 nm\uff0c\u9608\u503c\u7535\u6d41\u4f4e\u81f35 mA\uff0c\u8f93\u51fa\u529f\u7387\u8d85\u8fc71 mW\uff0c\u603b\u53d1\u5c04\u5149\u529f\u7387\u9ad8\u8fbe1.76 mW\uff0c\u6fc0\u5149\u7ebf\u5bbd\u4f4e\u81f346 MHz\uff0c\u6fc0\u5149\u5de5\u4f5c\u6e29\u5ea6\u9ad8\u8fbe55\u00b0C\u3002\u6b64\u5916\uff0c\u65e9\u671f\u7684\u53ef\u9760\u6027\u6d4b\u8bd5\u663e\u793a\uff0c\u5728\u81f3\u5c11500\u5c0f\u65f6\u7684\u5ba4\u6e29\u5de5\u4f5c\u671f\u95f4\uff0c\u8fde\u7eed\u6ce2\u6fc0\u5149\u5668\u53ea\u6709\u8f7b\u5fae\u7684\u9608\u503c\u7535\u6d41\u589e\u52a0\u548c\u6052\u5b9a\u7684\u659c\u7387\u6548\u7387\u3002\u8fd9\u4e9b\u7ed3\u679c\u8bf4\u660e\u4e86III-V \/Si\u7eb3\u7c73\u810a\u5de5\u7a0b\u6982\u5ff5\u5728\u7845\u5149\u5b50\u5b66\u5e73\u53f0\u4e2d\u96c6\u6210\u6fc0\u5149\u4e8c\u6781\u7ba1\u7684\u6f5c\u529b\uff0c\u4f7f\u672a\u6765\u5728\u5149\u5b66\u4f20\u611f\u3001\u4e92\u8fde\u7b49\u9886\u57df\u7684\u6210\u672c\u654f\u611f\u578b\u5927\u6279\u91cf\u5e94\u7528\u6210\u4e3a\u53ef\u80fd\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-264294\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/0.png\" alt=\"\" width=\"1139\" height=\"732\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/0.png 1139w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/0-300x193.png 300w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/0-768x494.png 768w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/0-1024x658.png 1024w\" sizes=\"(max-width: 1139px) 100vw, 1139px\" \/><\/p>\n<p style=\"text-align: center;\">03\u3010\u6570\u636e\u6982\u89c8\u3011<img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-264295\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/1.png\" alt=\"\" width=\"1268\" height=\"621\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/1.png 1268w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/1-300x147.png 300w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/1-768x376.png 768w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/1-1024x502.png 1024w\" sizes=\"(max-width: 1268px) 100vw, 1268px\" \/><\/p>\n<p style=\"text-align: center;\">\u56fe1.\u7247\u4e0aGaAs NR\u6fc0\u5149\u5668\u7684\u6676\u5706\u7ea7\u96c6\u6210\u00a9 2025 Springer Nature<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-264296\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/2.png\" alt=\"\" width=\"1269\" height=\"738\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/2.png 1269w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/2-300x174.png 300w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/2-768x447.png 768w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/2-1024x596.png 1024w\" sizes=\"(max-width: 1269px) 100vw, 1269px\" \/><\/p>\n<p style=\"text-align: center;\">\u56fe2.\u5177\u6709\u7247\u4e0a\u5149\u7535\u63a2\u6d4b\u5668\u7684GaAs NR\u6fc0\u5149\u6d4b\u8bd5\u5355\u5143\uff0c\u7528\u4e8e\u7247\u7ea7\u8868\u5f81\u00a9 2025 Springer Nature<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-264297\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/3.png\" alt=\"\" width=\"1269\" height=\"414\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/3.png 1269w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/3-300x98.png 300w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/3-768x251.png 768w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/3-1024x334.png 1024w\" sizes=\"(max-width: 1269px) 100vw, 1269px\" \/><\/p>\n<p style=\"text-align: center;\">\u56fe3.\u5355\u9762\u5207\u5272GaAs NR\u6fc0\u5149\u5668\u7684\u6a21\u7ea7\u6d4b\u91cf\u00a9 2025 Springer Nature<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-264298\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/4.png\" alt=\"\" width=\"1269\" height=\"369\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/4.png 1269w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/4-300x87.png 300w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/4-768x223.png 768w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/4-1024x298.png 1024w\" sizes=\"(max-width: 1269px) 100vw, 1269px\" \/><\/p>\n<p style=\"text-align: center;\">\u56fe4.\u8680\u523b\u9762GaAs NR\u6fc0\u5149\u5668\u7684\u7247\u4e0a\u6d4b\u91cf\u00a9 2025 Springer Nature<img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-264299\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/5.png\" alt=\"\" width=\"1269\" height=\"479\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/5.png 1269w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/5-300x113.png 300w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/5-768x290.png 768w, \/\/m.iemloyee.com\/wp-content\/uploads\/2025\/01\/5-1024x387.png 1024w\" sizes=\"(max-width: 1269px) 100vw, 1269px\" \/>\u56fe5.\u8680\u523b\u9762GaAs NR\u6fc0\u5149\u5668\u7684\u5168\u6676\u5706\u5c3a\u5ea6\u6d4b\u91cf\u00a9 2025 Springer Nature<\/p>\n<p style=\"text-align: center;\">04\u3010\u79d1\u5b66\u542f\u8fea\u3011<\/p>\n<p>\u8be5\u9879\u5de5\u4f5c\u5c55\u793a\u4e86\u5728CMOS\u5236\u9020\u8bd5\u7ebf\u4e0a\u5b8c\u5168\u5728300\u6beb\u7c73\u7845\u6676\u5706\u4e0a\u96c6\u6210\u5355\u7247III-V\u6fc0\u5149\u4e8c\u6781\u7ba1\uff0c\u800c\u4e0d\u9700\u8981\u4efb\u4f55III-V\u886c\u5e95\u6216\u7c98\u5408\u6b65\u9aa4\u3002\u9ad8\u8d28\u91cf\u7684\u6709\u6e90\u7837\u5316\u9553\u6ce2\u5bfc\u662f\u7531MOVPE\u5e94\u7528NRE\u751f\u957f\u7684\uff0c\u51cf\u8f7b\u4e86\u5728\u7845\u5916\u5ef6\u751f\u957f\u7684III-V\u5c42\u4e2d\u901a\u5e38\u9047\u5230\u7684\u4e0e\u6676\u5706\u5f2f\u66f2\u6216\u88c2\u7eb9\u5f62\u6210\u76f8\u5173\u7684\u4efb\u4f55\u4e3b\u8981\u95ee\u9898\u3002\u5c3d\u7ba1\u6a2a\u622a\u9762\u5c3a\u5bf8\u4e3a\u4e9a\u5fae\u7c73\u7ea7\uff0c\u4f46GaAs &#8211; Si NR\u7ed3\u6784\u5177\u6709\u9ad8\u6548\u7684\u8f7d\u6d41\u5b50\u6ce8\u5165\u7279\u6027\uff0c\u5e76\u57281 \u03bcm\u6ce2\u957f\u5904\u4ea7\u751f\u5f3a\u5927\u7684\u5149\u5b66\u589e\u76ca\uff0c\u8fd9\u5f97\u76ca\u4e8e\u5728Si\u4e0a\u5916\u5ef6\u751f\u957fGaAs\u7684\u521b\u7eaa\u5f55\u7684\u4f4e\u6676\u4f53\u7f3a\u9677\u548cInGaP\u5c01\u76d6\u5c42\u7684\u6709\u6548\u949d\u5316\u3002\u8fd9\u4e9b\u7279\u6027\u6709\u52a9\u4e8e\u5728\u5ba4\u6e29\u53ca\u4ee5\u4e0a\u6761\u4ef6\u4e0b\u5b9e\u73b0\u7a33\u5065\u7684\u8fde\u7eed\u6ce2\u6fc0\u5149\u5de5\u4f5c\uff0c\u5982\u6587\u4e2d\u6240\u793a\uff0c\u9608\u503c\u7535\u6d41\u5bc6\u5ea6\u4e0e\u4f20\u7edf\u6fc0\u5149\u8bbe\u8ba1\u76f8\u5f53\uff0c\u4f4e\u4e8e1 kA cm<sup>\u22122<\/sup>\uff0c\u8fde\u7eed\u6ce2\u5de5\u4f5c\u6e29\u5ea6\u53ef\u8fbe55\u00b0C\u3002\u5728\u6f14\u793a\u7684NRLs\u4e2d\uff0c\u5149\u5b66\u591a\u6a21\u6572\u6253\u6548\u5e94\u51cf\u8f7b\u4e86\u9876\u90e8\u91d1\u5c5e\u89e6\u70b9\u5f15\u8d77\u7684\u90e8\u5206\u5149\u5b66\u635f\u8017\uff0c\u8fd9\u5bf9\u4e8e\u5b9e\u73b0\u4f4e\u9608\u503c\u7535\u6d41\u548c\u9ad8\u659c\u7387\u6548\u7387\u540c\u6837\u91cd\u8981\u3002\u6b64\u5916\uff0c\u8fd9\u79cd\u73b0\u8c61\u7684\u6ce2\u957f\u4f9d\u8d56\u6027\uff0c\u52a0\u4e0a\u7531\u8680\u523b\u9762\u5f62\u6210\u7684\u6cd5\u5e03\u91cc-\u73c0\u7f57\uff08FP\uff09\u8154\u4ea7\u751f\u7684\u591a\u5cf0\u5149\u8c31\uff0c\u5bfc\u81f4\u5927\u591a\u6570\u6fc0\u5149\u8bbe\u5907\u7684\u5355\u6a21\u6fc0\u5149\u64cd\u4f5c\uff0c\u5176\u7ebf\u5bbd\u4e0e\u5178\u578b\u7684\u5782\u76f4\u8154\u9762\u53d1\u5c04\u6fc0\u5149\u5668\u7684\u7ebf\u5bbd\u76f8\u5f53\u6216\u66f4\u5c0f\u3002<\/p>\n<p>\u8be5\u9879\u5de5\u4f5c\u4e5f\u7ed9\u51fa\u4e86\u8bb8\u591a\u8d85\u8d8a\u5f53\u524d\u793a\u8303\u7684\u673a\u4f1a\u3002\u9996\u5148\uff0c\u53ef\u4ee5\u6539\u8fdbNR\u6a2a\u622a\u9762\u4ee5\u4f7f\u5149\u5b66\u6a21\u5f0f\u4e0e\u91d1\u5c5e\u89e6\u70b9\u89e3\u8026\uff0c\u4ece\u800c\u5728\u4fdd\u6301\u4f4e\u5149\u5b66\u635f\u8017\u7684\u540c\u65f6\u5b9e\u73b0\u66f4\u9ad8\u5bc6\u5ea6\u7684p\u89e6\u70b9\u63d2\u5934\u3002\u8fd9\u5c06\u964d\u4f4e\u5de5\u4f5c\u7535\u538b\uff0c\u63d0\u9ad8\u63d2\u5934\u6548\u7387\uff0c\u540c\u65f6\u964d\u4f4e\u9876\u90e8\u91d1\u5c5e\u89e6\u70b9\u7684\u7535\u6d41\u5bc6\u5ea6\u548c\u7535\u963b\uff0c\u4ece\u800c\u63d0\u9ad8\u53ef\u9760\u6027\u3002\u63a5\u4e0b\u6765\uff0c\u53ef\u4ee5\u901a\u8fc7\u751f\u957f\u5177\u6709\u66f4\u9ad8In-content\u7684NRLs\u6216\u4f7f\u7528InAs\u91cf\u5b50\u70b9\u4f5c\u4e3a\u589e\u76ca\u6750\u6599\uff0c\u5c06\u5de5\u4f5c\u6ce2\u957f\u6269\u5c55\u5230O\u6ce2\u6bb5\u3002\u6700\u540e\uff0cNRLs\u53ef\u4ee5\u5149\u5b66\u8026\u5408\u5230\uff08\u975e\u6676\uff09\u7845\u6ce2\u5bfc\u4e0a\u3002\u5c06GaAs NRs\u4e0e\u7845\u548c\u6c2e\u5316\u7845\u6ce2\u5bfc\u8026\u5408\u5c06\u5b9e\u73b0\u5916\u8154\u4e8c\u6781\u7ba1\u6fc0\u5149\u5668\uff0c\u5177\u6709\u66f4\u597d\u7684\u6fc0\u5149\u6ce2\u957f\u63a7\u5236\u548c\u964d\u4f4e\u6fc0\u5149\u566a\u58f0\u3002\u8fd9\u79cdGaAs-Si-SiN\u96c6\u6210\u5149\u7535\u5b50\u5e73\u53f0\u6709\u671b\u5728\u5149\u5b66\u4e92\u8fde\u3001\u5149\u5b66\u4f20\u611f\u7b49\u9886\u57df\u5b9e\u73b0\u672a\u6765\u6210\u672c\u654f\u611f\u578b\u5e94\u7528\u3002<\/p>\n<p>\u539f\u6587\u94fe\u63a5\uff1ahttps:\/\/www.nature.com\/articles\/s41586-024-08364-2<\/p>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>01\u3010\u79d1\u5b66\u80cc\u666f\u3011 \u7845\u5149\u5b50\u5b66\u662f\u4e00\u9879\u8fc5\u901f\u53d1\u5c55\u7684\u6280\u672f\uff0c\u6709\u671b\u5f7b\u5e95\u6539\u53d8\u6211\u4eec\u901a\u4fe1\u3001\u8ba1\u7b97\u548c\u611f\u77e5\u4e16\u754c\u7684\u65b9\u5f0f\u3002\u7136\u800c\uff0c\u7f3a\u4e4f\u9ad8\u5ea6\u53ef\u6269\u5c55\u7684\u3001\u539f\u751f\u4e92\u8865\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53\uff08CMOS\uff09\u96c6\u6210\u5149\u6e90&#8230;<\/p>\n","protected":false},"author":35295,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2],"tags":[],"class_list":["post-264293","post","type-post","status-publish","format-standard","hentry","category-keji"],"_links":{"self":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts\/264293"}],"collection":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/users\/35295"}],"replies":[{"embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=264293"}],"version-history":[{"count":3,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts\/264293\/revisions"}],"predecessor-version":[{"id":264303,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts\/264293\/revisions\/264303"}],"wp:attachment":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=264293"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=264293"},{"taxonomy":"post_tag","embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=264293"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}