{"id":261879,"date":"2024-08-08T08:46:48","date_gmt":"2024-08-08T00:46:48","guid":{"rendered":"\/\/m.iemloyee.com\/?p=261879"},"modified":"2024-08-08T08:46:48","modified_gmt":"2024-08-08T00:46:48","slug":"%e4%b8%8a%e6%b5%b7%e5%be%ae%e7%b3%bb%e7%bb%9f%e6%89%80nature%ef%bc%9a%e8%93%9d%e5%ae%9d%e7%9f%b3%e5%8a%a9%e5%8a%9b%e5%bc%80%e5%8f%91%e9%ab%98%e6%95%882d-fet","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=261879","title":{"rendered":"\u4e0a\u6d77\u5fae\u7cfb\u7edf\u6240Nature\uff1a\u84dd\u5b9d\u77f3\u52a9\u529b\u5f00\u53d1\u9ad8\u65482D FET"},"content":{"rendered":"
\u4e00\u3001\u3010\u79d1\u5b66\u80cc\u666f\u3011<\/strong><\/p>\n \u968f\u7740\u7535\u5b50\u8bbe\u5907\u4e0d\u65ad\u5c0f\u578b\u5316\u548c\u6027\u80fd\u8981\u6c42\u7684\u63d0\u5347\uff0c\u82af\u7247\u4e2d\u7684\u6676\u4f53\u7ba1\u6570\u91cf\u6301\u7eed\u589e\u52a0\uff0c\u5c3a\u5bf8\u4e5f\u65e5\u76ca\u7f29\u5c0f\u3002\u7136\u800c\uff0c\u6676\u4f53\u7ba1\u5c3a\u5bf8\u7684\u7f29\u5c0f\u540c\u65f6\u5e26\u6765\u4e86\u65b0\u7684\u6280\u672f\u6311\u6218\u2014\u5f53\u7845\u57fa\u6676\u4f53\u7ba1\u6c9f\u9053\u539a\u5ea6\u63a5\u8fd1\u7eb3\u7c73\u5c3a\u5ea6\uff0c\u7279\u522b\u662f\u5c0f\u4e8e\u51e0\u7eb3\u7c73\u65f6\uff0c\u6676\u4f53\u7ba1\u7684\u6027\u80fd\u5c31\u4f1a\u663e\u8457\u4e0b\u964d\u3002\u4e8c\u7ef4\uff082D\uff09\u6750\u6599\u4e2d\uff0cMoS2<\/sub>\u5177\u6709\u539f\u5b50\u7ea7\u539a\u5ea6\u548c\u9ad8\u8f7d\u6d41\u5b50\u8fc1\u79fb\u7387\uff0c\u56e0\u6b64\u5df2\u88ab\u7814\u7a76\u4e3a\u672a\u6765\u6676\u4f53\u7ba1\u7684\u5019\u9009\u6750\u6599\u3002\u7136\u800c\uff0c\u7531\u4e8e\u7f3a\u4e4f\u5408\u9002\u7684\u9ad8\u8d28\u91cf\u7535\u4ecb\u8d28\uff0c\u5c3d\u7ba1\u4e8c\u7ef4\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff08FET\uff09\u5177\u6709\u4f18\u8d8a\u7684\u7269\u7406\u548c\u7535\u6c14\u7279\u6027\uff0c\u4f46\u7f3a\u5c11\u4e0e\u4e4b\u5339\u914d\u7684\u9ad8\u8d28\u91cf\u6805\u4ecb\u8d28\u6750\u6599\uff0c\u5bfc\u81f4\u4e8c\u7ef4\u6676\u4f53\u7ba1\u5b9e\u9645\u6027\u80fd\u4e0e\u7406\u8bba\u5b58\u5728\u8f83\u5927\u5dee\u5f02\u3002<\/p>\n \u4e8c\u3001\u3010\u521b\u65b0\u6210\u679c\u3011<\/strong><\/p>\n \u57fa\u4e8e\u4ee5\u4e0a\u96be\u9898\uff0c\u4e2d\u56fd\u79d1\u5b66\u9662\u4e0a\u6d77\u5fae\u7cfb\u7edf\u4e0e\u4fe1\u606f\u6280\u672f\u7814\u7a76\u6240\u72c4\u589e\u5cf0\u7814\u7a76\u5458\u548c\u7530\u5b50\u50b2<\/strong>\u5408\u4f5c\uff0c\u5728Nature<\/em><\/strong>\u53d1\u8868\u4e86\u9898\u4e3a\u201cSingle-crystalline metal-oxide dielectrics for top-gate 2D transistors<\/strong>\u201d\u7684\u8bba\u6587\uff0c\u5c55\u793a\u4e86\u4e00\u79cd\u539f\u5b50\u7ea7\u8584\u5355\u6676Al2<\/sub>O3<\/sub>\uff08c-Al2<\/sub>O3<\/sub>\uff09\u7684\u5236\u9020\u5de5\u827a\uff0c\u5b83\u53ef\u4f5c\u4e3a2D FET\u7684\u9ad8\u8d28\u91cf\u9876\u6805\u6781\u7535\u4ecb\u8d28\u3002\u901a\u8fc7\u4f7f\u7528\u63d2\u5c42\u6c27\u5316\u6280\u672f\uff0c\u5728\u5ba4\u6e29\u4e0b\u5728\u5355\u6676\u94dd\u8868\u9762\u4e0a\u5f62\u6210\u4e86\u4e00\u5c421.25 nm\u539a\u7684\u7a33\u5b9a\u3001\u5316\u5b66\u8ba1\u91cf\u548c\u539f\u5b50\u7ea7\u8584\u7684\u84dd\u5b9d\u77f3\u5c42\uff08c-Al2<\/sub>O3<\/sub>\uff09\u3002\u4e0d\u540c\u4e8e\u4f20\u7edf\u65e0\u5e8f\u7684\u6c27\u5316\u94dd\uff0c\u84dd\u5b9d\u77f3\u7684\u5355\u6676\u7ed3\u6784\u5e26\u6765\u4e86\u66f4\u9ad8\u7684\u7535\u5b50\u8fc1\u79fb\u7387\u548c\u66f4\u4f4e\u7684\u7535\u6d41\u6cc4\u6f0f\u7387\u3002\u7531\u4e8e\u826f\u597d\u7684\u6676\u4f53\u7ed3\u6784\u548c\u6e05\u6670\u7684\u754c\u9762\uff0cc-Al2<\/sub>O3<\/sub>\u7684\u6805\u6f0f\u7535\u6d41\u3001\u754c\u9762\u6001\u5bc6\u5ea6\u548c\u4ecb\u7535\u5f3a\u5ea6\u5747\u7b26\u5408\u56fd\u9645\u5143\u4ef6\u53ca\u7cfb\u7edf\u6280\u672f\u84dd\u56fe\uff08IRDS\uff09\u7684\u8981\u6c42\u3002\u901a\u8fc7\u7531\u6e90\u6781\u3001\u6f0f\u6781\u3001\u4ecb\u8d28\u6750\u6599\u548c\u6805\u6781\u7ec4\u6210\u7684\u4e00\u6b65\u8f6c\u79fb\u5de5\u827a\uff0c\u7814\u7a76\u4eba\u5458\u5b9e\u73b0\u4e86\u9876\u6805MoS2<\/sub> FET\uff0c\u5176\u7279\u70b9\u662f61 mV dec-1<\/sup>\u7684\u4e9a\u9608\u503c\u6446\u5e45\u3001108<\/sup>\u7684\u9ad8\u7535\u6d41\u5f00\u5173\u6bd4\u548c10 mV\u7684\u6781\u5c0f\u6ede\u540e\u3002\u8fd9\u79cd\u6280\u672f\u548c\u6750\u6599\u8bc1\u660e\u4e86\u751f\u4ea7\u9ad8\u8d28\u91cf\u5355\u6676\u6c27\u5316\u7269\u7684\u53ef\u80fd\u6027\uff0c\u9002\u5408\u96c6\u6210\u5230\u5b8c\u5168\u53ef\u6269\u5c55\u7684\u5148\u8fdb\u4e8c\u7ef4\u573a\u6548\u5e94\u6676\u4f53\u7ba1\u4e2d\uff0c\u5305\u62ec\u8d1f\u7535\u5bb9\u6676\u4f53\u7ba1\u548c\u81ea\u65cb\u6676\u4f53\u7ba1\u3002<\/p>\n <\/p>\n \u4e3a\u4e86\u89e3\u51b3\u76f8\u5173\u6280\u672f\u96be\u9898\uff0c\u7814\u7a76\u4eba\u5458\u5f00\u53d1\u4e86\u4e00\u79cd\u521b\u65b0\u7684\u91d1\u5c5e\u63d2\u5c42\u6c27\u5316\u6280\u672f\u3002\u8fd9\u9879\u6280\u672f\u7684\u6838\u5fc3\u5728\u4e8e\u80fd\u5728\u5ba4\u6e29\u4e0b\uff0c\u7cbe\u51c6\u64cd\u63a7\u6c27\u539f\u5b50\u9010\u5c42\u5d4c\u5165\u94dd\u7684\u6676\u683c\u4e2d\uff0c\u5f62\u6210\u6709\u5e8f\u7684\u5355\u6676\u6c27\u5316\u94dd\u4ecb\u8d28\u6750\u6599\u2014\u2014\u84dd\u5b9d\u77f3\u3002\u8fd9\u79cd\u6750\u6599\u5728\u5fae\u89c2\u5c42\u9762\u4e0a\u7684\u6709\u5e8f\u6392\u5217\uff0c\u786e\u4fdd\u4e86\u7535\u5b50\u5728\u4f20\u8f93\u8fc7\u7a0b\u4e2d\u7684\u7a33\u5b9a\u6027\uff0c\u4f7f\u5f97\u5373\u4f7f\u5728\u4ec5\u67091\u7eb3\u7c73\u7684\u539a\u5ea6\u4e0b\uff0c\u4f9d\u7136\u80fd\u591f\u6709\u6548\u963b\u6b62\u7535\u6d41\u7684\u6cc4\u6f0f\uff0c\u4ece\u800c\u663e\u8457\u63d0\u9ad8\u4e86\u82af\u7247\u7684\u80fd\u6548\u3002<\/p>\n \u56fe<\/strong>1 \u00a0c-Al2<\/sub>O3<\/sub><\/strong>\u7684\u5236\u5907\u548c\u8868\u5f81<\/strong> \u00a9 2024 Springer Nature<\/strong><\/p>\n \u00a0<\/strong><\/p>\n \u56fe<\/strong>2 \u00a0Al\/c-Al2<\/sub>O3<\/sub><\/strong>\u6805\u6781\u7684\u6027\u80fd<\/strong> \u00a9 2024 Springer Nature<\/strong><\/p>\n \u00a0<\/strong><\/p>\n \u56fe<\/strong>3 \u00a0c-Al2<\/sub>O3<\/sub>\/MoS2<\/sub> FET<\/strong>\u7684\u5236\u5907\u5de5\u827a\u53ca\u7535\u5b50\u7279\u6027<\/strong> \u00a9 2024 Springer Nature<\/strong><\/p>\n \u00a0<\/strong><\/p>\n \u56fe<\/strong>4 \u00a0<\/strong>\u573a\u6548\u5e94\u7ba1\u9635\u5217\u7684\u5236\u5907<\/strong> \u00a9 2024 Springer Nature<\/strong><\/p>\n \u00a0<\/strong><\/p>\n \u4e09\u3001\u3010\u79d1\u5b66\u542f\u8fea\u3011<\/strong><\/p>\n \u7efc\u4e0a\uff0c\u7814\u7a76\u4eba\u5458\u5236\u9020\u4e86\u5355\u6676Al2<\/sub>O3<\/sub>\uff0c\u5e76\u5c06\u5176\u5236\u4f5c\u4e3a\u9876\u6805\u4e8c\u7ef4\u6676\u4f53\u7ba1\u7684\u9ad8\u8d28\u91cf\u4ecb\u7535\u5c42\u3002\u901a\u8fc7\u7ed3\u5408\u5916\u5ef6\u5265\u79bb\u548c\u63d2\u5c42\u6c27\u5316\uff0c\u5236\u5907\u4e86\u539a\u5ea6\u4e3a1.25nm\u7684\u539f\u5b50\u8584c-Al2O3\uff0c\u5176\u6805\u6781\u6f0f\u7535\u6d41\uff08J<\/em> < 1\u00d710-6<\/sup>A cm-2<\/sup>\uff09\u3001\u754c\u9762\u6001\u5bc6\u5ea6\uff08D<\/em>it<\/sub> = 8.4\u00d7109<\/sup> cm-2<\/sup> eV-1<\/sup>\uff09\u548c\u4ecb\u7535\u5f3a\u5ea6\uff08E<\/em>bd<\/sub> = 17.4 MV cm-1<\/sup>\uff09\u53ef\u4ee5\u6ee1\u8db3\u4f4e\u529f\u7387\u5668\u4ef6\u7684IRDS\u8981\u6c42\u3002\u901a\u8fc7\u4f7f\u7528\u8303\u5fb7\u534e\uff08vdW\uff09\u8f6c\u79fb\u65b9\u6cd5\uff0c\u6574\u4e2aFET\u5806\u53e0\uff0c\u5305\u62ec\u6e90\u6781\u3001\u6f0f\u6781\u3001\u7535\u4ecb\u8d28\u548c\u6805\u6781\uff0c\u53ef\u4ee5\u5728\u4e00\u6b65\u8fc7\u7a0b\u4e2d\u8f6c\u79fb\u5230MoS2<\/sub>\u6c9f\u9053\uff0c\u4ee5\u751f\u4ea7\u5177\u6709\u4f18\u5f02\u63a5\u89e6\u548c\u7535\u4ecb\u8d28\u754c\u9762\u76842D FET\u3002<\/p>\n \u8fd9\u4e00\u7a81\u7834\u5c06\u4e3a\u8fdb\u4e00\u6b65\u63d0\u9ad8\u5355\u6676\u6c27\u5316\u7269\u7684\u591a\u6837\u6027\u3001\u53ef\u6269\u5c55\u6027\u548c\u53ef\u5236\u9020\u6027\u5960\u5b9a\u57fa\u7840\uff0c\u4fc3\u8fdb\u4e8c\u7ef4\u534a\u5bfc\u4f53\u4ece\u5b9e\u9a8c\u5ba4\u5230\u5de5\u4e1a\u73af\u5883\u7684\u65e0\u7f1d\u8fc7\u6e21\u3002\u6676\u5706\u7ea7\u5355\u6676\u94dd\u548c\u6c27\u5316\u94dd\u7684\u751f\u957f\u65b9\u6cd5\u53ef\u4ee5\u8fdb\u4e00\u6b65\u6269\u5c55\u5230\u5176\u4ed6\u91d1\u5c5e\uff0c\u4e00\u4e9b\u4ee5\u524d\u65e0\u6cd5\u5b9e\u73b0\u7684\u5355\u6676\u6c27\u5316\u7269\u4e5f\u53ef\u4ee5\u5408\u6210\u7528\u4e8e\u5404\u79cd\u5e94\u7528\u3002\u901a\u8fc7\u6784\u5efa\u590d\u6742\u7684\u4e8c\u7ef4\u96c6\u6210\u7535\u8def\uff0c\u7279\u522b\u662f\u5728\u6210\u719f\u7684Si-CMOS\u5e73\u53f0\u4e0a\u5b9e\u73b0\u5f02\u8d28\u96c6\u6210\uff0c\u53ef\u4ee5\u5145\u5206\u91ca\u653e\u4e8c\u7ef4\u6750\u6599\u7684\u5de8\u5927\u6f5c\u529b\uff0c\u4e3a\u4e0b\u4e00\u4ee3\u9ad8\u6027\u80fd\u7535\u5b50\u5668\u4ef6\u5960\u5b9a\u57fa\u7840\u3002<\/p>\n<\/p>\n
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