{"id":249108,"date":"2023-03-23T09:14:26","date_gmt":"2023-03-23T01:14:26","guid":{"rendered":"\/\/m.iemloyee.com\/?p=249108"},"modified":"2023-03-23T09:14:26","modified_gmt":"2023-03-23T01:14:26","slug":"%e5%8c%97%e4%ba%ac%e5%a4%a7%e5%ad%a6%ef%bc%9a%e5%bc%b9%e9%81%93%e4%ba%8c%e7%bb%b4%e7%a1%92%e5%8c%96%e9%93%9finse%e6%99%b6%e4%bd%93%e7%ae%a1","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=249108","title":{"rendered":"\u5317\u4eac\u5927\u5b66\uff1a\u5f39\u9053\u4e8c\u7ef4\u7852\u5316\u94dfInSe\u6676\u4f53\u7ba1"},"content":{"rendered":"
\u4e00\u3001<\/strong> \u3010\u5bfc\u8bfb\u3011<\/strong>\u00a0 <\/strong><\/p>\n \u00a0 \u00a0 \u00a0 \u00a0\u8fd1\u5e74\u6765\uff0c\u7845\u57fa\u5668\u4ef6\u7684\u901f\u5ea6\u548c\u529f\u8017\u903c\u8fd1\u4e86\u7269\u7406\u6781\u9650,\u8fd9\u90fd\u8981\u5f52\u56e0\u4e8e\u6676\u4f53\u7ba1\u5c3a\u5bf8\u4e0d\u65ad\u51cf\u5c0f\u4ee5\u53ca\u77ed\u6c9f\u9053\u6548\u5e94\u7684\u65e5\u76ca\u52a0\u91cd\u3002\u56e0\u6b64\u9700\u8981\u5bfb\u627e\u65b0\u578b\u7684\u6c9f\u9053\u6750\u6599,\u4ee5\u540c\u65f6\u6ee1\u8db3\u5bf9\u672a\u6765\u96c6\u6210\u7535\u8def\u4f4e\u529f\u8017\u548c\u9ad8\u6027\u80fd\u7684\u8981\u6c42\u3002\u5bfb\u627e\u4e00\u79cd\u6781\u5177\u5e94\u7528\u6f5c\u529b\u7684\u6c9f\u9053\u6750\u6599\uff0c\u4e8c\u7ef4(2D)\u6750\u6599\u51ed\u501f\u5176\u539f\u5b50\u7ea7\u539a\u5ea6\u4e0e\u5e73\u6574\u5ea6\u3001\u4f18\u5f02\u7684\u7535\u5b66\u6027\u80fd\u5728\u4e00\u4f17\u5907\u9009\u6750\u6599\u4e2d\u8131\u9896\u800c\u51fa\u3002\u5176\u4e2d,\u5ba4\u6e29\u4e0b\u5177\u6709\u9ad8\u8fc1\u79fb\u7387\u7684\u7852\u5316\u94df(InSe)\u6210\u4e3a\u7814\u7a76\u70ed\u70b9\u3002<\/p>\n \u4e8c\u3001\u3010\u6210\u679c\u63a0\u5f71\u3011<\/p>\n \u00a0 \u00a0 \u00a0 \u00a0 \u5177\u6709\u539f\u5b50\u5c3a\u5ea6\u539a\u5ea6\u7684\u4e8c\u7ef4(2D)\u5c42\u72b6\u534a\u5bfc\u4f53\u88ab\u63a2\u7d22\u4e3a\u652f\u6301\u8fdb\u4e00\u6b65\u5c0f\u578b\u5316\u548c\u96c6\u6210\u7535\u5b50\u7684\u6f5c\u5728\u901a\u9053\u6750\u6599\u3002\u7136\u800c\uff0c\u5230\u76ee\u524d\u4e3a\u6b62\uff0c\u8fd8\u6ca1\u6709\u57fa\u4e8e\u534a\u5bfc\u4f53\u76842D fet\u8868\u73b0\u51fa\u53ef\u4ee5\u8d85\u8d8a\u6700\u5148\u8fdb\u7684\u7845\u573a\u6548\u5e94\u6676\u4f53\u7ba1(FETs)\u7684\u6027\u80fd\u3002\u56fd\u9645\u5668\u4ef6\u4e0e\u7cfb\u7edf\u8def\u7ebf\u56fe(IRDS)\u9884\u6d4b\uff0c\u5bf9\u4e8e\u7845\u57fa\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53(MOS)\u573a\u6548\u5e94\u6676\u4f53\u7ba1(FETs)\uff0c\u6805\u6781\u957f\u5ea6\u7684\u7f29\u653e\u5c06\u505c\u6b62\u572812\u7eb3\u7c73\uff0c\u6700\u7ec8\u7535\u6e90\u7535\u538b\u5c06\u4e0d\u4f1a\u4e0b\u964d\u5230\u5c0f\u4e8e0.6 V\u3002\u8fd9\u8981\u6c42\u4e86\u7845\u57fa\u82af\u7247\u5728\u7f29\u653e\u8fc7\u7a0b\u7ed3\u675f\u65f6\u7684\u6700\u7ec8\u96c6\u6210\u5bc6\u5ea6\u548c\u529f\u8017\u3002\u5317\u4eac\u5927\u5b66\u7535\u5b50\u5b66\u9662\u7eb3\u7c73\u5668\u4ef6\u7269\u7406\u4e0e\u5316\u5b66\u91cd\u70b9\u5b9e\u9a8c\u5ba4\u548c\u78b3\u57fa\u7535\u5b50\u7814\u7a76\u4e2d\u5fc3\u7684\u90b1\u6668\u5149\u548c\u5f6d\u7ec3\u77db\uff0c\u62a5\u9053\u4e86\u4e00\u79cd\u4ee52D\u7852\u5316\u94df(InSe)\u4e3a\u901a\u9053\u6750\u6599\u7684\u9ad8\u70ed\u901f\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff0c\u57280.5 V\u4e0b\u5de5\u4f5c\uff0c\u5b9e\u73b0\u4e866 mS \u03bcm\u22121<\/sup>\u7684\u9ad8\u8de8\u5bfc\u548c\u9971\u548c\u533a83%\u7684\u5ba4\u6e29\u5f39\u9053\u6bd4\uff0c\u8d85\u8fc7\u4e86\u4efb\u4f55\u5df2\u62a5\u9053\u7684\u7845\u573a\u6548\u5e94\u6676\u4f53\u7ba1\u3002\u4ee5\u9898\u76ee\u4e3a\uff1a\u201cBallistic two-dimensional InSe transistors\u201d\uff0c\u53d1\u8868\u5728Nature\u4e0a\u3002<\/p>\n \u00a0<\/strong><\/p>\n \u00a0<\/strong>\u4e09\u3001\u3010\u6838\u5fc3\u521b\u65b0\u70b9\u3011<\/strong><\/p>\n 1.\u63d0\u51fa\u4e86\u4e00\u79cd\u63ba\u6742\u9487\u8bf1\u5bfc\u7684\u4e0e\u94df\u7852\u573a\u6548\u5e94\u6676\u4f53\u7ba1\u8fdb\u884c\u6b27\u59c6\u63a5\u89e6\u7684\u76f8\u53d8\u65b9\u6cd5\uff0c\u5e76\u5c06\u94df\u7852\u573a\u6548\u5e94\u6676\u4f53\u7ba1\u7684\u6c9f\u9053\u957f\u5ea6\u7f29\u5c0f\u523010 nm\u3002<\/p>\n 2.InSe FETs\u53ef\u4ee5\u6709\u6548\u6291\u5236\u77ed\u901a\u9053\u6548\u5e94\uff0c\u5176\u4f4e\u4e9a\u9608\u503c\u6446\u52a8(SS)\u4e3a\u6bcf\u5341\u5e7475 mV\uff0c\u6f0f\u6781\u8bf1\u5bfc\u7684\u52bf\u5792\u964d\u4f4e(DIBL)\u4e3a22 mV V\u22121\u3002<\/p>\n 3.\u572810 nm\u5f39\u9053InSe FETs\u4e2d\u63d0\u53d6\u4e8662 \u03a9 \u03bcm\u7684\u4f4e\u63a5\u89e6\u7535\u963b\uff0c\u5bfc\u81f4\u4e86\u66f4\u5c0f\u7684\u5185\u5728\u5ef6\u8fdf\u548c\u66f4\u4f4e\u7684\u80fd\u91cf\u5ef6\u8fdf\u79ef(EDP)\uff0c\u8fdc\u4f4e\u4e8e\u9884\u6d4b\u7684\u7845\u6781\u9650\u3002<\/p>\n \u00a0<\/strong><\/p>\n \u00a0<\/strong>\u56db\u3001\u3010\u6570\u636e\u6982\u89c8\u3011<\/strong><\/p>\n \u00a0 \u56fe<\/strong>1\u00a0 <\/strong>\u5f39\u9053<\/strong>InSe fet<\/strong>\u7684\u7ed3\u6784\u548c\u7535\u5b50\u7279\u6027\u3002<\/strong>a<\/strong>\uff0c\u7845\u548c\u5178\u578b\u4e8c\u7ef4\u534a\u5bfc\u4f53\u6750\u6599\u4e2d\u7684\u70ed\u901f\u5ea6\u548c\u5c3a\u5ea6\u957f\u5ea6\u3002<\/strong>b<\/strong>\uff0c\u53cc\u6805<\/strong>InSe<\/strong>\u573a\u6548\u5e94\u6676\u4f53\u7ba1\u7684\u539f\u7406\u56fe\u3002<\/strong>c,d<\/strong>\uff0c\u663e\u793a\u53cc\u6805\u7ed3\u6784<\/strong>InSe<\/strong>\u573a\u6548\u5e94\u6676\u4f53\u7ba1\u622a\u9762\u7684\u900f\u5c04\u7535\u5b50\u663e\u5fae\u955c\u56fe\u50cf\u548c\u7535\u5b50\u80fd\u91cf\u635f\u5931\u8c31\u56fe\u3002<\/strong>e<\/strong>\uff0c\u8ba1\u7b97<\/strong>Y-InSe<\/strong>\u4f53\u7cfb\u4e2d\u53ef\u80fd\u63ba\u6742\u6216\u5438\u9644\u6784\u578b\u7684\u5f62\u6210\u80fd\u3002<\/strong>f<\/strong>\uff0c\u8ba1\u7b97\u5f97\u5230\u4e09\u5c42<\/strong>InSe<\/strong>\u7684\u80fd\u5e26\u7ed3\u6784\u548c\u9487\u63ba\u6742\u8bf1\u5bfc\u7684\u76f8\u53d8\u63a5\u89e6\u533a<\/strong>(<\/strong>\u5176\u4e2d<\/strong>Y<\/strong>\u539f\u5b50\u5728<\/strong>InSe<\/strong>\u7684\u9876\u5c42\u88ab\u53d6\u4ee3\u63ba\u6742<\/strong>)<\/strong>\u3002<\/strong>g, Y-InSe<\/strong>\u4e0e\u72ec\u7acb<\/strong>InSe<\/strong>\u76f8\u6bd4<\/strong>XPS<\/strong>\u8c31\u7684\u4f4d\u79fb<\/strong>(<\/strong>\u5747\u4e3a<\/strong>C 1s<\/strong>\u5cf0\uff0c<\/strong>284.8 eV)<\/strong>\u3002<\/strong>AU<\/strong>\uff0c\u4efb\u610f\u5355\u4f4d\u3002<\/strong>h<\/strong>\uff0c\u4e24\u79cd\u5f39\u9053\u88c5\u7f6e\u7684\u4f20\u9012\u7279\u6027<\/strong>VDS = 0.1 V<\/strong>\uff0c\u5305\u62ec<\/strong>Y-InSe<\/strong>\u901a\u9053<\/strong>(<\/strong>\u7d2b\u8272\u66f2\u7ebf<\/strong>)<\/strong>\u3001\u7eaf<\/strong>InSe<\/strong>\u901a\u9053<\/strong>(<\/strong>\u6a59\u8272\u66f2\u7ebf<\/strong>)<\/strong>\u4ee5\u53ca\u4e0e<\/strong>1 nm Y<\/strong>\u901a\u9053\u7684\u6bd4\u8f83<\/strong>(<\/strong>\u7070\u8272\u66f2\u7ebf<\/strong>)<\/strong>\u3002<\/strong>i<\/strong>\uff0c\u63ba\u9487\u8bf1\u5bfc\u76f8\u53d8\u63a5\u89e6\u793a\u610f\u56fe\u4fa7\u89c6\u56fe\u3002\u7eaf\u534a\u5bfc\u4f53<\/strong>InSe<\/strong>\u4e0e\u534a\u91d1\u5c5e<\/strong>Y-InSe<\/strong>\u7684\u5e26\u5411\u6bd4\u5bf9\u3002<\/strong>CBM<\/strong>\uff0c\u5bfc\u5e26\u6700\u5c0f\u503c<\/strong>;VBM<\/strong>\uff0c\u4ef7\u5e26\u6700\u5927\u503c<\/strong>;vdW<\/strong>\uff0c\u8303\u5fb7\u74e6\u5c14\u65af\u3002<\/strong>j<\/strong>\uff0c\u91c7\u7528<\/strong>y<\/strong>\u63ba\u6742\u8bf1\u5bfc\u76f8\u53d8\u63a5\u89e6\u7684\u5178\u578b<\/strong>10 nm<\/strong>\u5f39\u9053<\/strong>InSe FET<\/strong>\u548c\u76f4\u63a5\u91c7\u7528\u4f20\u7edf<\/strong>Ti\/Au<\/strong>\u63a5\u89e6\u7684\u5178\u578b<\/strong>10 nm InSe FET<\/strong>\u7684\u8f93\u51fa\u7279\u6027\u3002\u91c7\u7528<\/strong>y<\/strong>\u63ba\u6742<\/strong>(y –<\/strong>\u63ba\u6742<\/strong>)<\/strong>\u8bf1\u5bfc\u76f8\u53d8\u63a5\u89e6\u7684\u5f39\u9053<\/strong>InSe<\/strong>\u573a\u6548\u5e94\u7ba1\u7684\u603b\u7535\u963b\u7ea6\u4e3a<\/strong>124 <\/strong>\u03a9<\/strong> \u03bc<\/strong>m<\/strong>\u3002<\/strong>\u00a0 \u00a92023 Nature<\/strong><\/p>\n \u56fe<\/strong>2 InSe FETs<\/strong>\u7684\u7535\u5b50\u7279\u6027\u53ca\u603b\u7535\u963b\u3002<\/strong>a,b<\/strong>\uff0c\u9971\u548c\u8f93\u51fa\u7279\u6027<\/strong>(<\/strong>\u6700\u5927\u95e8\u7535\u538b<\/strong>)<\/strong>\u548c\u5f39\u9053<\/strong>2D InSe FETs<\/strong>\u548c\u5176\u4ed6<\/strong>2D<\/strong>\u77ed\u901a\u9053<\/strong>FETs<\/strong>\u7684\u603b\u7535\u963b\u6bd4\u8f83\u3002<\/strong>c<\/strong>\uff0c\u5728\u4e00\u4e9b\u6709\u4ee3\u8868\u6027\u7684\u62a5\u544a\u4e2d\u5bf9\u603b\u7535\u963b\u4e0e\u8f7d\u6d41\u5b50\u5bc6\u5ea6<\/strong>ns<\/strong>\u8fdb\u884c\u57fa\u51c6\u6d4b\u8bd5\u3002<\/strong>d<\/strong>\uff0c\u6676\u4f53\u7ba1\u4e2d\u4e0e\u6e29\u5ea6\u76f8\u5173\u7684\u6269\u6563\u548c\u5f39\u9053\u4f20\u8f93\u6a21\u5f0f\u793a\u610f\u56fe\u3002<\/strong>e<\/strong>\uff0c\u5178\u578b\u7684<\/strong>10<\/strong>\u7eb3\u7c73\u5f39\u9053<\/strong>2D InSe<\/strong>\u573a\u6548\u5e94\u6676\u4f53\u7ba1\u5728\u4e0d\u540c\u6e29\u5ea6\u8303\u56f4\u4ece<\/strong>300 K<\/strong>\u5230<\/strong>100 K<\/strong>\u7684\u4f20\u8f93\u7279\u6027\u3002<\/strong>f<\/strong>\uff0c\u5177\u6709\u6b27\u59c6\u63a5\u89e6\u7684\u5f39\u9053<\/strong>2D InSe FET (Y\/Ti\/Au<\/strong>\uff0c\u7ea2\u8272<\/strong>)<\/strong>\u548c\u5177\u6709\u672a\u4f18\u5316\u7684\u6b63\u5e38\u8096\u7279\u57fa\u63a5\u89e6\u7684\u5f39\u9053<\/strong>2D InSe FET (Ti\/Au<\/strong>\uff0c\u9ec4\u8272<\/strong>)<\/strong>\u7684\u5178\u578b\u4f20\u8f93\u7279\u6027\u3002\u5728\u8f6c\u79fb\u7684\u9608\u4e0b\u533a\u57df\u4f3c\u4e4e\u6709\u4e24\u4e2a\u6bb5<\/strong>Ti\/ au<\/strong>\u63a5\u89e6\u5668\u4ef6<\/strong>(<\/strong>\u9ec4\u8272<\/strong>)<\/strong>\u7684\u7279\u6027\uff0c\u5bf9\u5e94\u70ed\u53d1\u5c04<\/strong>(TE)<\/strong>\u548c\u70ed\u573a\u53d1\u5c04<\/strong>(TFE)<\/strong>\u3002<\/strong>g<\/strong>\uff0c\u8096\u7279\u57fa\u63a5\u89e6\u548c\u6b27\u59c6\u63a5\u89e6\u7684\u80fd\u5e26\u793a\u610f\u56fe\u3002<\/strong> \u00a92023 Nature<\/strong><\/p>\n \u56fe<\/strong>3\u00a0 <\/strong>\u5bf9\u6807<\/strong>InSe<\/strong>\uff0c\u7845\u548c<\/strong>InGaAs FET<\/strong>\u3002<\/strong>a<\/strong>\u3001\u4f20\u9012\u7279\u6027\u6bd4\u8f83\u4e94\u4e2a\u5178\u578b\u7684\u5f39\u9053\u3002<\/strong>b, 5<\/strong>\u4e2a\u5178\u578b\u7684\u5f39\u9053<\/strong>2D InSe FET<\/strong>\u7684\u8de8\u5bfc\u6bd4\u8f83\uff0c<\/strong>a<\/strong>\uff0c\u4e00\u4e2a<\/strong>10<\/strong>\u7eb3\u7c73\u8282\u70b9\u7684\u7845<\/strong>FinFET (Intel<\/strong>\uff0c\u9ed1\u7ebf\u5b9e\u7ebf<\/strong>)<\/strong>\u548c\u4e00\u4e2a<\/strong>InGaAs FinFET (IBM<\/strong>\uff0c\u9ed1\u7ebf\u865a\u7ebf<\/strong>)<\/strong>\u3002<\/strong>c d<\/strong>\u901a\u8def\u72b6\u6001<\/strong>VDD = 0.5 V<\/strong>\u65f6\u5f39\u9053<\/strong>2D InSe FET<\/strong>\u7684\u7535\u6d41<\/strong>(ION)<\/strong>\u548c\u5cf0\u8de8\u5bfc\u6bd4\u8f83\u4ee5\u53ca<\/strong>VDD = 1 V<\/strong>\u65f6<\/strong>LG<\/strong>\u5728<\/strong>50 nm<\/strong>\u4ee5\u4e0b\u7684\u5176\u4ed6<\/strong>2D FET (VDD = VDS = VGS)8,23 – 26<\/strong>\u3002\u4ece<\/strong>VDD<\/strong>\u7535\u538b\u7a97\u53e3\u7684\u4f20\u8f93\u7279\u6027\u4e2d\u63d0\u53d6\u901a\u6001\u7535\u6d41\u548c\u5cf0\u503c\u8de8\u5bfc\u503c\uff0c\u6807\u51c6\u5173\u6001\u7535\u6d41\u4e3a<\/strong>100 nA \u03bcm\u22121<\/sup><\/strong>\u3002<\/strong>e<\/strong>\uff0c\u672c\u6587\u7684<\/strong>InSe FET<\/strong>\u7684\u5f39\u9053\u6bd4\u57fa\u51c6\u4e0e\u7845<\/strong>MOS FETs<\/strong>\u76f8\u6bd4\u8f83\u3002<\/strong>f-h<\/strong>\uff0c\u4e0e\u7845<\/strong>FET<\/strong>\u76f8\u6bd4\uff0c\u672c\u6587\u7684\u5f39\u9053<\/strong>2D InSe FET<\/strong>\u7684<\/strong>VDD<\/strong>\u3001\u6805\u6781\u5ef6\u8fdf\u548c<\/strong>EDP(<\/strong>\u542b\u5bc4\u751f\u7535\u5bb9<\/strong>)<\/strong>\u7684\u7f29\u653e\u8d8b\u52bf\u3002<\/strong> \u00a92023 Nature<\/strong><\/p>\n \u00a0 \u56fe<\/strong>4\u00a0 InSe FET<\/strong>\u4e0e\u7845<\/strong>FINFETs<\/strong>\u7684\u77ed\u901a\u9053\u6548\u5e94\u6bd4\u8f83\u3002<\/strong>a<\/strong>\uff0c\u5178\u578b\u7684<\/strong><\/p>\n
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