{"id":247536,"date":"2023-02-22T05:55:59","date_gmt":"2023-02-21T21:55:59","guid":{"rendered":"\/\/m.iemloyee.com\/?p=247536"},"modified":"2023-02-20T17:08:36","modified_gmt":"2023-02-20T09:08:36","slug":"%e6%b5%99%e6%b1%9f%e5%a4%a7%e5%ad%a6acs-applied-materials-%ef%bc%86-interface%ef%bc%9a%e9%9d%9e%e6%99%b6inalzno%e5%9f%ba%e5%85%89%e7%94%b5%e4%ba%ba%e5%b7%a5%e7%aa%81%e8%a7%a6%e5%99%a8%e4%bb%b6","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=247536","title":{"rendered":"\u6d59\u6c5f\u5927\u5b66ACS Applied Materials \uff06 Interface\uff1a\u975e\u6676InAlZnO\u57fa\u5149\u7535\u4eba\u5de5\u7a81\u89e6\u5668\u4ef6"},"content":{"rendered":"
<\/p>\n
\u5728\u8fc7\u53bb\u7684\u534a\u4e2a\u4e16\u7eaa\u91cc\uff0c\u57fa\u4e8e\u51af\u00b7\u8bfa\u4f9d\u66fc\u7cfb\u7edf\u7684\u8ba1\u7b97\u673a\u53d1\u5c55\u8fc5\u901f\uff0c\u4f46\u5176\u5b58\u5728\u5185\u5b58\u4e0e\u5904\u7406\u5668\u5206\u79bb\u3001\u529f\u8017\u9ad8\u3001\u65e0\u6cd5\u81ea\u6211\u5b66\u4e60\u548c\u8fdb\u5316\u7b49\u7f3a\u70b9\u3002\u800c\u4eba\u8111\u6709\u5145\u8db3\u7684\u5185\u5b58\u7a7a\u95f4\uff0c\u53ef\u4ee5\u8fdb\u884c\u9ad8\u901f\u8fd0\u7b97\uff0c\u5177\u6709\u5b58\u50a8\u8ba1\u7b97\u5408\u4e00\u3001\u8d85\u4f4e\u529f\u8017\u3001\u81ea\u6211\u5b66\u4e60\u3001\u5bf9\u672a\u6765\u4e8b\u4ef6\u505a\u51fa\u9884\u6d4b\u7b49\u7279\u70b9\u3002\u6a21\u62df\u5927\u8111\u529f\u80fd\u7684\u795e\u7ecf\u5f62\u6001\u8ba1\u7b97\u662f\u89e3\u51b3\u201c\u51af\u00b7\u8bfa\u4f9d\u66fc\u74f6\u9888\u201d\u7684\u5173\u952e\u4e4b\u4e00\u3002\u795e\u7ecf\u5f62\u6001\u8ba1\u7b97\u7684\u5b9e\u73b0\u5728\u5f88\u5927\u7a0b\u5ea6\u4e0a\u4f9d\u8d56\u4e8e\u7a81\u89e6\u5668\u4ef6\u7684\u53d1\u5c55\u3002\u8bb8\u591a\u4f7f\u7528\u7535\u4fe1\u53f7\u8fdb\u884c\u7a81\u89e6\u6027\u80fd\u6a21\u62df\u7684\u8bbe\u5907\u5df2\u7ecf\u88ab\u62a5\u9053\u3002\u4eba\u7c7b\u901a\u8fc7\u89c6\u89c9\u7cfb\u7edf\u611f\u77e5\u548c\u5b66\u4e60\u65b0\u7684\u4e8b\u4ef6\u3002\u5149\u63a7\u4eba\u5de5\u7a81\u89e6\u88c5\u7f6e\u53ef\u4ee5\u6a21\u62df\u4eba\u7c7b\u7684\u5b66\u4e60\u8bb0\u5fc6\u8fc7\u7a0b\uff0c\u5e76\u5177\u6709\u4f4e\u529f\u8017\u4f4e\u5ef6\u8fdf\u7684\u4f18\u70b9\u3002\u6b64\u5916\uff0c\u5149\u4fe1\u53f7\u5177\u6709\u9ad8\u901f\u3001\u9ad8\u5e26\u5bbd\u3001\u4f4e\u4e32\u6270\u7684\u7279\u70b9\uff0c\u56e0\u6b64\u5149\u63a7\u4eba\u5de5\u7a81\u89e6\u88c5\u7f6e\u7684\u7a33\u5b9a\u6027\u4f1a\u4f18\u4e8e\u7535\u63a7\u4eba\u5de5\u7a81\u89e6\u88c5\u7f6e\u3002<\/p>\n
\u6d59\u6c5f\u5927\u5b66\u53f6\u5fd7\u9547\u9662\u58eb\u56e2\u961f\u7684\u5415\u5efa\u56fd\u8bfe\u9898\u7ec4\u7b49\u91c7\u7528\u8109\u51b2\u6fc0\u5149\u6c89\u79ef\u548c\u7535\u5b50\u675f\u84b8\u53d1\u8bbe\u5907\u503c\u5f97\u4e86\u975e\u6676InAlZnO\u57fa\u5149\u7535\u4eba\u5de5\u7a81\u89e6\u5668\u4ef6\u3002\u7814\u7a76\u4e86\u5668\u4ef6\u5174\u594b\u6027\u7a81\u89e6\u540e\u7535\u6d41(EPSC)\u3001\u77ed\u671f\u53ef\u5851\u6027(STP)\u3001\u6210\u5bf9\u8109\u51b2\u6613\u5316(PPF)\u548c\u957f\u671f\u53ef\u5851\u6027(LTP)\u7b49\u5149\u7535\u7a81\u89e6\u7684\u57fa\u672c\u6027\u8d28\u3002\u5f53\u65f6\u95f4\u95f4\u9694\u4e3a0.1 s\u65f6\uff0cPPF\u6307\u6570\u8fbe\u5230155.8%\u3002\u6bcf\u4e2a\u4e8b\u4ef6\u7684\u80fd\u91cf\u6d88\u8017\u4e3a2.45pJ\uff0c\u5927\u5927\u4f4e\u4e8e\u666e\u901aMOS\u5668\u4ef6\u548c\u5176\u4ed6\u5149\u63a7\u7a81\u89e6\u5668\u4ef6\u3002\u901a\u8fc7\u4e09\u6307\u6570\u51fd\u6570\u62df\u5408\u4e86\u5149\u7535\u6d41\u8870\u51cf\u66f2\u7ebf\uff0c\u5927\u7684\u5f1b\u8c6b\u65f6\u95f4\u8868\u660e\u6211\u4eec\u7684\u5668\u4ef6\u5177\u6709\u4f4e\u8870\u51cf\u7387\u548c\u5f88\u597d\u7684\u7a81\u89e6\u53ef\u5851\u6027\u3002\u53e6\u5916\uff0c\u901a\u8fc7\u8c03\u8282\u6805\u6781\u7535\u538b\u6a21\u62df\u4e0d\u540c\u60c5\u7eea\u4e0b\u7684\u5b66\u4e60\u8fc7\u7a0b\uff0c\u5145\u5206\u6a21\u62df\u4e86\u8be5\u88c5\u7f6e\u7684\u5b66\u4e60\u80fd\u529b\u3002\u5bf9\u4e8e\u63a8\u52a8\u7528\u4e8e\u795e\u7ecf\u5f62\u6001\u8ba1\u7b97\u7684\u9ad8\u6027\u80fd\u5149\u7535\u7a81\u89e6\u5668\u4ef6\u7684\u53d1\u5c55\u5177\u6709\u91cd\u8981\u610f\u4e49\u3002<\/p>\n
<\/p>\n
<\/p>\n
\u56fe1 a)\u7531\u4e00\u4e2a\u5149\u523a\u89e6\u53d1\u7684EPSC\u3002\u5149\u8109\u51b2\u7684\u6ce2\u957f\u548c\u6301\u7eed\u65f6\u95f4\u5206\u522b\u4e3a375 nm\u548c0.2 s\u3002b)\u4e00\u4e2a1\u79d2\u7684\u5149\u8109\u51b2\u89e6\u53d1\u7684EPSC\u3002c)\u4e00\u4e2a\u6301\u7eed1\u79d2\u7684\u5149\u8109\u51b2EPSC\u7684\u8870\u51cf\u3002\u5149\u8109\u51b2\u7684\u6ce2\u957f\u4e3a375 nm\u3002d)\u4e0d\u540c\u6301\u7eed\u65f6\u95f4\u7684\u4e00\u4e2a\u5149\u5cf0\u503c\u89e6\u53d1IDS<\/sub>\u7684\u53d8\u5316\u3002e)\u7531\u4e00\u5bf9\u6301\u7eed0.2 s\u7684\u5149\u523a\u6fc0\u89e6\u53d1\u7684EPSC\u3002\u4e24\u6b21\u5cf0\u503c\u4e4b\u95f4\u7684\u65f6\u95f4\u95f4\u9694(\u0394t)\u4e3a0.2 s\u3002f) PPF\u6307\u6570\u5bf9\u0394t\u7684\u4f9d\u8d56\u6027\u3002\u6240\u6709\u7684\u6d4b\u91cf\u90fd\u662f\u5728VD<\/sub>=0.3 V\uff1bVG<\/sub>=0 V\u65f6\u5b9e\u73b0\u7684\uff0c\u5149\u529f\u7387\u5bc6\u5ea6\u4e3a0.1mW\/cm2<\/sup>\u3002<\/p>\n <\/p>\n \u5668\u4ef6\u5c55\u73b0\u4e86\u5149\u63a7\u7a81\u89e6\u5668\u4ef6\u7684\u77ed\u65f6\u7a0b\u7a81\u89e6\u53ef\u5851\u6027\uff08STP\uff09\uff0c\u5f53\u65f6\u95f4\u95f4\u9694\u4e3a0.1 s\u65f6\uff0cPPF\u6307\u6570\u4e3a155.8%\uff0c\u5355\u4e2a\u4e8b\u4ef6\u7684\u80fd\u8017\u4e3a2.45 pJ\u3002<\/p>\n <\/p>\n \u56fe2 a)\u5149\u7167\u4e0b\u8f7d\u6d41\u5b50\u884c\u4e3a\u793a\u610f\u56fe\u3002b)\u5149\u7167\u540e\u8f7d\u6d41\u5b50\u884c\u4e3a\u793a\u610f\u56fe\uff0c\u7070\u8272\u7403\u7684\u4f4d\u7f6e\u8868\u793a\u590d\u5408\u524d\u5149\u751f\u7535\u5b50\u5728\u754c\u9762\u4e2d\u7684\u4f4d\u7f6e\u3002<\/p>\n <\/p>\n \u673a\u7406\u89e3\u91ca\uff1a\u7a81\u89e6\u6027\u80fd\u5f52\u56e0\u4e8e\u754c\u9762\u5904\u5149\u751f\u7535\u5b50\u7684\u6355\u83b7\u4e0e\u91ca\u653e\u3002<\/p>\n <\/p>\n \u56fe3 a)\u4eceSTP\u5230LTP\u7684\u8f6c\u53d8\u3002b)\u5bf9\u6bd4\u5149\u5f3a\u4e3a0.05 mW\/cm2<\/sup>\u548c0.24 mW\/cm2<\/sup>\u65f6\uff0c\u0394IDS<\/sub>\u5bf9\u5149\u5bc6\u5ea6\u7684\u4f9d\u8d56\u5173\u7cfb\u3002c)-d) \u0394IDS<\/sub>\u5bf9\u5149\u8109\u51b2\u6570\u7684\u4f9d\u8d56\u5173\u7cfb\u3002e) \u03c41<\/sub>\u3001\u03c42<\/sub>\u3001\u03c43<\/sub>\u4e0e\u8109\u51b2\u6570\u7684\u5173\u7cfb\u3002f) 30\u4e2a\u5149\u5c16\u5728\u4e0d\u540c\u5149\u5c16\u9891\u7387\u4e0b\u89e6\u53d1\u7684\u0394IDS<\/sub>\u3002g)\u589e\u76ca(A30\/A1)\u5bf9\u9891\u7387(0.1 Hz, 0.5 Hz, 1hz)\u7684\u4f9d\u8d56\u6027\u3002h) \u0394IDS<\/sub>\u5728\u4e0d\u540c\u5149\u9891\u7387\u4e0b\u5bf9\u8109\u51b2\u6570\u7684\u4f9d\u8d56\u5173\u7cfb\u3002i)\u4e0d\u540c\u9891\u7387(0.1 Hz\u30010.5 Hz\u30011hz\u30012hz)\u7684\u8870\u51cf\u66f2\u7ebf\u3002\u6240\u6709\u7684\u6d4b\u91cf\u90fd\u662f\u5728VD<\/sub>=0.3 V\uff1bVG<\/sub>=0 V\u65f6\u5b9e\u73b0\u7684\uff0c\u5149\u529f\u7387\u5bc6\u5ea6\u4e3a0.1mW\/cm2<\/sup>(\u56feb\u9664\u5916)\u3002<\/p>\n <\/p>\n \u5668\u4ef6\u5c55\u73b0\u4e86\u5149\u63a7\u7a81\u89e6\u5668\u4ef6\u7684\u957f\u65f6\u7a0b\u7a81\u89e6\u53ef\u5851\u6027\uff08LTP\uff09\uff0c\u8870\u51cf\u66f2\u7ebf\u53ef\u4ee5\u7528\u4e00\u4e0b\u4e09\u6307\u6570\u8870\u51cf\u516c\u5f0f\u62df\u5408\uff1a<\/p>\n \u5f53\u8109\u51b2\u6570\u4e3a5\u65f6\uff0c\u8870\u51cf\u6307\u6570\u03c42<\/sub>\u8fbe\u5230\u4e86277s\u3002<\/p>\n <\/p>\n \u56fe4 a)\u4eba\u8111\u5b66\u4e60\u6a21\u578b\u3002b)\u6a21\u62df\u5b66\u4e60-\u9057\u5fd8-\u518d\u5b66\u4e60-\u9057\u5fd8\u884c\u4e3a\u3002\u2160:\u7b2c\u4e00\u4e2a\u5b66\u4e60\u8fc7\u7a0b\u3002\u2161:\u7b2c\u4e00\u4e2a\u9057\u5fd8\u8fc7\u7a0b\u3002\u2162:\u91cd\u65b0\u5b66\u4e60\u7684\u8fc7\u7a0b\u3002\u2163:\u7b2c\u4e8c\u4e2a\u9057\u5fd8\u8fc7\u7a0b\u3002\u6d4b\u91cf\u662f\u5728VD<\/sub>=0.3 V\uff1bVG<\/sub>=0 V\u65f6\u5b9e\u73b0\u7684\uff0c\u5149\u529f\u7387\u5bc6\u5ea6\u4e3a0.1mW\/cm2<\/sup>\u3002<\/p>\n <\/p>\n \u56fe5 \u4e0d\u540c\u6805\u6781\u7535\u538ba) -1 V, b) -2 V\u548cc) -4 V\u7684\u5149\u8109\u51b2\u4e0b\u7684EPSC\uff1bd) \u5355\u523a\u6fc0\u4e0b\u0394IDS<\/sub>\u5bf9\u6805\u6781\u7535\u538b\u7684\u4f9d\u8d56\u3002e)\u548cf) \u753110\u4e2a\u5149\u5cf0\u503c\u89e6\u53d1\u7684\u0394IDS<\/sub>\u5bf9\u6805\u6781\u7535\u538b\u7684\u4f9d\u8d56\u3002g)\u6a21\u62df\u4e0d\u540c\u60c5\u7eea\u4e0b\u7684\u5b66\u4e60\u6548\u7387\u548c\u9057\u5fd8\u7387(\u5047\u8bbe\u5b66\u4e60\u5b57\u6bcd\u201cL\u201d\u884c\u4e3a)\u3002\u6240\u6709\u6d4b\u91cf\u5747\u5728VD<\/sub>=0.3 V\u65f6\u5b9e\u73b0\uff0c\u5149\u529f\u7387\u5bc6\u5ea6\u4e3a0.24mW\/cm2<\/sup>\u3002<\/p>\n <\/p>\n \u6211\u4eec\u53ef\u4ee5\u6a21\u62df\u60c5\u7eea\u5bf9\u5b66\u4e60-\u9057\u5fd8\u8fc7\u7a0b\u7684\u5f71\u54cd\uff0c\u5982\u56fe5d\u6240\u793a\u3002\u4e0e\u79ef\u6781\u60c5\u7eea(VG=-1V)\u548c\u4e2d\u6027\u60c5\u7eea(VG=- 2V)\u76f8\u6bd4\uff0c\u5177\u6709\u6d88\u6781\u60c5\u7eea(VG=- 4V)\u7684\u4eba\u5bf9\u5b57\u6bcd\u201cL\u201d\u53ea\u6709\u6a21\u7cca\u7684\u5370\u8c61\uff0c\u5e76\u5177\u6709\u5f88\u5feb\u7684\u9057\u5fd8\u901f\u5ea6\u3002\u76f8\u53cd\uff0c\u5f53\u4e00\u4e2a\u4eba\u6709\u79ef\u6781\u7684\u60c5\u7eea(VG=-1V)\uff0c\u572830\u79d2\u540e\u4ecd\u7136\u5bf9\u5b57\u6bcd\u201cL\u201d\u5177\u6709\u8f83\u6df1\u523b\u7684\u8bb0\u5fc6\u3002<\/p>\n <\/p>\n \u5229\u7528ITO\/ a-IAZO \/SiO2<\/sub>\/n++<\/sup>Si\u7ed3\u6784\u7684TFT\u578b\u7a81\u89e6\u6a21\u62df\u4eba\u8111\u7a81\u89e6\u6027\u80fd\u3002\u6a21\u62df\u4e86\u7a81\u89e6\u7684EPSC\u3001PPF\u7b49\u57fa\u672c\u6027\u8d28\uff0c\u4ee5\u53ca\u4eceSTP\u5230LTP\u7684\u8f6c\u53d8\u3002\u5355\u4e2a\u4e8b\u4ef6\u7684\u80fd\u91cf\u6d88\u8017\u4ec5\u4e3a2.45pJ\uff0c\u8fdc\u4f4e\u4e8e\u666e\u901aMOS\u5668\u4ef6\u548c\u5176\u4ed6\u5149\u63a7\u7a81\u89e6\u5668\u4ef6\u3002\u8be5\u7a81\u89e6\u88c5\u7f6e\u5177\u6709\u826f\u597d\u7684\u7a81\u89e6\u53ef\u5851\u6027\u300250\u6b21\u5149\u8109\u51b2\u523a\u6fc0\u540e\uff0c\u7a81\u89e6\u8870\u51cf\u66f2\u7ebf\u7684\u677e\u5f1b\u65f6\u95f4\u8fbe\u5230576 s\uff0c\u8fd9\u610f\u5473\u7740\u7a81\u89e6\u9700\u8981\u5f88\u957f\u7684\u9057\u5fd8\u65f6\u95f4\u3002\u540c\u65f6\u4e5f\u6a21\u62df\u4e86\u4eba\u7c7b\u7684\u91cd\u590d\u5b66\u4e60\u884c\u4e3a\u3002\u6b64\u5916\uff0c\u6211\u4eec\u901a\u8fc7\u8c03\u8282\u6805\u6781\u7535\u538b\uff0c\u6a21\u62df\u4e86\u4e0d\u540c\u60c5\u7eea\u5bf9\u4eba\u7c7b\u5b66\u4e60\u6548\u7387\u548c\u9057\u5fd8\u7387\u8bc6\u522b\u7684\u5f71\u54cd\u3002\u672c\u5de5\u4f5c\u5c55\u793a\u4e86\u4e00\u79cd\u7ed3\u6784\u7b80\u5355\u3001\u5236\u9020\u5de5\u827a\u7b80\u5355\u3001\u80fd\u8017\u4f4e\u3001\u7a81\u89e6\u53ef\u5851\u6027\u597d\u7684\u5149\u7535\u4eba\u5de5\u7a81\u89e6\u5668\u4ef6\uff0c\u6709\u52a9\u4e8e\u4fc3\u8fdb\u7528\u4e8e\u795e\u7ecf\u5f62\u6001\u8ba1\u7b97\u7684\u9ad8\u6027\u80fd\u5149\u7535\u7a81\u89e6\u5668\u4ef6\u7684\u53d1\u5c55\u3002<\/p>\n \u76f8\u5173\u8bba\u6587\u53d1\u8868\u5728ACS Applied Materials \uff06<\/strong>\u00a0<\/strong>Interfaces\u4e0a\uff0c\u6d59\u6c5f\u5927\u5b66\u6768\u6c5d\u742a\u535a\u58eb\u4e3a\u8bba\u6587\u7b2c\u4e00\u4f5c\u8005\uff0c\u5415\u5efa\u56fd\u526f\u7814\u7a76\u5458\u3001\u76ae\u5b5d\u4e1c\u6559\u6388\u3001\u8bf8\u845b\u98de\u7814\u7a76\u5458\u3001\u53f6\u5fd7\u9547\u9662\u58eb\u4e3a\u901a\u8baf\u4f5c\u8005\u3002<\/p>\n <\/p>\n \u8bba\u6587\u4fe1\u606f<\/p>\n Optoelectronic artificial synaptic device based on amorphous InAlZnO films\u00a0for\u00a0learning simulations<\/p>\n Ruqi Yang, Lei Yin, Jianguo Lu,\u00a0Bojing Lu,\u00a0Xiaodong Pi,\u00a0Siqin Li,\u00a0Fei Zhuge, Yangdan Lu, Wenyi Shao and\u00a0Zhizhen Ye<\/p>\n<\/p>\n
<\/p>\n
<\/p>\n
<\/p>\n
<\/p>\n
\n