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<\/p>\n
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\u4e8c\u3001\u6210\u679c\u63a0\u5f71<\/b><\/strong><\/p>\n \u8fd1\u65e5\uff0c\u5357\u4eac\u5927\u5b66\u738b\u6b23\u7136\u6559\u6388\u3001\u65bd\u6bc5\u6559\u6388\u548c\u4e1c\u5357\u5927\u5b66\u738b\u91d1\u5170\u6559\u6388\u901a\u8fc7\u5229\u7528\u5f3a\u8303\u5fb7\u534e\u76f8\u4e92\u4f5c\u7528\u5b9e\u73b0\u4e86\u5355\u5c42\u4e8c\u786b\u5316\u94bc(MoS2<\/sub>)\u548c\u534a\u91d1\u5c5e\u9511(Sb)(0112)\u4e4b\u95f4\u7684\u8f68\u9053\u6742\u5316\uff0c\u5c06\u63a5\u89e6\u7535\u963b\u63a8\u5411\u91cf\u5b50\u6781\u9650\u3002\u7814\u7a76\u8005\u9996\u5148\u4f7f\u7528\u5bc6\u5ea6\u6cdb\u51fd\u7406\u8bba(DFT)\u8ba1\u7b97\u6765\u9a8c\u8bc1\u65b9\u6cd5\u3002\u7136\u540e\u901a\u8fc7\u9ad8\u6e29\u84b8\u9540\u5de5\u827a\u5728MoS2<\/sub>\u4e0a\u5b9e\u73b0\u4e86Sb(0112)\u8584\u819c\u7684\u5236\u5907\uff0c\u57fa\u4e8e\u8be5\u65b9\u6cd5\uff0c\u56e2\u961f\u5236\u5907\u4e86MoS2<\/sub>\u6676\u4f53\u7ba1\u5668\u4ef6\uff0c\u901a\u8fc7\u6d4b\u91cf\u4ee5MoS2<\/sub>\u5355\u6676\u4e3a\u901a\u9053\u7684\u573a\u6548\u5e94\u6676\u4f53\u7ba1(FETs)\u6765\u8bc4\u4f30\u7535\u5b66\u6027\u8d28\uff0c\u7ed3\u679c\u8868\u660e\u5176\u63a5\u89e6\u7535\u963b\u751a\u81f3\u6bd4\u56fd\u9645\u5668\u4ef6\u4e0e\u7cfb\u7edf\u8def\u7ebf\u56fe(IRDS) 2028\u5e74\u7684\u76ee\u6807\u4f4e\u4e86\u4e00\u4e2a\u6570\u91cf\u7ea7\u3002<\/p>\n \u76f8\u5173\u7814\u7a76\u5de5\u4f5c\u4ee5\u201cApproaching the quantum limit in two-dimensional semiconductor contacts<\/strong>\u201d\u4e3a\u9898\u53d1\u8868\u5728\u56fd\u9645\u9876\u7ea7\u671f\u520aNature<\/em>\u4e0a\u3002<\/p>\n \u00a0 <\/p>\n \u4e09\u3001\u6838\u5fc3\u521b\u65b0\u70b9<\/b><\/strong><\/p>\n 1.\u901a\u8fc7\u589e\u5f3a\u534a\u91d1\u5c5e\u4e0e\u4e8c\u7ef4\u534a\u5bfc\u4f53\u754c\u9762\u7684\u8f68\u9053\u6742\u5316\uff0c\u5236\u5907\u7684Sb\u00a0(0112)-MoS2<\/sub>\u63a5\u89e6\u7535\u963b\u4ec5\u670942\u03a9\u00b7\u03bcm\uff0c\u9996\u6b21\u4f4e\u4e8e\u7845\u57fa\u5668\u4ef6\u4e14\u63a5\u8fd1\u7406\u8bba\u91cf\u5b50\u6781\u9650\uff0c\u540c\u65f6\u5728125\u2103\u4e0b\u4e5f\u5177\u6709\u51fa\u8272\u7684\u7a33\u5b9a\u6027\u3002\u8be5\u6210\u679c\u89e3\u51b3\u4e86\u4e8c\u7ef4\u534a\u5bfc\u4f53\u5e94\u7528\u4e8e\u9ad8\u6027\u80fd\u96c6\u6210\u7535\u8def\u7684\u5173\u952e\u74f6\u9888\u4e4b\u4e00\uff1b<\/p>\n 3.\u8fdb\u4e00\u6b65\u5236\u9020\u4e86\u5927\u9762\u79ef\u7684\u5668\u4ef6\u9635\u5217\uff0c\u5448\u73b0\u4f18\u5f02\u7684\u5747\u4e00\u7279\u6027\uff0c\u6709\u671b\u7528\u4e8e\u4e8c\u7ef4\u534a\u5bfc\u4f53\u7684\u96c6\u6210\u89c4\u6a21\u5316\u5236\u9020\u3002<\/p>\n \u56db\u3001\u6570\u636e\u6982\u89c8<\/b><\/strong><\/p>\n \u00a0 \u56fe1 <\/b><\/strong>DFT\u8ba1\u7b97\u7684<\/b><\/strong>Sb (0112)-MoS<\/b><\/strong>2<\/b><\/sub><\/strong>\u548cSb (0001) -MoS<\/b><\/strong>2<\/b><\/sub><\/strong>\u63a5\u89e6\u7535\u963b<\/b><\/strong>\u7684\u7535<\/b><\/strong>\u5b66<\/b><\/strong>\u6027\u8d28<\/b><\/strong>\u3002<\/b><\/strong>\u00a9<\/b><\/strong>\u00a02023 Springer Nature Limited<\/b><\/strong><\/p>\n (a-b) Sb (0112)-MoS2<\/sub>\u80fd\u5e26\u56fe\uff0c(c-d)EF<\/sub>\u9644\u8fd1\u7684\u7535\u8377\u5bc6\u5ea6(\u5de6)\u548cSb(0112)\u7684\u5fae\u5206\u7535\u8377\u5bc6\u5ea6(\u53f3)\uff0c(e-h)\u53c2\u6570\u6d4b\u91cf\u3002<\/p>\n \u00a0 \u56fe2 Sb (0112)-MoS<\/b><\/strong>2<\/b><\/sub><\/strong>\u63a5\u89e6\u7535\u963b<\/b><\/strong>\u7684\u8868\u5f81\u3002<\/b><\/strong>\u00a9<\/b><\/strong>\u00a02023 Springer Nature Limited<\/b><\/strong><\/p>\n (a) MoS2<\/sub>\/Si\u886c\u5e95\u6c89\u79efSb\u8584\u819c\u7684\u62c9\u66fc\u5149\u8c31\u3002(b) \u4e0d\u540c\u6c89\u79ef\u6761\u4ef6\u548c\u57fa\u5e95\u4e0bSb\u819c\u7684XRD \u03b8-2\u03b8\u884d\u5c04\u56fe\u3002\uff08c\uff09\u00a0Sb (0112) -MoS2<\/sub>\u63a5\u89e6\u7684\u6a2a\u622a\u9762HAADF-STEM\u56fe\u50cf\u3002\uff08d\uff09 \u653e\u5927c\u7ea2\u8272\u6846\u4e2d\u7684\u539f\u5b50\u5206\u8fa8\u7387\u56fe\u50cf\u3002\uff08e\uff09 \u6c89\u79ef\u5728MoS2<\/sub>\u548cSiO2<\/sub>\u886c\u5e95\u4e0aSb\u8584\u819c\u7684\u5149\u5b66\u663e\u5fae\u955c\u56fe\u50cf\u3002<\/p>\n \u00a0 \u56fe3 Sb (0112)-MoS<\/b><\/strong>2<\/b><\/sub><\/strong>\u63a5\u89e6\u7535\u963b<\/b><\/strong>\u7684\u7535\u5b66\u6027\u80fd\u548c\u7a33\u5b9a\u6027\u3002<\/b><\/strong>\u00a9<\/b><\/strong>\u00a02023 Springer Nature Limited<\/b><\/strong><\/p>\n (a) Lc<\/sub>\u8303\u56f4\u4e3a0.1 \u03bcm ~ 1.5 \u03bcm, Vds = 0.1 V\u7684\u5178\u578bTLM\u7ed3\u6784\u7684\u4f20\u8f93\u66f2\u7ebf\u3002(b) \u91c7\u7528TLM\u6cd5\u4ecea\u4e2d\u5668\u4ef6\u4e2d\u63d0\u53d6\u7684Rc<\/sub>\u3002(c) Rc<\/sub>(\u7ea2\u8272\u65b9\u5757)\u548c\u56fa\u6709\u8fc1\u79fb\u7387(\u9ed1\u8272\u83f1\u5f62)\u4e0e\u6e29\u5ea6\u7684\u5173\u7cfb\u3002(d – f) Sb(0112)\u548cSb(0001)\u89e6\u70b9\u7684Rc <\/sub>(d)\u3001LT <\/sub>(e)\u548c\u03bcint<\/sub>\u00a0(f)\u5206\u5e03\u3002<\/p>\n \u00a0 \u56fe4 \u00a0\u77ed\u901a\u9053MoS<\/b><\/strong>2<\/b><\/sub><\/strong>\u00a0FETS\u6027\u80fd\u53ca\u57fa\u51c6\u3002<\/b><\/strong>\u00a9<\/b><\/strong>\u00a02023 Springer Nature Limited<\/b><\/strong><\/p>\n (a) \u573a\u6548\u5e94\u6676\u4f53\u7ba1\u7ed3\u6784\u7684\u5361\u901a\u63d2\u56fe\u3002(b) \u5178\u578b\u7684Lc<\/sub>\u00a0= 20 nm MoS2<\/sub>\u573a\u6548\u5e94\u6676\u4f53\u7ba1\u5728Vds<\/sub>\u00a0= 100 mV(\u7eff\u7ebf)\u3001550 mV(\u84dd\u7ebf)\u548c1 V(\u7ea2\u7ebf)\u4e0b\u7684\u4f20\u8f93\u7279\u6027\u3002(c) b\u4e2d\u540c\u4e00\u8bbe\u5907\u7684\u8f93\u51fa\u7279\u6027\u3002(d) \u00a0Rc<\/sub>\u4e0en2D<\/sub>\u7684\u5173\u7cfb\u3002\uff08e\uff09\u4e0d\u540c\u6587\u732e\u4e2dLc<\/sub>\u4e0eIon<\/sub>\u7684\u5173\u7cfb\u3002\uff08f\uff09\u4e0d\u540cFETs\u7684Lg<\/sub>\u4e0e\u5ef6\u65f6\u65f6\u95f4\u7684\u5173\u7cfb\u3002<\/p>\n \u00a0 \u56fe5 Sb (0112)-MoS<\/b><\/strong>2<\/b><\/sub><\/strong>\u00a0<\/b><\/strong>FETS<\/b><\/strong>s\u7684<\/b><\/strong>\u8c03\u63a7\u6027<\/b><\/strong>\u3002<\/b><\/strong>\u00a9<\/b><\/strong>\u00a02023 Springer Nature Limited<\/b><\/strong><\/p>\n \uff08a\uff09\u4e0a\u56fe:\u5236\u5907\u5728HfO2<\/sub>\/Si\u886c\u5e95\u4e0a\u7684TLM\u9635\u5217\u7684\u5149\u5b66\u663e\u5fae\u955c\u56fe\u50cf\u3002\u4e0b\u56fe:TLM\u7ed3\u6784\u7684\u653e\u5927\u56fe\u3002\uff08b \u2013 h\uff09\u901a\u9053\u957f\u5ea6\u5206\u522b\u4e3a0.1 \u03bcm (b)\u30010.2 \u03bcm (c)\u30010.4 \u03bcm (d)\u30010.6 \u03bcm (e)\u30010.8 \u03bcm (f)\u30011.0 \u03bcm (g)\u548c1.5 \u03bcm (h)\u7684MoS2<\/sub>\u00a0FETs\u5728Vds <\/sub>= 1 V\u4e0b\u7684\u4f20\u8f93\u7279\u6027\u3002\uff08i\uff09\u5bf9\u5173\u952e\u8bbe\u5907\u6307\u6807\u8fdb\u884c\u9ad8\u65af\u62df\u5408\u7684\u7bb1\u7ebf\u56fe\u3002<\/p>\n \u00a0<\/b><\/strong><\/p>\n \u4e94\u3001\u6210\u679c\u542f\u793a<\/b><\/strong><\/p>\n \u7814\u7a76\u514b\u670d\u4e86MoS2<\/sub>\u4e0e\u534a\u91d1\u5c5eSb(0112)\u4e4b\u95f4\u56fa\u6709\u7684vdW\u95f4\u9699\uff0c\u5b9e\u73b0\u4e86MoS2<\/sub>\u4e0eSb(0112)\u4e4b\u95f4\u63a5\u8fd1\u91cf\u5b50\u6781\u9650\u7684\u7535\u963b\u63a5\u89e6\u3002Rc\u5c0f\u4e8e\u5171\u4ef7\u952e\u7ed3\u5408\u7684M-S\u89e6\u70b9\uff0c\u4f4e\u81f342 \u5fae\u6b27\uff0c\u8d85\u8d8a\u4e86\u4ee5\u5316\u5b66\u952e\u7ed3\u5408\u7684\u7845\u57fa\u6676\u4f53\u7ba1\u63a5\u89e6\u7535\u963b\uff0c\u5e76\u63a5\u8fd1\u7406\u8bba\u91cf\u5b50\u6781\u9650\u3002\u5728\u76f4\u6d41(\u8109\u51b2)\u6d4b\u91cf\u4e0b\uff0c\u77ed\u901a\u9053MoS2<\/sub>\u00a0FETs\u53ef\u63d0\u4f9b1.23 mA \u03bcm\u2212<\/sup>1<\/sup>\u00a0(1.54 mA \u03bcm\u2212<\/sup>1<\/sup>)\u7684\u5f00\u7535\u6d41\uff0c\u5f00\u5173\u6bd4\u8d85\u8fc7108<\/sup>\uff0c\u56fa\u6709\u5ef6\u8fdf\u4e3a74 fs\u3002\u8fd9\u4e9b\u6027\u80fd\u4f18\u4e8eSi CMOS\u6280\u672f\uff0c\u6ee1\u8db3\u4e86\u6700\u65b0\u7684\u56fd\u9645\u5668\u4ef6\u4e0e\u7cfb\u7edf\u8def\u7ebf\u56fe\u7684\u76ee\u6807\u3002\u9664\u4e86n\u578bMoS2<\/sub>\u5916\uff0c\u7814\u7a76\u8fd8\u62d3\u5c55\u4e86\u53cc\u6781\u6027\u4e8c\u7852\u5316\u94a8(WSe2<\/sub>)\u5668\u4ef6\u7684\u4f4eRc\uff0c\u8fd9\u8bf4\u660eSb(0112)\u63a5\u89e6\u6709\u671b\u6210\u4e3a\u8d85\u8d8a\u7845\u7684\u8fc7\u6e21\u91d1\u5c5e\u4e8c\u786b\u5c5e\u5316\u7269\u7535\u5b50\u4ea7\u54c1\u7684\u6838\u5fc3\u6280\u672f\u3002<\/p>\n \u539f\u6587\u8be6\u60c5<\/strong>\uff1ahttps:\/\/www.nature.com\/articles\/s41586-022-05431-4<\/p>\n \u672c\u6587\u7531\u5f20\u7199\u7199\u4f9b\u7a3f\u3002<\/p>\n \u00a0<\/b><\/strong><\/p>\n <\/p>\n <\/p>\n","protected":false},"excerpt":{"rendered":" \u5bfc\u8bfb 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