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Wu<\/strong>\u62a5\u544a\u4e86\u4e00\u79cd\u5177\u6709\u5bbd\u89c6\u573a\uff08FoV\uff0c70\u00b0\u00d770\u00b0\uff09\u3001\u7cbe\u7ec6\u5bfb\u5740\u5206\u8fa8\u7387\uff080.6\u00b0\u00d70.6\u00b0\uff09\u3001\u7a84\u5149\u675f\u53d1\u6563\u89d2\uff080.050\u00b0\u00d70.049\u00b0\uff09\u4ee5\u53ca\u5177\u6709\u4e9aMHz\u64cd\u4f5c\u901f\u5ea6<\/span><\/strong>\u7684\u968f\u673a\u8bbf\u95ee\u6ce2\u675f\u5bfb\u5740\u768416384\u50cf\u7d20\u6fc0\u5149\u96f7\u8fbe\u3002\u8be5\u7814\u7a76\u5c06\u5149\u6805\u5929\u7ebf\u7684128\u00d7128\u5143\u4ef6\u7126\u5e73\u9762\u5f00\u5173\u9635\u5217(FPSA)\u548c\u5fae\u673a\u7535\u7cfb\u7edf(MEMS)\u9a71\u52a8\u7684\u5149\u5f00\u5173\u5355\u7247\u96c6\u6210\u572810\u00d711 mm2<\/sup>\u7845\u5149\u5b50\u82af\u7247\u4e0a\uff0c\u5176\u4e2d128\u00d796\u5b50\u9635\u5217\u91c7\u7528\u5f15\u7ebf\u952e\u5408\u3002\u901a\u8fc7\u5355\u57fa\u5730\u914d\u7f6e\u7684\u8c03\u9891\u8fde\u7eed\u6ce2(FMCW)\u6d4b\u8ddd\u5b9e\u73b0\u4e86\u8ddd\u79bb\u5206\u8fa8\u7387\u4e3a1.7 cm\u76843D\u6210\u50cf\u3002FPSA\u53ef\u4ee5\u5728\u4e92\u8865\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53(CMOS)\u4ee3\u5de5\u5382\u5927\u89c4\u6a21\u751f\u4ea7\uff0c\u8fd9\u5c06\u4f7f\u5f973D\u4f20\u611f\u5668\u53ef\u5e7f\u6cdb\u5e94\u7528\u4e8e\u81ea\u52a8\u9a7e\u9a76\u6c7d\u8f66\u3001\u65e0\u4eba\u673a\u3001\u673a\u5668\u4eba\u548c\u667a\u80fd\u624b\u673a\u7b49\u9886\u57df\u3002\u8be5\u8bba\u6587\u4ee5\u9898\u4e3a\u201cA large-scale microelectromechanical-systems-based silicon photonics LiDAR<\/strong>\u201d \u53d1\u8868\u5728\u56fd\u9645\u9876\u7ea7\u671f\u520aNature<\/em><\/strong>\u4e0a\uff0c\u52a0\u5dde\u5927\u5b66\u7684\u5f20\u6653\u58f0\u548cKyungmok Kwon\u4e3a\u8be5\u6587\u7ae0\u7684\u5171\u540c\u4e00\u4f5c\u3002<\/p>\n \u4e09\u3001\u3010\u6838\u5fc3\u521b\u65b0\u70b9\u3011<\/strong><\/p>\n \u221a \u65b0\u65b9\u6cd5<\/strong>\uff1a\u5fae\u673a\u7535\u9a71\u52a8\u7684\u7845\u5149\u5b50\u5f00\u5173\u52a9\u529b\u5355\u82af\u7247\u7126\u5e73\u9762\u5f00\u5173\u9635\u5217\u5927\u89c4\u6a21\u96c6\u6210<\/span><\/strong>\uff1b<\/p>\n \u221a\u65b0\u6027\u80fd<\/strong>\uff1a\u5bbd<\/strong><\/span>\u89c6\u573a\uff08FoV\uff0c70\u00b0\u00d770\u00b0\uff09\u3001\u7cbe\u7ec6<\/span><\/strong>\u5bfb\u5740\u5206\u8fa8\u7387\uff080.6\u00b0\u00d70.6\u00b0\uff09\u3001\u7a84<\/span><\/strong>\u5149\u675f\u53d1\u6563\u89d2\uff080.050\u00b0\u00d70.049\u00b0\uff0916384\u50cf\u7d20<\/span><\/strong>\u6fc0\u5149\u96f7\u8fbe\uff0c3D\u6210\u50cf\u8ddd\u79bb\u5206\u8fa8\u73871.7 cm<\/span><\/strong>\u3002<\/p>\n \u56fe\u4e00\u00a0<\/strong>FPSA\u7ed3\u6784\u548c\u5de5\u4f5c\u539f\u7406 \u00a9 2022 Springer Nature<\/span><\/p>\n a\uff0c\u4e8c\u7ef4 FPSA\u900f\u89c6\u56fe\u793a\u610f\u56fe\u3002b\uff0c\u4e00\u7ef4FPSA\u5149\u675f\u626b\u63cf\u4eea\u539f\u7406\u56fe\u3002c\uff0c\u8bbe\u8ba1\u76842D 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\uff08a\uff09\u6295\u5f71\u5728\u7eb8\u5c4f\u5e55\u4e0a\u7684\u6ce2\u675f\u63a7\u5236\u56fe\u6848\u3002\uff08b\uff09\u626b\u63cf\u7684”Cal”\u56fe\u6807\u3002\uff08c\uff09\u5085\u91cc\u53f6\u900f\u955c\u7126\u5e73\u9762\u4e0a\u6355\u83b7\u7684\u653e\u5927\u5149\u675f\u63a7\u5236\u6a21\u5f0f\u3002\uff08d\uff09\u5728\u8ddd\u79bbFPSA\u5149\u675f\u626b\u63cf\u4eea0.71 m\u5904\u6d4b\u91cf\u7684\u5149\u675f\u8f6e\u5ed3\u3002\uff08e-f\uff09FPSA \u884c\u9009\u62e9\u5f00\u5173\u548c\u5217\u9009\u62e9\u5f00\u5173\u7684\u54cd\u5e94\u65f6\u95f4\u3002<\/p>\n \u56fe \u56db <\/strong>3D\u6210\u50cf\u7ed3\u679c \u00a0\u00a9 2022 Springer Natur<\/span><\/p>\n \uff08a\uff09 FMCW\u6fc0\u5149\u96f7\u8fbe\u4e0eFPSA\u5149\u675f\u626b\u63cf\u4eea\u793a\u610f\u56fe\u3002\uff08b\uff09\u76ee\u6807\u57280.84\u00a0m\u5904\u5177\u6709\u4ee3\u8868\u6027\u7684FMCW\u6fc0\u5149\u96f7\u8fbe\u5149\u8c31\u3002\uff08c-d\uff09\u4e09\u4e2a\u5b57\u6bcd\u7ec4\u6210\u7684\u76ee\u6807\u5728\u5927\u7ea60.8 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70\u00b0\u7684\u968f\u673a\u6ce2\u675f\u5bfc\u5411\uff0c\u4e24\u4e2a\u65b9\u5411\u7684\u5bfb\u5740\u5206\u8fa8\u7387\u4e3a0.6\u00b0\uff0c\u5149\u675f\u53d1\u6563\u5ea6\u4e3a0.05\u00b0\uff0c\u5de5\u4f5c\u901f\u5ea6\u4f4e\u4e8emhz\u3002\u6b64\u5916\uff0c\u8fd8\u5c55\u793a\u4e86\u5177\u67091.7 cm\u8303\u56f4\u5206\u8fa8\u7387\u76843D\u6210\u50cf\u3002\u901a\u8fc7\u4f18\u5316\u5149\u5b66\u8bbe\u8ba1\u548c\u5236\u9020\u5de5\u827a\uff0c\u53ef\u4ee5\u8fdb\u4e00\u6b65\u63d0\u9ad8\u73b0\u6709\u7cfb\u7edf\u7684\u89d2\u5ea6\u5206\u8fa8\u7387\u3002\u9664\u4e863D\u4f20\u611f\u5e94\u7528\uff0cFPSA\u8fd8\u53ef\u4ee5\u5e94\u7528\u4e8e\u81ea\u7531\u7a7a\u95f4\u5149\u901a\u4fe1\u548c\u6355\u83b7\u79bb\u5b50\u91cf\u5b50\u8ba1\u7b97\u7b49\u9700\u8981\u5149\u675f\u63a7\u5236\u7684\u9886\u57df\u3002<\/p>\n \u3010\u6587\u732e\u94fe\u63a5\u3011<\/strong><\/p>\n A large-scale microelectromechanical-systems-based silicon photonics LiDAR,Nature<\/em>, 2022, 603: 253-258.<\/p>\n 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