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\u4e00\u3001\u3010\u5bfc\u8bfb\u3011<\/b><\/strong><\/p>\n \u00a0 \u00a0 \u00a0 \u00a0 \u00a0\u4f17\u6240\u5468\u77e5\uff0c\u8d85\u5927\u89c4\u6a21\u6676\u4f53\u7ba1\u5728\u4e0b\u4e00\u4ee3\u7535\u5b50\u8bbe\u5907\u7684\u5f00\u53d1\u4e2d\u5177\u6709\u4e3e\u8db3\u8f7b\u91cd\u7684\u5730\u4f4d\u3002\u81ea\u4ece\u7b2c\u4e00\u5757\u96c6\u6210\u7535\u8def\u5efa\u6210\u4ee5\u6765\uff0c\u5f53\u7845\uff08Si\uff09\u6676\u4f53\u7ba1\u7684\u6805\u6781\u957f\u5ea6\u7f29\u5c0f\u52305 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dec-1<\/sup><\/strong><\/span>\u3002\u540c\u65f6\uff0c\u57fa\u4e8eSentaurus\u8ba1\u7b97\u673a\u8f85\u52a9\u8bbe\u8ba1\u6280\u672f\uff08TCAD\uff09\u6a21\u62df\u7ed3\u679c\u8868\u660e\uff0c\u77f3\u58a8\u70ef\u7684\u4e8c\u7ef4\u5e73\u9762\u7279\u6027\u63d0\u4f9b\u4e86\u6805\u6781\u63a7\u5236\u7684\u80fd\u529b\uff0cMoS2<\/sub>\u4fa7\u58c1\u6709\u6548\u6c9f\u9053\u957f\u5ea6\u5728\u5f00\u542f\u72b6\u6001\u4e0b\u63a5\u8fd10.34 nm\uff0c\u5728\u5173\u95ed\u72b6\u6001\u4e0b\u63a5\u8fd14.54 nm<\/strong><\/span>\u3002\u8fd9\u9879\u5de5\u4f5c\u4fc3\u8fdb\u4e86\u4e00\u79cd\u5c06\u6805\u6781\u957f\u5ea6\u7f29\u5c0f\u52301 nm\u4ee5\u4e0b\u7684\u6676\u5706\u7ea7\u751f\u4ea7\u65b9\u6cd5\u7684\u53d1\u5c55\u3002\u66f4\u91cd\u8981\u7684\u662f\uff0c\u5b83\u63d0\u4f9b\u4e86\u5bf9\u6700\u7ec8\u7f29\u653e\u6469\u5c14\u5b9a\u5f8b\u7684\u6df1\u523b\u89c1\u89e3\u3002\u7814\u7a76\u8868\u660e\uff0c\u5b83\u53ef\u4ee5\u88ab\u89c6\u4e3a\u8fc4\u4eca\u4e3a\u6b62\u6700\u5c0f\u7684\u6805\u6781\u957f\u5ea6\u6676\u4f53\u7ba1<\/strong>\u3002<\/span><\/p>\n \u00a0 \u00a0 \u00a0 \u00a0\u76f8\u5173\u7814\u7a76\u6210\u679c\u4ee5\u201cVertical MoS<\/i><\/em><\/strong>2<\/i><\/sub><\/em><\/strong>\u00a0transistors with sub-1-nm gate lengths<\/i><\/em><\/strong>\u201d\u4e3a\u9898\u53d1\u8868\u5728Nature<\/i><\/em><\/strong>\u4e0a\u3002 \u4e09\u3001\u3010\u6838\u5fc3\u521b\u65b0\u70b9\u3011<\/b><\/strong><\/p>\n \u221a\u5206\u522b\u4f7f\u7528MoS2<\/sub>\u548c\u77f3\u58a8\u70ef\u7684\u8fb9\u7f18\u5206\u522b\u5145\u5f53\u6c9f\u9053\u548c\u6805\u6781\uff0c\u5b9e\u73b0\u4e86\u6805\u6781\u957f\u5ea6\u4e3a0.34 nm\u7684\u4fa7\u58c1\u6676\u4f53\u7ba1<\/strong><\/span>\uff0c\u8fd9\u4e5f\u662f\u8fc4\u4eca\u4e3a\u6b62\u6700\u5c0f\u7684\u6805\u6781\u957f\u5ea6\u6676\u4f53\u7ba1<\/strong><\/span>\uff1b<\/p>\n \u221a0.34 nm\u6805\u6781\u957f\u5ea6\u7684\u4fa7\u58c1\u6676\u4f53\u7ba1\u663e\u793a\u51fa\u826f\u597d\u7684\u5f00\u5173\u7279\u6027\uff0c\u5f00\/\u5173\u6bd4\u9ad8\u8fbe1.02\u00d7105<\/sup><\/span><\/strong>\u548c\u4e9a\u9608\u503c\u6446\u5e45\u503c\u4f4e\u81f3117 mV dec-1<\/sup><\/span><\/strong>\u3002<\/p>\n \u56db\u3001\u3010\u6570\u636e\u6982\u89c8\u3011<\/b><\/strong><\/p>\n \u56fe<\/b><\/strong>\u4e00<\/b><\/strong>\u30010.34 nm\u6805\u6781\u957f\u5ea6<\/b><\/strong>\u7684<\/b><\/strong>\u4fa7\u58c1\u6676\u4f53\u7ba1\u4e0e\u5176\u4ed6\u5178\u578b\u7ed3\u6784\u6676\u4f53\u7ba1\u7684\u6bd4\u8f83 \u00a9 2022 Springer Nature<\/span><\/b><\/strong> \u56fe<\/b><\/strong>\u4e8c\u3001<\/b><\/strong>0.34 nm\u6805\u6781\u957f\u5ea6\u7684\u4fa7\u58c1\u5355\u5c42MoS<\/b><\/strong>2<\/b><\/sub><\/strong>\u6676\u4f53\u7ba1\u7ed3\u6784\u548c\u8868\u5f81\u00a0\u00a9 2022 Springer Nature<\/span><\/b><\/strong> \u56fe<\/b><\/strong>\u4e09<\/b><\/strong>\u30010.34nm\u6805\u6781\u957f<\/b><\/strong>\u5ea6\u7684<\/b><\/strong>\u4fa7\u58c1\u6676\u4f53\u7ba1\u7684<\/b><\/strong>\u6027\u80fd\u6d4b\u8bd5\u00a0\u00a9 2022 Springer Nature<\/span><\/b><\/strong> \u56fe<\/b><\/strong>\u56db<\/b><\/strong>\u3001TCAD\u4eff\u771f\u7ed3\u679c\u00a0\u00a9 2022 Springer Nature<\/span><\/b><\/strong> \u00a0 \u00a0 \u00a0 \u00a0 \u00a0\u7efc\u4e0a\u6240\u8ff0\uff0c\u4e8c\u7ef4\u6750\u6599\u4e3a\u5c06\u7535\u5b50\u8bbe\u5907\u7f29\u5c0f\u5230\u539f\u5b50\u6c34\u5e73\u63d0\u4f9b\u4e86\u5b9d\u8d35\u7684\u673a\u4f1a\u3002TMDCs\u5bf9\u77ed\u6c9f\u9053\u6548\u5e94(short channel effects , SCEs)<\/span><\/strong>\u8868\u73b0\u51fa\u826f\u597d\u7684\u62b5\u6297\u529b\uff0c\u77f3\u58a8\u70ef\u5177\u6709\u9ad8\u5bfc\u7535\u6027\u548c\u8d85\u8584\u539a\u5ea6\u3002MoS2<\/sub>\u548c\u77f3\u58a8\u70ef\u7684\u8fb9\u7f18\u5206\u522b\u5145\u5f53\u6c9f\u9053\u548c\u6805\u6781\uff0c\u4ece\u800c\u5b9e\u73b0\u4e86\u6805\u6781\u957f\u5ea6\u4e3a0.34 nm\u7684\u4fa7\u58c1\u6676\u4f53\u7ba1\u7684\u5236\u9020<\/span><\/strong>\u3002\u4fa7\u58c1\u7ed3\u6784\u6709\u6548\u5229\u7528\u4e86\u77f3\u58a8\u70ef\u7684\u5929\u7136\u8d85\u8584\u539a\u5ea6\uff0c\u5b9e\u73b0\u4e86\u6676\u5706\u7ea7\u751f\u4ea7\u3002\u5176\u4e2d\uff0c\u7f29\u5c0f\u7684\u7b49\u6548\u6c27\u5316\u5c42\u539a\u5ea6\u3001\u7f29\u77ed\u7684\u6c9f\u9053\u957f\u5ea6\u3001\u63d0\u9ad8MoS2<\/sub>\u8584\u819c\u8d28\u91cf\u548c\u5f00\u53d1\u4e0eMoS2<\/sub>\u7684\u7406\u60f3\u63a5\u89e6\u5bf9\u8fdb\u4e00\u6b65\u63d0\u9ad8\u6027\u80fd\u81f3\u5173\u91cd\u8981\u3002\u5c3d\u7ba1\u5982\u6b64\uff0c\u8fd9\u9879\u5de5\u4f5c\u5bf9\u6676\u4f53\u7ba1\u7f29\u653e\u81f3\u5176\u7269\u7406\u6781\u9650\u63d0\u4f9b\u4e86\u65b0\u7684\u89c1\u89e3\uff0c\u5e76\u63ed\u793a\u4e86\u7a81\u7834\u6469\u5c14\u5b9a\u5f8b\uff0c\u5b9e\u73b01 nm\u4ee5\u4e0b\u6676\u4f53\u7ba1\u7684\u5de8\u5927\u6f5c\u529b\u3002<\/p>\n<\/b><\/p>\n
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