{"id":227068,"date":"2021-09-10T06:30:01","date_gmt":"2021-09-09T22:30:01","guid":{"rendered":"\/\/m.iemloyee.com\/?p=227068"},"modified":"2021-09-09T21:52:27","modified_gmt":"2021-09-09T13:52:27","slug":"%ef%bc%88%e5%b7%b2%e6%a0%a1%e7%a8%bf%e4%bb%b6%ef%bc%89%e5%8d%97%e5%a4%a7%e4%b8%9c%e5%a4%a7-nature-nanotechnology%ef%bc%9a%e6%99%b6%e5%9c%86%e7%ba%a7mos2%e5%8d%8a%e5%af%bc%e4%bd%93%e5%8d%95","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=227068","title":{"rendered":"\u5357\u5927&\u4e1c\u5927 Nature Nanotechnology\uff1a\u6676\u5706\u7ea7MoS2\u534a\u5bfc\u4f53\u5355\u6676"},"content":{"rendered":"
\u3010\u80cc\u666f\u4ecb\u7ecd\u3011<\/strong><\/p>\n \u4e8c\u7ef4\uff082D\uff09\u534a\u5bfc\u4f53\uff0c\u7279\u522b\u662f\u8fc7\u6e21\u91d1\u5c5e\u4e8c\u5364\u5316\u7269\uff08TMDCs\uff09\uff0c\u5728\u5c06\u6469\u5c14\u5b9a\u5f8b\u6269\u5c55\u5230\u7845\uff08Si\uff09\u4e4b\u5916\u7684\u9886\u57df\u800c\u53d7\u5230\u4e86\u6781\u5927\u7684\u5173\u6ce8\u3002\u84dd\u5b9d\u77f3\uff08\u6676\u72b6\u03b1-Al2<\/sub>O3<\/sub>\uff09\u5728III-V\u534a\u5bfc\u4f53\u5de5\u4e1a\u4e2d\u88ab\u5e7f\u6cdb\u7528\u4f5c\u5916\u5ef6\u57fa\u5e95\uff0c\u5176\u6709\u4e00\u4e2a\u516d\u8fb9\u5f62\u6676\u683c\uff0c\u5e73\u9762\u5185a=b=4.76 \u00c5\uff0c\u5e73\u9762\u5916c=12.996 \u00c5\uff0c\u7531\u516d\u5c42\u4ea4\u66ff\u7684Al-O-Al\u539f\u5b50\u7ec4\u6210\u3002\u5b9e\u9645\u4e0a\uff0cC\u9762\uff080001\uff09\u84dd\u5b9d\u77f3\u6676\u7247\u662f\u4ece\u52a0\u5de5\u5e73\u9762\u548c\u6676\u4f53\u5b66\u5e73\u9762\u4e4b\u95f4\u5177\u6709\u9519\u5207\u89d2\uff08\u03b1\uff09\u7684\u94f8\u952d\u4e0a\u5207\u5272\u800c\u6210\uff0c\u8be5\u89d2\u5ea6\u53ef\u7528\u4e24\u4e2a\u5782\u76f4\u5206\u91cf\u03b1M<\/sub>\u548c\u03b1A<\/sub>\u8868\u793a\uff0c\u800c\u03b1M<\/sub>\u548c\u03b1A<\/sub>\u5206\u522b\u8868\u793a\uff080001\uff09\u5e73\u9762\u548c\u57fa\u5e95\u8868\u9762\u4e4b\u95f4\u6cbfM\u8f74\uff08<101\u00af0>\uff09\u548cA\u8f74\uff08<112\u00af0>\uff09\u7684\u89d2\u5ea6\u3002\u7136\u800c\uff0c\u5916\u5ef6\u5173\u7cfb\u8868\u660e\u84dd\u5b9d\u77f3\u7684<112\u00af0>\u53d6\u5411\u5782\u76f4\u4e8e\u4e09\u89d2\u5f62TMDCs\u7574\u7684\u952f\u9f7f\uff08ZZ\uff09\u8fb9\u7f18\uff0c\u4f7f\u7684\u4e24\u4e2a\u53cd\u5e73\u884c\u7574\u76f8\u7b49\uff0c\u5e76\u963b\u6b62\u5355\u6676\u751f\u957f\u3002\u6b64\u5916\uff0c\u5728\u53ef\u6269\u5c55\u4e14\u4e0e\u5de5\u4e1a\u517c\u5bb9\u7684\u57fa\u5e95\u4e0a\u751f\u957f\u6676\u5706\u7ea7TMDCs\u5355\u6676\u5c1a\u672a\u5f97\u5230\u5f88\u597d\u7684\u8bc1\u660e\u3002 \u8fd1\u65e5\uff0c\u5357\u4eac\u5927\u5b66\u738b\u6b23\u7136\u6559\u6388\u548c\u4e1c\u5357\u5927\u5b66\u738b\u91d1\u5170\u6559\u6388\uff08\u5171\u540c\u901a\u8baf\u4f5c\u8005\uff09\u7b49\u4eba<\/strong>\u62a5\u9053\u4e86\u5728C\u9762\u84dd\u5b9d\u77f3\u4e0a\u7684\u5916\u5ef6\u751f\u957f\u5236\u5907\u4e862\u82f1\u5bf8\uff08~50 mm\uff09\u7684\u5355\u5c42\u4e8c\u786b\u5316\u94bc\uff08MoS2<\/sub>\uff09\u534a\u5bfc\u4f53\u5355\u6676\u3002\u4f5c\u8005\u8bbe\u8ba1\u4e86\u671d\u5411\u84dd\u5b9d\u77f3A\u8f74\uff08C\/A\uff09\u7684\u9519\u5207\u53d6\u5411\uff0c\u5176\u4e2dA\u8f74\u5782\u76f4\u4e8e\u6807\u51c6\u57fa\u677f\u3002\u5c3d\u7ba1\u9519\u5207\u53d6\u5411\u7684\u53d8\u5316\u4e0d\u4f1a\u5f71\u54cd\u5916\u5ef6\u5173\u7cfb\uff0c\u4f46\u662f\u7531\u6b64\u4ea7\u751f\u7684\u9636\u68af\u8fb9\u7f18\u6253\u7834\u4e86\u53cd\u5e73\u884cMoS2<\/sub>\u7574\u7684\u6210\u6838\u80fd\u7b80\u5e76\u6027\uff0c\u5e76\u5bfc\u81f4\u8d85\u8fc799%\u7684\u5355\u5411\u6392\u5217\uff0c\u4ece\u800c\u89e3\u51b3\u4e86\u5e02\u573a\u4e0aC\u9762\u84dd\u5b9d\u77f3\u57fa\u5e95\u5916\u5ef6\u751f\u957fTMDCs\u5355\u6676\u5b58\u5728\u7684\u95ee\u9898\u3002\u901a\u8fc7\u663e\u5fae\u955c\u3001\u5149\u8c31\u548c\u7535\u5b66\u6d4b\u91cf\u5747\u8868\u660e\uff0c\u6240\u5236\u5907\u7684MoS2<\/sub>\u5355\u6676\u5177\u6709\u6781\u4f73\u7684\u6676\u5706\u7ea7\u5747\u5300\u6027\u3002\u4f5c\u8005\u8fdb\u4e00\u6b65\u5236\u9020\u4e86\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff08FETs\uff09\uff0c\u5e76\u83b7\u5f97\u4e86102.6 cm2<\/sup> V-1<\/sup> s-1<\/sup>\u7684\u8fc1\u79fb\u7387\u548c450 \u03bcA \u03bcm-1<\/sup>\u7684\u9971\u548c\u7535\u6d41\uff0c\u662f\u76ee\u524d\u5355\u5c42MoS2<\/sub>\u4e2d\u7684\u6700\u9ad8\u503c<\/strong>\u3002\u901a\u8fc7\u5bf9160\u4e2a\u5398\u7c73\u7ea7FETs\u7684\u7edf\u8ba1\u5206\u6790\u8868\u660e\uff0c\u5668\u4ef6\u6210\u54c1\u7387>94%\u3001\u8fc1\u79fb\u7387\u53d8\u5316\u4e3a15%\uff0c\u7531\u6b64\u8fdb\u4e00\u6b65\u8bc1\u660e\u4e86C\/A\u84dd\u5b9d\u77f3\u4e0a\u7684\u5355\u6676MoSe2<\/sub>\u3002\u8be5\u7814\u7a76\u4e2d\u7684\u65b9\u6cd5\u63d0\u4f9b\u4e86\u4e00\u79cd\u901a\u7528\u4e14\u53ef\u6269\u5c55\u7684\u9014\u5f84\u6765\u751f\u4ea7\u9762\u5411\u672a\u6765\u7535\u5b50\u4ea7\u54c1\u7684TMDCs\u5355\u6676\u3002\u7814\u7a76\u6210\u679c\u4ee5\u9898\u4e3a\u201cEpitaxial growth of wafer-scale molybdenum disulfide semiconductor single crystals on sapphire\u201d<\/strong>\u53d1\u5e03\u5728\u56fd\u9645\u8457\u540d\u671f\u520aNature Nanotechnology<\/strong>\u4e0a\u3002<\/p>\n \u3010\u56fe\u6587\u89e3\u8bfb\u3011<\/strong><\/p>\n \u56fe\u4e00\u3001\u84dd\u5b9d\u77f3\uff080001\uff09\u57fa\u5e95\u4e0e\u5916\u5ef6\u751f\u957f\u7684\u5173\u7cfb<\/strong> \uff08b, e\uff09\u9000\u706b\u7684C\/M\uff08\u03b1M<\/sub>=0.25\u00b0\uff09\u548cC\/A\uff08\u03b1A<\/sub>=0.26\u00b0\uff09\u84dd\u5b9d\u77f3\u57fa\u5e95\u7684AFM\u632f\u5e45\u56fe\u50cf\uff1b<\/p>\n \uff08c, f\uff09\u5206\u522b\u4e0e\uff08b\uff09\u548c\uff08e\uff09\u4e2d\u76f8\u540c\u57fa\u5e95\u7684XRD\u6447\u6446\u66f2\u7ebf\uff1b<\/p>\n \uff08g\uff09MoS2<\/sub>\u5728\u84dd\u5b9d\u77f3\uff080001\uff09\u57fa\u5e95\u4e0a\u7684\u5916\u5ef6\u751f\u957f\u5173\u7cfb\uff1b<\/p>\n \uff08h-i\uff09\u6cbfAl2<\/sub>O3<\/sub><101\u00af0>\u548c<112\u00af0>\u65b9\u5411\u751f\u957f\u7684MoS2<\/sub>\/Al2<\/sub>O3<\/sub>\u754c\u9762\u7684\u6a2a\u622a\u9762HAADF-STEM\u56fe\u50cf\uff1b<\/p>\n \uff08j-k\uff09MoS2<\/sub>\/\u84dd\u5b9d\u77f3\u6cbfAl2<\/sub>O3<\/sub><101\u00af0>\u548c<112\u00af0>\u65b9\u5411\u7684RHEED\u56fe\u6848\u3002<\/p>\n \u56fe\u4e8c\u3001C\/A\u84dd\u5b9d\u77f3\uff080001\uff09\u57fa\u5e95\u4e0aMoS2<\/sub>\u7574\u7684\u5355\u5411\u6392\u5217<\/strong> \uff08b\uff09AFM\u632f\u5e45\u56fe\u50cf\u8bf4\u660e\u7574\u8fb9\u7f18\u548c\u8868\u9762\u53f0\u9636\u4e4b\u95f4\u7684\u5173\u7cfb\uff1b<\/p>\n \uff08c\uff09C\/A\uff08\u7ea2\u8272\uff09\u548cC\/M\uff08\u84dd\u8272\uff09\u5e95\u7269\u4e0a\u53cd\u5e73\u884c\u7ed3\u6784\u57df\u7684\u7edf\u8ba1\u5206\u5e03\uff1b<\/p>\n \uff08d\uff09C\/A\u57fa\u5e95\u4e0a\u4e24\u4e2a\u5408\u5e76\u7684MoS2<\/sub>\u7574\u7684\u6781\u5316SHG\u6620\u5c04\uff1b<\/p>\n \uff08e\uff09\uff08d\uff09\u4e2d\u4e24\u4e2a\u57df\u7684\u500d\u9891\u5f3a\u5ea6\u548c\u7406\u8bba\u62df\u5408\u7684\u6781\u5750\u6807\u56fe\uff08\u00b0\uff09\uff1b<\/p>\n \uff08f\uff09\u751f\u957f\u7684MoS2<\/sub>\u7684\u62c9\u66fc\u5149\u8c31\uff1b<\/p>\n \uff08g\uff09\u751f\u957f\u7684MoS2<\/sub>\u7684PL\u5149\u8c31\uff1b<\/p>\n \uff08h\uff09MoS2<\/sub>\u57fa\u9762\u7684\u539f\u5b50\u5206\u8fa8\u7387HAADF-STEM\u56fe\u50cf\uff1b<\/p>\n \uff08i\uff09\u4e24\u4e2a\u5355\u5411\u57df\u4e4b\u95f4\u5408\u5e76\u533a\u57df\u7684HAADF-STEM\u56fe\u50cf\u3002<\/p>\n \u56fe\u4e09\u3001\u5355\u5411\u6210\u6838\u673a\u5236<\/strong> \uff08b\uff09C\/A\u548cC\/M\u57fa\u677f\u4e0a\u6210\u6838\u9636\u6bb5\u7684\u56db\u79cd\u53ef\u80fd\u7684\u8fb9\u7f18\u914d\u7f6e\uff1b<\/p>\n \uff08c\uff09\u8ba1\u7b97\u7684\u56db\u4e2a\u8fb9\u7f18\u914d\u7f6e\u7684\u5f62\u6210\u80fd\u3002<\/p>\n \u56fe\u56db\u3001\u6676\u5706\u7ea7MoS2<\/sub>\u5355\u6676<\/strong> \uff08b\uff09\u5728SiO2<\/sub>\/Si\u57fa\u5e95\u4e0a\u8f6c\u79fb\u76842\u82f1\u5bf8MoS2<\/sub>\u7684\u7167\u7247\uff1b<\/p>\n \uff08c\uff09\u751f\u957f\u7684MoS2<\/sub>\u8584\u819c\u7684AFM\u9ad8\u5ea6\u56fe\u50cf\uff1b<\/p>\n \uff08d\uff09MoS2<\/sub>\u8584\u819c\u57281 cm2\u533a\u57df\u4e0a\u7684LEED\u56fe\u6848\uff0c\u5728190 eV\u4e0b\u62cd\u6444\uff1b<\/p>\n \uff08e-g\uff09\u6cbf2\u82f1\u5bf8MoS2<\/sub>\u5355\u6676\u8584\u819c\u7684\u76f4\u5f84\u8fdb\u884c\u7ebf\u626b\u63cf\u7684PL\u548c\u62c9\u66fc\u5149\u8c31\uff1b<\/p>\n \uff08g-h\uff09\u4e09\u4e2a\u6620\u5c04\u533a\u7684PL\u5cf0\u533a\u57df\u7684\u7edf\u8ba1\u5206\u5e03\u548c\u4e94\u4e2a\u6620\u5c04\u533a\u7684E<\/em>1<\/sup>2g<\/sub>\u548cA<\/em>1g<\/sub>\u4e4b\u95f4\u7684\u62c9\u66fc\u5cf0\u5dee\uff08\u25b3\uff09\u3002<\/p>\n \u56fe\u4e94\u3001\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff08FET\uff09\u6027\u80fd<\/strong> \uff08b\uff09151\u4e2aMoS2<\/sub> FET\u7684\u4f20\u8f93\u7279\u6027\uff0c\u8ddd\u79bb\uff08a\uff09\u4e2d\u6807\u8bb0\u533a\u57df\u7684\u6c9f\u9053\u957f\u5ea6\u4e3a50 \u03bcm\uff1b<\/p>\n \uff08c\uff09\u5728V<\/em>ds<\/sub>=1 V\u548cV<\/em>gs<\/sub>=10 V\uff08gs\uff0c\u6805\u6781\u6e90\u6781\uff09\u5904\u7684\u901a\u6001\u7535\u6d41\u5206\u5e03\uff1b<\/p>\n \uff08d\uff09\u6d41\u52a8\u6027\u548cSS\u7684\u7edf\u8ba1\u5206\u5e03\uff1b<\/p>\n \uff08e\uff09\u5178\u578b\u7684500 nm\u77ed\u6c9f\u9053MoS2<\/sub> FET\u7684\u4f20\u8f93\u7279\u6027\uff08V<\/em>ds<\/sub>=1 V\uff09\uff1b<\/p>\n \uff08f\uff09\uff08e\uff09\u4e2d\u8bbe\u5907\u7684\u8f93\u51fa\u7279\u6027\u3002<\/p>\n \u3010\u5c0f\u7ed3\u3011<\/strong><\/p>\n \u7efc\u4e0a\u6240\u8ff0\uff0c\u4f5c\u8005\u5728C\u9762\u84dd\u5b9d\u77f3\u4e0a\u901a\u8fc7\u5916\u5ef6\u751f\u957f\u5236\u5907\u4e86\u5706\u6676\u7ea7MoS2<\/sub>\u534a\u5bfc\u4f53\u5355\u6676\u3002\u901a\u8fc7\u663e\u5fae\u955c\u3001\u5149\u8c31\u548c\u7535\u5b66\u6d4b\u91cf\u5747\u8868\u660e\uff0c\u6240\u5236\u5907\u7684MoS2<\/sub>\u5355\u6676\u5177\u6709\u6781\u4f73\u7684\u6676\u5706\u7ea7\u5747\u5300\u6027\u3002\u4f5c\u8005\u8fdb\u4e00\u6b65\u5236\u9020\u4e86\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff08FETs\uff09\uff0c\u5e76\u83b7\u5f97\u4e86102.6 cm2<\/sup> V-1<\/sup> s-1<\/sup>\u7684\u8fc1\u79fb\u7387\u548c450 \u03bcA \u03bcm-1<\/sup>\u7684\u9971\u548c\u7535\u6d41\uff0c\u662f\u76ee\u524d\u5355\u5c42MoS2<\/sub>\u4e2d\u7684\u6700\u9ad8\u503c\u3002\u540c\u65f6\uff0c\u901a\u8fc7\u5bf9160\u4e2a\u5398\u7c73\u7ea7FETs\u7684\u7edf\u8ba1\u5206\u6790\u8868\u660e\uff0c\u5668\u4ef6\u6210\u54c1\u7387\u8d85\u8fc794%\u3001\u8fc1\u79fb\u7387\u53d8\u5316\u4e3a15%\u3002\u6b64\u5916\uff0c\u8be5\u65b9\u6cd5\u8fd8\u53ef\u4ee5\u751f\u957fMoSe2<\/sub>\u5355\u6676\uff0c\u8868\u660e\u5176\u53ef\u4ee5\u63a8\u5e7f\u5230\u5176\u5b83\u8bb8\u591a2D\u6750\u6599\u3002\u5bf9\u6bd4\u4f7f\u7528\u516d\u65b9BN\u6216Au\u4f5c\u4e3a\u5916\u5ef6\u57fa\u5e95\u7684\u6f5c\u5728\u7ade\u4e89\u6280\u672f\uff0c\u8be5\u65b9\u6cd5\u4f7f\u7528\u4e86\u5e7f\u6cdb\u5e94\u7528\u7684\u4f4e\u6210\u672cC\u9762\u84dd\u5b9d\u77f3\uff0c\u800c\u8fd9\u79cd\u84dd\u5b9d\u77f3\u53ef\u4ee5\u5f88\u5bb9\u6613\u7684\u6269\u5c55\u52308\u82f1\u5bf8\uff0c\u5e76\u4e14\u4e0e\u5de5\u4e1a\u6280\u672f\u5177\u6709\u826f\u597d\u7684\u517c\u5bb9\u6027\u3002<\/p>\n
\n
\n \u3010\u6210\u679c\u7b80\u4ecb\u3011<\/strong><\/p>\n
\n \uff08a, d\uff09C\/M\u548cC\/A\u84dd\u5b9d\u77f3\uff080001\uff09\u6676\u7247\u4e0a\u7684\u53f0\u9636\u53d6\u5411\u4ee5\u53ca\u76f8\u5e94\u7684\u5916\u5ef6MoS2<\/sub>\u7574\u5bf9\u9f50\uff1b<\/p>\n
\n \uff08a\uff09\u5728C\/A\uff08\u03b1A<\/sub>=0.89\u00b0\uff09\u57fa\u5e95\u4e0a\u751f\u957f\u7684MoS2\u7574\u7684\u5149\u5b66\u663e\u5fae\u955c\u56fe\u50cf\uff1b<\/p>\n
\n \uff08a\uff09\u4e0d\u540cS\u8986\u76d6\u7387\u7684ZZ MoS2<\/sub>\u8fb9\u7f18\uff08ZZ-S\u548cZZ-Mo\uff09\u9644\u7740\u5728\u84dd\u5b9d\u77f3<101\u00af0>\uff09\u53f0\u9636\u4e0a\u7684\u5f62\u6210\u80fd\uff1b<\/p>\n
\n \uff08a\uff09\u5728C\/A\uff08\u03b1A<\/sub>=0.89\u00b0\uff09\u84dd\u5b9d\u77f3\uff080001\uff09\u57fa\u5e95\u4e0a\u76842\u82f1\u5bf8\u5355\u5c42MoS2<\/sub>\u5355\u6676\u7684\u7167\u7247\uff1b<\/p>\n
\n \uff08a\uff09\u5236\u9020\u7684\u8d85\u8fc74 cm2<\/sup>\u7684FET\u9635\u5217\u7684\u7167\u7247\uff1b<\/p>\n