{"id":210496,"date":"2020-10-04T06:30:08","date_gmt":"2020-10-03T22:30:08","guid":{"rendered":"\/\/m.iemloyee.com\/?p=210496"},"modified":"2020-10-03T21:43:20","modified_gmt":"2020-10-03T13:43:20","slug":"%e3%80%90%e6%8a%95%e7%a8%bf%e3%80%91%e5%8d%97%e4%ba%ac%e5%a4%a7%e5%ad%a6%e4%bd%99%e6%9e%97%e8%94%9a%e8%af%be%e9%a2%98%e7%bb%84%e5%ae%9e%e7%8e%b0%e7%aa%81%e7%a0%b4%e5%b9%b3%e9%9d%a2%e5%85%89%e5%88%bb","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=210496","title":{"rendered":"\u5357\u4eac\u5927\u5b66\u4f59\u6797\u851a\u8bfe\u9898\u7ec4\u5b9e\u73b0\u7a81\u7834\u5e73\u9762\u5149\u523b\u9650\u5236\u7684\u8d85\u9ad8\u5bc6\u5ea6\u5747\u5300\u7eb3\u7c73\u7ebf\u5806\u53e0\u751f\u957f\u96c6\u6210\u65b0\u6280\u672f"},"content":{"rendered":"

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\u9488\u5bf9\u6b64\u6280\u672f\u6311\u6218\uff0c\u5357\u4eac\u5927\u5b66\u7535\u5b50\u5b66\u9662\u4f59\u6797\u851a\u6559\u6388\u548c\u738b\u519b\u8f6c\u526f\u6559\u6388\u63d0\u51fa\u5229\u7528\u56e2\u961f\u57fa\u7840\u539f\u521b\u7684\u5e73\u9762IPSLS\u7eb3\u7c73\u7ebf\u751f\u957f\u6a21\u5f0f\uff0c\u5728\u975e\u6676\u6c2e\u5316\u7845\uff08SiN\uff09\/\u6c27\u5316\u7845\uff08SiO\uff09\u53e0\u5c42\u523b\u8680\u4fa7\u58c1\u4e0a\uff0c\u901a\u8fc7\u9009\u62e9\u6027\u523b\u8680\u5f62\u6210\u9ad8\u5bc6\u5ea6\u5f15\u5bfc\u53f0\u9636\uff0c\u5e73\u884c\u751f\u957f\u5236\u5907\u51fa\u5c3a\u5bf8\u5747\u5300\uff08Dnw<\/sub>=28<\/span>+<\/u>2.4 nm<\/span> \uff09\u7684\u8d85\u9ad8\u5bc6\u5ea6\uff08\u95f4\u9694<40 nm<\/em>\uff09\u6676\u7845\u7eb3\u7c73\u7ebf\u9635\u5217\u3002\u7814\u7a76\u53d1\u73b0\uff0c\u9ad8\u5bc6\u5ea6\u4fa7\u58c1\u6c9f\u69fd\u5bf9\u50ac\u5316\u94df\u9897\u7c92\u7684\u5f62\u6210\u5177\u6709\u663e\u8457\u7684\u8c03\u5236\u4f5c\u7528\uff0c\u5728\u6c2e\u6c27\u53e0\u5c42\u4fa7\u58c1\u4e0a\u5f62\u6210\u5c0f\u4e8e\u94df\u539f\u5b50\u8868\u9762\u6269\u6563\u957f\u5ea6\u7684\u6c9f\u69fd\u7ed3\u6784\u662f\u63a7\u5236\u7eb3\u7c73\u7ebf\u6c9f\u9053\u5747\u5300\u6027\u7684\u5173\u952e\uff0c\u540c\u65f6\u7a81\u51fa\u7684\u6c2e\u5c42\u5bbd\u5ea6\u5bf9\u8c03\u63a7\u76f8\u90bb\u751f\u957f\u7eb3\u7c73\u7ebf\u7ed3\u6784\u4e4b\u95f4\u7684\u8026\u5408\u7ade\u4e89\u6709\u91cd\u8981\u5f71\u54cd\u3002\u503c\u5f97\u4e00\u63d0\u7684\u662f\uff0c\u901a\u8fc7\u6b64\u4f4e\u6e29\u4fa7\u58c1\u5e73\u884c\u751f\u957f\u53ef\u4ee5\u5927\u89c4\u6a21\u5236\u5907\u591a\u8fbe10\u5c42\u7684\u5806\u53e0\u7eb3\u7c73\u7ebf\u6c9f\u9053\u7ed3\u6784\uff0c\u5176\u4e2d\u7eb3\u7c73\u7ebf\u7684\u76f4\u5f84\u3001\u754c\u9762\u5f62\u8c8c\u548c\u95f4\u9694\u5bc6\u5ea6\u53ef\u901a\u8fc7\u6c2e\u6c27\u53e0\u5c42\u7684\u6dc0\u79ef\u539a\u5ea6\u548c\u523b\u8680\u65f6\u95f4\u7cbe\u786e\u8c03\u63a7\uff0c\u4ece\u800c\u907f\u514d\u4e86\u5bf9\u9ad8\u6210\u672cSi\/GeSi\u591a\u5c42\u53e0\u5c42\u5916\u5ef6\u548c\u6781\u6df1\u7d2b\u5916\u5149\u523b\u6280\u672f\u7684\u4f9d\u8d56\u3002\u901a\u8fc7\u6b64\u6280\u672f\u53ef\u4ee5\u5927\u5e45\u538b\u7f29FET\u5668\u4ef6\u7684\u6c9f\u9053\u6295\u5f71\u9762\u79ef\uff0c\u6709\u671b\u5e94\u7528\u4e8e\u5229\u7528\u8f83\u4f4e\u5149\u523b\u8282\u70b9\u6280\u672f\uff08\u4f8b\u5982N65~90\u7eb3\u7c73\uff09\u5b9e\u73b0\u7b49\u6548\u4e8eN 5\u8282\u70b9\u6280\u672f\u7684\u66f4\u9ad8\u5668\u4ef6\u96c6\u6210\u5bc6\u5ea6\u3002\u6b64\u9879\u7814\u7a76\u5efa\u7acb\u5728\u8bfe\u9898\u7ec4\u8fd1\u671f\u57283D\u7eb3\u7c73\u7ebf\u751f\u957f\u8c03\u63a7\u7684\u57fa\u7840\u4e4b\u4e0a\uff08\u89c1\u540e\u7eed\u5217\u8868\uff09\uff0c\u9996\u6b21\u5c55\u793a\u4e86\u7cbe\u63a7\u7eb3\u7c73\u751f\u957f\u6280\u672f\u5728\u9ad8\u5747\u5300\u6027\u5c3a\u5bf8\u8c03\u63a7\u548c\u5927\u89c4\u6a21\u4e09\u7ef4\u6784\u67b6\u5236\u5907\u4e0a\u7684\u5de8\u5927\u6f5c\u529b\uff0c\u5176\u4f4e\u6e29\u751f\u957f\u6280\u672f\uff08<350 o<\/sup>C\uff09\u4e5f\u4e3a\u5b9e\u73b0\u771f\u6b63\u610f\u4e49\u4e0a\u7684Monolithic 3D\u524d\u7aef-\u540e\u7aef\u5668\u4ef6\u96c6\u6210\u5e26\u6765\u4e86\u5168\u65b0\u7684\u6280\u672f\u53ef\u80fd\u548c\u7a81\u7834\u65b9\u5411\u3002<\/p>\n

\"\"<\/p>\n

\u56fe1\uff1a\u975e\u6676\u6c2e\u5316\u7845\uff08SiN\uff09\/\u6c27\u5316\u7845\uff08SiO\uff09\u8d85\u6676\u683c\u4fa7\u58c1\u8c03\u5236\u751f\u957f\u8d85\u9ad8\u5bc6\u5ea6\u5747\u5300\u5806\u53e0\u7845\u7eb3\u7c73\u7ebf\u9635\u5217\u7ed3\u6784\u3002<\/p>\n

\"\"<\/p>\n

\u56fe2\uff1a\u5806\u53e0\u7eb3\u7c73\u7ebf\u751f\u957f\u5236\u5907\u57fa\u672c\u6d41\u7a0b\uff0c\u4ee5\u53ca\u4e0e\u4f20\u7edfFET\u5668\u4ef6\u7ed3\u6784\u548c\u751f\u957f\u6a21\u5f0f\u7684\u6bd4\u8f83\u3002<\/p>\n

\"\"<\/p>\n

\u56fe3\uff1a\u5806\u53e0\u7eb3\u7c73\u7ebf\u751f\u957f\u7ed3\u6784\u8868\u5f81\u548c\u5c3a\u5bf8\u8c03\u63a7\u7edf\u8ba1\u5206\u6790\u3002<\/p>\n

\u5de5\u4f5c\u8fd1\u671f\u53d1\u8868\u4e8e\u7f8e\u56fd\u5316\u5b66\u5b66\u4f1a\u300a\u7eb3\u7c73\u5feb\u62a5\u300b\u4e0a\uff1aUnprecedented Uniform 3D Growth Integration of 10-Layer Stacked Si Nanowires on Tightly Confined Sidewall Grooves, Nano Letters<\/strong> 20 (10), 10.1021\/acs.nanolett.0c02950 (2020)\u3002\u5176\u4e2d\uff0c\u535a\u58eb\u751f\u80e1\u745e\u91d1\u540c\u5b66\u4e3a\u7b2c\u4e00\u4f5c\u8005\uff0c\u738b\u519b\u8f6c\u526f\u6559\u6388\u548c\u4f59\u6797\u851a\u6559\u6388\u4e3a\u5171\u540c\u901a\u8baf\u4f5c\u8005\uff0c\u7814\u7a76\u5de5\u4f5c\u5f97\u5230\u4e86\u5357\u4eac\u5927\u5b66\u5f90\u9a8f\u6559\u6388\u3001\u65bd\u6bc5\u6559\u6388\u548c\u9648\u5764\u57fa\u6559\u6388\u7684\u6089\u5fc3\u6307\u5bfc\u548c\u5927\u529b\u652f\u6301\u3002\u76f8\u5173\u6280\u672f\u6210\u679c\u5df2\u7ecf\u901a\u8fc7\u4e0e\u534e\u4e3a\u516c\u53f8\u5408\u4f5c\u5171\u540c\u63d0\u4ea4\u7533\u8bf7\u4e86\u591a\u9879\u6280\u672f\u4e13\u5229\u3002<\/strong>\u8be5\u9879\u7814\u7a76\u5de5\u4f5c\u53d7\u5230\u9752\u5e74\u5343\u4eba\u8ba1\u5212\uff0c\u56fd\u5bb6\u81ea\u7136\u79d1\u5b66\u57fa\u91d1\uff0c\u6c5f\u82cf\u7701\u6770\u51fa\u9752\u5e74\u57fa\u91d1\u548c\u53cc\u521b\u4eba\u624d\u8ba1\u5212\u8d44\u52a9\u3002<\/p>\n

\u8bba\u6587\u94fe\u63a5\uff1a https:\/\/pubs.acs.org\/doi\/10.1021\/acs.nanolett.0c02950<\/a><\/p>\n

\u9644\u4ef6\uff1a<\/strong>\u8bfe\u9898\u7ec43D\u751f\u957f\u8c03\u63a7\u7684\u76f8\u5173\u524d\u671f\u5de5\u4f5c:<\/p>\n

1. Cylindrical Line-Feeding Growth of Free-Standing Silicon Nanohelices as Elastic Springs and Resonators
\n Haiguang Ma, Rongrong Yuan, Junzhuan Wang, Yi Shi, Jun Xu, Kunji Chen, and Linwei Yu*<\/p>\n

Nano Letters<\/em><\/strong> 20<\/strong>, 5072\u20135080 (2020) Cover Report
\n <\/strong>https:\/\/pubs.acs.org\/doi\/full\/10.1021\/acs.nanolett.0c01265?ref=recommended<\/a><\/p>\n

2. Facile 3D integration of Si nanowires on Bosch-etched sidewalls for stacked channel transistors
\n Ruijin Hu,\u00a0\u00a0 Haiguang Ma,\u00a0\u00a0 Han Yin,\u00a0\u00a0 Jun Xu,\u00a0\u00a0 Kun Ji Chen and Linwei Yu*<\/sup> \u00a0
\n Nanoscale <\/em><\/strong>12<\/strong>, 2787-2792 (2020)
\n https:\/\/pubs.rsc.org\/en\/Content\/ArticleLanding\/NR\/2020\/C9NR09000B#!divAbstract<\/a><\/p>\n

3. 3D sidewall integration of ultra-high density silicon nanowires for stacked channel electronics
\n Xiaoxiang Wu, Haiguang Ma, Han Yin, Danfeng Pan, Junzhuan Wang, Linwei Yu,*<\/sup> Jun Xu, Yi Shi, Kunji Chen
\n Advanced Electronic Materials <\/em>5<\/strong>, 1800627 (2019)
\n https:\/\/www.onlinelibrary.wiley.com\/doi\/10.1002\/aelm.201800627<\/a><\/p>\n

4. Planar Growth, Integration and Applications of Semiconducting Nanowires
\n Ying Sun, Taige Dong, Linwei Yu*<\/sup>, Jun Xu*<\/sup> and Kunji Chen
\n Advanced Materials<\/em><\/strong> 31<\/strong>, 1903945 (2019)
\n https:\/\/onlinelibrary.wiley.com\/doi\/abs\/10.1002\/adma.201903945<\/a><\/p>\n

5. Monolithic integration of silicon nanowire networks as a soft wafer for highly stretchable and transparent electronics
\n Taige Dong, Ying Sun, Zhimin Zhu, Xiaoxiang Wu, Junzhuan Wang, Yi Shi, Jun Xu, Kunji Chen and Linwei Yu*<\/sup>
\n Nano Letters<\/em><\/strong> 19<\/strong>, 6235-6243 (2019)
\n https:\/\/pubs.acs.org\/doi\/10.1021\/acs.nanolett.9b02291<\/a><\/p>\n

\u8bfe\u9898\u7ec4\u6b22\u8fce\u6709\u5fd7\u4e8e\u4e09\u7ef4\u7535\u5b50\u96c6\u6210\u5e94\u7528\u7684\u6709\u5fd7\u9752\u5e74\u62a5\u8003\u535a\u58eb\u3001\u535a\u58eb\u540e\u53ca\u4e13\u804c\u79d1\u7814\u5c97\u804c\u4f4d\uff01<\/p>\n

\u8054\u7cfb\u4eba\uff1a\u4f59\u6797\u851a\uff0cyulinwei@nju.edu.cn<\/p>\n

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