{"id":210274,"date":"2020-10-12T06:03:43","date_gmt":"2020-10-11T22:03:43","guid":{"rendered":"\/\/m.iemloyee.com\/?p=210274"},"modified":"2020-10-11T21:07:14","modified_gmt":"2020-10-11T13:07:14","slug":"%e8%bf%99%e4%b8%aa%e6%9d%90%e6%96%99%e5%b1%a1%e4%b8%8anature-science-%e5%8f%af%e8%83%bd%e6%88%90%e4%b8%ba%e6%9c%aa%e6%9d%a5%e7%94%b5%e5%ad%90%e5%99%a8%e4%bb%b6%e7%9a%84%e4%b8%bb%e5%ae%b0%ef%bc%9f","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=210274","title":{"rendered":"\u8fd9\u4e2a\u6750\u6599\u5c61\u4e0aNature Science \u53ef\u80fd\u6210\u4e3a\u672a\u6765\u7535\u5b50\u5668\u4ef6\u7684\u4e3b\u5bb0\uff1f"},"content":{"rendered":"
\u4eca\u5929\u6211\u4eec\u76d8\u70b9\u7684\u8fd9\u4f4d\u5609\u5bbe\uff0c\u4ece2011\u5e74\u9996\u6b21\u53d1\u73b0\u5176\u5947\u5f02\u7684\u7269\u7406\u7279\u6027\u5f00\u59cb\uff0c\u4e0d\u5230\u5341\u5e74\uff0c\u5374\u9010\u6b65\u5d2d\u9732\u5934\u89d2\uff0c\u663e\u793a\u51fa\u6781\u5177\u6f5c\u529b\u7684\u4ef7\u503c\u3002\u5b83\uff0c\u4e0d\u662f\u9499\u949b\u77ff\uff0c\u4e0d\u662f\u77f3\u58a8\u70ef\uff0c\u4e5f\u4e0d\u662f\u4e8c\u7ef4\u6750\u6599\uff0c\u5e74\u53d1\u6587\u91cf\u4e0d\u5230200\u7bc7\u3002<\/p>\n
\u4f46\uff0c\u4f60\u4e0d\u53ef\u80fd\u5ffd\u89c6\u5b83\u7684\u5b58\u5728\uff0c\u672a\u6765\u7684\u624b\u673a\u3001\u7535\u8111\u91cc\u53ef\u80fd\u90fd\u662f\u5b83\u7684\u5f71\u5b50\uff0c\u8584\u5982\u8749\u7ffc\u7684\u5b83\uff0c\u7a76\u7adf\u4f1a\u5c55\u73b0\u4f55\u7b49\u7684\u975e\u51e1\u7edd\u6280\uff1f\u4e14\u542c\u6211\u6162\u6162\u9053\u6765\u3002<\/p>\n
\u4e00\u3001\u5bfc\u8bfb<\/b><\/strong><\/p>\n H<\/b><\/strong>f<\/b><\/sub><\/strong>O<\/b><\/strong>2<\/b><\/sub><\/strong>\uff0c\u4e2d\u6587\u540d\uff1a\u4e8c\u6c27\u5316\u94ea\uff0c\u82f1\u6587\u540d\uff1a<\/b><\/strong>hafnium oxide<\/b><\/strong>\u6216<\/b><\/strong>hafnia<\/b><\/strong>\u3002\u4f5c\u4e3a\u4e00\u79cd\u5bbd\u5e26\u9699\u3001\u9ad8\u4ecb\u7535\u5e38\u6570\u7684\u7b80\u5355\u6c27\u5316\u7269\u6750\u6599\uff0c\u957f\u671f\u4ee5\u6765\u88ab\u7528\u4e8e\u5fae\u7535\u5b50\u3001\u96c6\u6210\u7535\u8def\u3001\u4ecb\u7535\u5668\u4ef6\u7684\u6805\u6781\u7edd\u7f18\u5c42\uff0c\u5e76\u4e14\u672a\u6765\u6781\u6709\u53ef\u80fd\u66ff\u4ee3\u76ee\u524d\u5e7f\u6cdb\u4f7f\u7528\u7684SiO2<\/sub>\u6805\u6781\u6750\u6599\uff0c\u53ea\u56e0\u5b83\u80fd\u66f4\u5bb9\u6613\u505a\u5230\u5c3a\u5bf8\u8db3\u591f\u5c0f\u3001\u8db3\u591f\u8584\u30022011\u5e74\uff0c\u5fb7\u56fdQimonda\u534a\u5bfc\u4f53\u516c\u53f8\u548c\u5fb7\u96f7\u65af\u987f\u5de5\u4e1a\u5927\u5b66\u521b\u529e\u7684NaMLab\u7535\u5b50\u6750\u6599\u521b\u4e1a\u516c\u53f8\u7684\u7814\u53d1\u56e2\u961f\uff0c\u901a\u8fc7\u539f\u5b50\u5c42\u6c89\u79ef\u6280\u672f\u5236\u5907\u4e86\u539a\u5ea6\u5c0f\u4e8e10 nm\u7684<\/b><\/strong>SiO<\/b><\/strong>2<\/b><\/sub><\/strong>\u63ba\u6742\u7684H<\/b><\/strong>f<\/b><\/sub><\/strong>O<\/b><\/strong>2<\/b><\/sub><\/strong>\u8584\u819c<\/b><\/strong>\uff0c\u5b9e\u9a8c\u4e0a\u9996\u6b21\u89c2\u6d4b\u5230\u94c1\u7535\u6750\u6599\u7279\u6709\u7684\u7535\u6ede\u56de\u7ebf<\/b><\/strong>\u3002\u8fd9\u4e00\u5947\u5999\u7684\u53d1\u73b0\u5728\u5b66\u672f\u548c\u5de5\u4e1a\u754c\u5f15\u8d77\u4e86\u5de8\u5927\u7684\u201c\u9a9a\u52a8\u201d\uff0c\u957f\u4e45\u4ee5\u6765\uff0c\u7ecf\u5178\u7684\u65e0\u673a\u6c27\u5316\u7269\u94c1\u7535\u6750\u6599\u4e00\u76f4\u88ab\u9499\u949b\u77ff\u7b49\u6750\u6599\u7cfb\u7edf\u7edf\u6cbb\uff0c\u4f46\u9499\u949b\u77ff\u7b49\u6750\u6599\u5f88\u96be\u5b9e\u73b0\u540cCMOS\u96c6\u6210\u7535\u8def\u7684\u9ad8\u5ea6\u878d\u5408\uff0c\u8fd9\u4e5f\u662f\u94c1\u7535\u6750\u6599\u8fd0\u7528\u4e8e\u5b58\u50a8\u5668\u4ef6\u7684\u6838\u5fc3\u5de5\u4e1a\u74f6\u9888\u4e4b\u4e00\u3002\u800cHf<\/sub>O2<\/sub>\u540c\u96c6\u6210\u7535\u8def\u5de5\u827a\u7684\u517c\u5bb9\u6027\u975e\u5e38\u9ad8\uff0c\u5e76\u4e14\u5177\u6709\u80fd\u8fdb\u4e00\u6b65\u51cf\u5c0f\u6750\u6599\u5c3a\u5bf8\u7684\u4f18\u52bf\uff0c\u5b83\u7684\u94c1\u7535\u6027\u7684\u53d1\u73b0\u65e0\u7591\u4e3a\u4e0b\u4e00\u4ee3\u9ad8\u5bc6\u5ea6\u3001\u975e\u6613\u5931\u6027\u94c1\u7535\u5b58\u50a8\u5668\u7684\u5e94\u7528\u5e26\u6765\u66d9\u5149\u3002\u4e0d\u5230\u5341\u5e74\u7684\u65f6\u95f4\uff0c\u56fd\u5916\u5df2\u7ecf\u6709\u516c\u53f8\u5236\u4f5c\u51faHf<\/sub>O2<\/sub>\u57fa\u94c1\u7535\u5b58\u50a8\u5668\u7684\u539f\u578b\u5668\u4ef6\uff0c\u5e76\u6709\u6570\u5bb6\u516c\u53f8\u6b63\u5728\u5e03\u5c40\u4e09\u7ef4\u96c6\u6210\u903b\u8f91\u7535\u8def\u7684\u5f00\u53d1\uff1b\u5728\u57fa\u7840\u79d1\u7814\u9886\u57df\uff0c\u8fd1\u51e0\u5e74\u6709\u5173Hf<\/sub>O2<\/sub>\u94c1\u7535\u6027\u7684\u5de5\u4f5c\u65e5\u76ca\u589e\u591a\uff0c\u5176\u94c1\u7535\u6027\u7684\u8d77\u6e90\u3001\u7ed3\u6784\u76f8\u53d8\u3001\u5668\u4ef6\u5236\u9020\u548c\u80fd\u6e90\u5e94\u7528<\/b><\/strong>\u662f\u4e3b\u8981\u7684\u7814\u7a76\u65b9\u5411\uff0c\u57fa\u7840\u79d1\u5b66\u7684\u4e0d\u65ad\u53d1\u529b\uff0c\u5c06\u63ed\u5f00\u5176\u80cc\u540e\u66f4\u4e3a\u57fa\u7840\u3001\u672c\u5f81\u7684\u79d1\u5b66\u5185\u6838<\/b><\/strong>\uff0c\u6700\u7ec8\u5c06\u8fdb\u4e00\u6b65\u4fc3\u8fdb\u5176\u5728\u82af\u7247\u9886\u57df\u7684\u5e94\u7528\u3002<\/p>\n \u4e8c\u3001\u6700\u65b0\u8fdb\u5c55<\/b><\/strong><\/p>\n 01<\/strong><\/p>\n 20200922:\u00a0<\/b><\/strong>Wafer-scale graphene-ferroelectric HfO<\/b><\/strong>2<\/b><\/sub><\/strong>\/Ge\u2013HfO<\/b><\/strong>2<\/b><\/sub><\/strong>\/HfO<\/b><\/strong>2<\/b><\/sub><\/strong>\u00a0<\/b><\/sub><\/strong>transistors acting as three-terminal memristors<\/b><\/strong>, \u00a0<\/b><\/strong>Nanotechnology<\/i><\/em>\u00a0<\/i><\/em>(\u56fd\u7acb\u5fae\u6280\u672f\u7814\u7a76\u4e0e\u53d1\u5c55\u7814\u7a76\u9662\uff0c\u7f57\u9a6c\u5c3c\u4e9a)\u00a0<\/p>\n \u5c06\u77f3\u58a8\u70ef\u5355\u5c42\u6c9f\u9053\u8f6c\u79fb\u5230\u94c1\u7535Hf<\/sub>O2<\/sub>\/Ge-Hf<\/sub>O2<\/sub>\/Hf<\/sub>O2<\/sub>\u4e09\u5c42\u7ed3\u6784\u4e0a\u4ece\u800c\u5b9e\u73b0\u4e86\u6676\u5706\u7ea7\u7684\u573a\u6548\u5e94\u6676\u4f53\u7ba1<\/b><\/strong>\u3002\u7531\u4e8e\u94c1\u7535\u7ed3\u6784\u5728\u77f3\u58a8\u70ef\u4e2d\u7684\u8bf1\u5bfc\u80fd\u9699\uff0c\u8be5\u573a\u6548\u5e94\u7ba1\u7684\u5f00\u5173\u6bd4\u53ef\u8fbe103<\/sup>\uff1b\u9876\u6805\u548c\u80cc\u6805\u90fd\u80fd\u6709\u6548\u5730\u63a7\u5236\u77f3\u58a8\u70ef\u4e2d\u8f7d\u6d41\u5b50\u7684\u6d41\u52a8\u3002\u8be5\u6676\u4f53\u7ba1\u53ef\u4f5c\u4e3a\u4e09\u7aef\u5fc6\u963b\u5668\uff0c\u5373\u8bb0\u5fc6\u6676\u4f53\u7ba1\uff0c\u6709\u671b\u5e94\u7528\u4e8e\u795e\u7ecf\u5f62\u6001\u8ba1\u7b97\u9886\u57df\u3002<\/p>\n 02<\/strong><\/p>\n 20200917:<\/b><\/strong>\u00a0Frequency mixing with HfO<\/b><\/strong>2<\/b><\/sub><\/strong>\u00a0based ferroelectric transistors<\/b><\/strong>,<\/p>\n ACS Appl. Mater. Interfaces<\/i><\/em>\u00a0\u00a0(NaMLab\u516c\u53f8\uff0c\u5fb7\u56fd)\u00a0<\/p>\n \u4e8c\u6b21\u8c10\u6ce2\uff08SHG\uff09\u548c\u7535\u4fe1\u53f7\u7684\u6df7\u9891\u662f\u5e7f\u6cdb\u7684\u5c04\u9891\u5e94\u7528\u7684\u57fa\u7840\u3002\u7531\u94c1\u7535Hf<\/sub>O2<\/sub>\u5236\u6210\u7684\u94c1\u7535\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff08FeFET\uff09\u7531\u4e8e\u5176\u72ec\u7279\u7684\u5bf9\u79f0\u8f6c\u79fb\u66f2\u7ebf\u800c\u663e\u793a\u51fa\u6781\u5177\u524d\u666f\u7684SHG\u6027\u80fd\u3002\u8fd9\u9879\u6700\u65b0\u7814\u7a76\u63a2\u7d22\u4e86\u901a\u8fc7\u6539\u53d8\u94c1\u7535\u5c42\u7684\u539a\u5ea6\u548c\u7845\u886c\u5e95\u7684\u63ba\u6742\uff0c\u53d1\u73b0\u8fd9\u79cd\u5bf9\u79f0\u6027\u5bf9\u6750\u6599\u7684\u6027\u8d28\u9ad8\u5ea6\u654f\u611f\u3002\u901a\u8fc7\u7cbe\u786e\u8c03\u63a7\u94c1\u7535\u6781\u5316\u53cd\u8f6c\u548c\u91cf\u5b50\u96a7\u7a7f\u7535\u6d41\uff0cSHG\u8f6c\u6362\u589e\u76ca\u548c\u5149\u8c31\u7eaf\u5ea6\u5f97\u4ee5\u5927\u5927\u63d0\u9ad8\uff08\u9ad8\u8fbe96\uff05\uff09\u3002\u5e76\u901a\u8fc7\u5b9e\u9a8c\u8bc1\u660e\u4e86\u4f7f\u7528\u5355\u4e2aFeFET\u53ef\u4ee5\u4ea7\u751f\u6df7\u9891\uff0c\u7531\u4e8e\u5728Hf<\/sub>O2<\/sub>\u4e2d\u53ef\u4ee5\u4ea7\u751f\u53ef\u9006\u548c\u8fde\u7eed\u7684\u94c1\u7535\u53cd\u8f6c\uff0c\u56e0\u800c\u53ef\u4ee5\u5b9e\u73b0\u5bf9\u9891\u8c31\u6210\u5206\u7684\u80fd\u91cf\u5206\u5e03\u8fdb\u884c\u7535\u5b66\u63a7\u5236\uff0c\u5f00\u62d3\u4e86\u4f7f\u7528\u7b80\u5355\u7684\u94c1\u7535\u5668\u4ef6\u53ef\u4ee5\u8fdb\u884c\u9891\u7387\u63a7\u5236\u7684\u65b0\u8def\u5f84<\/b><\/strong>\u3002<\/p>\n 03<\/strong><\/p>\n 20200707:\u00a0Scale-free ferroelectricity induced by flat phonon bands in H<\/b><\/strong>f<\/b><\/sub><\/strong>O<\/b><\/strong>2<\/b><\/sub><\/strong>\u00a0, Science<\/i><\/em>\u00a0(\u851a\u5c71\u56fd\u5bb6\u79d1\u5b66\u6280\u672f\u7814\u7a76\u9662\uff0c\u97e9\u56fd)\u00a0<\/p>\n \u5728\u5c3a\u5bf8\u6781\u9650\u4e0b\u53d1\u73b0\u7a33\u5b9a\u7684\u3001\u53ef\u9006\u53cd\u8f6c\u7684\u7535\u5076\u6781\u5b50\u5bf9\u7eb3\u7c73\u7535\u5b50\u5668\u4ef6\u7684\u53d1\u5c55\u81f3\u5173\u91cd\u8981\u3002\u52a8\u91cf\u7a7a\u95f4\u4e2d\u5e73\u5766\u7684\u80fd\u5e26\u53ef\u4ee5\u4ea7\u751f\u76f8\u4e92\u72ec\u7acb\u6fc0\u6d3b\u7684\u7a33\u5065\u7684\u5c40\u57df\u6001\u3002\u8fd9\u9879\u7814\u7a76\u901a\u8fc7\u7406\u8bba\u8ba1\u7b97<\/b><\/strong>\u786e\u5b9a\u4e86\u5728Hf<\/sub>O2<\/sub>\u4e2d\u5b58\u5728\u5e73\u5e26\uff0c\u5e76\u8bf1\u5bfc\u51fa\u7a33\u5065\u7684\u4e14\u53ef\u72ec\u7acb\u53cd\u8f6c\u7684\u5076\u6781\u5b50\u3002 Hf<\/sub>O2<\/sub>\u4e2d\u7684\u5e73\u5766\u7684\u6781\u6027\u58f0\u5b50\u5e26\u5bfc\u81f4\u5728\u5176\u4e0d\u53ef\u7ea6\u7684\u4e00\u534a\u6676\u80de\u5bbd\u5ea6\uff08~3\u57c3\uff09\u4e0b\uff0c\u7535\u5076\u6781\u5b50\u51fa\u73b0\u4e86\u5f3a\u7684\u5c40\u57df\u5316\u3002\u4e0e\u5177\u6709\u5f25\u6563\u7684\u5076\u6781\u5b50\u7684\u4f20\u7edf\u94c1\u7535\u4f53\u4e0d\u540c\uff0c\u5c40\u57df\u5316\u7684\u5076\u6781\u5b50\u53ef\u4ee5\u5bf9\u6297\u591a\u79cd\u5916\u90e8\u6270\u52a8\uff08\u4f8b\u5982\u7574\u58c1\uff0c\u8868\u9762\u66b4\u9732\uff0c\u4ee5\u53ca\u5c3a\u5bf8\u6781\u9650\u8fbe\u5230\u57c3\u6570\u91cf\u7ea7\uff09\uff0c\u5e76\u4fdd\u6301\u7a33\u5b9a\u3002\u4ece\u800c\u53ef\u4ee5\u91c7\u7528\u6676\u80de\u5c3a\u5bf8\u7ea7\u522b\u7684\u7d27\u5bc6\u5806\u53e0\u7684\u94c1\u7535\u53cd\u8f6c\u5668\u4ef6\u76f4\u63a5\u540c\u6210\u719f\u7684\u7845\u57fa\u5668\u4ef6\u5b9e\u73b0\u96c6\u6210<\/b><\/strong>\u3002<\/p>\n 04<\/strong><\/p>\n 20200422:\u00a0<\/b><\/strong>Enhanced ferroelectricity in ultrathin films grown directly on silicon<\/b><\/strong>,\u00a0Nature<\/i><\/em>\u00a0<\/i><\/em>(\u52a0\u5dde\u5927\u5b66\u4f2f\u514b\u5229\u5206\u6821\uff0c\u7f8e\u56fd)\u00a0<\/p>\n \u8d85\u8584\u94c1\u7535\u6750\u6599\u5177\u6709\u5b9e\u73b0\u4f4e\u529f\u8017\u903b\u8f91\u548c\u975e\u6613\u5931\u6027\u5b58\u50a8\u5668\u7684\u5e94\u7528\u6f5c\u529b\uff0c\u7136\u800c\uff0c\u5c3a\u5bf8\u964d\u4f4e\u901a\u5e38\u4f1a\u6291\u5236\u94c1\u7535\u6027\u3002\u4f8b\u5982\uff0c\u94c1\u7535\u4f53\u4e2d\u7684\u5c3a\u5bf8\u6548\u5e94\u5df2\u5728\u9499\u949b\u77ff\u6c27\u5316\u7269\u4e2d\u8fdb\u884c\u4e86\u6df1\u5165\u7814\u7a76\u3002\u7136\u800c\uff0c\u5230\u76ee\u524d\u4e3a\u6b62\uff0c\u9499\u949b\u77ff\u6750\u6599\u5e76\u4e0d\u9002\u5408\u51cf\u5c0f\u539a\u5ea6\u5e76\u4e0e\u73b0\u4ee3\u534a\u5bfc\u4f53\u5de5\u827a\u96c6\u6210\u3002\u8fd9\u9879\u7814\u7a76\u62a5\u9053\u4e86\u8d85\u8584\u63ba\u6742Hf<\/sub>O2<\/sub>\u4e2d\u7684\u94c1\u7535\u6027\uff0c\u8fd9\u662f\u4e00\u79cd\u5728\u7845\u57fa\u7247\u4e0a\u901a\u8fc7\u539f\u5b50\u5c42\u6c89\u79ef\u800c\u751f\u957f\u7684\u8424\u77f3\u7ed3\u6784\u6c27\u5316\u7269\u3002\u5b9e\u9a8c\u8bc1\u660e\u5176\u57281 nm\u539a\u5ea6\u4ee5\u4e0b\u4ecd\u5177\u6709\u53cd\u8f6c\u5bf9\u79f0\u7834\u7f3a\u548c\u53ef\u53cd\u8f6c\u7684\u81ea\u53d1\u6781\u5316<\/b><\/strong>\u3002\u4e0e\u9499\u949b\u77ff\u94c1\u7535\u6750\u6599\u4e0d\u540c\uff0c\u8fd9\u4e00\u6750\u6599\u4e0d\u4ec5\u4e0d\u5b58\u5728\u94c1\u7535\u4e34\u754c\u5c3a\u5bf8\u6548\u5e94\uff0c\u800c\u4e14\u968f\u7740\u539a\u5ea6\u7684\u51cf\u5c0f\uff0c\u6781\u6027\u626d\u66f2\u53cd\u800c\u4f1a\u589e\u5f3a\u3002\u8fd9\u79cd\u8d85\u8584\u5c42\u4e2d\u589e\u5f3a\u7684\u94c1\u7535\u6027\u53ef\u4ee5\u5b9e\u73b0\u6781\u5316\u9a71\u52a8\u7684\u5b58\u50a8\u5668\u548c\u57fa\u4e8e\u94c1\u7535\u7684\u5148\u8fdb\u6676\u4f53\u7ba1\u7684\u65b0\u8def\u5f84\u3002\u8fd9\u9879\u5de5\u4f5c\u5c06\u5bfb\u627e\u94c1\u7535\u6027\u7684\u5c3a\u5bf8\u6781\u9650\u8f6c\u5411\u4e86\u66f4\u7b80\u5355\u7684\u8fc7\u6e21\u91d1\u5c5e\u6c27\u5316\u7269\u4f53\u7cfb\uff0c\u5373\u4ece\u9499\u949b\u77ff\u7b49\u590d\u5408\u6c27\u5316\u7269\u5230\u5177\u6709\u8424\u77f3\u7ed3\u6784\u7684\u7b80\u5355\u4e8c\u5143\u6c27\u5316\u7269\uff0c\u5373\u5c3a\u5bf8\u6548\u5e94\u53cd\u76f4\u89c9\u5730\u7a33\u5b9a\u4e86\u8d85\u8584\u673a\u5236\u4e0b\u7684\u6781\u6027\u5bf9\u79f0\u6027<\/b><\/strong>\u3002<\/p>\n 05<\/strong><\/p>\n 20200421:\u00a0Facile Ferroelectric Phase Transition Driven by Si Doping in H<\/b><\/strong>f<\/b><\/sub><\/strong>O<\/b><\/strong>2<\/b><\/sub><\/strong>, <\/b><\/strong>Inorg. Chem.<\/i><\/em>\u00a0<\/i><\/em>(\u851a\u5c71\u56fd\u5bb6\u79d1\u5b66\u6280\u672f\u7814\u7a76\u9662\uff0c\u97e9\u56fd)\u00a0<\/p>\n \u6b63\u4ea4\u76f8\u7684Hf<\/sub>O2<\/sub>\u8584\u819c\u4e2d\u53d1\u73b0\u7684\u94c1\u7535\u6027\u5177\u6709\u91cd\u8981\u7684\u7814\u7a76\u610f\u4e49\uff0c\u56e0\u4e3a\u53ef\u4ee5\u5b9e\u73b0\u540cCMOS\u6280\u672f\u7684\u76f4\u63a5\u96c6\u6210\u3002\u7136\u800c\uff0c\u5728\u5668\u4ef6\u5e94\u7528\u4e2d\u7ecf\u5e38\u4f1a\u53d7\u5230\u975e\u94c1\u7535\u7684\u5355\u659cHf<\/sub>O2<\/sub>\u6742\u76f8\u7684\u56f0\u6270\uff0c\u4ece\u800c\u4f1a\u964d\u4f4e\u94c1\u7535\u6027\u3002\u8fd9\u9879\u7814\u7a76\u53d1\u73b0\u7531\u4e8e\u72ec\u7279\u7684\u952e\u5408\u7279\u6027\uff0c\u63ba\u6742\u7845\u53ef\u4ee5\u51cf\u5f31\u6b63\u4ea4\u548c\u5355\u659c\u76f8\u754c\uff0c\u4ece\u800c\u53ef\u4ee5\u663e\u8457\u7a33\u5b9a\u94c1\u7535\u76f8\u3002\u57fa\u4e8e\u4e0a\u8ff0\u7406\u8bba\u9884\u6d4b\uff0c\u7814\u7a76\u8005\u901a\u8fc7\u900f\u5c04\u7535\u955c\u8bc1\u5b9e\u4e86\u7845\u63ba\u6742\u786e\u5b9e\u53ef\u4ee5\u5c06\u5355\u659c\u7ec4\u5206\u5f15\u5165\u5230\u6b63\u4ea4\u76f8\uff0c\u8bc1\u5b9e\u4e86\u76f8\u754c\u5f97\u4ee5\u5f31\u5316\u5e76\u6709\u5229\u4e8e\u94c1\u7535\u76f8\u53d8\u3002\u8fd9\u9879\u7814\u7a76\u4ece\u539f\u5b50\u5c3a\u5ea6\u660e\u786e\u4e86\u7845\u5728\u4fc3\u8fdb\u94c1\u7535\u76f8\u4e2d\u7684\u72ec\u7279\u4f5c\u7528\u4ee5\u53ca\u63ba\u6742\u5242\u5bf9H<\/b><\/strong>f<\/b><\/sub><\/strong>O<\/b><\/strong>2<\/b><\/sub><\/strong>\u7684\u5524\u9192\u6548\u5e94<\/b><\/strong>\uff0c\u6709\u52a9\u4e8e\u7406\u89e3Hf<\/sub>O2<\/sub>\u94c1\u7535\u4f53\u5728\u5668\u4ef6\u4e2d\u7684\u96c6\u6210\u5e94\u7528\u3002<\/p>\n 06<\/strong><\/p>\n 20200211:\u00a0Room-temperature deposition of ferroelectric H<\/b><\/strong>f<\/b><\/sub><\/strong>O<\/b><\/strong>2<\/b><\/sub><\/strong>-based films by the sputtering method, <\/b><\/strong>Appl. Phys. Lett.<\/i><\/em>\u00a0<\/i><\/em>\u00a0<\/i><\/em>(\u4e1c\u4eac\u5de5\u4e1a\u5927\u5b66\uff0c\u65e5\u672c)\u00a0<\/p>\n \u5728\u5ba4\u6e29\u4e0b\uff0c\u901a\u8fc7\u5c04\u9891\u78c1\u63a7\u6e85\u5c04\u6cd5\u751f\u957f\u4e86\u5916\u5ef6\u76847<\/b><\/strong>%<\/b><\/strong>Y\u63ba\u6742-H<\/b><\/strong>f<\/b><\/sub><\/strong>O<\/b><\/strong>2<\/b><\/sub><\/strong>\uff080.07YO<\/b><\/strong>1.5<\/b><\/sub><\/strong>-0.93H<\/b><\/strong>f<\/b><\/sub><\/strong>O<\/b><\/strong>2<\/b><\/sub><\/strong>\uff0cYHO7\uff09<\/b><\/strong>\u8584\u819c,\u5e76\u4e14\u9a8c\u8bc1\u5176\u5177\u6709\u94c1\u7535\u6027\uff0c\u8be5\u5408\u6210\u7b56\u7565\u65e0\u9700\u4efb\u4f55\u540e\u7eed\u70ed\u5904\u7406\u8fc7\u7a0b<\/b><\/strong>\u3002\u8584\u819c\u7684X\u5c04\u7ebf\u884d\u5c04\u56fe\u8868\u660e\uff0c\u964d\u4f4e\u5c04\u9891\u529f\u7387\u548c\u6c27\u5206\u538b\u4f1a\u8bf1\u5bfc\u8584\u819c\u7684\u6676\u4f53\u7ed3\u6784\u4ece\u5355\u659c\u6676\u76f8\u8f6c\u53d8\u4e3a\u56db\u65b9\/\u6b63\u4ea4\u76f8\u3002\u5728\u5236\u5907\u7684\u5177\u6709\u56db\u65b9\/\u659c\u65b9\u6676\u76f8\u7684\u5916\u5ef6\u819c\u4e2d\u89c2\u6d4b\u5230\u4e86\u6e05\u6670\u7684\u7535\u6ede\u56de\u7ebf\u3002\u6b64\u5916\uff0c\u5728\u5ba4\u6e29\u6761\u4ef6\u4e0b\u540c\u6837\u5b9e\u73b0\u4e86\u5728Pt\/TiOx<\/sub>\/SiO2<\/sub>\/(100)Si\u3001\u7ed3\u6676\u7684ITO\/ soda glass\u3001\u975e\u6676\u7684ITO\/PET\u7b49\u57fa\u7247\u4e0a\u6210\u529f\u6c89\u79ef\u591a\u6676YHO7\u8584\u819c\u3002\u4e3a\u94c1\u7535H<\/b><\/strong>f<\/b><\/sub><\/strong>O<\/b><\/strong><\/p>\n
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