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off\u65b9\u6cd5\u80fd\u591f\u5c06epilayer\u8f6c\u79fb\u5230\u4efb\u4f55\u7684\u886c\u5e95\u4e0a\uff0c\u5e76\u4e14\u5982\u679c\u886c\u5e95\u5728lift off\u8fc7\u7a0b\u4e2d\u6ca1\u6709\u635f\u574f\uff0c\u6602\u8d35\u7684\u886c\u5e95\u8fd8\u53ef\u4ee5\u53cd\u590d\u4f7f\u7528\uff0c\u4ece\u800c\u964d\u4f4e\u5668\u4ef6\u751f\u4ea7\u7684\u603b\u6210\u672c\u3002\u968f\u7740\u5f02\u8d28\u6750\u6599\u5f02\u8d28\u96c6\u6210\u9700\u6c42\u7684\u4e0d\u65ad\u589e\u957f\uff0c\u5404\u79cd\u4e0d\u540c\u7684lift off\u6280\u672f\u5f97\u5230\u4e86\u53d1\u5c55\uff0c\u5305\u62ecepitaxial lift-off\u00a0(ELO)\u3001\u673a\u68b0\u5265\u79bb\u3001laser lift-off\u548c\u4e8c\u7ef4(2D)\u6750\u6599\u8f85\u52a9\u5c42\u8f6c\u79fb(2DLT)\u7b49\u3002\u7279\u522b\u662f2DLT\u9700\u8981\u72ec\u7279\u7684\u5916\u5ef6\u6280\u672f\uff0c\u5982\u8fdc\u7aef\u5916\u5ef6\u6216\u8303\u5fb7\u534e(van der Waals, 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matching epitaxy, DME)\u662f\u4e00\u79cd\u5178\u578b\u7684\u751f\u957f\u65b9\u5f0f\uff0c\u5b83\u901a\u8fc7\u5339\u914d\u754c\u9762\u4e0a\u4e3b\u8981\u6676\u683c\u5e73\u9762\u533a\u57df\u6765\u5b9e\u73b0\u9ad8\u8d28\u91cf\u7684\u6750\u6599\u5916\u5ef6\u751f\u957f\u3002<sup>[3]<\/sup>\u00a0\u8fd9\u79cd\u6a21\u5f0f\u5df2\u7ecf\u88ab\u7528\u5728TiN\uff0cAlN\u5728Si(100)\u4e0a\u751f\u957f\uff0cZnO\u5728\u03b1Al<sub>2<\/sub>O<sub>3<\/sub>\u00a0(0001)\u4e0a\u751f\u957f\uff0c\u5b83\u4eec\u4e4b\u95f4\u90fd\u670915%\u523025%\u7684\u6676\u683c\u5931\u914d\uff0c\u8bc1\u660e\u4e86III-V\u548cIII-N\u6750\u6599\u3001\u6c27\u5316\u7269\u548c\u7845\u901a\u8fc7\u5916\u5ef6\u751f\u957f\u5728\u5355\u4e2a\u6676\u5706\u7247\u4e0a\u7684\u96c6\u6210\u7684\u53ef\u80fd\u6027\u3002<\/p>\n<p>\u5728\u5668\u4ef6\u5c42\u548c\u886c\u5e95\u4e4b\u95f4\u5f15\u5165\u7f13\u51b2\u5c42\u662f\u4e00\u79cd\u83b7\u5f97\u9ad8\u8d28\u91cf\u5668\u4ef6\u5c42\u7684\u5e7f\u6cdb\u4f7f\u7528\u7684\u6280\u672f\u3002\u4f8b\u5982\uff0c\u4f4e\u6e29\u7684grown buffer\u6291\u5236\u4e86\u5c9b\u72b6\u7684Volmer-Weber\u751f\u957f\uff0c\u540c\u65f6\u5728\u751f\u957f\u7684\u65e9\u671f\u9636\u6bb5\u4fc3\u8fdb\u4e86\u5f1b\u8c6b\u548c\u9010\u5c42\u751f\u957f\uff0c\u8fd9\u6709\u5229\u4e8e\u5728\u9ad8\u6e29\u4e0b\u9ad8\u8d28\u91cf\u7684\u76ee\u6807\u5916\u5ef6\u5c42\u7684\u540e\u7eed\u751f\u957f\u3002<sup>[4]<\/sup><\/p>\n<p>\u56fe2.\u00a0\u4f20\u7edf\u7684\u5916\u5ef6\u6280\u672f<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-199027 aligncenter\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2020\/03\/\u56fe\u72472-35.png\" alt=\"\" width=\"700\" height=\"341\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2020\/03\/\u56fe\u72472-35.png 700w, \/\/m.iemloyee.com\/wp-content\/uploads\/2020\/03\/\u56fe\u72472-35-300x146.png 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/><\/p>\n<p><strong><b>3. \u65b0\u5174\u7684\u5916\u5ef6\u751f\u957f\u65b9\u6cd5<\/b><\/strong><\/p>\n<p>\u867d\u7136\u4e0a\u8ff0\u4f20\u7edf\u7684\u5916\u5ef6\u65b9\u6cd5\u53ef\u4ee5\u5927\u5927\u964d\u4f4e\u4f4d\u9519\u5bc6\u5ea6\uff0c\u4f46\u662f\u5f02\u8d28\u5916\u5ef6\u5c42\u7684\u6750\u6599\u8d28\u91cf\u4ecd\u7136\u4e0d\u5982\u540c\u8d28\u5916\u5ef6\u5c42\uff0c\u7279\u522b\u662f\u5728\u9ad8\u5ea6\u7f51\u683c\u4e0d\u5339\u914d\u7684\u7cfb\u7edf\u4e2d\u3002\u6b64\u5916\uff0c\u539a\u7f13\u51b2\u5c42\u7684\u4f7f\u7528\u662f\u4e0d\u53ef\u53d6\u7684\uff0c\u56e0\u4e3a\u5b83\u6d88\u8017\u4e86\u589e\u957f\u6e90\uff0c\u964d\u4f4e\u4e86\u751f\u4ea7\u541e\u5410\u91cf\uff0c\u8fd9\u662f\u96c6\u4e2d\u4e8e\u5927\u89c4\u6a21\u751f\u4ea7\u7684\u884c\u4e1a\u7684\u4e00\u4e2a\u7f3a\u70b9\u3002\u6b64\u5916\uff0c\u7531\u4e8e\u70ed\u81a8\u80c0\u7cfb\u6570\u7684\u4e0d\u5339\u914d\uff0c\u5f53\u8bbe\u5907\u4ece\u751f\u957f\u6e29\u5ea6\u51b7\u5374\u5230\u5ba4\u6e29\u65f6\uff0c\u539a\u7684\u7f13\u51b2\u5c42\u4f1a\u4ea7\u751f\u989d\u5916\u7684\u5e94\u53d8\uff0c\u5bfc\u81f4\u6676\u5706\u5f2f\u66f2\u3001\u5f00\u88c2\u548c\u5206\u5c42\u3002\u56e0\u6b64\uff0c\u9700\u8981\u521b\u65b0\u7684\u65b9\u6cd5\u6765\u514b\u670d\u8fd9\u4e9b\u4e25\u683c\u7684\u5916\u5ef6\u6676\u683c\u5339\u914d\u89c4\u5219\uff0c\u63d0\u9ad8\u53ef\u5236\u9020\u6027\u548c\u53ef\u91c7\u7528\u7387\u3002\u5728\u8fd9\u4e00\u8282\u4e2d\uff0c\u6211\u4eec\u5c06\u6982\u8ff0\u51e0\u79cd\u7528\u4e8e\u751f\u4ea7\u5927\u9762\u79ef\u5355\u6676\u5916\u5ef6\u8584\u819c\u7684\u65b0\u5174\u7684\u5916\u5ef6\u6280\u672f\uff0c\u5b83\u4eec\u4e0d\u540c\u4e8e\u524d\u4e00\u8282\u4e2d\u8ba8\u8bba\u7684\u4f20\u7edf\u6280\u672f\u3002\u6211\u4eec\u5c06\u5176\u5206\u4e3a\u4e8c\u7ef4\u6750\u6599\u8f85\u52a9\u5916\u5ef6(\u56fe3a)\u548c\u51e0\u4f55\u5b9a\u4e49\u7684\u5916\u5ef6\u6280\u672f(\u56fe3b)\u3002\u524d\u8005\u5229\u7528\u4e8c\u7ef4\u6750\u6599\u886c\u5e95\u7684\u5149\u6ed1\u8868\u9762\uff0c\u53ef\u4ee5\u5e2e\u52a9\u5728\u5c06\u4f4d\u9519\u5f15\u5165\u6676\u4f53\u4e4b\u524d\u653e\u677e\u8584\u819c\uff0c\u800c\u540e\u8005\u53ef\u4ee5\u5728\u5176\u4e09\u7ef4\u7ed3\u6784\u4e2d\u5b9e\u73b0\u4f4d\u9519\u7684geometrical filtering\u3002<\/p>\n<p>\u8303\u5fb7\u74e6\u5c14\u65af\u5916\u5ef6\u6280\u672f\u662f\u4e00\u79cd\u4e8c\u7ef4\u6750\u6599\u8f85\u52a9\u5916\u5ef6\u6280\u672f\uff0c\u8fd1\u5e74\u6765\u56e0\u5176\u6676\u683c\u5931\u914d\u5927\u4e8e60%\u7684\u5f02\u8d28\u5916\u5ef6\u8584\u819c\u751f\u957f\u7684\u53ef\u80fd\u6027\u800c\u53d7\u5230\u4eba\u4eec\u7684\u5173\u6ce8\u3002vdWE\u6700\u521d\u662f\u7531Koma\u7b49\u4eba\u53d1\u73b0\u7684\u3002<sup>[5, 6]<\/sup>vdWE\u662f\u4e00\u79cd\u5728\u4e8c\u7ef4\u548c\u4e09\u7ef4\u6750\u6599\u4e0a\u8fdb\u884c\u5916\u5ef6\u7684\u65b9\u6cd52D\u6750\u6599\u62163D\u6750\u6599\u8868\u9762\u6709\u949d\u5316\u60ac\u7a7a\u952e\u7684\u8868\u9762\u3002\u5757\u4f532D\u6750\u6599\u8868\u9762\u6ca1\u6709\u60ac\u7a7a\u952e\uff0c\u9760\u975e\u5e38\u5f31\u7684vdW\u529b\u5c06\u5176\u7ed3\u5408\u5728\u4e00\u8d77\u3002\u56e0\u6b64\uff0c\u5916\u5ef6\u5e94\u53d8\u53ef\u4ee5\u5728\u5149\u6ed1\u76842D\u8868\u9762\u4e0a\u7acb\u5373\u677e\u5f1b\uff0c\u4ece\u800c\u5141\u8bb8\u5728\u8868\u9762\u4e0a\u5927\u91cf\u7684\u7f51\u683c\u9519\u914d\u6750\u6599\u7684\u751f\u957f\u3002\u7531\u4e8e\u5927\u591a\u6570\u4e8c\u7ef4\u6750\u6599\u90fd\u662f\u516d\u8fb9\u5f62\u6676\u683c\uff0c\u56e0\u6b64\u5177\u6709\u76f8\u4f3c\u6676\u683c\u7ed3\u6784\u7684\u5757\u72b6\u6750\u6599\uff0c\u5982III-N\u6750\u6599\uff0c\u8868\u73b0\u51fa\u4e86\u7a33\u5b9a\u548c\u9ad8\u8d28\u91cf\u7684\u751f\u957f\u3002<\/p>\n<p>\u4f7f\u7528\u8fd9\u4e9b\u65b9\u6cd5\u63d0\u9ad8\u6750\u6599\u8d28\u91cf\u6240\u5e26\u6765\u7684\u597d\u5904\u5e76\u4e0d\u8db3\u4ee5\u8bc1\u660e\u5728\u5de5\u4e1a\u89c4\u6a21\u4e0a\u5b9e\u65bd\u8fd9\u4e9b\u65b9\u6cd5\u6240\u9700\u8981\u7684\u989d\u5916\u65f6\u95f4\u548c\u6210\u672c\u662f\u5408\u7406\u7684\u3002\u7136\u800c\uff0c\u968f\u7740Si\u4e0a\u4e0d\u540c\u6750\u6599\u7684\u5f02\u8d28\u96c6\u6210\u53d8\u5f97\u8d8a\u6765\u8d8a\u91cd\u8981\uff0c\u6211\u4eec\u76f8\u4fe1\u8fd9\u4e9b\u65b9\u6cd5\u5c06\u88ab\u91cd\u65b0\u5ba1\u89c6\u548c\u6539\u8fdb\uff0c\u4ee5\u66f4\u5feb\u7684\u4ea7\u91cf\u548c\u66f4\u4f4e\u7684\u6210\u672c\u3002<\/p>\n<p>\u56fe3. \u5148\u8fdb\u7684\u5916\u5ef6\u6280\u672f<sup>[7, 8]<\/sup><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-199028 aligncenter\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2020\/03\/\u56fe\u72473-34.png\" alt=\"\" width=\"700\" height=\"691\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2020\/03\/\u56fe\u72473-34.png 700w, \/\/m.iemloyee.com\/wp-content\/uploads\/2020\/03\/\u56fe\u72473-34-300x296.png 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/><\/p>\n<p><strong><b>4. \u901a\u8fc7\u5916\u5ef6lift off\u548c\u5c42\u8f6c\u79fb\u5b9e\u73b0\u5f02\u8d28\u96c6\u6210<\/b><\/strong><\/p>\n<p>\u5916\u5ef6lift-off\u6280\u672f\u5728\u5236\u9020\u8d85\u8584\u3001\u67d4\u6027\u3001\u8f7b\u91cf\u5316\u3001\u4e09\u7ef4\u4e00\u4f53\u5316\u7684\u7ed3\u6784\u4e2d\u53d1\u6325\u7740\u8d8a\u6765\u8d8a\u91cd\u8981\u7684\u4f5c\u7528\u3002\u5916\u5ef6\u6280\u672f\u7684\u4e3b\u8981\u597d\u5904\u6709\u4e24\u65b9\u9762:\u5b83\u5141\u8bb8\u5bf9\u4e0d\u540c\u7684\u6750\u6599\u8fdb\u884c\u5f02\u6784\u96c6\u6210\uff0c\u5426\u5219\u65e0\u6cd5\u5c06\u8fd9\u4e9b\u6750\u6599\u96c6\u6210\u5728\u4e00\u8d77\u5b9e\u73b0\u6269\u5c55\u529f\u80fd\uff1b\u5b83\u5141\u8bb8\u886c\u5e95\u88ab\u91cd\u590d\u4f7f\u7528\uff0c\u8fd9\u5927\u5927\u964d\u4f4e\u4e86\u8bbe\u5907\u7684\u5236\u9020\u6210\u672c\u3002\u5230\u76ee\u524d\u4e3a\u6b62\uff0c\u7814\u7a76\u4eba\u5458\u5df2\u7ecf\u5728\u5de5\u4e1a\u89c4\u6a21\u4e0a\u5f00\u53d1\u4e86\u51e0\u79cdlift-off\u6280\u672f\u3002\u5316\u5b66lift-off\u662f\u4e00\u79cd\u901a\u8fc7\u5728\u6709\u6e90\u5668\u4ef6\u5c42\u548c\u886c\u5e95\u4e4b\u95f4\u63d2\u5165\u53ef\u9009\u62e9\u6027\u8680\u523b\u7684\u727a\u7272\u5c42\u6765\u5236\u5907\u72ec\u7acb\u5f0f\u5916\u5ef6\u8584\u819c\u7684\u65b9\u6cd5\u3002\uff08\u56fe4a\uff09<\/p>\n<p>\u6fc0\u5149lift-off\u662f\u4e00\u79cd\u5229\u7528\u51c6\u5206\u5b50\u6fc0\u5149\u5c06\u5916\u5ef6\u5c42\u4ece\u900f\u660e\u57fa\u5e95(\u5982\u84dd\u5b9d\u77f3\u6216\u78b3\u5316\u7845)\u4e2d\u5206\u79bb\u51fa\u6765\u7684\u6280\u672f\u3002\uff08\u56fe4b\uff09\u8be5\u65b9\u6cd5\u5229\u7528\u77ed\u6ce2\u957f\u6fc0\u5149\u88abGaN\u819c\u5438\u6536\uff0c\u5c06\u886c\u5e95\/GaN\u754c\u9762\u5206\u89e3\u6210\u91d1\u5c5eGa\u548cN2\u6c14\u4f53\uff0c\u52a0\u70ed\u5230Ga\u7194\u70b9\u4ee5\u4e0a(30\u00b0C)\uff0c\u5c06epilayer\u4ece\u57fa\u4f53\u4e2d\u5206\u79bb\u51fa\u6765\u3002\u4f46\u662f\uff0c\u7531\u4e8e\u6fc0\u5149\u6fc0\u53d1\u65f6\u5728\u754c\u9762\u5904\u4ea7\u751f\u7684\u8bf1\u5bfc\u7b49\u79bb\u5b50\u4f53\uff0c\u4f7f\u886c\u5e95\u8868\u9762\u4ea7\u751f\u4e86\u7c97\u7cd9\u5ea6\uff0c\u7c97\u7cd9\u5ea6\u8303\u56f4\u4e3a60 ~ 90nm\u3002<sup>[9]<\/sup>\u56e0\u6b64\uff0c\u540e\u7eed\u7684\u5916\u5ef6\u5fc5\u987b\u7ecf\u8fc7\u5316\u5b66\u548c\u673a\u68b0\u629b\u5149\u3002\u8fd9\u79cd\u6280\u672f\u5bf9\u4e8e\u751f\u957f\u5728\u9ad8\u80fd\u5e26\u9699\u886c\u5e95\u4e0a\u7684\u5916\u5ef6\u8584\u819c\u6765\u8bf4\u662f\u5feb\u901f\u548c\u7a33\u5b9a\u7684\uff0c\u4f46\u56e0\u6b64\u5728\u6750\u6599\u7684\u53ef\u80fd\u8303\u56f4\u65b9\u9762\u53d7\u5230\u9650\u5236\u3002\u5c3d\u7ba1\u5982\u6b64\uff0c\u5728\u8fc7\u53bb\u7684\u51e0\u5e74\u91cc\uff0c\u9ad8\u80fd\u5e26\u9699\u6750\u6599\u5728\u91cf\u5b50\u8ba1\u7b97\u3001\u7535\u529b\u7535\u5b50\u548c\u9ad8\u6548\u6fc0\u5149\u7b49\u9886\u57df\u7684\u5e94\u7528\u8d8a\u6765\u8d8a\u53d7\u5230\u5173\u6ce8\uff0c\u8fd9\u53ef\u80fd\u4f1a\u4f7f\u9ad8\u80fd\u5e26\u9699\u7535\u5b50\u548c\u5149\u7535\u5b50\u5728\u5355\u4e00\u5e73\u53f0\u4e0a\u5b9e\u73b0\u5782\u76f4\u96c6\u6210\u3002<\/p>\n<p>\u673a\u68b0\u5265\u79bb\u662f\u4e00\u79cd\u5728\u5fae\u7c73\u539a\u5ea6\u8303\u56f4\u5185\u5236\u9020\u8584\u819c\u7684\u65b9\u6cd5\uff0c\u5728\u8fd9\u79cd\u65b9\u6cd5\u4e2d\uff0c\u91d1\u5c5e\u5e94\u529b\u5c42(\u901a\u5e38\u662f\u539a\u7684\u954d\u819c)\u88ab\u7528\u6765\u5f15\u53d1\u5e73\u884c\u4e8e\u886c\u5e95\u7684\u88c2\u7eb9\u3002\uff08\u56fe4c\uff09\u673a\u68b0\u5265\u843d\u5df2\u5728IBM\u7684Si\u3001Ge\u3001GaAs\u548cGaN\u57fa\u677f\u4e0a\u5f97\u5230\u8bc1\u660e\uff0c\u4ee5\u751f\u6210\u8584\u819cCMOS\u7535\u8def\uff0c<sup>[10]<\/sup>\u592a\u9633\u80fd\u7535\u6c60<sup>[11]<\/sup>\u548c\u53d1\u5149\u4e8c\u6781\u7ba1<sup>[12]<\/sup>\u3002\u4ece\u5de5\u827a\u63cf\u8ff0\u4e2d\u53ef\u4ee5\u63a8\u65ad\uff0c\u673a\u68b0\u5265\u79bb\u662f\u4e00\u79cd\u76f8\u5bf9\u7c97\u7cd9\u7684\u5de5\u827a\uff0c\u5b83\u4ea7\u751f\u7684\u8584\u819c\u539a\u5ea6\u5728\u51e0\u767e\u7eb3\u7c73\u5230\u51e0\u5fae\u7c73\u8303\u56f4\u5185\uff0c\u800c\u886c\u5e95\u8868\u9762\u7684\u7c97\u7cd9\u5ea6\u4e0e\u5176\u4ed6\u5916\u5ef6lift-off\u6280\u672f\u76f8\u6bd4\u662f\u6700\u7c97\u7cd9\u7684\u3002<\/p>\n<p>2DLT\u6280\u672f\u5229\u7528\u4e86vdWE\u548c\u5916\u5ef6\u6280\u672f\u7684\u4f18\u70b9\u6765\u751f\u6210free-standing\u5355\u6676\u819c\u3002\u8fd9\u79cd\u65b9\u6cd5\u662f\u901a\u8fc7vdWE\u548c\u5916\u5ef6\u4e0e\u4e8c\u7ef4\u6750\u6599\u8f85\u52a9\u8f6c\u79fb\u6280\u672f\u76f8\u7ed3\u5408\u5b9e\u73b0\u7684\uff0c\u5176\u4e2d\u4e8c\u7ef4\u6750\u6599\u7684\u5f31vdW\u7ed3\u5408\u4fc3\u8fdb\u4e86\u5916\u5ef6\u751f\u957f\u8584\u819c\u4ece\u886c\u5e95\u4e0a\u5265\u79bb\uff0c\u5728\u5265\u79bb\u540e\u7559\u4e0b\u4e00\u4e2a\u539f\u59cb\u7684\u8868\u9762\u3002<strong><b>\u8fd9\u4e2a\u8fc7\u7a0b\u7c7b\u4f3c\u4e8e\u673a\u68b0\u5265\u843d\uff0c\u4f46\u6709\u51e0\u4e2a\u4f18\u70b9\uff1a<\/b><\/strong>\u9996\u5148\uff0c\u5265\u843d\u6df1\u5ea6\u662f\u7531\u4e8c\u7ef4\u6750\u6599\u7684\u4f4d\u7f6e\u51b3\u5b9a\u7684\uff0c\u800c\u4e0d\u662f\u7531\u91d1\u5c5e\u5e94\u529b\u6e90\u819c\u7684\u5e94\u529b\u51b3\u5b9a\u7684\uff0c\u56e0\u6b64\u66f4\u5bb9\u6613\u63a7\u5236\uff1b\u5176\u6b21\uff0c\u4e0e\u5265\u79bb\u76f8\u6bd4\uff0c\u5b83\u9700\u8981\u66f4\u5c11\u7684\u5e94\u529b\uff0c\u800c\u4e14\u66f4\u5bb9\u6613\u5728\u5265\u79bb\u540e\u53bb\u9664\u91d1\u5c5e\uff1b\u7b2c\u4e09\uff0c\u7531\u4e8e\u4e8c\u7ef4\u7f13\u51b2\u5c42\u4e0d\u5141\u8bb8epilayer\u5c42\u548c\u886c\u5e95\u4e4b\u95f4\u6709\u5171\u4ef7\u952e\uff0c\u6240\u4ee5\u5206\u79bb\u754c\u9762\u5177\u6709\u539f\u5b50\u7ea7\u7684\u9510\u5ea6\u3002\u56e0\u6b64\uff0c\u53ef\u80fd\u4e0d\u9700\u8981\u6676\u5706\u7ffb\u65b0\u8fc7\u7a0b\uff0c\u4f8b\u5982\u5316\u5b66\u629b\u5149\u548c\u673a\u68b0\u629b\u5149\u3002\u7136\u800c\uff0c\u5728\u5de5\u4e1a\u4e0a\u91c7\u7528\u8fd9\u79cd\u6280\u672f\u4ecd\u7136\u5b58\u5728\u4e00\u4e9b\u6311\u6218\u3002\u7845\u548c\u9517\u7b49\u5143\u7d20\u534a\u5bfc\u4f53\u7531\u4e8e\u5176\u952e\u7684\u975e\u79bb\u5b50\u6027\u800c\u4e0d\u80fd\u5728\u5916\u5ef6\u751f\u957f\u3002\u6b64\u5916\uff0c\u5265\u79bb\u7684\u9762\u79ef\u4ea7\u91cf\u53d6\u51b3\u4e8e\u8f6c\u79fb\u7684\u77f3\u58a8\u70ef\u5c42\u7684\u8d28\u91cf\u3002\u5982\u679c\u8f6c\u79fb\u77f3\u58a8\u70ef\u540e\u51fa\u73b0\u660e\u663e\u7684\u6495\u88c2\u3001\u5b54\u6d1e\u6216\u8936\u76b1\uff0c\u5219\u6750\u6599\u8d28\u91cf\u548c\u5265\u79bb\u886c\u5e95\u7684\u5e73\u6574\u5ea6\u90fd\u4f1a\u4e0b\u964d\u3002<\/p>\n<p>\u56fe4. \u5916\u5ef6lift-off\u6280\u672f<sup>[13-16]<\/sup><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-199029 aligncenter\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2020\/03\/\u56fe\u72474-31.png\" alt=\"\" width=\"700\" height=\"499\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2020\/03\/\u56fe\u72474-31.png 700w, \/\/m.iemloyee.com\/wp-content\/uploads\/2020\/03\/\u56fe\u72474-31-300x214.png 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/><\/p>\n<p><strong><b>5. \u5148\u8fdb\u5916\u5ef6\u6280\u672f\u548clift off\u6280\u672f\u7684\u5e94\u7528<\/b><\/strong><\/p>\n<p>IBM\u516c\u53f8\u7684TASE\u65b9\u6cd5\u662f\u4e00\u79cd\u5148\u8fdb\u7684\u9009\u62e9\u6027\u751f\u957f\u6280\u672f\uff0c\u4f7f\u7528\u7684\u662f\u4e9a100 nm\u7684\u6c27\u5316\u7269\u63a9\u819c\uff0c\u8be5\u65b9\u6cd5\u5df2\u88ab\u7528\u4e8e\u6f14\u793a\u591a\u79cdIII-V\u5668\u4ef6\u5728CMOS\u4e0a\u7684\u65e0\u7f3a\u9677\u96c6\u6210\u3002\u4ee5InGaAs n\u578b\u573a\u6548\u5e94\u6676\u4f53\u7ba1(nFET)\u5668\u4ef6\u76843D\u5355\u7247\u96c6\u6210\u4e3a\u4f8b\uff0c\u5728SiGe-OI(\u7edd\u7f18\u4f53\u4e0a)\u77ed\u901a\u9053p\u578bFET (pFET)\u4e0a\u751f\u957f\u548c\u5236\u5907\uff0c\u4ee5\u5b9e\u73b0\u5728\u4f9b\u7535\u7535\u538bV<sub>DD<\/sub>\u00a0= 0.25 V\u4e0b\u5de5\u4f5c\u7684\u6700\u5148\u8fdb\u7684CMOS\u9006\u53d8\u5668\u3002\uff08\u56fe5a-c\uff09<sup>[17, 18]<\/sup>\u8fd9\u4e9b\u6f14\u793a\u6709\u529b\u5730\u8bc1\u660e\u4e86\u57fa\u4e8e\u7845\u57fa\u5e73\u53f0\u7684\uff0c\u7528\u4e8e\u5355\u5c42\u5806\u53e0\u7684\u591a\u5c42\u5149\u5b50\u5b66\u548c\u7535\u5b50\u7535\u8def\u7684\u4e09\u7ef4\u96c6\u6210III-V\u548cIII-N\u5668\u4ef6\u7684\u53ef\u80fd\u6027\u3002<\/p>\n<p>\u56fe5. \u5148\u8fdb\u7684\u5f02\u8d28\u5916\u5ef6\u6280\u672f\u5728\u7845\u4e0a\u5f02\u8d28\u96c6\u6210\u7684\u5b9e\u4f8b<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-199030 aligncenter\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2020\/03\/\u56fe\u72475-29.png\" alt=\"\" width=\"700\" height=\"235\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2020\/03\/\u56fe\u72475-29.png 700w, \/\/m.iemloyee.com\/wp-content\/uploads\/2020\/03\/\u56fe\u72475-29-300x101.png 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/><\/p>\n<p>\u7c7b\u4f3c\u7684\u94c1\u7535\u6750\u6599\uff0cPb(Zr<sub>0.2<\/sub>Ti<sub>0.8<\/sub>)O<sub>3<\/sub>\u00a0(PZT)\uff0c\u4e5f\u88ab\u5916\u5ef6\u751f\u957f\u5e76\u8f6c\u79fb\u5230\u6676\u4f53\u7ba1\u4e0a\uff0c\u4ee5\u521b\u5efa\u4e00\u4e2a\u5355\u6676PZT\u95e8\u63a7\u7845\u6676\u4f53\u7ba1\uff0c\u5141\u8bb8\u901a\u8fc7PZT\u5c42\u7684\u6781\u5316\u6765\u63a7\u5236\u901a\u9053\u7535\u8377\u3002\uff08\u56fe6\uff09<sup>[19]<\/sup><\/p>\n<p>\u56fe6.\u00a0\u5148\u8fdb\u7684\u5f02\u8d28\u5916\u5ef6\u6280\u672f\u5728\u7845\u4e0a\u5f02\u8d28\u96c6\u6210\u7684\u5b9e\u4f8b<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-199031 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loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-199032 aligncenter\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2020\/03\/\u56fe\u72477-24.png\" alt=\"\" width=\"700\" height=\"149\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2020\/03\/\u56fe\u72477-24.png 700w, \/\/m.iemloyee.com\/wp-content\/uploads\/2020\/03\/\u56fe\u72477-24-300x64.png 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/><\/p>\n<p><strong><b>6. \u5c55\u671b<\/b><\/strong><\/p>\n<p>\u5728\u5782\u76f4\u5806\u53e0\u591a\u529f\u80fd\u96c6\u6210\u7535\u8def\u7684\u6676\u5706\u7247\u4e0a\u751f\u957f\u5668\u4ef6\u54c1\u8d28\u7684\u5916\u5ef6\u5c42\uff0c\u5c06\u4f1a\u5927\u5e45\u51cf\u5c11\u96c6\u6210\u7535\u8def\u7684\u8db3\u8ff9\u3002\u5b83\u8fd8\u5c06\u5141\u8bb8\u4e00\u4f53\u5f0f\u82af\u7247\u5e73\u53f0\u88ab\u521b\u9020\u51fa\u6765\uff0c\u4f7f\u5149\u5b50\u7535\u8def\u4e0e\u6700\u5148\u8fdb\u7684\u4f20\u611f\u5668\u3001\u6676\u4f53\u7ba1\u548c\u7531\u795e\u7ecf\u5f62\u6001\u82af\u7247\u79ef\u6781\u5904\u7406\u7684\u8bb0\u5fc6\u5143\u4ef6\u76f8\u7ed3\u5408\u3002\u867d\u7136\u91c7\u7528\u5148\u8fdb\u7684\u5916\u5ef6\u6280\u672f\u7684\u5355\u7247\u96c6\u6210\u662f\u8026\u5408\u4e0d\u540c\u6750\u6599\u7684\u6700\u7b80\u5355\u65b9\u6cd5\uff0c\u4f46\u5f02\u8d28\u5916\u5ef6\u751f\u957f\u7684\u5916\u5ef6\u8584\u819c\u7684\u6750\u6599\u8d28\u91cf\u4ecd\u7136\u4e0d\u7406\u60f3\u3002\u968f\u7740\u5916\u5ef6\u6280\u672f\u7684\u8fdb\u4e00\u6b65\u53d1\u5c55\uff0c\u5b83\u53ef\u4ee5\u751f\u4ea7\u51fa\u8584\u7684\u5355\u6676\u72ec\u7acb\u5f0f\u67d4\u6027\u8584\u819c\uff0c\u6ee1\u8db3\u67d4\u6027\u3001\u5171\u5f62\u548c\u591a\u529f\u80fd\u7535\u5b50\u5668\u4ef6\u5728\u5de5\u4e1a\u4e0a\u7684\u5e94\u7528\u8981\u6c42\uff0c\u6bd4\u5982\u7269\u8054\u7f51\u3001\u667a\u6167\u57ce\u5e02\u3001\u667a\u80fd\u6c7d\u8f66\u548c\u53ef\u7a7f\u6234\u7535\u5b50\u4ea7\u54c1\u3002<\/p>\n<p><strong><b>\u53c2\u8003\u6587\u732e\uff1a<\/b><\/strong><\/p>\n<p>[1] 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Chun, J. et\u00a0al., Scripta Mater. 2014, 77, 13\u201316.<\/p>\n<p>[17]\u00a0V. Deshpande, et\u00a0al., Solid State Electron. 2017, 128, 87\u201391.<\/p>\n<p>[18] V. Deshpande, et\u00a0al.,Tech. Dig. Int. Electron Devices Meet. 2015, 8.8.1\u20138.8.4.<\/p>\n<p>[19]\u00a0S. R. Bakaul, et\u00a0al., Nat. Commun. 2016, 7, 10547.<\/p>\n<p>[20] R. H. Kim, et\u00a0al. Nat. Mater. 2010, 9, 929\u2013937.<\/p>\n<p>[21]\u00a0K. Lee, et al., Light Sci. Appl. 2015, 4, e288.<\/p>\n<p>[22]\u00a0M. M. Shulaker, et\u00a0al., Nature 2017, 547, 74\u201378.<\/p>\n<p>\u672c\u6587\u7531Nano-optic\u4f9b\u7a3f\u3002<\/p>\n<p>\u6b22\u8fce\u5927\u5bb6\u5230\u6750\u6599\u4eba\u5ba3\u4f20\u79d1\u6280\u6210\u679c\u5e76\u5bf9\u6587\u732e\u8fdb\u884c\u6df1\u5165\u89e3\u8bfb\uff0c\u6295\u7a3f\u90ae\u7bb1: tougao@cailiaoren.com.<\/p>\n<p>\u6295\u7a3f\u4ee5\u53ca\u5185\u5bb9\u5408\u4f5c\u53ef\u52a0\u7f16\u8f91\u5fae\u4fe1\uff1acailiaorenVIP\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>1. \u524d\u8a00 \u5916\u5ef6\u6280\u672f\u2014\u2014\u5728\u6676\u4f53\u53d6\u5411\u7684\u6676\u5706\u7247\u4e0a\u751f\u957f\u5355\u6676\u8584\u819c\u7684\u6280\u672f\u2014\u2014\u5df2\u7ecf\u6210\u4e3a\u5728\u5404\u79cd\u65e0\u673a\u886c\u5e95\u4e0a\u5f00\u53d1\u73b0\u4ee3\u56fa\u6001\u7535\u5b50\u548c\u5149\u5b50\u5668\u4ef6\u7684\u5173\u952e\u6280\u672f\u3002\u8fd9\u4e2a\u8fc7\u7a0b\u53ef\u4ee5\u662f\u5747\u5300\u7684(\u5728\u540c\u4e00\u6750\u6599&#8230;<\/p>\n","protected":false},"author":10213,"featured_media":199005,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1187],"tags":[],"class_list":["post-199025","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-zhuanlan"],"_links":{"self":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts\/199025"}],"collection":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/users\/10213"}],"replies":[{"embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=199025"}],"version-history":[{"count":2,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts\/199025\/revisions"}],"predecessor-version":[{"id":199112,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts\/199025\/revisions\/199112"}],"wp:featuredmedia":[{"embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/media\/199005"}],"wp:attachment":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=199025"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=199025"},{"taxonomy":"post_tag","embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=199025"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}