{"id":187962,"date":"2019-10-27T06:30:13","date_gmt":"2019-10-26T22:30:13","guid":{"rendered":"\/\/m.iemloyee.com\/?p=187962"},"modified":"2019-10-26T21:12:49","modified_gmt":"2019-10-26T13:12:49","slug":"%e3%80%90%e5%ae%a1%e7%a8%bf%e5%b7%b2%e5%9b%9e%e5%a4%8d%e3%80%91%e5%8d%97%e4%ba%ac%e5%a4%a7%e5%ad%a6%e5%88%98%e6%96%8c%e6%95%99%e6%8e%88adv-mater-%e5%9f%ba%e4%ba%8eiii%e5%9e%8b%e6%b0%ae%e5%8c%96","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=187962","title":{"rendered":"\u5357\u4eac\u5927\u5b66\u5218\u658c\u6559\u6388Adv. Mater.: \u57fa\u4e8eIII\u578b\u6c2e\u5316\u7269\u534a\u5bfc\u4f53\u7684\u6df7\u5408\u7ed3\u6784\u5149\u53d1\u5c04\u5668\u548c\u7d2b\u5916\u65e5\u76f2\u5149\u7535\u4e8c\u6781\u7ba1\u63a2\u6d4b\u5668"},"content":{"rendered":"

\u3010\u5f15\u8a00<\/strong>\u3011<\/p>\n

III\u65cf\u6c2e\u5316\u7269\u662f\u5177\u6709\u76f4\u63a5\u5e26\u9699\u7684\u72ec\u7279\u534a\u5bfc\u4f53\u6750\u6599\u7cfb\u7edf\uff0c\u8986\u76d6\u4ece\u6df1\u7d2b\u5916\uff08DUV\uff09\u5230\u8fd1\u7ea2\u5916\u7684\u5bbd\u5149\u8c31\u8303\u56f4\u3002\u5728\u8fc7\u53bb\u7684\u51e0\u5341\u5e74\u4e2d\uff0c\u57fa\u4e8eIII\u65cf\u6c2e\u5316\u7269\u5149\u7535\u5b50\u5668\u4ef6\u53d6\u5f97\u4e86\u5de8\u5927\u7684\u8fdb\u6b65\uff0c\u5c24\u5176\u662f\u65e5\u672c\u4e09\u4f4d\u79d1\u5b66\u5bb6\u53d1\u660e\u4e86\u9ad8\u6548\u8282\u80fd\u7684\u56fa\u6001\u7167\u660e\u84dd\u8272\u53d1\u5149\u4e8c\u6781\u7ba1\uff08LED\uff09\u3002\u5982\u4eca\uff0c\u5b83\u5df2\u5e26\u6765\u4e86\u6570\u767e\u4ebf\u7f8e\u5143LED\u7167\u660e\u5e02\u573a\u3002\u8fd1\u5e74\u6765\uff0cmicro-LED\u7b49\u65b0\u5174\u6280\u672f\u5728\u4e0b\u4e00\u4ee3\u9ad8\u6027\u80fd\u663e\u793a\u5668\u548c\u667a\u80fd\u53ef\u7a7f\u6234\u6d88\u8d39\u7535\u5b50\u4ea7\u54c1\u7684\u5e94\u7528\u4e2d\u663e\u793a\u51fa\u5de8\u5927\u6f5c\u529b\u3002\u53e6\u4e00\u65b9\u9762\uff0c\u7531\u4e8eAlN\u548cGaN\u7ec4\u6210\u7684\u6c2e\u5316\u94dd\u9553\uff08AlGaN\uff09\u4e09\u5143\u6750\u6599\u5177\u6709\u4f18\u5f02\u7684\u5149\u7535\u6027\u80fd\uff0c\uff0c\u7d2b\u5916LED\u548c\u5149\u7535\u63a2\u6d4b\u5668\u4ef6\u5bf9\u4e8e\u73af\u5883\u76d1\u6d4b\uff0c\u533b\u5b66\u8bca\u65ad\u7b49\u65b0\u5e94\u7528\u8d8a\u6765\u8d8a\u91cd\u8981\u3002AlGaN\u57fa\u7d2b\u5916LED\u548c\u9ad8\u7075\u654f\u5ea6\u7684\u7d2b\u5916\u5149\u7535\u68c0\u6d4b\u5668\u5f15\u8d77\u4e86\u91cd\u70b9\u5173\u6ce8\u3002\u76ee\u524d\uff0c\u8fd9\u4e00\u9886\u57df\u4ecd\u7136\u5b58\u5728\u4e00\u4e9b\u56f0\u96be\u548c\u6311\u6218\uff0c\u4f8b\u5982AlGaN\u4e0e\u5f02\u8d28\u886c\u5e95\u4e4b\u95f4\u7684\u6676\u683c\u5931\u914d\u8f83\u5927\uff0c\u7528\u4e8e\u9ad8Al\u6210\u5206\u7684AlGaN\u5408\u91d1\u4e2dAl\u7684\u63ba\u5165\u6548\u7387\u4f4e\uff0c\u4ee5\u53ca\u9ad8\u5bfc\u7535\u6027p\u578bAlGaN\u7684\u56f0\u96be\uff0c\u9650\u5236\u4e86III\u65cf\u6c2e\u5316\u7269\u7684\u7d2b\u5916\u5149\u7535\u5b50\u5668\u4ef6\u7684\u6027\u80fd\u6539\u8fdb\u63d0\u5347\u3002<\/p>\n

\u3010\u6210\u679c\u7b80\u4ecb<\/strong>\u3011<\/p>\n

\u8fd1\u65e5\uff0c\u5357\u4eac\u5927\u5b66\u5218\u658c\u6559\u6388<\/strong>\u5728\u8fd9\u7bc7\u7814\u7a76\u8fdb\u5c55\u7efc\u8ff0\u4e2d\u603b\u7ed3\u4e86\u5357\u4eac\u5927\u5b66\u5bbd\u7981\u5e26\u534a\u5bfc\u4f53\u7814\u7a76\u56e2\u961f\u5728III\u65cf\u6c2e\u5316\u7269\u5149\u7535\u5b50\u5668\u4ef6\u7814\u53d1\u65b9\u9762\u7684\u6700\u65b0\u8fdb\u5c55\u3002\u7b2c\u4e00\u4e2a\u5177\u6709\u4ee3\u8868\u6027\u7684\u6210\u679c\u662f\u6f14\u793a\u4e86\u91c7\u7528\u7d2b\u5916\u7eb3\u7c73\u538b\u5370\uff08\u7eb3\u7c73\u538b\u5370\u5149\u523b\uff08NIL\uff09\uff09\u56fe\u6848\u5316\u6280\u672f\u5236\u9020\u7684\u9ad8\u6027\u80fd\u6df7\u5408\u578b\u5fae\u5b54\/\u7eb3\u7c73\u5b54\u53ef\u89c1\u5149LED\u3002InGaN\/GaN MQW\u548cCdSe\/ZnS\u6838\/\u58f3QD\u4e4b\u95f4\u7684\u975e\u8f90\u5c04\u5171\u632f\u80fd\u91cf\u8f6c\u79fb\uff08NRET\uff09\u989c\u8272\u8f6c\u6362\u4ecb\u8d28\u53ef\u4ea7\u751f\u7eff\u8272\/\u7ea2\u8272\u53d1\u5c04\u7684\u9ad8\u989c\u8272\u8f6c\u6362\u6548\u7387\uff08CCE\uff09\uff0c\u548c\u663e\u8272\u6307\u6570\uff08CRI\uff09\uff0c\u5e76\u5e94\u7528\u4e0eMicro-LED\u5668\u4ef6\u5236\u5907\u3002\u5176\u6b21\uff0c\u5229\u7528\u8868\u9762\u7b49\u79bb\u5b50\u4f53\u6fc0\u5143\u901a\u8fc7\u53d7\u6fc0\u8f90\u5c04\u7684\u8f90\u5c04\u653e\u5927\u7269\u7406\u673a\u5236\uff0c\u91c7\u7528\u6df7\u5408\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53\uff08MOS\uff09\u7ed3\u6784\u8bbe\u8ba1\u548c\u5236\u9020\u4e86\u4f4e\u9608\u503c\u7684\u7b49\u79bb\u5b50\u4f53\u7eb3\u7c73\u7ebf(NW)\u6fc0\u5149\u5668\u3002InGaN\/GaN\u6216AlGaN\/GaN NW\u662f\u901a\u8fc7NIL\u548c\u81ea\u4e0a\u800c\u4e0b\u7684\u523b\u8680\u5de5\u827a\u5236\u5907\u7684\uff0c\u83b7\u5f97\u4ece\u7eff\u5149\u81f3\u6df1\u7d2b\u5916UV-B\u7684\u6fc0\u5149\u53d1\u5c04\u3002\u7b2c\u4e09\uff0c\u62a5\u544a\u4e86\u5177\u6709\u72ec\u7acb\u5438\u6536\u548c\u500d\u589e\uff08SAM\uff09\u8bbe\u8ba1\u7ed3\u6784\u7684\u9ad8\u6027\u80fdAlGaN\u57fa\u65e5\u76f2\u7d2b\u5916\u96ea\u5d29\u5149\u7535\u4e8c\u6781\u7ba1\uff08APD\uff09\u63a2\u6d4b\u5668\u3002\u901a\u8fc7\u5f15\u5165\u6781\u5316\u7535\u573a\uff0c\u6cc4\u6f0f\u7535\u6d41\u663e\u7740\u964d\u4f4e\uff0c\u5e76\u4e14\u589e\u76ca\u8fbe\u5230\u4e86\u521b\u7eaa\u5f55\u76841.6\u00d7105<\/sup>\u3002\u6700\u540e\uff0c\u8bba\u6587\u5bf9\u57fa\u4e8eIII\u65cf\u6c2e\u5316\u7269\u7684\u5149\u7535\u5b50\u5668\u4ef6\u7684\u5e94\u7528\u524d\u666f\u4f5c\u4e86\u603b\u7ed3\u6027\u7684\u5c55\u671b\u3002\u8be5\u6210\u679c\u4ee5\u9898\u4e3a\u201c<\/strong>Hybrid Light Emitters and UV Solar-Blind Avalanche Photodiodes based on III-Nitride Semiconductors<\/strong>\u201d\u6700\u8fd1\u53d1\u8868\u5728<\/strong>Adv. Mater.<\/strong>\u4e0a<\/strong>\u3002<\/p>\n

\u3010\u56fe\u6587\u5bfc\u8bfb\u3011<\/strong><\/p>\n

Figure 1.<\/strong>InGaN\/GaN MQW<\/strong>\u8868\u5f81<\/strong><\/p>\n

\"\"<\/p>\n

a\uff09\u5177\u6709\u7eb3\u7c73\u7ebf(NW)\u9635\u5217\u76842\u82f1\u5bf8\u7d2b\/\u84dd\/\u7effInGaN\/GaN MQW\u6676\u7247\u7684\u5916\u89c2<\/p>\n

bc\uff09\u5206\u522b\u5177\u6709\u9876\u89c6\u56fe\u548c\u6a2a\u622a\u9762\u56fe\u7684\u7eff\u8272InGaN\/GaN\u692d\u5706\u5f62NW\u9635\u5217\u7684\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c\uff08SEM\uff09\u56fe\u50cf<\/p>\n

de\uff09\u4fef\u89c6\u7684InGaN\/GaN\u5706\u7eb3\u7c73\u7ebf\u548c\u7eb3\u7c73\u5149\u6805\u7684SEM\u56fe\u50cf<\/p>\n

Figure 2.LED<\/strong>\u6027\u80fd\u8868\u5f81<\/strong><\/p>\n

\"\"<\/p>\n

a\uff09\u6df7\u5408\u91cf\u5b50\u70b9\u96c6\u6210\u7684\u7eb3\u7c73\u5b54LED\u7684\u7ed3\u6784\u793a\u610f\u56fe<\/p>\n

b\uff09\u9ad8\u5ea6\u6709\u5e8f\u7684\u7eb3\u7c73\u5b54\u9635\u5217\u7684\u4fef\u89c6SEM\u56fe\u50cf<\/p>\n

c\uff09\u586b\u5145\u6709\u91cf\u5b50\u70b9\u7684\u7eb3\u7c73\u5b54\u7684\u6a2a\u622a\u9762SEM\u56fe\u50cf<\/p>\n

d\uff09CdSe\/ZnS\u6838\/\u58f3\u91cf\u5b50\u70b9\u7684\u900f\u5c04\u7535\u5b50\u663e\u5fae\u955c\u56fe\u50cf\u548c\u63d2\u56fe\u4e3a\u91cf\u5b50\u70b9\u9ad8\u5206\u8fa8\u7387\u56fe\u50cf<\/p>\n

Figure 3.LED<\/strong>\u5149\u8c31\u8868\u5f81<\/strong>\"\"<\/strong><\/p>\n

ab\uff09\u96c6\u6210\u4e86\u7eff\/\u6a59\/\u7ea2\u8272QD\u6df7\u5408\u7d2b\/\u84dd\u7eb3\u7c73\u5b54LED\u7684EL\u5149\u8c31<\/p>\n

c\uff09\u53d1\u5c04\u4e0d\u540c\u989c\u8272\u7684\u91cf\u5b50\u70b9(QD)\u96c6\u6210Micro-LED\u7684\u5916\u89c2\uff0cMicro<\/p>\n

d\uff09\u767d\u5149\u53d1\u5c04\u6df7\u5408LED\u7684\u7535\u81f4\u53d1\u5149(EL)\u5149\u8c31<\/p>\n

Figure 4.<\/strong>\u5668\u4ef6\u7684\u7ed3\u6784\u4e0e\u8868\u5f81<\/strong><\/p>\n

\"\"<\/p>\n

a\uff09\u6df7\u5408\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53\uff08MOS\uff09\u7ed3\u6784\u7684\u7b49\u79bb\u5b50\u4f53\u7eb3\u7c73\u7ebf(NW)\u6fc0\u5149\u5668\u7684\u793a\u610f\u56fe<\/p>\n

b\uff09\u5176FDTD\u7535\u78c1\u573a\u5206\u5e03\u6a21\u62df<\/p>\n

c\uff09\u5728\u4e0d\u540c\u7684\u5149\u6cf5\u6d66\u529f\u7387\u5bc6\u5ea6\u4e0b\u7684PL\u6fc0\u5c04\u5149\u8c31\u56fe\u3002<\/p>\n

Figure 5.AlGaN APD<\/strong>\u7684\u793a\u610f\u56fe<\/strong><\/p>\n

\"\"<\/p>\n

ab\uff09\u5e38\u89c4\u7ed3\u6784\u548c\u6781\u5316\u589e\u5f3a\u7ed3\u6784\u7684\u7d2b\u5916\u65e5\u76f2\u96ea\u5d29\u5149\u7535\u4e8c\u6781\u7ba1(APD)\u63a2\u6d4b\u5668<\/p>\n

c\uff09\u4e24\u79cd\u5668\u4ef6\u7ed3\u6784\u7684\u80fd\u5e26\u56fe<\/p>\n

d\uff09\u5728\u9ed1\u6697\u548c\u5149\u7167\u6761\u4ef6\u4e0b\uff0c\u6781\u5316\u589e\u5f3a\u578b\u548c\u4f20\u7edfAPD\u7ed3\u6784\u7684\u53cd\u504fI-V<\/em>\u66f2\u7ebf<\/p>\n

e\uff09\u6781\u5316\u589e\u5f3a\u578b\u548c\u4f20\u7edfAPD\u7ed3\u6784\u7684\u500d\u589e\u589e\u76ca\u66f2\u7ebf<\/p>\n

\u3010\u603b\u7ed3\u3011<\/strong><\/p>\n

\u5728\u8fc7\u53bb\u7684\u4e8c\u5341\u5e74\uff0c III\u65cf\u6c2e\u5316\u7269\u534a\u5bfc\u4f53\u7531\u4e8e\u5176\u4f18\u5f02\u548c\u4e0d\u53ef\u66ff\u4ee3\u7684\u7279\u6027\uff0c\u5728\u53ef\u89c1-\u7d2b\u5916\u5149\u7535\u5b50\u5668\u4ef6\u9886\u57df\u5df2\u7ecf\u53d6\u5f97\u4e86\u5de8\u5927\u6210\u5c31\u3002\u5f53\u524d\uff0c\u65b0\u5174\u7684\u57fa\u4e8e\u6c2e\u5316\u9553\uff08GaN\uff09\u7684\u5fae\u53d1\u5149\u4e8c\u6781\u7ba1\uff08LED\uff09\u6280\u672f\u53ef\u7528\u4e8e\u9ad8\u5206\u8fa8\u7387\u663e\u793a\uff0c\u800cUV\u5149\u68c0\u6d4b\u5219\u53ef\u7528\u4e8e\u73af\u5883\u76d1\u6d4b\uff0c\u5065\u5eb7\u548c\u533b\u7597\u5e94\u7528\uff0c\u5747\u5907\u53d7\u5173\u6ce8\u3002\u5728\u8fd9\u9879\u5de5\u4f5c\u4e2d\uff0c\u6211\u4eec\u5c55\u793a\u4e86\u901a\u8fc7\u5149\u523b\u548c\u7eb3\u7c73\u538b\u5370\u56fe\u6848\u6280\u672f\u5c06II-VI\u91cf\u5b50\u70b9\u96c6\u6210\u5728\u4e00\u8d77\u7684\u5fae\u578b\/\u7eb3\u7c73\u6df7\u5408LED\uff0c\u5e76\u5b9e\u73b0\u4e86\u9ad8\u6027\u80fd\u7684\u7ea2\u8272\/\u7eff\u8272\/\u84dd\u8272\u548c\u767d\u8272\u53d1\u5c04\u5fae\u7eb3\u5668\u4ef6\u3002\u5176\u6b21\uff0c\u8bbe\u8ba1\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53\u7ed3\u6784\u7684\u7b49\u79bb\u6fc0\u5143\u7eb3\u7c73\u6fc0\u5149\u5668\uff0c\u83b7\u5f97\u4e86\u4ece\u53ef\u89c1\u5149\u81f3\u6df1\u7d2b\u5916(Deep-UV)\u53ef\u8c03\u5149\u8c31\u8303\u56f4\u7684\u4f4e\u6fc0\u53d1\u9608\u503c\u7684\u60c5\u51b5\u4e0b\u4ea7\u751f\u6709\u6548\u7684\u6fc0\u5149\u3002\u6b64\u5916\uff0c\u901a\u8fc7\u8bbe\u8ba1\u72ec\u7279\u7684\u5438\u6536\u548c\u500d\u589e\u7ed3\u6784\uff0c\u5236\u5907\u83b7\u5f97\u4e86\u6027\u80fd\u5927\u5e45\u6539\u5584\u7684AlGaN\u57fa\u7d2b\u5916\u65e5\u76f2\u5149\u7535\u4e8c\u6781\u7ba1\uff08APD\uff09\u63a2\u6d4b\u5668\uff0c\u8fd9\u4e9bAPD\u8fbe\u5230\u4e861.6\u00d7105<\/sup>\u7684\u521b\u7eaa\u5f55\u7684\u589e\u76ca\u3002\u4ee5\u4e0a\u7eb3\/\u5fae\u7c73\u6df7\u5408LED\uff0c\u7eb3\u7c73\u6fc0\u5149\u5668\u548c\u6781\u5316\u589e\u5f3a\u578bAPD\u7684\u6700\u65b0\u8fdb\u5c55\u6709\u671b\u5f15\u9886III\u65cf\u6c2e\u5316\u7269\u57fa \u5149\u7535\u5b50\u5668\u4ef6\u5728\u672a\u6765\u7684\u521b\u65b0\u5e94\u7528\u3002<\/p>\n

\u6587\u732e\u94fe\u63a5<\/strong>\uff1aHybrid Light Emitters and UV Solar-Blind Avalanche Photodiodes based on III-Nitride Semiconductors<\/a>. Adv. Mater.<\/em>, 2019<\/strong>, DOI: 10.1002\/adma.201904354.<\/p>\n

 <\/p>\n

\u76f8\u5173\u53c2\u8003\u6587\u732e\uff1a<\/p>\n

[1] Z. Zhuang, X. Guo, G. G. Zhang, B. Liu, R. Zhang, T. Zhi, T. Tao, H. X. Ge, F. F. Ren, Z. L. Xie, Y. D. Zheng, Nanotechnology 2013<\/strong>, 24, 405303.<\/p>\n

[2] Z. Zhuang, X. Guo, B. Liu, F. R. Hu, J. P. Dai, Y. Zhang, Y. Li, T. Tao, T. Zhi, Z. L. Xie, H. X. Ge, X. Y. Wang, M. Xiao, T. Wang, Y. Shi, Y. D. Zheng, R. Zhang, Nanotechnology 2016<\/strong>, 27, 015301.<\/p>\n

[3] Z. Zhuang, X. Guo, B. Liu, F. R. Hu, Y. Li, T. Tao, J. P. Dai, T. Zhi, Z. L. Xie, P. Chen, D. J. Chen, H. X. Ge, X. Y. Wang, M. Xiao, Y. Shi, Y. D. Zheng, R. Zhang, Adv. Funct. Mater. 2016<\/strong>, 26, 36-43.<\/p>\n

[4] T. Tao, T. Zhi, B. Liu, J. P. Dai, Z. Zhuang, Z. L. Xie, P. Chen, F. F. Ren, D. J. Chen, Y. D. Zheng, R. Zhang, Advanced Functional Materials 2017<\/strong>, 27, 1703198.<\/p>\n

[5] F. Xie, H. Lu, D. J. Chen, X. L. Ji, F. Yan, R. Zhang, Y. D. Zheng, L. Li, J. J. Zhou, IEEE Sensors Journal 2012<\/strong>, 12(6), 2086-2090.<\/p>\n

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 <\/p>\n

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