{"id":181701,"date":"2019-07-31T06:30:17","date_gmt":"2019-07-30T22:30:17","guid":{"rendered":"\/\/m.iemloyee.com\/?p=181701"},"modified":"2019-07-29T17:44:56","modified_gmt":"2019-07-29T09:44:56","slug":"%e3%80%90%e6%8a%95%e7%a8%bf%e3%80%91%e5%93%88%e5%b7%a5%e5%a4%a7jap%e5%92%8cmre%ef%bc%9a%e8%b6%85%e6%9c%89%e8%b6%a3%e7%9a%84twinkle-twinkle-little-graphene-%e5%a4%9a","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=181701","title":{"rendered":"\u54c8\u5de5\u5927JAP\u548cMRE\uff1a\u8d85\u6709\u8da3\u7684\u201cTwinkle Twinkle Little Graphene\u201d\u2014\u2014\u591a\u6676\u886c\u5e95\u652f\u6491\u77f3\u58a8\u70ef\u7684\u626b\u63cf\u7535\u955c\u6210\u50cf\u8868\u5f81\u7814\u7a76"},"content":{"rendered":"
\u3010\u5f15\u8a00\u3011<\/b><\/strong><\/p>\n 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Layer\uff09\uff0c\u800c\u77f3\u58a8\u70ef\u8986\u76d6\u7684\u533a\u57df\u5219\u4f9d\u6761\u4ef6\u4e0d\u540c\uff0c\u6c27\u5316\u7a0b\u5ea6\u8de8\u8d8a\u5b8c\u5168\u4e0d\u6c27\u5316\u5230\u4e25\u91cd\u6c27\u5316\u3002\u8fd9\u79cd\u590d\u6742\u7684\u8868\u9762\u6c27\u5316\u5f02\u8d28\u6027\u5bf9\u77f3\u58a8\u70ef\u7684SEM\u6210\u50cf\u8868\u5f81\u7814\u7a76\u4e5f\u63d0\u51fa\u4e86\u66f4\u5927\u7684\u6311\u6218\u3002<\/p>\n CVD\u6cd5\u5236\u5907\u7684\u591a\u6676Cu\u57fa\u77f3\u58a8\u70ef\uff0c\u662f\u5178\u578b\u7684\u886c\u5e95\u4e3a\u591a\u6676\u800c\u4e14\u8868\u9762\u6709\u6c27\u5316\u5c42\u7684\u886c\u5e95\u652f\u6491\u77f3\u58a8\u70ef\u4f53\u7cfb\u3002\u7528SEM\u5bf9\u5176\u8fdb\u884c\u89c2\u5bdf\uff0c\u591a\u6676\u886c\u5e95\u7684\u7535\u5b50\u901a\u9053\u6548\u5e94\u3001\u886c\u5e95\u8868\u9762\u6c27\u5316\u5c42\u548c\u6210\u50cf\u53c2\u6570\u4e09\u8005\u5747\u4f1a\u5bf9\u77f3\u58a8\u70ef\u56fe\u50cf\u886c\u5ea6\u4ea7\u751f\u5f71\u54cd\uff0c\u8fd9\u5c31\u5bf9SEM\u7684\u53ef\u9760\u6210\u50cf\u8868\u5f81\u548c\u7ed3\u679c\u89e3\u91ca\u63d0\u51fa\u4e86\u524d\u6240\u672a\u6709\u7684\u6311\u6218\u3002<\/p>\n \u5728\u524d\u671f\u5df2\u53d6\u5f97\u7684\u5355\u6676\u886c\u5e95\u652f\u6491\u77f3\u58a8\u70ef\u7684SEM\u6210\u50cf\u7814\u7a76\u6210\u679c\u7684\u57fa\u7840\u4e0a\uff08Small, 2018,14, 1704190\uff09\uff0c\u54c8\u5c14\u6ee8\u5de5\u4e1a\u5927\u5b66\u5316\u5de5\u4e0e\u5316\u5b66\u5b66\u9662\u7684\u7518\u9633\u6559\u6388\u3001\u5f20\u4e39\u535a\u58eb\u548c\u6307\u5bfc\u7684\u535a\u58eb\u751f\u9ec4\u4e3d\uff08\u8bba\u6587\u7b2c\u4e00\u4f5c\u8005\uff09\uff0c\u4e0e\u9ec4\u7389\u4e1c\u6559\u6388\u3001\u5f20\u98de\u864e\u6559\u6388\u3001\u51af\u5fd7\u7ea2\u7814\u7a76\u5458\u5408\u4f5c\uff0c\u91c7\u7528Zeiss\u70ed\u573a\u53d1\u5c04SEM\uff0c\u901a\u8fc7\u7cfb\u7edf\u6df1\u5165\u7684SEM\u6210\u50cf\u8868\u5f81\u7814\u7a76\u5e76\u7ed3\u5408\u4ed4\u7ec6\u7684\u5b9e\u9a8c\u8bbe\u8ba1\u53ca\u6a21\u578b\u5206\u6790\uff0c\u5f97\u4ee5\u8fdb\u4e00\u6b65\u63a2\u5e7d\u5165\u5fae\uff0c\u4e00\u7aa5\u77f3\u58a8\u70ef\u7684\u7535\u955c\u6210\u50cf\u8868\u5f81\u7684\u5965\u79d8\u3002<\/p>\n \u3010\u6210\u679c\u7b80\u4ecb\u3011<\/strong><\/p>\n \u7518\u9633\u6559\u6388\u8bfe\u9898\u7ec4\u5bf9\u591a\u79cd\u591a\u6676\u886c\u5e95\u652f\u6491\u77f3\u58a8\u70ef\u4f53\u7cfb\u8fdb\u884c\u4e86\u7cfb\u7edf\u7684SEM\u6210\u50cf\u8868\u5f81\u7814\u7a76\uff0c\u5305\u62ec\u4e00\u7cfb\u5217\u8868\u9762\u6c27\u5316\u7a0b\u5ea6\u53ca\u8986\u76d6\u5ea6\u4e0d\u540c\u7684\u6837\u54c1\uff0c\u5982\u975e\u6c27\u5316\u591a\u6676Au\u57fa\u77f3\u58a8\u70ef\uff08G\/Au\uff09\uff0cCVD\u6cd5\u5236\u5907\u591a\u6676Cu\u57fa\u77f3\u58a8\u70ef\uff08CVD G\/Cu\uff09\uff08\u886c\u5e95\u8868\u9762\u6c27\u5316\uff0c\u77f3\u58a8\u70ef\u5c40\u90e8\u8986\u76d6\u6216\u5168\u8986\u76d6\uff09\uff0c\u4ee5\u53ca\u591a\u6676Cu\u4e0a\u8986\u76d6\u4eba\u5de5\u8f6c\u79fb\u77f3\u58a8\u70ef\uff08G\/Cu\uff09\u3002\u901a\u8fc7\u6539\u53d8\u52a0\u901f\u7535\u538b\u3001\u5de5\u4f5c\u8ddd\u79bb\u4ee5\u53ca\u6837\u54c1\u53f0\u503e\u8f6c\u89d2\u5ea6\uff0c\u7ed3\u5408Raman\u3001XPS\u548cEDS\u7b49\u8868\u5f81\u6280\u672f\uff0c\u63a2\u7a76\u4e86\u886c\u5e95\u8868\u9762\u6c27\u5316\u5c42\u3001\u591a\u6676\u886c\u5e95\u7535\u5b50\u901a\u9053\uff08ECC\uff09\u6548\u5e94\u4ee5\u53ca\u6210\u50cf\u53c2\u6570\u5bf9\u77f3\u58a8\u70ef\u886c\u5ea6\u7684\u7efc\u5408\u5f71\u54cd\uff0c\u63ed\u793a\u4e86CVD G\/Cu\u7684\u53cd\u5e38\u56fe\u50cf\u886c\u5ea6\uff08\u77f3\u58a8\u70ef\u886c\u5ea6\u7684\u201cTwinkling\uff08\u95ea\u70c1\uff09\u201d\u73b0\u8c61\uff09\u7684\u5f62\u6210\u673a\u5236\u3002\u636e\u6b64\uff0c\u4ed6\u4eec\u53d1\u73b0\uff0c\u5bf9\u4e8e\u590d\u6742\u7684CVD G\/Cu\u6837\u54c1\uff0c\u5728\u8f83\u5927\u5de5\u4f5c\u8ddd\u79bb\u6761\u4ef6\u4e0b\u6210\u50cf\uff0c\u77f3\u58a8\u70ef\u5bf9E-T SE\u63a2\u6d4b\u5668\u7684\u4e3b\u8981\u6210\u50cf\u4fe1\u53f7SE1+SE2\u7684\u8870\u51cf\u4f5c\u7528\u589e\u5f3a\uff0c\u4f7f\u5404\u6676\u7c92\u5185\u77f3\u58a8\u70ef\u8f83\u76f8\u90bb\u886c\u5e95\u6697\uff0c\u5373\u53ef\u5b9e\u73b0\u886c\u5e95\u548c\u77f3\u58a8\u70ef\u7684\u6b63\u786e\u533a\u5206\u3002<\/p>\n \u7136\u540e\uff0c\u9488\u5bf9G\/Cu\u548cG\/Au\u6837\u54c1\u7684SEM\u6210\u50cf\u4e2dECC\u886c\u5ea6\u7684\u5e72\u6270\u95ee\u9898\uff0c\u4ed6\u4eec\u63d0\u51fa\u4e86\u4e24\u79cd\u6d88\u9664\u591a\u6676\u6750\u6599\u7535\u5b50\u901a\u9053\u886c\u5ea6\u7684\u6709\u6548\u65b9\u6cd5\uff0c\u5b9e\u73b0\u4e86\u886c\u5e95\u548c\u77f3\u58a8\u70ef\u7684\u6b63\u786e\u533a\u5206\u5e76\u6709\u52a9\u4e8e\u77f3\u58a8\u70ef\u5c42\u6570\u7684\u51c6\u786e\u9274\u5b9a\u3002\u65b9\u6cd5\u4e00\uff1a\u901a\u8fc7\u56fe\u50cf\u5904\u7406\u8f6f\u4ef6\u9010\u4e00\u8c03\u8282\u5404\u6676\u7c92\u7684\u56fe\u50cf\u4eae\u5ea6\uff0c\u4f7f\u5404\u6676\u7c92\u56fe\u50cf\u4eae\u5ea6\u76f8\u540c\uff0c\u53ef\u6d88\u9664\u6676\u7c92\u95f4\u7684\u7535\u5b50\u901a\u9053\u886c\u5ea6\u3002\u65b9\u6cd5\u4e8c\uff1a\u5728SEM\u6210\u50cf\u8fc7\u7a0b\u4e2d\uff0c\u6539\u53d8\u6837\u54c1\u53f0\u503e\u8f6c\u89d2\u5ea6\uff0c\u4f7f\u76f8\u90bb\u6676\u7c92\u5185\u6ee1\u8db3\u7535\u5b50\u901a\u9053\u6548\u5e94\u7684\u6676\u9762\u53d6\u5411\u76f8\u540c\uff0c\u8fdb\u800c\u6d88\u9664\u6676\u7c92\u95f4\u7684\u7535\u5b50\u901a\u9053\u886c\u5ea6\uff08\u56fe4\uff09\u3002<\/p>\n \u5728\u53d1\u8868\u7684\u4e24\u7bc7\u6587\u7ae0\u4e2d\uff0c\u53d1\u8868\u4e8eJAP<\/i><\/em>\u7684\u6587\u7ae0\u5728\u9898\u76ee\u4e2d\u501f\u7528\u4e86\u8033\u719f\u80fd\u8be6\u7684\u513f\u6b4c\u300aTwinkle Twinkle Little Star<\/b><\/strong>\uff08\u4e00\u95ea\u4e00\u95ea\u5c0f\u661f\u661f\uff09<\/b><\/strong>\u300b\u4e2d\u7684\u201cTwinkle\u201d\u4e00\u8bcd\uff0c\u5bd3\u610f\u4e3a\u4e0a\u8ff0\u591a\u6676Cu\u57faCVD\u77f3\u58a8\u70ef\u7684SEM\u6210\u50cf\u663e\u793a\u7684\u77f3\u58a8\u70ef\u886c\u5ea6\u201c\u95ea\u70c1\u201d\u73b0\u8c61\u3002\u800c\u53d1\u8868\u4e8eMRE<\/i><\/em>\u7684\u6587\u7ae0\uff0c\u5219\u5728\u9898\u76ee\u4e2d\u6539\u5199\u4e86\u4e00\u53e5\u8033\u719f\u80fd\u8be6\u7684\u540d\u8a00\u300aAshes to <\/b><\/strong>A<\/b><\/strong>shes<\/b><\/strong>,<\/b><\/strong>\u00a0and <\/b><\/strong>D<\/b><\/strong>ust to <\/b><\/strong>D<\/b><\/strong>ust<\/b><\/strong>\uff08\u5c18\u5f52\u5c18\uff0c\u571f\u5f52\u571f\uff09<\/b><\/strong>\u300b\uff0c\u6539\u4e3a\u201cGraphene to graphene, and substrate to substrate<\/b><\/strong>\u201d\uff0c\u5bd3\u610f\u4e3a\u5bf9\u4e8e\u591a\u6676\u886c\u5e95\u652f\u6491\u7684\u77f3\u58a8\u70ef\u7684SEM\u6210\u50cf\u8868\u5f81\uff0c\u53ea\u6709\u7528\u5408\u9002\u7684\u65b9\u6cd5\u6d88\u9664ECC\uff0c\u624d\u80fd\u4f7f\u5176\u4e0d\u5e72\u6270\u77f3\u58a8\u70ef\u7684\u6210\u50cf\uff0c\u8fbe\u5230\u6b63\u786e\u533a\u5206\u77f3\u58a8\u70ef\u548c\u591a\u6676\u886c\u5e95\u3001\u5b9e\u73b0\u591a\u6676\u886c\u5e95\u652f\u6491\u77f3\u58a8\u70ef\u4f53\u7cfb\u7684\u53ef\u9760SEM\u6210\u50cf\u8868\u5f81\u7684\u76ee\u7684\u3002<\/p>\n \u3010\u56fe\u6587\u5bfc\u8bfb\u3011<\/b><\/strong><\/p>\n \u00a0<\/b><\/strong>\u56fe1\u4e0d\u540c\u6837\u54c1\u53f0\u503e\u8f6c\u89d2\u5ea6\u4e0b\u91c7\u96c6\u7684CVD 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\u4ee5\u4e0a\u7814\u7a76\u7ed3\u679c\uff0c\u5bf9\u886c\u5e95\u652f\u6491\u77f3\u58a8\u70ef\u4ee5\u53ca\u5176\u5b83\u4e8c\u7ef4\u6750\u6599\u548c\u8584\u819c\u6750\u6599\u7684\u9ad8\u8d28\u91cfSEM\u8868\u5f81\u5177\u6709\u501f\u9274\u610f\u4e49\u3002\u00a0\u7518\u9633\u6559\u6388\u8bfe\u9898\u7ec4\u6b63\u5728\u5229\u7528\u626b\u63cf\u7535\u955c\u548c\u591a\u79cd\u8868\u5f81\u6280\u672f\uff0c\u7ee7\u7eed\u5bf9\u4e0d\u540c\u73af\u5883\u4e0b\u4f7f\u7528\u7684\u77f3\u58a8\u70ef\u548c\u5176\u5b83\u4e8c\u7ef4\u6750\u6599\u7684\u7ed3\u6784\u548c\u7279\u6027\u8fdb\u884c\u6df1\u5165\u7814\u7a76\u3002<\/p>\n \u8be5\u7814\u7a76\u5f97\u5230\u4e86\u56fd\u5bb6\u81ea\u7136\u79d1\u5b66\u57fa\u91d1\u91cd\u70b9\u9879\u76ee\u3001\u56fd\u5bb6\u91cd\u70b9\u7814\u53d1\u8ba1\u5212\u9879\u76ee\u3001\u9ed1\u9f99\u6c5f\u7701\u91cd\u5927\u79d1\u6280\u62db\u6807\u8ba1\u5212\u9879\u76ee\u7684\u8d44\u52a9\u3002<\/p>\n \u3010\u6587\u732e\u94fe\u63a5\u3011<\/strong><\/p>\n [1] Li Huang, Dan Zhang, Fei-Hu Zhang, Yu-Dong Huang, Zhi-Hong Feng, Yang Gan, Twinkling Graphene on Polycrystalline Cu Substrate: A Scanning Electron Microscopy Study, J. Appl. Phys.<\/i><\/em>,\u00a0125\u00a0(2019)\u00a0194303.\u00a0https:\/\/doi.org\/10.1063\/1.5089151<\/u><\/a>\u3002<\/p>\n [2] Li Huang, Dan Zhang, Fei-Hu Zhang, Yu-Dong Huang, Yang Gan*, Graphene to graphene, and substrate to substrate: How to reliably differentiate supported graphene from polycrystalline substrates using SEM? Mater. Res. Express<\/i><\/em>, 6\u00a0(2019)\u00a0085604.\u00a0https:\/\/doi.org\/10.1088\/2053-1591\/ab199d<\/u><\/a>\u3002<\/p>\n<\/b><\/strong><\/p>\n
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