{"id":155074,"date":"2018-10-02T06:32:03","date_gmt":"2018-10-01T22:32:03","guid":{"rendered":"\/\/m.iemloyee.com\/?p=155074"},"modified":"2018-10-01T10:34:33","modified_gmt":"2018-10-01T02:34:33","slug":"%e5%88%98%e5%bf%a0%e8%8c%83%e5%bd%ad%e6%b5%b7%e7%90%b3chem-rev-%e7%bb%bc%e8%bf%b0%ef%bc%9a%e5%8c%96%e5%ad%a6%e6%b0%94%e7%9b%b8%e6%b2%89%e7%a7%af%e5%88%b6%e5%a4%87%e7%9f%b3%e5%a2%a8%e7%83%af","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=155074","title":{"rendered":"\u5218\u5fe0\u8303&\u5f6d\u6d77\u7433Chem. Rev.\u7efc\u8ff0\uff1a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u5236\u5907\u77f3\u58a8\u70ef–\u7406\u60f3\u4e0e\u73b0\u5b9e"},"content":{"rendered":"
1.\u524d\u8a00<\/strong><\/p>\n \u77f3\u58a8\u70ef\u662f\u4e00\u79cd\u65b0\u578b\u7eb3\u7c73\u78b3\u6750\u6599\uff0c\u5177\u6709\u72ec\u7279\u7684\u4e8c\u7ef4\u8702\u7a9d\u72b6\u6676\u4f53\u7ed3\u6784\uff0c\u4ee5\u53ca\u4f18\u5f02\u7684\u7535\u5b66\u3001\u70ed\u5b66\u3001\u5149\u5b66\u548c\u529b\u5b66\u7b49\u6027\u80fd\uff0c\u56e0\u800c\u5728\u7535\u5b50\u5668\u4ef6\u3001\u5149\u5b66\u5668\u4ef6\u3001\u4f20\u611f\u5668\u4ef6\u3001\u7535\u5316\u5b66\u50a8\u80fd\u3001\u590d\u5408\u6750\u6599\u3001\u70ed\u5b66\u7b49\u9886\u57df\u6709\u7740\u5e7f\u9614\u7684\u5e94\u7528\u524d\u666f\u3002\u81ea\u4ece\u77f3\u58a8\u70ef\u88ab\u53d1\u73b0\u4ee5\u6765\uff0c\u5176\u5236\u5907\u6280\u672f\u4e5f\u540c\u65f6\u5f15\u8d77\u5b66\u672f\u754c\u7684\u5e7f\u6cdb\u5173\u6ce8\u3002\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08Chemical Vapor Deposition, CVD\uff09\u6cd5\u662f\u76ee\u524d\u5927\u9762\u79ef\u5236\u5907\u9ad8\u54c1\u8d28\u77f3\u58a8\u70ef\u8584\u819c\u7684\u6709\u6548\u65b9\u6cd5\uff0c\u7136\u800c\uff0cCVD\u751f\u957f\u7684\u77f3\u58a8\u70ef\u8584\u819c\u5728\u5236\u5907\u7684\u8fc7\u7a0b\u4e2d\u4f1a\u4ea7\u751f\u7f3a\u9677\u3001\u6676\u754c\u548c\u8936\u76b1\uff0c\u8f6c\u79fb\u7684\u8fc7\u7a0b\u4e2d\u4e5f\u4f1a\u9020\u6210\u8868\u9762\u6c61\u67d3\u4e0e\u7834\u635f\uff0c\u56e0\u6b64\u9650\u5236\u4e86\u8fdb\u4e00\u6b65\u5e94\u7528\u3002\u8fd1\u65e5\uff0c\u5317\u4eac\u5927\u5b66\u5218\u5fe0\u8303\u9662\u58eb\u548c\u5f6d\u6d77\u7433\u6559\u6388<\/strong>\u5728Chemical Reviews<\/strong>\u671f\u520a\u4e0a\u53d1\u8868\u4e86\u7efc\u8ff0\u6587\u7ae0\u201cBridging the Gap between Reality and Ideal in Chemical Vapor Deposition Growth of Graphene<\/strong>\u201d\u3002\u672c\u6587\u7684\u7b2c\u4e00\u4f5c\u8005\u662f\u6797\u7acb\u535a\u58eb\u3002\u8fd9\u4e5f\u662f\u6743\u5a01\u7efc\u8ff0\u671f\u520aChemical Reviews\u9996\u6b21\u520a\u767bCVD\u77f3\u58a8\u70ef\u7684\u7efc\u8ff0\u6587\u7ae0\u3002\u672c\u7efc\u8ff0\u4e3b\u8981\u4ecb\u7ecd\u4e86\u78b3\u6750\u6599\u7684\u6210\u952e\u548c\u5236\u5907\u5386\u53f2\uff0cCVD\u6cd5\u5236\u5907\u77f3\u58a8\u70ef\u7684\u70ed\u529b\u5b66\u8fc7\u7a0b\u4e0e\u751f\u957f\u52a8\u529b\u5b66\u673a\u5236\uff0c\u8ba8\u8bba\u4e86\u751f\u957f\u6761\u4ef6\u5bf9\u77f3\u58a8\u70ef\u7574\u533a\u5c3a\u5bf8\u3001\u5f62\u8c8c\u3001\u7f3a\u9677\u3001\u751f\u957f\u901f\u5ea6\u3001\u5c42\u6570\u548c\u8d28\u91cf\u7684\u5f71\u54cd\uff0c\u5e76\u5bf9\u9ad8\u8d28\u91cf\u77f3\u58a8\u70ef\u6750\u6599\u7684\u5236\u5907\u65b9\u6cd5\u8fdb\u884c\u603b\u7ed3\uff0c\u5c55\u671b\u4e86\u672a\u6765\u5236\u5907\u9ad8\u8d28\u91cf\u77f3\u58a8\u70ef\u8584\u819c\u7684\u7814\u7a76\u3002<\/p>\n 2.\u77f3\u58a8\u70ef\u751f\u957f\u7684\u70ed\u529b\u5b66\u4e0e\u52a8\u529b\u5b66\u8fc7\u7a0b<\/strong><\/p>\n 2.1 \u77f3\u58a8\u70ef CVD \u751f\u957f\u7684\u4e00\u822c\u8fc7\u7a0b<\/p>\n CVD \u6cd5\u5236\u5907\u77f3\u58a8\u70ef\uff0c\u4e3b\u8981\u662f\u5229\u7528\u78b3\u6e90\u5728\u4e00\u5b9a\u6e29\u5ea6\u6216\u5916\u573a\u4e0b\u53d1\u751f\u5316\u5b66\u5206\u89e3\u5e76\u5728\u57fa\u5e95\u8868\u9762\u6c89\u79ef\u6765\u5b9e\u73b0\u3002CVD \u53cd\u5e94\u7cfb\u7edf\u4e3b\u8981\u7531\u4e09\u90e8\u5206\u6784\u6210\uff1a\u6c14\u4f53\u8f93\u9001\u7cfb\u7edf\uff0c\u53cd\u5e94\u8154\u4f53\u548c\u6392\u6c14\u7cfb\u7edf\u3002CVD\u53cd\u5e94\u8fc7\u7a0b\u4e3b\u8981\u7531\u5347\u6e29\u3001\u57fa\u5e95\u70ed\u5904\u7406\u3001\u77f3\u58a8\u70ef\u751f\u957f\u548c\u51b7\u5374\u56db\u90e8\u5206\u6784\u6210\u3002\u6c14\u4f53\u8f93\u5165\u7cfb\u7edf\u4e00\u822c\u7531\u6c14\u4f53\u6d41\u91cf\u8ba1\u63a7\u5236\uff0c\u53cd\u5e94\u8154\u662f\u78b3\u6e90\u524d\u9a71\u4f53\u53d1\u751f\u5316\u5b66\u53cd\u5e94\u5e76\u5728\u53cd\u5e94\u57fa\u5e95\u6c89\u79ef\u5f97\u5230\u77f3\u58a8\u70ef\u7684\u533a\u57df\uff0c\u6392\u6c14\u7cfb\u7edf\u7528\u4e8e\u5c06\u53cd\u5e94\u540e\u7684\u6c14\u4f53\u6392\u51fa\u3002\u5176\u4e2d\u78b3\u6e90\u524d\u9a71\u4f53\u53ef\u4ee5\u662f\u6c14\u6001\u70c3\u7c7b\uff08\u5982\u7532\u70f7\u3001\u4e59\u70ef\u3001\u4e59\u7094\u7b49\uff09\uff0c\u6db2\u6001\u78b3\u6e90\uff08\u5982\u4e59\u9187\u3001\u82ef\u3001\u7532\u82ef\u7b49\uff09\uff0c\u6216\u56fa\u6001\u78b3\u6e90\uff08\u5982\u805a\u7532\u57fa\u4e19\u70ef\u9178\u7532\u916fPMMA\u3001\u65e0\u5b9a\u5f62\u78b3\u7b49\uff09\u3002\u53cd\u5e94\u57fa\u5e95\u4e00\u822c\u5206\u4e3a\u4e24\u5927\u7c7b\uff1a\u94dc\u3001\u954d\u3001\u94c2\u7b49\u91d1\u5c5e\u57fa\u5e95\u548c\u6c27\u5316\u7845\u3001\u6c2e\u5316\u7845\u3001\u73bb\u7483\u7b49\u975e\u91d1\u5c5e\u57fa\u5e95\u3002\u5916\u754c\u6761\u4ef6\u63a7\u5236\u4e3b\u8981\u5305\u62ec\u6e29\u5ea6\u3001\u538b\u5f3a\u3001\u6c14\u4f53\u7684\u6d41\u901f\u548c\u79cd\u7c7b\u3001\u7b49\u79bb\u5b50\u5316\u3001\u52a0\u70ed\u65b9\u5f0f\u7b49\u3002<\/p>\n \u56fe2. CVD\u6cd5\u5236\u5907\u77f3\u58a8\u70ef\u6f14\u793a\u56fe<\/p>\n <\/p>\n 2.2 \u77f3\u58a8\u70ef\u751f\u957f\u7684\u5316\u5b66\u70ed\u529b\u5b66\u4e0e\u52a8\u529b\u5b66<\/p>\n \u8584\u819c\u751f\u957f\u7684\u53cd\u5e94\u662f\u6d3b\u6027\u53cd\u5e94\u7269\u79cd\u5728\u57fa\u5e95\u8868\u9762\u76f8\u4e92\u4f5c\u7528\u7684\u8fc7\u7a0b\u3002\u4ece\u5316\u5b66\u70ed\u529b\u5b66\u89d2\u5ea6\u6765\u770b\uff0c\u77f3\u58a8\u70ef\u5728\u5404\u79cd\u57fa\u5e95\u8868\u9762\u7684\u751f\u957f\u8fc7\u7a0b\u4e3b\u8981\u5206\u4e3a\u4e09\u4e2a\u6b65\u9aa4\uff1a\u542b\u78b3\u524d\u9a71\u4f53\u5728\u57fa\u5e95\u8868\u9762\u7684\u50ac\u5316\u5206\u89e3\u3001\u77f3\u58a8\u70ef\u6210\u6838\u548c\u751f\u957f\u8fc7\u7a0b\uff0c\u6676\u7574\u4e4b\u95f4\u76f8\u4e92\u62fc\u63a5\u8fde\u7eed\u6210\u819c\u8fc7\u7a0b\u3002<\/p>\n \u886c\u5e95\u7684\u9009\u62e9\u5bf9\u4e8e\u77f3\u58a8\u70ef\u7684\u751f\u957f\u6765\u8bf4\u5c24\u5176\u91cd\u8981\u3002\u7531\u4e8e\u91d1\u5c5e\u57fa\u5e95\u6bd4\u975e\u91d1\u5c5e\u57fa\u5e95\u5177\u6709\u66f4\u9ad8\u7684\u50ac\u5316\u6d3b\u6027\uff0c\u5728CVD\u751f\u957f\u9ad8\u54c1\u8d28\u77f3\u58a8\u70ef\u4e2d\uff0c\u666e\u904d\u91c7\u7528\u91d1\u5c5e\u57fa\u5e95\u4f5c\u4e3a\u751f\u957f\u50ac\u5316\u5242\u3002\u4e0d\u540c\u91d1\u5c5e\u57fa\u5e95\u6709\u7740\u4e0d\u540c\u7684\u7194\u70b9\u3001\u6eb6\u78b3\u91cf\u548c\u50ac\u5316\u6d3b\u6027\u7b49\u7279\u6027\uff0c\u663e\u8457\u5f71\u54cd\u7740\u77f3\u58a8\u70ef\u7684\u751f\u957f\u6761\u4ef6\u548c\u751f\u957f\u673a\u5236\u3002\u91d1\u5c5eCu\u662f\u76ee\u524d\u751f\u957f\u77f3\u58a8\u70ef\u6700\u7406\u60f3\u7684\u50ac\u5316\u57fa\u5e95\u3002\u5728Cu\u8868\u9762\u751f\u957f\u5355\u5c42\u77f3\u58a8\u70ef\u7684\u8fc7\u7a0b\u4e3b\u8981\u5305\u62ec\uff08\u78b3\u6e90\u524d\u9a71\u4f53\u4ee5\u7532\u70f7\u4e3a\u4f8b\uff1a(1)CH4<\/sub>\u5728Cu\u8868\u9762\u7684\u5438\u9644\u4e0e\u50ac\u5316\u5206\u89e3\u5f62\u6210\u6d3b\u6027C\u788e\u7247(CHx<\/sub>, x=0-3) (2)\u6d3b\u6027C\u788e\u7247\u7684\u8868\u9762\u8fc1\u79fb (3)\u6d3b\u6027C\u788e\u7247\u5f62\u6210\u7a33\u5b9a\u77f3\u58a8\u70ef\u6838 (4)\u77f3\u58a8\u70ef\u6838\u7684\u957f\u5927\uff0c\u8fdb\u800c\u7574\u533a\u62fc\u63a5\u6210\u8fde\u7eed\u8584\u819c\u3002 \u56fe3. \u77f3\u58a8\u70ef\u5728\u91d1\u5c5e\u8868\u9762\u7684\u751f\u957f\u793a\u610f\u56fe<\/p>\n \u5728\u5236\u5907\u9ad8\u8d28\u91cf\u77f3\u58a8\u70ef\u7684\u8fc7\u7a0b\u4e2d\uff0c\u5f80\u5f80\u9700\u8981\u5f15\u5165\u6c22\u6c14\u6765\u4fc3\u8fdb\u78b3\u6e90\u88c2\u89e3\uff0c\u63d0\u9ad8\u77f3\u58a8\u70ef\u7684\u5747\u5300\u6027\u548c\u8d28\u91cf\u3002\u6b64\u5916\uff0c\u6c22\u6c14\u5bf9\u4e8e\u5df2\u7ecf\u751f\u6210\u7684\u77f3\u58a8\u70ef\u4f1a\u6709\u523b\u8680\u77f3\u58a8\u70ef\u8fb9\u754c\u53ca\u5176\u5185\u90e8\u7f3a\u9677\u7684\u6548\u5e94\uff0c\u4ece\u800c\u5f71\u54cd\u77f3\u58a8\u70ef\u7684\u6676\u7574\u5c3a\u5bf8\u4e0e\u5f62\u8c8c\u3002\u56e0\u6b64\uff0c\u6c22\u6c14\u5bf9\u77f3\u58a8\u70ef\u7684\u751f\u957f\u548c\u523b\u8680\u4e8c\u8005\u4e4b\u95f4\u662f\u4e00\u4e2a\u5e73\u8861\u8fc7\u7a0b\u3002\u77f3\u58a8\u70ef\u5236\u5907\u8fc7\u7a0b\u4e2d\u6709\u65f6\u91c7\u7528\u5316\u5b66\u6027\u8d28\u7a33\u5b9a\u7684\u6c29\u6c14\u4f5c\u4e3a\u8f7d\u6c14\u6765\u8c03\u63a7\u78b3\u6e90\u7684\u6d53\u5ea6\u548c\u4f53\u7cfb\u538b\u5f3a\u3002<\/p>\n \u56fe4. a.\u7532\u70f7\u5728\u94dc\u57fa\u5e95\u7684\u8131\u6c22\u88c2\u89e3\u8fc7\u7a0b b. Ar\/H2<\/sub>\u6bd4\u4f8b\u5bf9\u77f3\u58a8\u70ef\u5355\u6676\u8fb9\u754c\u7684\u8c03\u63a7 c-g.\u4e0d\u540c H2<\/sub>\u5206\u538b\u4e0b\u77f3\u58a8\u70ef\u6676\u7574\u5c3a\u5bf8\u5f62\u8c8c\u7684\u8c03\u63a7<\/p>\n \u6b64\u5916\uff0c\u901a\u8fc7\u7efc\u5408\u8c03\u8282\u78b3\u6e90\uff08\u79cd\u7c7b\u3001\u542b\u91cf\uff09\u3001\u751f\u957f\u886c\u5e95\uff08\u79cd\u7c7b\u3001\u7c97\u7cd9\u5ea6\u3001\u6676\u7574\u53d6\u5411\u3001\u7eaf\u5ea6\uff09\u548c\u5916\u754c\u73af\u5883\uff08\u6c14\u4f53\u6210\u5206\u3001\u538b\u5f3a\u3001\u6e29\u5ea6\uff09\uff0c\u53ef\u4ee5\u5b9e\u73b0\u5bf9\u77f3\u58a8\u70ef\u7574\u533a\u5c3a\u5bf8\u3001\u5f62\u8c8c\u3001\u7f3a\u9677\u3001\u5c42\u6570\u548c\u8d28\u91cf\u7684\u63a7\u5236\u3002<\/p>\n 3.\u77f3\u58a8\u70ef\u5728\u91d1\u5c5e\u57fa\u5e95\u7684\u751f\u957f<\/strong><\/p>\n 3.1 \u77f3\u58a8\u70ef\u751f\u957f\u673a\u5236\u7814\u7a76<\/p>\n \u4e0d\u540c\u91d1\u5c5e\u886c\u5e95\u6709\u7740\u4e0d\u540c\u7684\u7194\u70b9\u3001\u6eb6\u78b3\u91cf\u548c\u50ac\u5316\u6d3b\u6027\u7b49\u7279\u6027\uff0c\u663e\u8457\u5f71\u54cd\u7740\u77f3\u58a8\u70ef\u7684\u751f\u957f\u6761\u4ef6\u548c\u751f\u957f\u673a\u5236\uff0c\u4ece\u800c\u5bfc\u81f4\u77f3\u58a8\u70ef\u8d28\u91cf\u548c\u5747\u5300\u6027\u7684\u5dee\u5f02\u3002Ruoff\u7b49[1]<\/sup>\u91c7\u7528\u78b3\u540c\u4f4d\u7d20\u6807\u8bb0(12<\/sup>C\u548c 13<\/sup>C)\u6765\u8ffd\u8e2a\u77f3\u58a8\u70ef\u7684\u751f\u957f\u8fc7\u7a0b\uff0c\u4ece\u800c\u63ed\u793a\u4e86\u77f3\u58a8\u70ef\u5728\u4e0d\u540c\u57fa\u5e95\u7684\u751f\u957f\u673a\u5236\uff1a\u7814\u7a76\u53d1\u73b0\uff0c\u5f53\u4f7f\u7528\u9ad8\u6eb6\u78b3\u91cf\u7684\u91d1\u5c5e\uff08\u4ee3\u8868\u91d1\u5c5e\u4e3a Ni\uff09\u4f5c\u4e3a\u751f\u957f\u886c\u5e95\u65f6\uff0c\u7ecf\u78b3\u6e90\u9ad8\u6e29\u88c2\u89e3\u4ea7\u751f\u7684\u78b3\u539f\u5b50\u4f1a\u6e17\u5165\u5230\u4f53\u76f8\u5e76\u6269\u6563\uff0c\u964d\u6e29\u65f6\u6eb6\u89e3\u7684\u78b3\u7531\u4e8e\u8fc7\u9971\u548c\u800c\u5728\u91d1\u5c5e\u8868\u9762\u504f\u6790\u5f62\u6210\u77f3\u58a8\u70ef\uff0c\u5373\u504f\u6790\u751f\u957f\u673a\u5236\u3002\u7531\u4e8e\u78b3\u6790\u51fa\u91cf\u5f88\u5927\u7a0b\u5ea6\u4e0a\u53d6\u51b3\u4e8e\u6eb6\u89e3\u7684\u78b3\u6d53\u5ea6\u548c\u964d\u6e29\u901f\u7387\uff0c\u91d1\u5c5e\u6676\u754c\u5904\u5f80\u5f80\u751f\u6210\u7684\u77f3\u58a8\u70ef\u8f83\u539a\uff0c\u56e0\u6b64\u751f\u957f\u7684\u77f3\u58a8\u70ef\u4ee5\u591a\u5c42\u4e3a\u4e3b\uff0c\u5c42\u6570\u4e0d\u5747\u5300\u4e14\u53ef\u63a7\u6027\u8f83\u5dee\u3002<\/p>\n \u56fe5. \u91d1\u5c5e-C\u76f8\u56fe\u4e0e\u77f3\u58a8\u70ef\u5728\u91d1\u5c5e\u8868\u9762\u751f\u957f\u673a\u5236\u793a\u610f\u56fe<\/p>\n \u53cd\u4e4b\uff0c\u5f53\u4f7f\u7528\u4f4e\u6eb6\u78b3\u91cf\u7684\u91d1\u5c5e\uff08\u4ee3\u8868\u91d1\u5c5e\u4e3aCu\uff09\u65f6\uff0c\u9ad8\u6e29\u88c2\u89e3\u4ea7\u751f\u7684\u78b3\u539f\u5b50\u4ec5\u80fd\u5438\u9644\u5728\u91d1\u5c5e\u8868\u9762\uff0c\u8fdb\u800c\u5728\u8868\u9762\u8fc1\u79fb\uff0c\u6210\u6838\u5e76\u751f\u957f\u5f97\u5230\u77f3\u58a8\u70ef\u8584\u819c\u3002\u77f3\u58a8\u70ef\u5728\u94dc\u8868\u9762\u9075\u5faa\u8868\u9762\u50ac\u5316\u673a\u5236\uff0c\u8fd9\u79cd\u65b9\u5f0f\u5f97\u5230\u7684\u77f3\u58a8\u70ef\u4ee5\u5355\u5c42\u4e3a\u4e3b\uff0c\u5f53\u7b2c\u4e00\u5c42\u77f3\u58a8\u70ef\u8986\u76d6\u91d1\u5c5e\u8868\u9762\u65f6\uff0c\u91d1\u5c5e\u96be\u4ee5\u7ee7\u7eed\u50ac\u5316\u88c2\u89e3\u78b3\u6e90\uff0c\u5f88\u96be\u518d\u7ee7\u7eed\u751f\u957f\u7b2c\u4e8c\u5c42\uff0c\u8fd9\u5c31\u662fCu\u57fa\u5e95\u7279\u6709\u7684\u81ea\u9650\u5236\u884c\u4e3a\u3002<\/p>\n \u56fe6. \u77f3\u58a8\u70ef\u5728Cu\u8868\u9762\u7684SEM\u7167\u7247\u3001Raman\u8868\u5f81\u7ed3\u679c\u4e0e\u5149\u5b66\u663e\u5fae\u955c\u7167\u7247<\/p>\n 3.2 \u77f3\u58a8\u70ef\u5c42\u6570\u4e0e\u5806\u579b\u65b9\u5f0f\u7684\u63a7\u5236<\/p>\n \u5bf9\u4e8eAB\u5806\u579b\u53cc\u5c42\u77f3\u58a8\u70ef\uff08\u4e24\u5c42\u77f3\u58a8\u70ef\u95f4\u5c42\u7684\u626d\u8f6c\u89d2\u4e3a\u96f6\uff09\uff0c\u9876\u5c42\u78b3\u539f\u5b50\u5782\u76f4\u4e8e\u5e95\u5c42\u516d\u5143\u73af\u7684\u4e2d\u5fc3\uff0c\u8fd9\u662f\u4e00\u79cd\u6700\u7a33\u5b9a\u7684\u53cc\u5c42\u77f3\u58a8\u70ef\u7ed3\u6784\u3002AB\u5806\u579b\u53cc\u5c42\u77f3\u58a8\u70ef\u80fd\u5e26\u662f\u7c7b\u629b\u7269\u7ebf\u7ed3\u6784\u3002\u6839\u636eAB\u5806\u579b\u53cc\u5c42\u77f3\u58a8\u70ef\u72ec\u7279\u7684\u7535\u5b50\u7ed3\u6784\u7279\u70b9\u53ef\u77e5\uff0c\u5f53\u5728\u5176\u5782\u76f4\u65b9\u5411\u4e0a\u52a0\u4e0a\u504f\u538b\u540e\uff0c\u77f3\u58a8\u70ef\u7684\u5e26\u9699\u53ef\u4ee5\u88ab\u6253\u5f00\uff0c\u4e14\u5176\u5e26\u9699\u5927\u5c0f\u53ef\u4ee5\u8fdb\u884c\u6709\u6548\u5730\u8c03\u8282\u3002<\/p>\n \u56fe7. AB\u5806\u579b\u53cc\u5c42\u77f3\u58a8\u70ef\u7ed3\u6784\u7279\u70b9<\/p>\n \u9488\u5bf9\u53cc\u5c42\u77f3\u58a8\u70ef\u7684\u53ef\u63a7\u5236\u5907\uff0c2014 \u5e74\uff0cKaustav\u7b49[2]<\/sup>\u63d0\u51fa\u5728\u94dc\u954d\u5408\u91d1\u8584\u819c\u4e0a\u5236\u5907\u53cc\u5c42\u77f3\u58a8\u70ef\u7684\u65b9\u6cd5\uff0c\u5229\u7528\u78b3\u539f\u5b50\u5728\u94dc\u954d\u5408\u91d1\u4e2d\u8f83\u9ad8\u7684\u6eb6\u89e3\u5ea6\uff0c\u57fa\u4e8e\u78b3\u539f\u5b50\u5728\u94dc\u954d\u5408\u91d1\u4e2d\u504f\u6790\u751f\u957f\u673a\u5236\u83b7\u5f97\u5927\u9762\u79ef\u53cc\u5c42\u77f3\u58a8\u70ef\u8584\u819c\u3002\u7136\u800c\uff0c\u8fd9\u79cd\u65b9\u6cd5\u6240\u5236\u5907\u7684\u53cc\u5c42\u77f3\u58a8\u70ef\u8584\u819c\u5747\u4e00\u6027\u4ecd\u96be\u4ee5\u4fdd\u8bc1\uff0c\u53cc\u5c42\u5806\u579b\u7684\u626d\u8f6c\u89d2\u5ea6\u96be\u4ee5\u63a7\u5236\uff0c\u4ece\u800c\u5f71\u54cd\u5176\u7535\u5b66\u8f93\u8fd0\u6027\u80fd\u3002\u4e3a\u4e86\u5236\u5907\u53cc\u5c42\u77f3\u58a8\u70ef\uff0c\u5fc5\u987b\u6253\u7834Cu\u57fa\u5e95”\u81ea\u9650\u5236”\u751f\u957f\u8fc7\u7a0b\uff0c\u63d0\u4f9b\u989d\u5916\u7684\u78b3\u6e90\u4f9b\u7ed9\u7528\u4e8e\u7b2c\u4e8c\u5c42\u77f3\u58a8\u70ef\u751f\u957f\u3002\u5218\u5fe0\u8303\u548c\u5f6d\u6d77\u7433\u8bfe\u9898\u7ec4[3]<\/sup>\u5c06\u65b0\u9c9c\u7684\u94dc\u7b94\u7f6e\u4e8e\u5df2\u7ecf\u6ee1\u5c42\u8986\u76d6\u94dc\u7b94\u7684\u77f3\u58a8\u70ef\u4e0a\u6e38\uff0c\u5229\u7528\u65b0\u9c9c\u7684\u94dc\u7b94\u6301\u7eed\u50ac\u5316\u88c2\u89e3\u78b3\u6e90\uff0c\u63d0\u4f9b\u989d\u5916\u7684\u78b3\u6e90\u4f9b\u7ed9\u7528\u4e8e\u4e0b\u6e38\u7684\u7b2c\u4e8c\u5c42\u77f3\u58a8\u70ef\u7684\u751f\u957f\uff0c\u8fdb\u800c\u83b7\u5f97\u4e86\u9ad8\u8986\u76d6\u7387\u7684\u53cc\u5c42\u77f3\u58a8\u70ef\u3002<\/p>\n \u56fe8. \u53cc\u5c42\u77f3\u58a8\u70ef\u7684\u5236\u5907\u65b9\u6cd5<\/p>\n Ruoff[5]<\/sup>\u7b49\u5728\u6c27\u9884\u5904\u7406\u7684\u94dc\u7b94\u4fe1\u5c01\u5916\u8868\u9762\u4e0a\u6210\u529f\u83b7\u5f97\u6676\u7574\u5c3a\u5bf8\u8fbe\u5230500\u03bcm\u768480% AB\u5806\u579b\u53cc\u5c42\u77f3\u58a8\u70ef\u6676\u7574\uff0c\u5e76\u6df1\u5165\u5206\u6790\u4e86AB\u5806\u579b\u77f3\u58a8\u70ef\u751f\u957f\u673a\u5236\u3002<\/p>\n \u56fe9. \u53cc\u5c42\u77f3\u58a8\u70ef\u7684\u5236\u5907\u65b9\u6cd5<\/p>\n 4.\u77f3\u58a8\u70ef\u5355\u6676\u7684\u751f\u957f\u4e0e\u8c03\u63a7<\/strong><\/p>\n 4.1 \u591a\u6676\u77f3\u58a8\u70ef\u7684\u6676\u754c\u7814\u7a76<\/p>\n 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\u8fd1\u5e74\u6765\uff0c\u77f3\u58a8\u70ef\u7684CVD\u6cd5\u5236\u5907\u3001\u7269\u6027\u7814\u7a76\u548c\u5e94\u7528\u63a2\u7d22\u5747\u53d6\u5f97\u4e86\u5de8\u5927\u8fdb\u5c55\u3002\u7136\u800c\u9aa8\u611f\u7684\u73b0\u5b9e\u548c\u4e30\u6ee1\u7684\u7406\u60f3\u4e4b\u95f4\u4ecd\u5b58\u5728\u5de8\u5927\u5dee\u8ddd\u3002\u5982\u4f55\u63d0\u9ad8CVD\u6cd5\u5236\u5907\u7684\u77f3\u58a8\u70ef\u8d28\u91cf\u548c\u53ef\u63a7\u6027\u4ecd\u7136\u662f\u91cd\u4e2d\u4e4b\u91cd\uff0c\u4e5f\u662f\u77f3\u58a8\u70ef\u7814\u7a76\u9886\u57df\u516c\u8ba4\u7684\u96be\u9898\uff0c\u5145\u6ee1\u4e86\u673a\u9047\u548c\u6311\u6218\u3002<\/p>\n \u6587\u732e\u94fe\u63a5\uff1aBridging the Gap between Reality and Ideal in Chemical Vapor Deposition Growth of Graphene. <\/a><\/strong>\uff08Chem. 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