{"id":154489,"date":"2018-09-30T06:25:39","date_gmt":"2018-09-29T22:25:39","guid":{"rendered":"\/\/m.iemloyee.com\/?p=154489"},"modified":"2018-09-29T09:01:55","modified_gmt":"2018-09-29T01:01:55","slug":"%e5%8c%97%e5%a4%a7%e5%bd%ad%e6%b5%b7%e7%90%b3%e6%95%99%e6%8e%88%e5%88%98%e5%bf%a0%e8%8c%83%e9%99%a2%e5%a3%abadv-mater-%e7%bb%bc%e8%bf%b0%ef%bc%9a%e8%b5%b0%e5%90%91cvd%e7%9f%b3%e5%a2%a8%e7%83%af","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=154489","title":{"rendered":"\u5317\u5927\u5f6d\u6d77\u7433\u6559\u6388&\u5218\u5fe0\u8303\u9662\u58ebAdv. Mater.\u7efc\u8ff0\uff1a\u8d70\u5411CVD\u77f3\u58a8\u70ef\u8584\u819c\u7684\u89c4\u6a21\u5236\u5907"},"content":{"rendered":"

\u3010\u5f15\u8a00\u3011<\/strong><\/p>\n

\u77f3\u58a8\u70ef\u5177\u6709\u9ad8\u673a\u68b0\u5f3a\u5ea6\u3001\u70ed\u548c\u7535\u5b50\u4f20\u5bfc\u80fd\u529b\uff0c\u5e76\u4e14\u5bf9\u6240\u6709\u6c14\u4f53\u90fd\u4e0d\u6e17\u900f\uff0c\u56e0\u6b64\u5176\u5728\u9ad8\u6027\u80fd\u7535\u5b50\u5668\u4ef6\u3001\u4fdd\u62a4\u6d82\u5c42\u548c\u963b\u9694\u8584\u819c\u7b49\u9886\u57df\u5177\u6709\u6781\u5927\u7684\u5e94\u7528\u524d\u666f\u3002\u4ee5\u53ef\u63a5\u53d7\u6210\u672c\u6279\u91cf\u5236\u5907\u5927\u9762\u79ef\u3001\u9ad8\u8d28\u91cf\u77f3\u58a8\u70ef\u662f\u5b9e\u73b0\u77f3\u58a8\u70ef\u5de5\u4e1a\u89c4\u6a21\u5e94\u7528\u7684\u5148\u51b3\u6761\u4ef6\uff0c\u76ee\u524d\u8bf8\u5982\u673a\u68b0\u5265\u79bb\u3001\u6db2\u4f53\u5265\u79bb\u3001SiC\u4e0a\u5916\u5ef6\u751f\u957f\u548c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09\u7b49\u65b9\u6cd5\u5df2\u7ecf\u88ab\u5f00\u53d1\u51fa\u6765\u751f\u4ea7\u5177\u6709\u591a\u79cd\u5f62\u72b6\u3001\u4e0d\u540c\u5c3a\u5bf8\u7684\u77f3\u58a8\u70ef\u3002\u5176\u4e2d\uff0c\u5c3d\u7ba1CVD\u65b9\u6cd5\u5236\u5f97\u7684\u77f3\u58a8\u70ef\u5c55\u73b0\u51fa\u6700\u4f73\u7684\u7efc\u5408\u6027\u80fd\uff0c\u4e5f\u4ecd\u7136\u5b58\u5728\u6676\u754c\u3001\u70b9\u7f3a\u9677\u548c\u8936\u76b1\u7b49\u7ed3\u6784\u7f3a\u9677\uff0c\u8fd9\u4e9b\u95ee\u9898\u5728\u77f3\u58a8\u70ef\u89c4\u6a21\u5316\u751f\u4ea7\u8fc7\u7a0b\u4e2d\u6108\u52a0\u660e\u663e\u3002\u56e0\u6b64\uff0c\u5c06\u5b9e\u9a8c\u5ba4\u89c4\u6a21\u7684\u7814\u7a76\u548c\u5de5\u4e1a\u89c4\u6a21\u7684\u77f3\u58a8\u70ef\u8584\u819c\u5236\u5907\u7d27\u5bc6\u8054\u7cfb\u8d77\u6765\u662f\u5341\u5206\u5fc5\u8981\u7684\u3002<\/p>\n

\u3010\u6210\u679c\u7b80\u4ecb\u3011<\/strong><\/p>\n

\u8fd1\u65e5\uff0cAdv. Mater. <\/strong>\u5728\u7ebf\u520a\u767b\u4e86<\/strong>\u5317\u4eac\u5927\u5b66\u5f6d\u6d77\u7433\u6559\u6388\u4e0e\u5218\u5fe0\u8303\u9662\u58eb\u53d1\u8868\u7684\u9898\u4e3a\u201c<\/strong>Toward Mass Production of CVD Graphene Films<\/strong>\u201d\u7684\u7efc\u8ff0\u6587\u7ae0\uff0c\u96c6\u4e2d\u9610\u8ff0\u4e86\u57fa\u4e8e<\/strong>CVD<\/strong>\u65b9\u6cd5\u7684\u77f3\u58a8\u70ef\u8584\u819c\u5927\u89c4\u6a21\u751f\u4ea7\u7684\u7814\u7a76\u73b0\u72b6\u4e0e\u672a\u6765\u53d1\u5c55\u65b9\u5411<\/strong>\u3002\u8bba\u6587\u7b2c\u4e00\u4f5c\u8005\u4e3a\u5317\u4eac\u5927\u5b66\u535a\u58eb\u7814\u7a76\u751f\u9093\u5175\uff0c\u901a\u8baf\u4f5c\u8005\u4e3a\u5f6d\u6d77\u7433\u6559\u6388\u548c\u5218\u5fe0\u8303\u9662\u58eb\u3002\u9996\u5148\u7b80\u8981\u4ecb\u7ecd\u4e86CVD\u65b9\u6cd5\u5236\u5907\u77f3\u58a8\u70ef\u7684\u57fa\u672c\u539f\u7406\uff0c\u7136\u540e\u8be6\u7ec6\u5206\u6790\u4e86\u63a7\u5236\u77f3\u58a8\u70ef\u8d28\u91cf\u7684\u5de5\u7a0b\u539f\u7406\uff0c\u5305\u62ec\u5236\u7a0b\u3001\u8bbe\u5907\u4ee5\u53ca\u5173\u952e\u53c2\u6570\u7b49\uff0c\u6700\u540e\u8fd8\u8ba8\u8bba\u4e86\u77f3\u58a8\u70ef\u8584\u819c\u7684\u5927\u9762\u79ef\u5747\u4e00\u6027\u548c\u5feb\u901f\u8868\u5f81\u65b9\u6cd5\u3002\u6b64\u5916\uff0c\u8be5\u7efc\u8ff0\u4e2d\u8fd8\u6307\u51fa\u4e86\u77f3\u58a8\u70ef\u89c4\u6a21\u5316\u751f\u4ea7\u6240\u9762\u4e34\u7684\u6311\u6218\u3002<\/p>\n

\u3010\u56fe\u6587\u5bfc\u8bfb\u3011<\/strong><\/p>\n

\u56fe1 \u8d70\u5411CVD\u77f3\u58a8\u70ef\u8584\u819c\u7684\u89c4\u6a21\u5236\u5907<\/strong><\/p>\n

\"\"<\/p>\n

\u77f3\u58a8\u70ef\u7684\u5236\u5907\u5de5\u827a\u51b3\u5b9a\u4e86\u77f3\u58a8\u70ef\u7684\u4e3b\u8981\u7ed3\u6784\u7279\u5f81\u548c\u5176\u7269\u7406\u6027\u8d28\uff0c\u53cd\u8fc7\u6765\uff0c\u5b9e\u9645\u5e94\u7528\u5bf9\u77f3\u58a8\u70ef\u63d0\u51fa\u7684\u9700\u6c42\u53ef\u4ee5\u6307\u5bfc\u77f3\u58a8\u70ef\u7684\u751f\u4ea7\u8fc7\u7a0b\u3002\u76ee\u524d\uff0c\u901a\u8fc7\u8c03\u63a7\u5236\u5907\u6761\u4ef6\uff08\u5236\u7a0b\u3001\u8bbe\u5907\u4ee5\u53ca\u5173\u952e\u53c2\u6570\u7b49\uff09\uff0c\u80fd\u591f\u6bd4\u8f83\u597d\u5730\u63a7\u5236\u77f3\u58a8\u70ef\u7684\u4e3b\u8981\u7ed3\u6784\u7279\u5f81\u3002<\/p>\n

\u56fe<\/strong>2 <\/strong>\u91d1\u5c5e\u57fa\u5e95\u4e0a<\/strong>CVD<\/strong>\u5236\u5907\u77f3\u58a8\u70ef\u7684\u673a\u7406<\/strong><\/p>\n

\"\"<\/p>\n

(a) \u5728\u50ac\u5316\u57fa\u5e95\u4e0a\u751f\u957f\u77f3\u58a8\u70ef\u7684\u57fa\u672c\u6b65\u9aa4\uff1b<\/p>\n

(b) \u5728\u9ad8\u548c\u4f4e\u78b3\u6eb6\u89e3\u5ea6\u7684\u91d1\u5c5e\u50ac\u5316\u5242\u4e0a\u77f3\u58a8\u70ef\u7684\u4e24\u79cd\u5178\u578b\u751f\u957f\u9014\u5f84\u793a\u610f\u56fe\u3002<\/p>\n

\u56fe3 \u77f3\u58a8\u70ef\u5728Cu\u7b94\u4e0a\u7684\u6279\u6b21\u5236\u7a0b<\/strong><\/p>\n

\"\"<\/p>\n

(a) \u5377\u7ed5\u5728\u77f3\u82f1\u7ba1\u4e0a\u7684\u94dc\u7b94\u548c\u5927\u578b\u7ba1\u5f0f\u7089\u7684\u56fe\u7247\uff1b<\/p>\n

(b) \u5806\u79ef\u7684Cu\u7b94\u548c\u957f\u5b8c\u77f3\u58a8\u70ef\u540eCu\u7b94\u7684\u7167\u7247\uff1b<\/p>\n

(c) Cu\u5806\u79ef\u7684\u793a\u610f\u56fe\u548c\u5176\u4e2d\u4e09\u5c42\u94dc\u7b94\u4e0a\u751f\u957f\u7684\u77f3\u58a8\u70ef\u7684\u62c9\u66fc\u5149\u8c31\uff1b<\/p>\n

(d) Cu\u7b94\u6210\u5377\u653e\u7f6e\u7684\u793a\u610f\u56fe\uff1b<\/p>\n

(e) \u4e0d\u540c\u7684Cu\u7b94\u653e\u7f6e\u65b9\u6cd5\u53ef\u5b9e\u73b0\u7684\u94dc\u7b94\u4fa7\u5411\u5c3a\u5bf8\u793a\u610f\u56fe\u3002<\/p>\n

\u56fe4 Cu\u7b94\u4e0a\u77f3\u58a8\u70ef\u8584\u819c\u7684\u5377\u5bf9\u5377\u5236\u7a0b<\/strong><\/p>\n

\"\"<\/p>\n

(a) R2R APCVD\u7684\u539f\u7406\u56fe\uff1b<\/p>\n

(b) R2R LPCVD\u7684\u539f\u7406\u56fe\u548c\u56fe\u7247\uff1b<\/p>\n

(c) R2R CTCVD\u7684\u539f\u7406\u56fe\u548c\u56fe\u7247\uff1b<\/p>\n

(d) R2R OPCVD\u7684\u539f\u7406\u56fe\u548c\u56fe\u7247\u3002<\/p>\n

\u56fe5 \u7528\u4e8e\u77f3\u58a8\u70ef\u751f\u957f\u7684\u51b7\u58c1CVD\u7cfb\u7edf<\/strong><\/p>\n

\"\"<\/p>\n

(a) \u78c1\u611f\u5e94\u52a0\u70edCVD\u7684\u793a\u610f\u56fe\u548c\u56fe\u7247\uff1b<\/p>\n

(b) \u7126\u8033\u52a0\u70edR2R CVD\u7cfb\u7edf\u548c\u4e00\u5377\u77f3\u58a8\u70ef\/ PET\u7684\u793a\u610f\u56fe\uff1b<\/p>\n

(c) \u5feb\u901f\u70edCVD\u7cfb\u7edf\u7684\u793a\u610f\u56fe\u548c\u751f\u957f\u8fc7\u7a0b\uff1b<\/p>\n

(d) \u7535\u963b\u52a0\u70edCVD\u7684\u793a\u610f\u56fe\u548c\u56fe\u7247\u3002<\/p>\n

\u56fe6 \u91d1\u5c5e\u57fa\u5e95\u4e0aPECVD\u751f\u957f\u77f3\u58a8\u70ef<\/strong><\/p>\n

\"\"<\/p>\n

(a) PECVD\u8bbe\u5907\u6784\u6210\uff1b<\/p>\n

(b) R2R SMWCVD\u8bbe\u5907\u793a\u610f\u56fe\uff1b<\/p>\n

(c) \u901a\u8fc7PECVD\u4e00\u6b65\u5408\u6210\u9ad8\u8d28\u91cf\u77f3\u58a8\u70ef\u3002<\/p>\n

\u56fe7 \u77f3\u58a8\u70ef\u751f\u957f\u7684\u78b3\u6e90\u524d\u9a71\u4f53<\/strong><\/p>\n

\"\"<\/p>\n

(a) \u4f7f\u7528\u4e59\u9187\u4f5c\u4e3a\u78b3\u6e90\uff0c\u5728\u4e0d\u540c\u6e29\u5ea6\u4e0b\u751f\u957f\u7684\u77f3\u58a8\u70ef\u7684SEM\u56fe\u50cf\u548c\u62c9\u66fc\u5149\u8c31\uff1b<\/p>\n

(b) \u4f7f\u7528PMMA\u4f5c\u4e3a\u524d\u9a71\u4f53\u5728Cu\u819c\u4e0a\u751f\u957f\u77f3\u58a8\u70ef\u7684\u793a\u610f\u56fe\uff1b<\/p>\n

(c) \u4f7f\u7528\u5404\u79cd\u56fa\u4f53\u78b3\u6e90\u751f\u957f\u7684\u77f3\u58a8\u70ef\u7684\u62c9\u66fc\u5149\u8c31\uff1b<\/p>\n

(d) \u672c\u5f81\u548cN\u63ba\u6742\u77f3\u58a8\u70ef\u7684\u62c9\u66fc\u5149\u8c31\u3002<\/p>\n

\u56fe8 \u8154\u5ba4\u538b\u529b\u5bf9\u77f3\u58a8\u70efCVD\u751f\u957f\u7684\u5f71\u54cd<\/strong><\/p>\n

\"\"<\/p>\n

(a) \u4e0d\u540c\u538b\u529b\u4e0b\u4e09\u79cd\u6c14\u4f53\u6d41\u52a8\u72b6\u6001\uff1b<\/p>\n

(b) \u53cd\u5e94\u5668\u7684\u793a\u610f\u56fe\u548c\u8ba1\u7b97\u7684AP\u548cLP\u4e0b\u7532\u70f7\u6d53\u5ea6\u7684\u5206\u5e03\u8f6e\u5ed3\uff1b<\/p>\n

(c) \u4e0d\u540c\u7532\u70f7\u6d53\u5ea6\u4e0b\u5728SiO2<\/sub>\u4e0a\u5229\u7528APCVD\u5408\u6210\u7684\u77f3\u58a8\u70ef\u7684\u5149\u5b66\u663e\u5fae\u56fe\u50cf\uff1b<\/p>\n

(d) \u5728\u4e0d\u540c\u603b\u538b\u529b\u4e0b\u751f\u957f\u7684\u77f3\u58a8\u70ef\u7684SEM\u56fe\u50cf\u3002<\/p>\n

\u56fe9 \u6c14\u6d41\u5bf9\u77f3\u58a8\u70efCVD\u751f\u957f\u7684\u5f71\u54cd<\/strong><\/p>\n

\"\"<\/p>\n

(a) \u77f3\u58a8\u70ef\/\u94dc\u7b94\u7684SEM\u56fe\u50cf\u548c\u6d3b\u6027\u7269\u8d28\u6cbf\u7ba1\u957f\u5ea6\u7684\u6d53\u5ea6\u5206\u5e03\u793a\u610f\u56fe\uff1b<\/p>\n

(b) \u591a\u5c42\u77f3\u58a8\u70ef\u7684\u8303\u5fb7\u534e\u5916\u5ef6\u751f\u957f\uff1b<\/p>\n

(c) Cu\u4fe1\u5c01\u7684\u56fe\u7247\u548c\u4f7f\u7528Cu\u4fe1\u5c01\u751f\u957f\u77f3\u58a8\u70ef\u7684\u793a\u610f\u56fe\uff1b<\/p>\n

(d) \u53e0\u5c42Cu\u7b94\u9650\u57df\u7a7a\u95f4\u5185\u77f3\u58a8\u70ef\u7684\u751f\u957f\u4ee5\u53ca\u6291\u5236Cu\u6325\u53d1\u7684\u793a\u610f\u56fe\u3002<\/p>\n

\u56fe10 \u5149\u5b66\u663e\u5fae\u955c\u5feb\u901f\u8868\u5f81\u77f3\u58a8\u70ef\u7574\u5c3a\u5bf8\u548c\u8986\u76d6\u7387<\/strong><\/p>\n

\"\"<\/p>\n

(a) \u901a\u8fc7\u9009\u62e9\u6027\u6c27\u5316\u76f4\u63a5\u5728Cu\u7b94\u4e0a\u8868\u5f81\u77f3\u58a8\u70ef\u7574\u7684\u793a\u610f\u56fe\uff1b<\/p>\n

(b) \u6c27\u5316\u540e\u6ee1\u8986\u76d6\u77f3\u58a8\u70ef\/\u94dc\u7b94\u7684BF-OM\u56fe\u50cf\uff1b<\/p>\n

(c) \u6c27\u5316\u540e\u90e8\u5206\u8986\u76d6\u77f3\u58a8\u70ef\/\u94dc\u7b94\u7684BF-OM\u56fe\u50cf\uff1b<\/p>\n

(d) \u90e8\u5206\u8986\u76d6\u77f3\u58a8\u70ef\/Cu\u7b94\u7684DF-OM\u56fe\u50cf\uff1b<\/p>\n

(e) \u6ee1\u8986\u76d6\u77f3\u58a8\u70ef\/Cu\u7b94\u7684DF-OM\u56fe\u50cf\uff1b<\/p>\n

(f) \u4e0d\u540cCu\u6676\u4f53\u6676\u9762\u4e0a\u90e8\u5206\u8986\u76d6\u77f3\u58a8\u70ef\/Cu\u7b94\u7684DF-OM\u56fe\u50cf\uff1b<\/p>\n

(g)\u90e8\u5206\u8986\u76d6\u77f3\u58a8\u70ef\/Cu\u7b94\u7684DF-OM\u56fe\u50cf\uff0c\u4e2d\u95f4\u4e3a\u53cc\u5c42\u533a\u57df\u3002<\/p>\n

\u56fe11 \u5149\u5b66\u663e\u5fae\u955c\u5feb\u901f\u663e\u5f71\u77f3\u58a8\u70ef\u6676\u754c<\/strong><\/p>\n

\"\"<\/p>\n

(a) \u77f3\u58a8\u70ef\u8868\u9762\u4e0a\u6db2\u6676\u53d6\u5411\u6392\u5217\u7684\u793a\u610f\u56fe\uff1b<\/p>\n

(b) SiO2<\/sub>\/Si\u57fa\u5e95\u4e0a\u7684\u6db2\u6676\u6d82\u8986\u7684\u77f3\u58a8\u70ef\u8584\u819c\u7684POM\u56fe\u50cf\uff1b<\/p>\n

(c) \u77f3\u58a8\u70ef\/\u94dc\u7b94\u7684\u7d2b\u5916\u6c27\u5316\u5904\u7406\u793a\u610f\u56fe\uff1b<\/p>\n

(d) \u6c27\u5316\u5904\u7406\u524d\u77f3\u58a8\u70ef\/Cu\u7b94\u7684\u5149\u5b66\u7167\u7247\uff1b<\/p>\n

(e) \u6c27\u5316\u5904\u7406\u540e\u77f3\u58a8\u70ef\/Cu\u7b94\u7684\u5149\u5b66\u7167\u7247\u3002<\/p>\n

\u56fe12 \u4f7f\u7528\u5149\u5b66\u65b9\u6cd5\u5feb\u901f\u8868\u5f81\u77f3\u58a8\u70ef\u5c42\u6570<\/strong><\/p>\n

\"\"<\/p>\n

(a) \u5728\u767d\u5149\uff08\u5de6\uff09\u548c\u5355\u8272\u5149\uff08\u53f3\uff09\u7167\u660e\u4e0bSiO2<\/sub>\/Si\u57fa\u5e95\u4e0a\u77f3\u58a8\u70ef\u7684OM\u56fe\u50cf\uff1b<\/p>\n

(b) \u9010\u5c42\u8f6c\u79fb\u5230\u77f3\u82f1\u57fa\u677f\u4e0a\u77f3\u58a8\u70ef\u8584\u819c\u7684\u7d2b\u5916-\u53ef\u89c1\u5149\u8c31\uff1b<\/p>\n

(c) \u73bb\u7483\u4e0a\u77f3\u58a8\u70ef\u6837\u54c1\u7684IRM\u56fe\u50cf\uff1b<\/p>\n

(d) \u73bb\u7483\u4e0a\u77f3\u58a8\u70ef\u6837\u54c1\u7684\u900f\u5c04\u663e\u5fae\u955c\u56fe\u50cf\uff1b<\/p>\n

(e) \u591a\u5c42\u77f3\u58a8\u70ef\u6837\u54c1\u7684\u6c27\u5316\u5904\u7406\u793a\u610f\u56fe\uff1b<\/p>\n

(f)\u7d2b\u5916\u81ed\u6c27\u6c27\u5316\u5904\u7406\u540e\u7684\u77f3\u58a8\u70ef\/ Cu\u6837\u54c1\u7684OM\u56fe\u50cf\uff1b<\/p>\n

(g) (f)\u4e2d\u76f8\u540c\u533a\u57df\u7684\u77f3\u58a8\u70ef\/ Cu\u7684SEM\u56fe\u50cf\u3002<\/p>\n

\u56fe13 \u4e25\u683c\u5355\u5c42\u77f3\u58a8\u70ef\u7684\u751f\u957f<\/strong><\/p>\n

\"\"<\/p>\n

(a) \u4e8c\u5143Ni-Mo\u5408\u91d1\u7528\u4e8eCVD\u751f\u957f\u77f3\u58a8\u70ef\u7684\u793a\u610f\u56fe\uff1b<\/p>\n

(b) Ni-Mo\u5408\u91d1\u4e0a\u751f\u957f\u7684\u77f3\u58a8\u70ef\u7684\u62c9\u66fc\u5149\u8c31\uff1b<\/p>\n

(c) \u4e0d\u540c\u6761\u4ef6\u4e0bNi-Mo\u5408\u91d1\u4e0a\u751f\u957f\u7684\u77f3\u58a8\u70ef\u8584\u819c\u7684OM\u56fe\u50cf\uff1b<\/p>\n

(d) \u5728\u6db2\u6001Cu\u548c\u56fa\u4f53Cu\u4e0a\u751f\u957f\u7684\u77f3\u58a8\u70ef\u7684SEM\u56fe\u50cf\u3002<\/p>\n

\u56fe14 \u5177\u6709\u5747\u5300\u7574\u5c3a\u5bf8\u7684\u77f3\u58a8\u70ef\u8584\u819c\u751f\u957f<\/strong><\/p>\n

\"\"<\/p>\n

(a) \u77f3\u58a8\u70ef\u6676\u79cd\u9635\u5217\u7684SEM\u56fe\u50cf\uff1b<\/p>\n

(b) \u4ece\u4e00\u7cfb\u5217\u6676\u79cd\u4e2d\u5728\u8f83\u77ed\u65f6\u95f4\u5185\u751f\u957f\u7684\u77f3\u58a8\u70ef\u6676\u7c92\u9635\u5217\u7684SEM\u56fe\u50cf\uff1b<\/p>\n

(c) \u4ece\u4e00\u7cfb\u5217\u6676\u79cd\u4e2d\u5728\u8f83\u957f\u65f6\u95f4\u5185\u751f\u957f\u7684\u77f3\u58a8\u70ef\u6676\u7c92\u9635\u5217\u7684SEM\u56fe\u50cf\uff1b<\/p>\n

(d) \u968f\u673a\u5206\u5e03\u5728Cu\u8868\u9762\u4e0a\u77f3\u58a8\u70ef\u7574\u7684SEM\u56fe\u50cf\uff1b<\/p>\n

(e) \u5728\u6db2\u6001Cu\u8868\u9762\u4e0a\u5408\u6210HGFs\u7684CVD\u8fc7\u7a0b\u793a\u610f\u56fe\uff1b<\/p>\n

(f) \u90e8\u5206\u8986\u76d6HGFs\u7684SEM\u56fe\u50cf\uff1b<\/p>\n

(g) \u7d27\u51d1\u7ec4\u88c5HGFs\u7684SEM\u56fe\u50cf\uff1b<\/p>\n

(h) \u901a\u8fc7SACVD\u65b9\u6cd5\u5236\u5907\u591a\u6676\u77f3\u58a8\u70ef\u8584\u819c\u7684\u793a\u610f\u56fe\u3002<\/p>\n

(i) SACVD\u65b9\u6cd5\u5728Pt\u7b94\u4e0a\u751f\u957f\u7684\u7574\u533a\u5c3a\u5bf8\u5747\u4e00\u53ef\u8c03\u7684\u77f3\u58a8\u70ef\u8584\u819c\u3002<\/p>\n

\u56fe15 \u5404\u79cd\u5de5\u7a0b\u53c2\u6570\u4e0b\u77f3\u58a8\u70ef\u7684\u6027\u80fd\u548c\u6210\u672c<\/strong><\/p>\n

\"\"<\/p>\n

(a,b) \u5404\u79cd\u5236\u9020\u8fc7\u7a0b\uff08B2B\u8fc7\u7a0b\u548cR2R\u8fc7\u7a0b\uff09\u548c\u8bbe\u5907\uff08HWCVD\uff0cCW CVD\u548cPECVD\uff09\u5236\u5907\u7684\u77f3\u58a8\u70ef\u6027\u80fd\u548c\u6210\u672c\u8bc4\u4f30\uff1b<\/p>\n

(c,d) \u5404\u79cd\u5173\u952e\u53c2\u6570\uff0c\u5305\u62ec\u57fa\u677f\uff08Cu\uff0cNi\uff09\u3001\u538b\u529b\uff08APCVD\uff0cLPCVD\uff09\u548c\u78b3\u6e90\uff08\u6c14\u6001\uff0c\u6db2\u6001\u548c\u56fa\u6001\uff09\u5236\u5907\u7684\u77f3\u58a8\u70ef\u6027\u80fd\u548c\u6210\u672c\u8bc4\u4f30\u3002<\/p>\n

\u56fe16 CVD\u77f3\u58a8\u70ef\u8584\u819c\u5546\u4e1a\u5316\u7684\u5c55\u671b<\/strong><\/p>\n

\"\"<\/p>\n

\u77f3\u58a8\u70ef\u8584\u819c\u7684\u5546\u4e1a\u5316\u5e94\u7528\u662f\u4e00\u4e2a\u7efc\u5408\u7684\u8fc7\u7a0b\uff0c\u9700\u8981\u8003\u8651\u5230\u751f\u957f\u3001\u8f6c\u79fb\u3001\u5e94\u7528\u3001\u6807\u51c6\u5316\u7b49\u591a\u4e2a\u65b9\u9762\u3002<\/p>\n

\u3010\u5c0f\u7ed3\u3011<\/strong><\/p>\n

\u8d28\u91cf\u63a7\u5236\u5bf9\u4e8e\u77f3\u58a8\u70ef\u7684\u5927\u89c4\u6a21\u751f\u4ea7\u5341\u5206\u91cd\u8981\uff0c\u4e3a\u4e86\u5b9e\u73b0\u672a\u6765\u77f3\u58a8\u70ef\u8584\u819c\u7684\u5b9e\u9645\u5e94\u7528\uff0c\u5176\u5927\u9762\u79ef\u540c\u8d28\u6027\u548c\u6279\u6b21\u95f4\u91cd\u73b0\u6027\u662f\u5fc5\u987b\u8981\u89e3\u51b3\u7684\u95ee\u9898\u3002\u57fa\u4e8eCVD\u65b9\u6cd5\u5728\u91d1\u5c5e\u57fa\u5e95\u4e0a\u751f\u957f\u7684\u77f3\u58a8\u70ef\u8584\u819c\u5177\u6709\u4f18\u5f02\u7684\u53ef\u6269\u5c55\u6027\u548c\u53ef\u63a7\u6027\u3002\u5728\u672c\u7efc\u8ff0\u4e2d\uff0c\u4f5c\u8005\u7740\u91cd\u8ba8\u8bba\u4e86CVD\u65b9\u6cd5\u89c4\u6a21\u5316\u5236\u5907\u77f3\u58a8\u70ef\u8584\u819c\u7684\u91cd\u8981\u5f71\u54cd\u56e0\u7d20\uff0c\u5305\u62ec\u5236\u7a0b\u3001\u5de5\u4e1a\u89c4\u6a21\u8bbe\u5907\u548c\u5173\u952e\u53c2\u6570\u3002\u540c\u65f6\uff0c\u4e5f\u6307\u51fa\u77f3\u58a8\u70ef\u8584\u819c\u7684\u5546\u4e1a\u5316\u8fc7\u7a0b\u662f\u4e00\u4e2a\u7efc\u5408\u7684\u3001\u590d\u6742\u7684\u8fc7\u7a0b\u3002\u5c3d\u7ba1\u8fd1\u5e74\u6765\uff0cCVD\u6cd5\u5236\u5907\u77f3\u58a8\u70ef\u8584\u819c\u5f97\u5230\u4e86\u8f83\u4e3a\u6df1\u5165\u7684\u79d1\u5b66\u754c\u548c\u5de5\u4e1a\u754c\u7684\u7814\u7a76\uff0c\u77f3\u58a8\u70ef\u7684\u5927\u89c4\u6a21\u751f\u4ea7\u4ecd\u5904\u4e8e\u4e00\u4e2a\u521d\u671f\u9636\u6bb5\uff0c\u800c\u4e14\uff0c\u5728\u627e\u5230\u77f3\u58a8\u70ef\u8584\u819c\u7684\u6740\u624b\u950f\u5f0f\u5e94\u7528\u4e4b\u524d\uff0c\u6269\u5927\u77f3\u58a8\u70ef\u8584\u819c\u751f\u4ea7\u89c4\u6a21\u9700\u8981\u4fdd\u6301\u8c28\u614e\u3002<\/p>\n

\u6587\u732e\u94fe\u63a5\uff1aToward Mass Production of CVD Graphene Films<\/a><\/strong>\u00a0(Adv. Mater. 2018, DOI: 10.1002\/adma.201800996)<\/p>\n

\u672c\u6587\u7531\u6750\u6599\u4eba\u751f\u7269\u5b66\u672f\u7ec4biotech\u4f9b\u7a3f\uff0c\u6750\u6599\u725b\u5ba1\u6838\u6574\u7406\u3002<\/p>\n

\u6b22\u8fce\u5927\u5bb6\u5230\u6750\u6599\u4eba\u5ba3\u4f20\u79d1\u6280\u6210\u679c\u5e76\u5bf9\u6587\u732e\u8fdb\u884c\u6df1\u5165\u89e3\u8bfb\uff0c\u6295\u7a3f\u90ae\u7bb1tougao@cailiaoren.com\u3002<\/p>\n

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