{"id":142378,"date":"2018-06-15T06:30:30","date_gmt":"2018-06-14T22:30:30","guid":{"rendered":"\/\/m.iemloyee.com\/?p=142378"},"modified":"2018-06-14T22:32:32","modified_gmt":"2018-06-14T14:32:32","slug":"%e5%93%88%e5%b7%a5%e5%a4%a7small%ef%bc%9a%e5%b7%a7%e7%94%a8%e6%89%ab%e6%8f%8f%e7%94%b5%e9%95%9c%e5%ae%9e%e7%8e%b0%e8%a1%ac%e5%ba%95%e6%94%af%e6%92%91%e7%9f%b3%e5%a2%a8%e7%83%af%e7%9a%84%e9%ab%98","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=142378","title":{"rendered":"\u54c8\u5de5\u5927Small\uff1a\u5de7\u7528\u626b\u63cf\u7535\u955c\u5b9e\u73b0\u886c\u5e95\u652f\u6491\u77f3\u58a8\u70ef\u7684\u9ad8\u8d28\u91cf\u6210\u50cf"},"content":{"rendered":"
\u3010\u5f15\u8a00\u3011<\/strong><\/p>\n \u5e38\u89c1\u7684\u886c\u5e95\u652f\u6491\u77f3\u58a8\u70ef\u4f53\u7cfb\uff0c\u6709SiC\u70ed\u89e3\u751f\u957f\u77f3\u58a8\u70ef\u3001Cu\u7b49\u91d1\u5c5e\u886c\u5e95\u4e0aCVD\u6cd5\u751f\u957f\u77f3\u58a8\u70ef\u3001Si\u4e0a\u8f6c\u79fb\u77f3\u58a8\u70ef\u7b49\u3002\u77f3\u58a8\u70ef\u7684\u5e38\u7528\u7ed3\u6784\u8868\u5f81\u6280\u672f\u5305\u62ec\u900f\u5c04\u7535\u955c\u3001\u62c9\u66fc\uff08Raman\uff09\u3001\u539f\u5b50\u529b\u663e\u5fae\u955c\uff08AFM\uff09\u3001\u5149\u5b66\u663e\u5fae\u955c\u4ee5\u53ca\u626b\u63cf\u7535\u955c\uff08SEM\uff09\u3002\u5176\u4e2d\uff0cSEM\u5177\u6709\u5206\u8fa8\u7387\u8fbe\u7eb3\u7c73\u7ea7\u3001\u89c2\u6d4b\u8303\u56f4\u5927\u3001\u901f\u5ea6\u5feb\u3001\u65e0\u635f\u7b49\u4f18\u70b9\uff0c\u5728\u77f3\u58a8\u70ef\u7684\u751f\u957f\u673a\u7406\u7814\u7a76\u3001\u8868\u9762\u8986\u76d6\u5ea6\u786e\u5b9a\u3001\u8936\u76b1\u7b49\u7f3a\u9677\u89c2\u5bdf\u3001\u76f8\u5bf9\u539a\u5ea6\u6d4b\u5b9a\u7b49\u7814\u7a76\u65b9\u9762\u5177\u6709\u72ec\u7279\u4f18\u52bf\u3002\u76ee\u524d\uff0c\u51e0\u4e4e\u6240\u6709\u7684SEM\u5747\u914d\u5907\u4e86\u4e8c\u6b21\u7535\u5b50\uff08Secondary electron\uff0cSE\uff09\u63a2\u6d4b\u5668\u8fdb\u884c\u8868\u9762\u5f62\u8c8c\u5206\u6790\uff0c\u201c\u6807\u914d\u201d\u7684SE\u63a2\u6d4b\u5668\u662f\u8154\u5ba4\u5185\u7684\u65c1\u7f6e\u5f0fEverhart-Thornley\uff08E-T\uff09\u63a2\u6d4b\u5668\u3002<\/p>\n \u4e00\u76f4\u4ee5\u6765\uff0c\u7814\u7a76\u8005\u53d1\u73b0\u4f4e\u52a0\u901f\u7535\u538b\uff08<5 kV\uff09\u4e0b\u6210\u50cf\u53ef\u4ee5\u663e\u8457\u63d0\u5347\u886c\u5e95\u652f\u6491\u77f3\u58a8\u70ef\u7684E-T SE\u56fe\u50cf\u886c\u5ea6\u3002\u4f46\u662f\uff0c\u5bf9\u4e8e\u53e6\u5916\u4e00\u4e2a\u5f88\u91cd\u8981\u7684\u6210\u50cf\u53c2\u6570\u2014\u2014\u5de5\u4f5c\u8ddd\u79bb\uff08\u6837\u54c1\u4e0a\u8868\u9762\u4e0e\u7269\u955c\u6781\u9774\u4e0b\u7aef\u9762\u4e4b\u95f4\u7684\u8ddd\u79bb\uff09\u7684\u5f71\u54cd\uff0c\u5374\u5c11\u4eba\u5173\u6ce8\uff0c\u7814\u7a76\u8005\u4e00\u822c\u5747\u8bbe\u5176\u4e3a\u9ad8\u52a0\u901f\u7535\u538b\u4e0b\u7684\u6570\u503c\uff088\u201312 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SE\u56fe\u50cf\u886c\u5ea6\u968f\u7740\u5de5\u4f5c\u8ddd\u79bb\u589e\u52a0\u800c\u663e\u8457\u63d0\u5347\uff0c\u5373\u4f7f\u5de5\u4f5c\u7535\u538b\u8f83\u9ad8\uff0c\u4e5f\u80fd\u591f\u5b9e\u73b0\u4e0e\u4f4e\u52a0\u901f\u7535\u538b\u6761\u4ef6\u4e0b\u7684\u7c7b\u4f3c\u9ad8\u56fe\u50cf\u886c\u5ea6\uff0c\u6210\u529f\u5b9e\u73b0\u5bf9\u7eb3\u7c73\u7ea7\u8936\u76b1\u7b49\u7ec6\u8282\u8fdb\u884c\u9ad8\u6e05\u6670\u6210\u50cf\uff08\u6587\u7ae0\u9898\u76ee\u4e2d\u501f\u7528\u4e86\u8d39\u66fc\u7684\u540d\u8a00\u201cThere is Plenty of Room at the Bottom\u201d\uff0c\u5bd3\u610f\u4e3a\u5de5\u4f5c\u8ddd\u79bb\u52a0\u5927\u540e\u6210\u50cf\u6548\u679c\u63d0\u5347\uff09\u3002<\/p>\n \u4ed6\u4eec\u8fd8\u53d1\u73b0\uff0c\u501f\u52a9\u9ad8\u886c\u5ea6SEM\u56fe\u50cf\uff0c\u518d\u8f85\u4ee5AFM\u548cRaman\u6d4b\u8bd5\uff0c\u53ef\u4ee5\u5b9e\u73b0\u5168\u886c\u5e95\u8303\u56f4\u5185\u7684\u77f3\u58a8\u70ef\u5c42\u6570\u7684\u5feb\u901f\u3001\u51c6\u786e\u7684\u5b9a\u91cf\u786e\u5b9a\u3002<\/p>\n \u4ed6\u4eec\u8fdb\u4e00\u6b65\u6df1\u5165\u8ba8\u8bba\u4e86\u5de5\u4f5c\u53c2\u6570\u5bf9\u63a2\u6d4b\u5668\u7684SE\u6536\u96c6\u6548\u7387\u7684\u5f71\u54cd\uff0c\u5efa\u7acb\u4e86\u7edf\u4e00\u7684\u7406\u8bba\u6846\u67b6\uff0c\u80fd\u591f\u540c\u65f6\u81ea\u6d3d\u5730\u89e3\u91ca\u5de5\u4f5c\u8ddd\u79bb\u548c\u52a0\u901f\u7535\u538b\u4e24\u4e2a\u56e0\u7d20\u5bf9\u886c\u5ea6\u7684\u5f71\u54cd\u89c4\u5f8b\u3002SEM\u7535\u5b50\u67aa\u53d1\u5c04\u7684\u7535\u5b50\u675f\u4e0e\u886c\u5e95\u548c\u77f3\u58a8\u70ef\u4f5c\u7528\u540e\uff0c\u4f1a\u4ea7\u751f\u51e0\u79cd\u4e8c\u6b21\u7535\u5b50\uff0c\u5982SE1\u4e3a\u76f4\u63a5\u53d1\u5c04\u4ea7\u751f\uff0cSE2\u4e3a\u80cc\u6563\u5c04\u7535\u5b50\u6fc0\u53d1\u4ea7\u751f\uff0cSE3 \u4e3a\u80cc\u6563\u5c04\u7535\u5b50\u4e0e\u955c\u7b52\u5185\u90e8\u4ef6\u4f5c\u7528\u6fc0\u53d1\u4ea7\u751f\u3002E-T\u63a2\u6d4b\u5668\u5bf9\u5404\u79cdSE\u7684\u6536\u96c6\u6548\u7387\u548c\u5b83\u4eec\u5bf9\u603bSE\u6570\u91cf\u7684\u76f8\u5bf9\u8d21\u732e\uff0c\u51b3\u5b9a\u4e86\u886c\u5e95\u652f\u6491\u77f3\u58a8\u70ef\u7684\u56fe\u50cf\u886c\u5ea6\uff08\u77f3\u58a8\u70ef\u8986\u76d6\u533a\u57df\u548c\u672a\u8986\u76d6\u533a\u57df\u7684\u56fe\u50cf\u76f8\u5bf9\u7070\u5ea6\u6bd4\u503c\uff0c\u4ee5\u53ca\u4e0d\u540c\u5c42\u6570\u77f3\u58a8\u70ef\u8986\u76d6\u533a\u57df\u7684\u56fe\u50cf\u76f8\u5bf9\u7070\u5ea6\u6bd4\u503c\uff09\u7684\u4f18\u52a3\u3002<\/p>\n \u3010\u56fe\u6587\u5bfc\u8bfb\u3011<\/strong><\/p>\n \u56fe<\/strong>1<\/strong> SiC<\/strong>\u70ed\u89e3\u77f3\u58a8\u70ef\u7684\u540c\u4e00\u533a\u57df\uff0c\u5728<\/strong>\u4e0d\u540c\u6210\u50cf\u53c2\u6570\u4e0b<\/strong>SEM E-T 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\uff08e\uff09\uff08f\uff09\u5de5\u4f5c\u8ddd\u79bb\u589e\u52a0\u3001\u52a0\u901f\u7535\u538b\u51cf\u5c0f\uff0c\u4eae\u5ea6\u548c\u5bf9\u6bd4\u5ea6\u81ea\u52a8\u8c03\u8282\u3002\u886c\u5ea6\u63d0\u5347\uff0c\u566a\u70b9\u6ca1\u6709\u589e\u52a0\uff0c\u56fe\u50cf\u771f\u5b9e\u8d28\u91cf\u5927\u5e45\u63d0\u5347\u3002\u7ec6\u5fae\u7684\u8936\u76b1\uff08\u7bad\u5934\uff09\u548c\u7a84\u6761\u886c\u5ea6\u5dee\u5f02\u5e26\uff08\u7eff\u5708\uff09\u6e05\u6670\u53ef\u89c1\uff1b<\/p>\n \uff08g\uff09\uff08h\uff09\u5bf9\u5e94\u7684AFM\u5f62\u8c8c\u56fe\uff0c\u6cbf\u767d\u7ebf\u7684\u8f6e\u5ed3\u56fe\uff08\u6ce8\uff1a\u7ea2\u8272\u4e3a\u53bb\u9664\u77f3\u58a8\u70ef\u540e\u7684\u8f6e\u5ed3\u7ebf\uff0c\u4ee5\u5bf9\u6bd4\u663e\u793a\u886c\u5e95\u7684\u5f62\u8c8c\uff09\uff0c\u7eff\u5708\u6240\u793a\u4e3aSiC\u4e0a\u7684\u51f8\u8d77\u5e73\u53f0\uff1b<\/p>\n 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\uff08c\uff09\u793a\u610f\u56fe\uff1a\u8868\u660e\u4f4eVacc\u6709\u52a9\u4e8e\u589e\u52a0\u77f3\u58a8\u70ef\u4e0e\u886c\u5e95\u4ee5\u53ca\u4e0d\u540c\u5c42\u6570\u77f3\u58a8\u70ef\u4e4b\u95f4\u7684SE1+SE2\u6570\u91cf\u5dee\u5f02\uff08SE3\u6570\u91cf\u4e0d\u53d8\uff09\uff1b<\/p>\n \uff08d\uff09\u5b9e\u9a8c\u7ed3\u679c\uff1a\u8868\u660e\u4f4eVacc\u6709\u52a9\u4e8e\u63d0\u5347\u886c\u5ea6\u5e76\u66f4\u597d\u5730\u533a\u5206\u77f3\u58a8\u70ef\/\u886c\u5e95\u4ee5\u53ca\u4e0d\u540c\u5c42\u6570\u7684\u77f3\u58a8\u70ef\uff08Vacc=3 kV\u7684\u886c\u5ea6\u662fVacc=20 kV\u65f6\u76843\u500d\uff09\u3002<\/p>\n \u56fe<\/strong>4 <\/strong>\u5de5\u4f5c\u8ddd\u79bb\u5bf9\u886c\u5ea6\u7684\u5f71\u54cd<\/strong>\u673a\u5236\uff1a<\/strong>\u7edf\u4e00\u7684\u7406\u8bba\u6846\u67b6<\/strong><\/p>\n 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SE\u56fe\u50cf\u886c\u5ea6\u968f\u7740\u5de5\u4f5c\u8ddd\u79bb\u589e\u52a0\u800c\u663e\u8457\u63d0\u5347\uff0c\u5373\u4f7f\u5de5\u4f5c\u7535\u538b\u8f83\u9ad8\uff0c\u4e5f\u80fd\u591f\u5b9e\u73b0\u4e0e\u4f4e\u52a0\u901f\u7535\u538b\u6761\u4ef6\u4e0b\u7684\u7c7b\u4f3c\u9ad8\u56fe\u50cf\u886c\u5ea6\uff0c\u80fd\u591f\u5bf9\u7eb3\u7c73\u7ea7\u8936\u76b1\u7b49\u7ec6\u8282\u8fdb\u884c\u9ad8\u6e05\u6670\u6210\u50cf\u3002\u6b64\u5916\uff0c\u501f\u52a9\u9ad8\u886c\u5ea6SEM\u56fe\u50cf\uff0c\u518d\u8f85\u4ee5AFM\u548cRaman\u6d4b\u8bd5\uff0c\u53ef\u4ee5\u5b9e\u73b0\u5168\u886c\u5e95\u8303\u56f4\u5185\u7684\u77f3\u58a8\u70ef\u5c42\u6570\u7684\u5feb\u901f\u3001\u51c6\u786e\u7684\u5b9a\u91cf\u786e\u5b9a\u3002\u901a\u8fc7\u5efa\u7acb\u7684\u7edf\u4e00\u7684\u7406\u8bba\u6846\u67b6\uff0c\u80fd\u591f\u540c\u65f6\u81ea\u6d3d\u5730\u89e3\u91ca\u5de5\u4f5c\u8ddd\u79bb\u548c\u52a0\u901f\u7535\u538b\u4e24\u4e2a\u56e0\u7d20\u5bf9\u886c\u5ea6\u7684\u5f71\u54cd\u89c4\u5f8b\u3002<\/p>\n 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Huang, et al,\u00a0High-Contrast SEM Imaging of Supported Few-Layer Graphene for Differentiating Distinct Layers and Resolving Fine Features: There is Plenty of Room at the Bottom<\/a>, Small, 2018, DOI:\u00a010.1002\/smll.201704190.<\/p>\n \u672c\u6587\u7531\u7518\u9633\u6559\u6388\u8bfe\u9898\u7ec4\u4f9b\u7a3f\u3002<\/p>\n<\/a><\/p>\n
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