{"id":127533,"date":"2018-03-05T06:30:55","date_gmt":"2018-03-04T22:30:55","guid":{"rendered":"\/\/m.iemloyee.com\/?p=127533"},"modified":"2018-03-03T22:51:31","modified_gmt":"2018-03-03T14:51:31","slug":"%e5%ad%a6%e6%9c%af%e5%b9%b2%e8%b4%a7-%e5%8c%96%e5%ad%a6%e6%b0%94%e7%9b%b8%e6%b2%89%e7%a7%af%ef%bc%88chemical-vapor-deposition%ef%bc%89","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=127533","title":{"rendered":"\u3010\u5236\u5907\u4e13\u680f\u3011\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09\u6280\u672f\u68b3\u7406"},"content":{"rendered":"

\"\"<\/a><\/p>\n

\u6750\u6599\u4eba\u63a8\u51fa\u5236\u5907\u4e13\u680f\uff0c\u9080\u8bf7\u4e13\u680f\u79d1\u6280\u987e\u95ee\u64b0\u7a3f\u8bb2\u8ff0\u5404\u79cd\u5236\u5907\u6280\u672f\u3002\u672c\u6587\u7531\u6750\u6599\u4eba\u4e13\u680f\u79d1\u6280\u987e\u95ee\u77f3\u78ca\u64b0\u7a3f\u63d0\u4f9b\u3002<\/p>\n

1. \u5316\u5b66\u6c14\u76f8\u6c89\u79efCVD\u7684\u6765\u6e90\u53ca\u53d1\u5c55<\/strong><\/p>\n

\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08Chemical Vapor Deposition\uff09\u4e2d\u7684Vapor Deposition\u610f\u4e3a\u6c14\u76f8\u6c89\u79ef\uff0c\u5176\u610f\u662f\u6307\u5229\u7528\u6c14\u76f8\u4e2d\u53d1\u751f\u7684\u7269\u7406\u3001\u5316\u5b66\u8fc7\u7a0b\uff0c\u5728\u56fa\u4f53\u8868\u9762\u5f62\u6210\u6c89\u79ef\u7269\u7684\u6280\u672f\u3002\u6309\u7167\u673a\u7406\u5176\u53ef\u4ee5\u5212\u5206\u4e3a\u4e09\u5927\u7c7b\uff1a\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08Physical\u00a0Vapor\u00a0Deposition,\u7b80\u79f0PVD\uff09\uff0c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08Chemical\u00a0Vapor\u00a0Deposition,\u7b80\u79f0CVD\uff09\u548c\u7b49\u79bb\u5b50\u4f53\u6c14\u76f8\u6c89\u79ef\uff08Plasma Chemical Vapor Deposition,\u7b80\u79f0PCVD\uff09\u3002[<\/sup>1]<\/sup>\u76ee\u524dCVD\u7684\u5e94\u7528\u6700\u4e3a\u5e7f\u6cdb\uff0c\u5176\u6280\u672f\u53d1\u5c55\u53ca\u7814\u7a76\u4e5f\u6700\u4e3a\u6210\u719f\uff0c\u5176\u5e7f\u6cdb\u5e94\u7528\u4e8e\u5e7f\u6cdb\u7528\u4e8e\u63d0\u7eaf\u7269\u8d28\u3001\u5236\u5907\u5404\u79cd\u5355\u6676\u3001\u591a\u6676\u6216\u73bb\u7483\u6001\u65e0\u673a\u8584\u819c\u6750\u6599\u3002<\/p>\n

CVD\u548cPVD\u4e4b\u95f4\u7684\u533a\u522b\u4e3b\u8981\u662f\uff0cCVD\u6c89\u79ef\u8fc7\u7a0b\u8981\u53d1\u751f\u5316\u5b66\u53cd\u5e94\uff0c\u5c5e\u4e8e\u6c14\u76f8\u5316\u5b66\u751f\u957f\u8fc7\u7a0b\uff0c\u5176\u5177\u4f53\u662f\u6307\u5229\u7528\u6c14\u6001\u6216\u8005\u84b8\u6c7d\u6001\u7684\u7269\u8d28\u5728\u56fa\u4f53\u8868\u9762\u4e0a\u53d1\u751f\u5316\u5b66\u53cd\u5e94\u7ee7\u800c\u751f\u6210\u56fa\u6001\u6c89\u79ef\u7269\u7684\u5de5\u827a\u8fc7\u7a0b\u3002\u7b80\u800c\u8a00\u4e4b\uff0c\u5373\u901a\u8fc7\u5c06\u591a\u79cd\u6c14\u4f53\u539f\u6599\u5bfc\u5165\u5230\u53cd\u5e94\u5ba4\u5185,\u4f7f\u5176\u76f8\u4e92\u95f4\u53d1\u751f\u5316\u5b66\u53cd\u5e94\u751f\u6210\u65b0\u6750\u6599\uff0c\u6700\u540e\u6c89\u79ef\u5230\u57fa\u7247\u4f53\u8868\u9762\u7684\u8fc7\u7a0b\u3002CVD\u8fd9\u4e00\u540d\u79f0\u6700\u65e9\u5728Powell C F\u7b49\u4eba1966\u5e74\u6240\u8457\u540d\u4e3a\u300aVapor Deposition\u300b\u7684\u4e66\u4e2d\u88ab\u9996\u6b21\u63d0\u5230\uff0c\u4e4b\u540eChemical Vapor Deposition\u624d\u4e3a\u4eba\u5e7f\u6cdb\u63a5\u53d7\u3002[<\/sup>2] <\/sup><\/p>\n

CVD\u6280\u672f\u7684\u5229\u7528\u6700\u65e9\u53ef\u4ee5\u88ab\u8ffd\u6eaf\u5230\u53e4\u4eba\u7c7b\u65f6\u671f\uff0c\u5ca9\u6d1e\u58c1\u6216\u5ca9\u77f3\u4e0a\u7559\u4e0b\u4e86\u7531\u4e8e\u53d6\u6696\u548c\u70e7\u70e4\u7b49\u5f62\u6210\u7684\u9ed1\u8272\u78b3\u5c42\u3002\u73b0\u4ee3CVD\u6280\u672f\u840c\u82bd\u4e8e20\u4e16\u7eaa\u768450\u5e74\u4ee3\uff0c\u5f53\u65f6\u5176\u4e3b\u8981\u5e94\u7528\u4e8e\u5236\u4f5c\u5200\u5177\u7684\u6d82\u5c42\u300220\u4e16\u7eaa60\uff5e70\u5e74\u4ee3\u4ee5\u6765\uff0c\u968f\u7740\u534a\u5bfc\u4f53\u548c\u96c6\u6210\u7535\u8def\u6280\u672f\u7684\u53d1\u5c55\uff0cCVD\u6280\u672f\u5f97\u5230\u4e86\u957f\u8db3\u7684\u53d1\u5c55\u548c\u8fdb\u6b65\u30021968\u5e74Nishizawa\u8bfe\u9898\u7ec4\u9996\u6b21\u4f7f\u7528\u4f4e\u538b\u6c5e\u706f\u7814\u7a76\u4e86\u5149\u7167\u5c04\u5bf9\u56fa\u4f53\u8868\u9762\u4e0a\u6c89\u79efP\u578b\u5355\u6676\u7845\u819c\u7684\u5f71\u54cd\uff0c\u5f00\u542f\u4e86\u5149\u6c89\u79ef\u7684\u7814\u7a76\u3002[<\/sup>3]\u00a0<\/sup>1972\u5e74Nelson\u548cRichardson\u7528CO2<\/sub>\u6fc0\u5149\u805a\u7126\u675f\u6c89\u79ef\u78b3\u819c\uff0c\u5f00\u59cb\u4e86\u6fc0\u5149\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7684\u7814\u7a76\u3002[<\/sup>4] <\/sup>\u7ee7Nelson\u4e4b\u540e\uff0c\u7814\u7a76\u8005\u4eec\u91c7\u7528\u529f\u7387\u4e3a\u51e0\u5341\u74e6\u7684\u6fc0\u5149\u5668\u6c89\u79efSiC\u3001Si3<\/sub>N4<\/sub>\u7b49\u975e\u91d1\u5c5e\u819c\u548cFe\u3001Ni\u3001W\u3001Mo\u7b49\u91d1\u5c5e\u819c\u548c\u91d1\u5c5e\u6c27\u5316\u819c\uff0c\u63a8\u52a8\u4e86\u6fc0\u5149\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7684\u53d1\u5c55\u3002[<\/sup>5-7]<\/sup>\u00a0\u524d\u82cf\u8054Deryagin\u548cFedoseev\u7b49\u57281970\u5e74\u5f15\u5165\u539f\u5b50\u6c22\u5f00\u521b\u4e86\u6fc0\u6d3b\u4f4e\u538bCVD\u91d1\u521a\u77f3\u8584\u819c\u751f\u957f\u6280\u672f\uff0c80\u5e74\u4ee3\u5728\u5168\u4e16\u754c\u5f62\u6210\u4e86\u7814\u7a76\u70ed\u6f6e\u3002[<\/sup>8,9]<\/sup>\u00a0\u76ee\u524dCVD\u6280\u672f\u5728\u7535\u5b50\u3001\u673a\u68b0\u7b49\u5de5\u4e1a\u90e8\u95e8\u4e2d\u53d1\u6325\u4e86\u5de8\u5927\u4f5c\u7528\uff0c\u7279\u522b\u5bf9\u4e00\u4e9b\u5982\u6c27\u5316\u7269\u3001\u78b3\u5316\u7269\u3001\u91d1\u521a\u77f3\u548c\u7c7b\u91d1\u521a\u77f3\u7b49\u529f\u80fd\u8584\u819c\u548c\u8d85\u786c\u8584\u819c\u7684\u6c89\u79ef\u3002\u5c24\u5176\u76ee\u524d\u8d85\u7eaf\u7845\u539f\u6599-\u8d85\u7eaf\u591a\u6676\u7845\u7684\u751f\u4ea7\u53ea\u80fd\u901a\u8fc7CVD\u6280\u672f\u3002<\/p>\n

2. \u5316\u5b66\u6c14\u76f8\u6c89\u79efCVD\u53cd\u5e94\u673a\u7406[<\/sup>10-12]<\/sup><\/strong><\/p>\n

\u5982\u524d\u6240\u8ff0\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u662f\u5efa\u7acb\u5728\u5316\u5b66\u53cd\u5e94\u4e4b\u4e0a\u7684\uff0c\u9009\u62e9\u5408\u9002\u7684\u53cd\u5e94\u539f\u6599\u548c\u6c89\u79ef\u53cd\u5e94\u6709\u52a9\u4e8e\u5f97\u5230\u9ad8\u6027\u80fd\u7684\u6750\u6599\u3002<\/p>\n

a)<\/strong>\u9ad8\u6e29\u5206\u89e3\u53cd\u5e94<\/p>\n

CVD\u6c89\u79ef\u53cd\u5e94\u91cc\u6700\u7b80\u5355\u76f4\u63a5\u7684\u65b9\u5f0f\u5c31\u662f\u70ed\u5206\u89e3\u53cd\u5e94\uff0c\u5176\u539f\u7406\u4e3b\u8981\u662f\u56fa\u6001\u5316\u5408\u7269\u5347\u6e29\u5230\u4e00\u5b9a\u6e29\u5ea6\u4f1a\u5206\u89e3\u4e3a\u56fa\u6001\u76ee\u6807\u4ea7\u7269\u548c\u6c14\u6001\u526f\u4ea7\u7269\u3002\u64cd\u4f5c\u6b65\u9aa4\u4e00\u822c\u662f\u5411\u771f\u7a7a\u6216\u60f0\u6027\u6c14\u6c1b\u4e0b\u7684\u5355\u6e29\u533a\u7ba1\u5f0f\u7089\u5bfc\u5165\u53cd\u5e94\u6c14\u4f53\uff0c\u5c06\u7089\u6e29\u5347\u81f3\u5316\u5408\u7269\u7684\u5206\u89e3\u6e29\u5ea6\u4f7f\u4e4b\u53d1\u751f\u5206\u89e3\uff0c\u5728\u57fa\u7247\u4e0a\u6c89\u79ef\u5f97\u5230\u76ee\u6807\u4ea7\u7269\u3002\u70ed\u5206\u89e3\u53cd\u5e94\u7684\u5173\u952e\u5728\u4e8e\u5408\u9002\u6325\u53d1\u6e90\u548c\u5206\u89e3\u6e29\u5ea6\u7684\u9009\u62e9\uff0c\u5c24\u5176\u9700\u8981\u7279\u522b\u6ce8\u610f\u539f\u6750\u6599\u5728\u4e0d\u540c\u6e29\u5ea6\u4e0b\u7684\u5206\u89e3\u4ea7\u7269\u3002\u76ee\u524d\u5e38\u4f7f\u7528\u7684\u539f\u6599\u6709\u6c22\u5316\u7269\u3001\u7fb0\u57fa\u5316\u5408\u7269\u548c\u91d1\u5c5e\u6709\u673a\u5316\u5408\u7269\u7b49\uff0c\u56e0\u5176\u5316\u5b66\u952e\u7684\u89e3\u79bb\u80fd\u90fd\u666e\u904d\u8f83\u5c0f\uff0c\u6613\u5206\u89e3\uff0c\u5206\u89e3\u6e29\u5ea6\u76f8\u5bf9\u8f83\u4f4e\uff0c\u5c24\u5176\u6c22\u5316\u7269\u5206\u89e3\u540e\u7684\u526f\u4ea7\u7269\u662f\u6ca1\u6709\u8150\u8680\u6027\u7684\u6c22\u6c14\u3002\u70ed\u5206\u89e3\u53cd\u5e94\u4e3b\u8981\u9002\u7528\u4e8e\u91d1\u5c5e\u3001\u534a\u5bfc\u4f53\u3001\u7edd\u7f18\u4f53\u7b49\u6750\u6599\u7684\u5236\u5907\u3002<\/p>\n

1)\u6c22\u5316\u7269\u5206\u89e3\u5236\u5907\u591a\u6676\u7845\u548c\u975e\u6676\u7845\uff1aSiH4 <\/sub>(g)\u00a0\u2192 Si (s)+2H2 <\/sub>(g) \u00a0 \u00a0650\u2103<\/p>\n

2)\u7fb0\u57fa\u6c2f\u5316\u7269\u5206\u89e3\u6c89\u79ef\u8d35\u91d1\u5c5e\u6216\u8005\u8fc7\u6e21\u91d1\u5c5e\uff1aNi(CO)4 <\/sub>(s)\u00a0\u2192 Ni (s)+4CO (g) \u00a0 \u00a0 140-240\u2103<\/p>\n

3)\u91d1\u5c5e\u6709\u673a\u7269\u5206\u89e3\u6c89\u79efAl2<\/sub>O3<\/sub>\uff1a2Al(OC3<\/sub>H7<\/sub>)3 <\/sub>(s)\u00a0\u2192 Al2<\/sub>O3 <\/sub>(s)+6C3<\/sub>H6 <\/sub>(g)+3H2<\/sub>O (g) \u00a0 \u00a0420\u2103<\/p>\n

b)<\/strong>\u5316\u5b66\u5408\u6210\u53cd\u5e94<\/p>\n

CVD\u6c89\u79ef\u53cd\u5e94\u91cc\u5e94\u7528\u6700\u5e7f\u6cdb\u7684\u5f53\u5c5e\u5316\u5b66\u5408\u6210\u53cd\u5e94\uff0c\u5176\u4e3b\u8981\u6d89\u53ca\u5230\u591a\u79cd\u53cd\u5e94\u6c14\u4f53\u5728\u57fa\u7247\u8868\u9762\u76f8\u4e92\u53cd\u5e94\u6c89\u79ef\u751f\u6210\u56fa\u4f53\u8584\u819c\u7684\u8fc7\u7a0b\uff0c\u56e0\u6b64\u79f0\u4e3a\u5316\u5b66\u5408\u6210\u53cd\u5e94\uff0cCVD\u6c89\u79ef\u53cd\u5e94\u5927\u591a\u90fd\u5c5e\u4e8e\u6b64\u7c7b\u3002\u4e00\u822c\u662f\u5c06\u591a\u79cd\u53cd\u5e94\u6c14\u4f53\u901a\u5165\u5411\u771f\u7a7a\u6216\u60f0\u6027\u6c14\u6c1b\u4e0b\u7684\u5355\u6e29\u533a\u7ba1\u5f0f\u7089\u4e2d\uff0c\u7089\u6e29\u5347\u81f3\u5408\u9002\u7684\u6e29\u5ea6\u4f7f\u4e4b\u5728\u57fa\u7247\u4e0a\u53d1\u751f\u5408\u6210\u53cd\u5e94\u5f97\u5230\u76ee\u6807\u4ea7\u7269\u3002\u5316\u5b66\u5408\u6210\u53cd\u5e94\u7684\u5173\u952e\u5728\u4e8e\u53cd\u5e94\u4ea7\u7269\u7684\u9009\u62e9\uff0c\u539f\u5219\u8981\u5c3d\u91cf\u907f\u514d\u526f\u4ea7\u7269\u7684\u751f\u6210\u3002\u56e0\u4e3a\u5229\u7528\u70ed\u5206\u89e3\u6c89\u79ef\u76ee\u6807\u4ea7\u7269\u7684\u539f\u6599\u9009\u62e9\u8303\u56f4\u76f8\u5bf9\u72ed\u7a84\uff0c\u800c\u7406\u8bba\u4e0a\u4efb\u610f\u4e00\u79cd\u65e0\u673a\u6750\u6599\u90fd\u53ef\u4ee5\u901a\u8fc7\u591a\u79cd\u539f\u6599\u7684\u5316\u5408\u53cd\u5e94\u6765\u5f97\u5230\u3002\u56e0\u6b64\uff0c\u4e0e\u70ed\u5206\u89e3\u53cd\u5e94\u76f8\u6bd4\uff0c\u5316\u5b66\u5408\u6210\u53cd\u5e94\u5e94\u7528\u6700\u4e3a\u5e7f\u6cdb\uff0c\u5176\u4e3b\u8981\u5e94\u7528\u4e8e\u5236\u5907\u5404\u79cd\u591a\u6676\u6001\u548c\u73bb\u7483\u6001\u7684\u6c89\u79ef\u5c42\u3001\u7edd\u7f18\u819c\u7b49\uff0c\u5982SiO2<\/sub>\u3001Al2<\/sub>O3<\/sub>\u3001Si3<\/sub>N4<\/sub>\u3002<\/p>\n

1)\u56db\u6c2f\u5316\u7845\u5916\u5ef6\u6cd5\u751f\u957f\u7845\u5916\u5ef6\u7247\uff1aSiCl4<\/sub>\u00a0(s)+ 2H2<\/sub>\u00a0(g) \u2192\u00a0Si (s)+ 4HCl (g) \u00a0 \u00a01150-1200\u2103<\/p>\n

2)\u534a\u5bfc\u4f53SiO2<\/sub>\u63a9\u819c\u5de5\u827a\uff1aSiH4<\/sub>\u00a0(s)+2O2<\/sub>\u00a0(g)\u00a0\u2192 SiO2<\/sub>\u00a0(s)+2H2<\/sub>O (g) \u00a0 \u00a0325-475\u2103<\/p>\n

3)Si3<\/sub>N4<\/sub>\u7b49\u7edd\u7f18\u819c\u7684\u6c89\u79ef\uff1a3SiCl4<\/sub>\u00a0(s)+4NH3<\/sub>\u00a0(g)\u00a0\u2192 Si3<\/sub>N4<\/sub>\u00a0(s)+12HCl (g) \u00a0 \u00a0850-900\u2103<\/p>\n

c)<\/strong>\u5316\u5b66\u4f20\u8f93\u53cd\u5e94<\/p>\n

\u5316\u5b66\u8f93\u8fd0\u53cd\u5e94\u5c06\u76ee\u6807\u4ea7\u7269\u4f5c\u4e3a\u6325\u53d1\u6e90\uff0c\u501f\u52a9\u4e8e\u5e73\u8861\u53cd\u5e94\u6765\u6c89\u79ef\u76ee\u6807\u4ea7\u7269\uff0c\u5176\u501f\u52a9\u4e8e\u6c14\u4f53\u4e0e\u4e4b\u53cd\u5e94\u751f\u6210\u6c14\u6001\u5316\u5408\u7269\uff0c\u751f\u6210\u7684\u6c14\u6001\u5316\u5408\u7269\u7ecf\u8f7d\u6c14\u8fd0\u8f93\u5230\u4e0e\u6325\u53d1\u533a\u6e29\u5ea6\u4e0d\u540c\u7684\u6c89\u79ef\u533a\u53d1\u751f\u9006\u5411\u53cd\u5e94\uff0c\u5728\u57fa\u5e95\u4e0a\u751f\u6210\u6e90\u7269\u8d28\u3002\u5316\u5b66\u4f20\u8f93\u53cd\u5e94\u7684\u5173\u952e\u5728\u4e8e\u8f93\u8fd0\u53cd\u5e94\u4f53\u7cfb\u53ca\u5176\u6761\u4ef6(\u6e29\u5ea6\u3001\u8f93\u8fd0\u5242\u7528\u91cf\u7b49\u7b49)\u7684\u9009\u62e9\uff0c\u8fd9\u5176\u4e2d\u6d89\u53ca\u5230\u90e8\u5206\u5316\u5b66\u70ed\u529b\u5b66\u76f8\u5173\u7684\u77e5\u8bc6\uff0c\u4e00\u822c\u751f\u6210\u6c14\u6001\u5316\u5408\u7269\u7684\u6e29\u5ea6\u5f80\u5f80\u6bd4\u91cd\u65b0\u53cd\u5e94\u6c89\u79ef\u65f6\u8981\u9ad8\u4e00\u4e9b\u3002<\/p>\n

\u7a00\u6709\u91d1\u5c5e\u7684\u63d0\u7eaf\u548cZnSe\u7b49\u5355\u6676\u7684\u751f\u957f\uff1aZnSe (s)+I2<\/sub>\u00a0(g)ZnI2<\/sub>\u00a0(g)+1\/2 Se2<\/sub>\u00a0(g)<\/p>\n

ZnS (s)+I2<\/sub>\u00a0(g)ZnI2<\/sub>\u00a0(g)+1\/2 S2<\/sub>\u00a0(g)<\/p>\n

3. \u5316\u5b66\u6c14\u76f8\u6c89\u79efCVD\u6280\u672f\u7684\u57fa\u672c\u8981\u6c42<\/strong><\/p>\n

\u4f7f\u7528CVD\u6280\u672f\u6c89\u79ef\u76ee\u6807\u4ea7\u7269\u65f6\uff0c\u5176\u76ee\u6807\u4ea7\u7269\u3001\u539f\u6750\u6599\u53ca\u53cd\u5e94\u7c7b\u578b\u7684\u9009\u62e9\u901a\u5e38\u8981\u9075\u5faa\u4ee5\u4e0b3\u9879\u539f\u5219\uff1a \u00a0<\/p>\n

(1)\u539f\u6750\u6599\u5728\u8f83\u4f4e\u6e29\u5ea6\u4e0b\u5e94\u5177\u6709\u8f83\u9ad8\u7684\u84b8\u6c14\u538b\u4e14\u6613\u4e8e\u6325\u53d1\u6210\u84b8\u6c7d\u5e76\u5177\u6709\u5f88\u9ad8\u7684\u7eaf\u5ea6\uff0c\u7b80\u800c\u8a00\u4e4b\u539f\u6750\u6599\u6325\u53d1\u6210\u6c14\u6001\u7684\u6e29\u5ea6\u4e0d\u5b9c\u8fc7\u9ad8\uff0c\u4e00\u822c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6e29\u5ea6\u90fd\u57281000\u2103\u4ee5\u4e0b\u3002\u00a0<\/p>\n

(2)\u901a\u8fc7\u53cd\u5e94\u7c7b\u578b\u548c\u539f\u6750\u6599\u7684\u9009\u62e9\u5c3d\u91cf\u907f\u514d\u526f\u4ea7\u7269\u7684\u751f\u6210\uff0c\u82e5\u6709\u526f\u4ea7\u7269\u7684\u5b58\u5728\uff0c\u5728\u53cd\u5e94\u6e29\u5ea6\u4e0b\u526f\u4ea7\u7269\u5e94\u6613\u6325\u53d1\u4e3a\u6c14\u6001\uff0c\u8fd9\u6837\u6613\u4e8e\u6392\u51fa\u6216\u5206\u79bb\u3002<\/p>\n

(3)\u5c3d\u91cf\u9009\u62e9\u6c89\u79ef\u6e29\u5ea6\u4f4e\u7684\u53cd\u5e94\u6c89\u79ef\u76ee\u6807\u4ea7\u7269\uff0c\u56e0\u5927\u591a\u6570\u57fa\u4f53\u6750\u6599\u65e0\u6cd5\u627f\u53d7CVD\u7684\u9ad8\u6e29\u3002<\/p>\n

(4)\u53cd\u5e94\u8fc7\u7a0b\u5c3d\u91cf\u7b80\u5355\u6613\u4e8e\u63a7\u5236<\/p>\n

\u53c2\u8003\u6587\u732e<\/b><\/strong><\/p>\n

[1] \u5218\u8273\u7ea2, \u5f20\u8fce\u6625, \u845b\u660c\u7eaf. \u91d1\u5c5e\u94a8\u6d82\u5c42\u5236\u5907\u5de5\u827a\u7684\u7814\u7a76\u8fdb\u5c55. \u7c89\u672b\u51b6\u91d1\u6750\u6599\u79d1\u5b66\u4e0e\u5de5\u7a0b, 2011, 16, 315-322.<\/a><\/p>\n

[2] Powell C F, Oxley J H, Blocher J M. Vapor Deposition. sponsored by the Electrochemical Society, New York\uff08The Electrochemical Society series\uff09 UMI Books on Demand, 1966.<\/a><\/p>\n

[3] Kumagawa M, Sunami H, Terasaki T, Nishizawa J I. Epitaxial Growth with Light Irradiation. Japanese Journal of Applied Physics, 2014, 7, 1332-1341.<\/a><\/p>\n

[4] Nelson L S, Richardson N L. Formation of Thin Rods of Pyrolytic Carbon by Heating with A Focused Carbon Dioxide Laser. Materials Research Bulletin, 1972, 7, 971-975.<\/a><\/p>\n

[5] Leyendecker G, Bauerle D, Geittner P,\u00a0Lydtin H. Laser Induced Chemical Vapor Deposition of Carbon. Applied Physics Letters, 1981, 39, 921-923.<\/a><\/p>\n

[6] Kwok K, Chiu W K S. Growth of Carbon Nanotubes by Open-Air Laser-Induced Chemical Vapor Deposition. Carbon, 2005, 43, 437-446.<\/a><\/p>\n

[7] Michaelis F B, Weatherup R S, Bayer B C, Bock M C, Sugime H, Caneva S, Robertson J, Baumberg J J, Hofmann S. Co-Catalytic Absorption Layers for Controlled Laser-Induced Chemical Vapor Deposition of Carbon Nanotubes. ACS Applied Materials & Interfaces, 2014, 6, 4025-4032.<\/a><\/p>\n

[8] Deryagin B V, Fedoseev D V. Epitaxial Synthesis of Diamond in the Metastable Region. Russian Chemical Reviews, 1970, 39, 1661\u20131671.<\/a><\/p>\n

[9] Deryagin B V, Fedoseev D V. Growth of Diamond and Graphite from the Gas Phase, Nauka, Moscow (1977); (English translation in Diamond Growth and Films, edited by UCFMG, Elsevier, New York, 1989).<\/a><\/p>\n

[10] \u80e1\u660c\u4e49, \u674e\u9756\u534e. \u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f\u4e0e\u6750\u6599\u5236\u5907. \u7a00\u6709\u91d1\u5c5e, 2001, 25, 364-368.<\/a><\/p>\n

[11] \u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u548c\u65e0\u673a\u65b0\u6750\u6599[B].<\/a><\/p>\n

[12] \u7530\u6c11\u6ce2. \u5316\u5b66\u6c14\u76f8\u6c89\u79ef. \u8868\u9762\u6280\u672f, 1989, 3, 33-37.<\/a><\/p>\n

\u6750\u6599\u4eba\u63a8\u51fa\u5b9e\u9a8c\u4eea\u5668\u89e3\u51b3\u65b9\u6848\uff0c\u53ef\u4e3a\u5ba2\u6237\u63d0\u4f9b\u4eea\u5668\u9009\u578b\u3001\u4eea\u5668\u6280\u672f\u57f9\u8bad\u3001\u81ea\u4e3b\u4eea\u5668\u642d\u5efa\u7b49\u4e2a\u6027\u5316\u670d\u52a1\u3002\u5982\u6709\u9700\u8981\uff0c\u6b22\u8fce\u626b\u63cf\u4ee5\u4e0b\u4e8c\u7ef4\u7801\u63d0\u4ea4\u9700\u6c42\u3002<\/p>\n

\"\"<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"

\u6750\u6599\u4eba\u63a8\u51fa\u5236\u5907\u4e13\u680f\uff0c\u9080\u8bf7\u4e13\u680f\u79d1\u6280\u987e\u95ee\u64b0\u7a3f\u8bb2\u8ff0\u5404\u79cd\u5236\u5907\u6280\u672f\u3002\u672c\u6587\u7531\u6750\u6599\u4eba\u4e13\u680f\u79d1\u6280\u987e\u95ee\u77f3\u78ca\u64b0\u7a3f\u63d0\u4f9b\u3002 1. \u5316\u5b66\u6c14\u76f8\u6c89\u79efCVD\u7684\u6765\u6e90\u53ca\u53d1\u5c55 \u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08Chemi…<\/p>\n","protected":false},"author":7350,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[4],"tags":[2878],"class_list":["post-127533","post","type-post","status-publish","format-standard","hentry","category-ganhuo","tag-2878"],"_links":{"self":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts\/127533"}],"collection":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/users\/7350"}],"replies":[{"embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=127533"}],"version-history":[{"count":8,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts\/127533\/revisions"}],"predecessor-version":[{"id":127689,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts\/127533\/revisions\/127689"}],"wp:attachment":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=127533"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=127533"},{"taxonomy":"post_tag","embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=127533"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}