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R2R\u7eb3\u7c73\u538b\u5370\u7cfb\u7edf\u53ca\u538b\u5370\u7ed3\u6784<\/p>\n<p>\u57fa\u4e8e\u63a9\u6a21\u677f\u56fe\u5f62\u4f20\u9012\u7684\u5149\u523b\u5de5\u827a\u53ef\u5236\u4f5c\u5b8f\u89c2\u5c3a\u5bf8\u7684\u5fae\u7ec6\u7ed3\u6784\uff0c\u53d7\u5149\u5b66\u884d\u5c04\u7684\u6781\u9650\uff0c\u4ec5\u9002\u7528\u4e8e\u5fae\u7c73\u4ee5\u4e0a\u5c3a\u5ea6\u7684\u5fae\u7ec6\u7ed3\u6784\u5236\u4f5c\uff0c\u90e8\u5206\u4f18\u5316\u7684\u5149\u523b\u5de5\u827a\u53ef\u80fd\u5177\u6709\u4e9a\u5fae\u7c73\u7684\u52a0\u5de5\u80fd\u529b\u3002\u4f8b\u5982\uff0c\u63a5\u89e6\u5f0f\u5149\u523b\u7684\u5206\u8fa8\u7387\u53ef\u80fd\u5230\u8fbe0.5\u03bcm\uff0c\u91c7\u7528\u6df1\u7d2b\u5916\u66dd\u5149\u5149\u6e90\u53ef\u80fd\u5b9e\u73b00.1\u03bcm\u3002\u4f46\u5229\u7528\u8fd9\u79cd\u5149\u523b\u6280\u672f\u5b9e\u73b0\u5b8f\u89c2\u9762\u79ef\u7684\u7eb3\u7c73\/\u4e9a\u5fae\u7c73\u56fe\u5f62\u7ed3\u6784\u7684\u5236\u4f5c\u662f\u53ef\u6b32\u800c\u4e0d\u53ef\u6c42\u7684\u3002\u8fd1\u5e74\u6765\uff0c\u56fd\u5185\u5916\u5f88\u591a\u5b66\u8005\u76f8\u7ee7\u63d0\u51fa\u4e86\u8d85\u884d\u5c04\u6781\u9650\u5149\u523b\u6280\u672f\u3001\u5468\u671f\u51cf\u5c0f\u5149\u523b\u6280\u672f\u7b49\uff0c\u529b\u6c42\u901a\u8fc7\u66dd\u5149\u5149\u523b\u6280\u672f\u5b9e\u73b0\u5927\u9762\u79ef\u7684\u4e9a\u5fae\u7c73\u7ed3\u6784\u5236\u4f5c\uff0c\u4f46\u8fd9\u7c7b\u65b0\u578b\u7684\u5149\u523b\u6280\u672f\u5c1a\u5904\u4e8e\u5b9e\u9a8c\u5ba4\u7814\u7a76\u9636\u6bb5\u3002<\/p>\n<p> \u9ad8\u7cbe\u5ea6\u7684\u5fae\u7ec6\u7ed3\u6784\u53ef\u4ee5\u901a\u8fc7\u7535\u5b50\u675f\u76f4\u5199\u6216\u6fc0\u5149\u76f4\u5199\u5236\u4f5c\uff0c\u8fd9\u7c7b\u5149\u523b\u6280\u672f\uff0c\u50cf\u201c\u5199\u5b57\u201d\u4e00\u6837\uff0c\u901a\u8fc7\u63a7\u5236\u805a\u7126\u7535\u5b50\u675f\uff08\u5149\u675f\uff09\u79fb\u52a8\u4e66\u5199\u56fe\u6848\u8fdb\u884c\u66dd\u5149\uff0c\u5177\u6709\u5f88\u9ad8\u7684\u66dd\u5149\u7cbe\u5ea6\uff0c\u4f46\u8fd9\u4e24\u79cd\u65b9\u6cd5\u5236\u4f5c\u6548\u7387\u6781\u4f4e\uff0c\u5c24\u5176\u5728\u5927\u9762\u79ef\u5236\u4f5c\u65b9\u9762\u6349\u895f\u89c1\u8098\uff0c\u76ee\u524d\u76f4\u5199\u5149\u523b\u6280\u672f\u4ec5\u9002\u7528\u4e8e\u5c0f\u9762\u79ef\u7684\u5fae\u7eb3\u7ed3\u6784\u5236\u4f5c\u3002\u8fd1\u5e74\u6765\uff0c\u4e09\u7ef4\u6d6e\u96d5\u5fae\u7eb3\u7ed3\u6784\u7684\u9700\u6c42\u8d8a\u6765\u8d8a\u5927\uff0c\u5982\u95ea\u8000\u5149\u6805\u3001\u83f2\u6d85\u5c14\u900f\u955c\u3001\u591a\u53f0\u9636\u5fae\u5149\u5b66\u5143\u4ef6\u7b49\u3002\u636e\u6089\uff0c\u82f9\u679c\u516c\u53f8\u65b0\u4e0a\u5e02\u7684\u624b\u673a\u4ea7\u54c1\u4e2d\u4eba\u8138\u8bc6\u522b\u6a21\u5757\u5c31\u91c7\u7528\u4e86\u591a\u53f0\u9636\u5fae\u5149\u5b66\u5143\u4ef6\uff0c\u4ee5\u53ca\u5f53\u4e0b\u5982\u706b\u5982\u837c\u7684\u65e0\u4eba\u9a7e\u9a76\u6280\u672f\u4e2d\u6fc0\u5149\u96f7\u8fbe\u5149\u5b66\u7cfb\u7edf\u4e5f\u7528\u5230\u4e86\u590d\u6742\u7684\u5fae\u5149\u5b66\u5143\u4ef6\u3002\u8fd9\u7c7b\u7cbe\u5bc6\u7684\u5fae\u7eb3\u7ed3\u6784\u5149\u5b66\u5143\u4ef6\u9700\u91c7\u7528\u7070\u5ea6\u5149\u523b\u6280\u672f\u8fdb\u884c\u5236\u4f5c\u3002\u76f4\u5199\u6280\u672f\uff0c\u901a\u8fc7\u5728\u5149\u675f\u79fb\u52a8\u8fc7\u7a0b\u4e2d\u8fdb\u884c\u76f8\u5e94\u7684\u66dd\u5149\u80fd\u91cf\u8c03\u8282\uff0c\u53ef\u4ee5\u5b9e\u73b0\u826f\u597d\u7684\u7070\u5ea6\u5149\u523b\u80fd\u529b\u3002<\/p>\n<p><a href=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2018\/02\/5-27.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-127170\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2018\/02\/5-27.jpg\" alt=\"\" width=\"600\" height=\"346\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2018\/02\/5-27.jpg 600w, \/\/m.iemloyee.com\/wp-content\/uploads\/2018\/02\/5-27-300x173.jpg 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/a><\/p>\n<p style=\"text-align: center;\">\u56fe4. \u76f4\u5199\u7cfb\u7edf\u53ca\u5176\u5236\u4f5c\u7684\u5fae\u7eb3\u7ed3\u6784<\/p>\n<p>\u901a\u8fc7\u5149\u523b\u6280\u672f\u5236\u4f5c\u51fa\u7684\u5fae\u7eb3\u7ed3\u6784\u9700\u8fdb\u4e00\u6b65\u901a\u8fc7\u523b\u8680\u6216\u8005\u9540\u819c\uff0c\u624d\u53ef\u83b7\u5f97\u6240\u9700\u7684\u7ed3\u6784\u6216\u5143\u4ef6\u3002<\/p>\n<p> \u523b\u8680\u6280\u672f\uff08etching technique\uff09\uff0c\u662f\u6309\u7167\u63a9\u6a21\u56fe\u5f62\u5bf9\u886c\u5e95\u8868\u9762\u6216\u8868\u9762\u8986\u76d6\u8584\u819c\u8fdb\u884c\u9009\u62e9\u6027\u8150\u8680\u6216\u5265\u79bb\u7684\u6280\u672f\uff0c\u53ef\u5206\u4e3a\u6e7f\u6cd5\u523b\u8680\u548c\u5e72\u6cd5\u523b\u8680\u3002\u6e7f\u6cd5\u523b\u8680\u6700\u666e\u904d\u3001\u4e5f\u662f\u8bbe\u5907\u6210\u672c\u6700\u4f4e\u7684\u523b\u8680\u65b9\u6cd5\u3002\u5927\u90e8\u4efd\u7684\u6e7f\u523b\u8680\u6db2\u5747\u662f\u5404\u5411\u540c\u6027\u7684\uff0c\u6362\u8a00\u4e4b\uff0c\u5bf9\u523b\u8680\u63a5\u89e6\u70b9\u4e4b\u4efb\u4f55\u65b9\u5411\u8150\u8680\u901f\u5ea6\u5e76\u65e0\u660e\u663e\u5dee\u5f02\u3002\u7136\u800c\u81ea1970\u5e74\u4ee3\u8d77\uff0c\u62a5\u9053\u4e86\u8bb8\u591a\u6709\u5173\u78b1\u6027\u6216\u6709\u673a\u6eb6\u6db2\u8150\u8680\u5355\u6676\u7845\u7684\u6587\u7ae0\uff0c\u5176\u7279\u70b9\u662f\u4e0d\u540c\u7684\u7845\u6676\u9762\u8150\u8680\u901f\u7387\u76f8\u5dee\u6781\u5927\uff0c\u5c24\u5176\u662f&lt;111&gt;\u65b9\u5411\uff0c\u8db3\u8db3\u6bd4&lt;100&gt;\u6216\u662f&lt;110&gt;\u65b9\u5411\u7684\u8150\u8680\u901f\u7387\u5c0f\u4e00\u5230\u4e24\u4e2a\u6570\u91cf\u7ea7\uff01\u56e0\u6b64\uff0c\u8150\u8680\u901f\u7387\u6700\u6162\u7684\u6676\u9762\uff0c\u5f80\u5f80\u4fbf\u662f\u8150\u8680\u540e\u7559\u4e0b\u7684\u7279\u5b9a\u9762\u3002\u5e72\u6cd5\u523b\u8680\u5229\u7528\u7b49\u79bb\u5b50\u4f53 (plasma) \u6765\u8fdb\u884c\u534a\u5bfc\u4f53\u8584\u819c\u6750\u6599\u7684\u523b\u8680\u52a0\u5de5\u3002\u5176\u4e2d\u7b49\u79bb\u5b50\u4f53\u5fc5\u987b\u5728\u771f\u7a7a\u5ea6\u7ea610\u81f30.001 Torr \u7684\u73af\u5883\u4e0b\uff0c\u624d\u6709\u53ef\u80fd\u88ab\u6fc0\u53d1\u51fa\u6765\uff1b\u800c\u5e72\u523b\u8680\u91c7\u7528\u7684\u6c14\u4f53\uff0c\u6216\u8f70\u51fb\u8d28\u91cf\u9887\u5de8\uff0c\u6216\u5316\u5b66\u6d3b\u6027\u6781\u9ad8\uff0c\u5747\u80fd\u8fbe\u6210\u523b\u8680\u7684\u76ee\u7684\u3002\u5176\u6700\u91cd\u8981\u7684\u4f18\u70b9\u662f\u80fd\u517c\u987e\u8fb9\u7f18\u4fa7\u5411\u4fb5\u8680\u73b0\u8c61\u6781\u5fae\u4e0e\u9ad8\u523b\u8680\u7387\u4e24\u79cd\u4f18\u70b9\u3002\u5e72\u6cd5\u523b\u8680\u80fd\u591f\u6ee1\u8db3\u4e9a\u5fae\u7c73\/\u7eb3\u7c73\u7ebf\u5bbd\u5236\u7a0b\u6280\u672f\u7684\u8981\u6c42\uff0c\u4e14\u5728\u5fae\u7eb3\u52a0\u5de5\u6280\u672f\u4e2d\u88ab\u5927\u91cf\u4f7f\u7528\u3002<\/p>\n<p> \u8fd1\u5e74\u6765\uff0c\u6fc0\u5149\u6280\u672f\u7684\u98de\u901f\u53d1\u5c55\u4f7f\u7684\u6fc0\u5149\u8680\u523b\u6280\u672f\u5b55\u80b2\u800c\u751f\uff0c\u7c7b\u4f3c\u4e8e\u6fc0\u5149\u76f4\u5199\u6280\u672f\uff0c\u6fc0\u5149\u8680\u523b\u6280\u672f\u901a\u8fc7\u63a7\u5236\u805a\u7126\u7684\u9ad8\u80fd\u77ed\u6ce2\/\u8109\u51b2\u6fc0\u5149\u675f\u76f4\u63a5\u5728\u57fa\u6750\u4e0a\u70e7\u8680\u6750\u6599\u5e76\u201c\u96d5\u523b\u201d\u51fa\u5fae\u7ec6\u7ed3\u6784\u3002\u5b83\u4e0d\u4f46\u80fd\u591f\u5b9e\u73b0\u4f20\u7edf\u610f\u4e49\u7684\u8584\u819c\u8680\u523b\uff0c\u800c\u4e14\u53ef\u4ee5\u7528\u6765\u5b9e\u73b0\u4e09\u7ef4\u7684\u5fae\u7ed3\u6784\u5236\u4f5c\u3002\u98de\u79d2\u9ad8\u5cf0\u503c\u529f\u7387\u6fc0\u5149\u4e8e\u6709\u673a\u805a\u5408\u7269\u7684\u4ecb\u8d28\u7684\u4f5c\u7528\u5177\u6709\u5f88\u591a\u79d1\u5b66\u4e0a\u5f88\u5438\u5f15\u4eba\u6ce8\u76ee\u7684\u7279\u70b9\uff0c\u5176\u4e2d\uff0c\u53cc\u5149\u5b50\u4f5c\u7528\u4e0b\u7684\u805a\u5408\u4f5c\u7528\uff08two-photon 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