{"id":125283,"date":"2018-02-09T06:30:07","date_gmt":"2018-02-08T22:30:07","guid":{"rendered":"\/\/m.iemloyee.com\/?p=125283"},"modified":"2018-02-09T06:12:31","modified_gmt":"2018-02-08T22:12:31","slug":"%e5%93%88%e4%bd%9b%e5%a4%a7%e5%ad%a6%e7%89%a9%e7%90%86%e7%b3%bbamir-yacoby%e5%9b%a2%e9%98%9fadv-mater-%ef%bc%9a%e5%8d%95%e6%99%b6%e9%87%91%e5%88%9a%e7%9f%b3%e4%b8%ad%e6%8c%89%e7%85%a7%e6%99%b6","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=125283","title":{"rendered":"\u54c8\u4f5b\u5927\u5b66\u7269\u7406\u7cfbAmir Yacoby\u56e2\u961fAdv. Mater.\uff1a\u5355\u6676\u91d1\u521a\u77f3\u4e2d\u6309\u7167\u6676\u4f53\u5b66\u65b9\u5411\u7684\u53cd\u5e94\u79bb\u5b50\u523b\u8680"},"content":{"rendered":"

\u3010\u5f15\u8a00\u3011<\/strong><\/p>\n

\u5728\u7eb3\u7c73\u5149\u5b66\u3001\u91cf\u5b50\u8ba1\u7b97\u3001\u91cf\u5b50\u5149\u5b66\u7b49\u9886\u57df\u4e2d\uff0c\u5982\u4f55\u6309\u7167\u8bbe\u8ba1\u7406\u60f3\u5730\u523b\u8680\u5355\u6676\u91d1\u521a\u77f3\u4e00\u76f4\u662f\u4e2a\u975e\u5e38\u91cd\u8981\u7684\u95ee\u9898\u3002\u5728\u6e7f\u523b\u8680\u65b9\u6cd5\u4e2d\uff0c\u53ef\u5229\u7528\u6c22\u6c27\u5316\u94be\uff08KOH\uff09\u5728\u5355\u6676\u7845\u4e2d\u5b9e\u73b0\u6309\u6676\u4f53\u5b66\u65b9\u5411\u523b\u8680\u7684\u523b\u8680\uff0c\u8fd9\u79cd\u65b9\u6cd5\u5bf9MEMS\u3001AFM\u3001\u5fae\u6d41\u4f53\u7b49\u90fd\u5177\u6709\u91cd\u8981\u610f\u4e49\u3002\u7136\u800c\uff0c\u5728\u5e72\u523b\u8680\u7cfb\u7edf\u4e2d\uff0c\u5e76\u6ca1\u6709\u76f8\u5173\u7684\u6280\u672f\u624b\u6bb5\u3002<\/p>\n

\u3010\u6210\u679c\u7b80\u4ecb\u3011<\/strong><\/p>\n

\u8fd1\u65e5\uff0c\u54c8\u4f5b\u5927\u5b66\u7269\u7406\u7cfbAmir Yacoby<\/strong>\uff08\u901a\u8baf\u4f5c\u8005<\/strong>\uff09\u7b49\u4eba\u7814\u53d1\u4e86\u4e00\u79cd\u6309\u7167\u6676\u4f53\u5b66\u65b9\u5411\u523b\u8680\u7684\u5e72\u523b\u8680\u65b9\u6cd5\u3002\u76f8\u5173\u6210\u679c\u4ee5\u9898\u76ee\u201cCrystallographic Orientation Dependent ReactiveIon Etching in Single Crystal Diamond<\/strong>\u201d\u53d1\u8868\u4e8e\u671f\u520aAdv. Mater.<\/strong>\u3002\u8be5\u523b\u8680\u65b9\u6cd5\u5229\u7528\u8bf1\u5bfc\u8026\u5408\u7b49\u79bb\u5b50\u4f53\u53cd\u5e94\u79bb\u5b50\u523b\u8680\u6cd5 \uff08ICP-RIE\uff09\uff0c\u901a\u8fc7\u63a7\u5236\u523b\u8680\u6761\u4ef6\uff0c\u53ef\u5728\u5355\u6676\u91d1\u521a\u77f3\u4e2d\u9009\u62e9\u6027\u5730\u523b\u8680\u6307\u5b9a\u6676\u9762\u3002\u5229\u7528\u6b64\u65b9\u6cd5\u6210\u529f\u523b\u8680\u4e86\u78c1\u529b\u6d4b\u5b9a\u4e2d\u4f7f\u7528\u7684\u5355\u6676\u91d1\u521a\u77f3\u7eb3\u7c73\u67f1\uff0c\u6700\u5927\u9525\u89d2\u8fbe\u5230\u4e8621\u00b0\uff0c\u4e3a\u6709\u62a5\u9053\u7684\u6700\u5927\u89d2\u5ea6\u3002\u76f8\u5e94\u7684\uff0c\u8be5\u7eb3\u7c73\u67f1\u7ed3\u6784\u91c7\u96c6\u5149\u5b50\u6548\u7387\u9ad8\uff0c\u673a\u68b0\u5f3a\u5ea6\u9ad8\u3002\u8fd9\u662f\u7b2c\u4e00\u6b21\u5b9e\u73b0\u4e86\u6309\u6676\u4f53\u5b66\u65b9\u5411\u523b\u8680\u7684\u53cd\u5e94\u79bb\u5b50\u523b\u8680\u6cd5\uff0c\u4e3a\u4ee5\u540e\u523b\u8680\u7279\u6b8a\u5f62\u72b6\u7684\u7eb3\u7c73\u7ed3\u6784\u63d0\u4f9b\u4e86\u65b0\u7684\u9014\u5f84\u3002\u540c\u6837\u7684\uff0c\u8be5\u65b9\u6cd5\u4e5f\u88ab\u5bc4\u5e0c\u671b\u80fd\u5e94\u7528\u5728\u5176\u4ed6\u5355\u6676\u6750\u6599\u7684\u523b\u8680\u4e2d\u3002<\/p>\n

\u3010\u56fe\u6587\u5bfc\u8bfb\u3011<\/strong><\/p>\n

\u56fe1. \u5728\u91d1\u521a\u77f3\u5355\u6676\u4e2d\u7528\u8be5\u523b\u8680\u65b9\u6cd5\u523b\u8680\u7684V\u578b\u69fd\u7684\u793a\u610f\u56fe\uff0c\u523b\u8680\u65b9\u5411\u4e0e<100>\u65b9\u5411\u76f8\u540c<\/strong>
\n \"\"
\n a<\/strong>)\u5728\u57fa\u4f53\u8868\u9762(100)\u65b9\u5411\u4e0a\u8986\u76d6\u7684\u5149\u523b\u8680\u56fe\u6837\u819c<\/p>\n

b<\/strong>) \u5728\u57fa\u4f53\u81ea\u504f\u538b\u4e0b\u53cd\u5e94\u79bb\u5b50\u523b\u8680\u8fc7\u7a0b\uff1b\u82e5<100>\u65b9\u5411\u4e0a\u7684\u523b\u8680\u901f\u7387\u8981\u9ad8\u4e8e<hkl>\u65b9\u5411\u4e0a\u7684\u523b\u8680\u901f\u7387\uff0c\u53cd\u5e94\u79bb\u5b50\u5c06\u52a0\u901f\u8f70\u51fb\u57fa\u4f53\u8868\u9762\u5e76\u6cbf\u7740{hkl}\u6676\u9762\u5f62\u6210\u6c9f\u69fd\u4fa7\u58c1<\/p>\n

c<\/strong>)\u79fb\u9664\u5149\u523b\u819c\uff1b\u8be5\u523b\u8680\u7279\u5f81\u4e0e\u7845\u5728KOH\u4e2d\u523b\u8680\u662f\u76f8\u7c7b\u4f3c\u7684<\/p>\n

d<\/strong>) \u5728\u7ecf\u5386\u66f4\u957f\u523b\u8680\u540e\uff0c\u6676\u9762\u5c06\u5728\u5e95\u90e8\u88ab\u622a\u65ad<\/p>\n

\u56fe2. \u6676\u4f53\u57285W\u57fa\u4f53\u529f\u7387\u6761\u4ef6\u4e0b\u523b\u868070\u5206\u949f\u540e\u7684SEM\u56fe\uff1b\u6676\u4f53\u88ab\u523b\u8680\u6210\u5404\u79cd\u5f62\u72b6\uff0c\u7a97\u53e3\u8fb9\u7f18\u4e0e\u6676\u4f53<110>\u65b9\u5411\u5e73\u884c<\/strong>
\n \"\"
\n a<\/strong>) \u6240\u523b\u8680\u7684\u7c7b\u4f3c\u88ab\u5207\u53bb\u9876\u7aef\u7684\u65b9\u578b\u91d1\u5b57\u5854\u7684\u7ed3\u6784\uff0c\u5728\u7a97\u53e3\u5916\u90e8\u62d0\u89d2\u5904\u51fa\u73b0\u4e86\u5176\u4ed6\u523b\u8680\u9762<\/p>\n

b<\/strong>) \u653e\u5927\u7684a\u56fe\uff1b\u9525\u5f62\u4fa7\u9762\u8868\u9762\u4e0e{332}\u6676\u65cf\u65b9\u5411\u4e00\u81f4\uff0c\u5728\u62d0\u89d2\u5904\u51fa\u73b0\u4e86\u9510\u5229\u7684\u4ea4\u7ebf<\/p>\n

c<\/strong>) \u523b\u8680\u7684\u65b9\u5f62\u9635\u5217<\/p>\n

d<\/strong>) \u6240\u523b\u8680\u7684\u4e0d\u540c\u5bbd\u5ea6\u7684\u9876\u9762\u662f\u957f\u65b9\u5f62\u7684\u7ed3\u6784\uff0c\u6d45\u8272\u6a2a\u6761\u662f\u7531SEM\u5145\u7535\u6548\u5e94\u9020\u6210\u7684<\/p>\n

e<\/strong>) d\u56fe\u4e2d\u4fa7\u58c1\u523b\u8680\u7279\u5199\uff0c\u663e\u793a\u4e86\u4e0e{332}\u6676\u65cf\u65b9\u5411\u5e73\u884c\u7684\u4fa7\u58c1\u548c\u4e0e{100}\u6676\u65cf\u65b9\u5411\u5e73\u884c\u7684\u5e95\u9762\u76f8\u4ea4\u7684\u60c5\u51b5<\/p>\n

\u56fe3. \u6676\u4f53\u57285W\u57fa\u4f53\u529f\u7387\u4e0b\u523b\u868070\u5206\u949f\u540e\u7684\u8868\u683c\u72b6\u6676\u4f53SEM\u56fe\uff0c\u6240\u523b\u8680\u7684\u7a97\u53e3\u72b6\u7ed3\u6784\u5176\u8fb9\u7f18\u4e0e\u6676\u4f53<100>\u65b9\u5411\u5e73\u884c\u548c\u6676\u4f53\u5728\u5176\u4ed6\u529f\u7387\u6761\u4ef6\u4e0b\u523b\u8680\u7684\u7ed3\u6784<\/strong>
\n \"\"
\n a<\/strong>)\u6676\u4f53\u523b\u8680\u540e\u7684\u65b9\u5757\u72b6\u9635\u5217\uff08\u5185\u63d2\u7279\u5199\u56fe\uff09<\/p>\n

b<\/strong>)\u4e00\u4e2a\u5206\u79bb\u7684\u523b\u8680\u540e\u65b9\u5757\u72b6\u7ed3\u6784\uff0c\u6ca1\u6709\u5176\u4ed6\u5916\u90e8\u523b\u8680\u9762<\/p>\n

c<\/strong>) b\u56fe\u7684\u653e\u5927\uff0c\u65b0\u51fa\u73b0\u7684\u5728\u62d0\u89d2\u4e0a\u7684\u523b\u8680\u9762\u5927\u7ea6\u662f{111}\u9762\uff0c\u8be5\u9762\u4e0e\u4fa7\u58c1\u7684\u4ea4\u63a5\u5904\u6210\u5f27\u7ebf<\/p>\n

d<\/strong>)\u4e0d\u540c\u5bbd\u5ea6\u7684\u957f\u65b9\u5f62\u523b\u8680\u5bb9\u8c8c\uff0c\u7531\u4e8e\u4fa7\u58c1\u9525\u5f62\u89d2\u5ea6\u8f83\u5c0f\uff0c\u4fa7\u58c1\u5728\u5e95\u90e8\u6ca1\u6709\u6d88\u5931<\/p>\n

e<\/strong>) 0W\u57fa\u4f53\u529f\u7387\u4e0b\u523b\u868070\u5206\u949f\u540e\u7684\u6676\u4f53\u51fa\u73b0\u7684{111}\u9762<\/p>\n

f<\/strong>) 80W\u57fa\u4f53\u529f\u7387\u4e0b\u523b\u868070\u5206\u949f\u540e\u6676\u4f53\u5404\u5411\u5f02\u6027\u6d88\u5931\uff0c\u523b\u8680\u7a97\u53e3\u8fb9\u7f18\u4e0e\u6676\u4f53<110>\u65b9\u5411\u5e73\u884c<\/p>\n

g<\/strong>) 80W\u57fa\u4f53\u529f\u7387\u4e0b\u523b\u868070\u5206\u949f\u540e\u6676\u4f53\u5404\u5411\u5f02\u6027\u6d88\u5931\uff0c\u523b\u8680\u7a97\u53e3\u8fb9\u7f18\u4e0e\u6676\u4f53<100>\u65b9\u5411\u5e73\u884c<\/p>\n

\u56fe4. \u5de8\u5927\u5757\u91d1\u521a\u77f3\u7eb3\u7c73\u67f1SEM\u56fe<\/strong>
\n \"\"
\n a<\/strong>) \u6240\u523b\u8680\u7eb3\u7c73\u67f1\u9525\u89d2\u4e3a3.4\u00b0<\/p>\n

b<\/strong>)\u6240\u523b\u8680\u7eb3\u7c73\u67f1\u9525\u89d2\u4e3a7.5\u00b0<\/p>\n

c<\/strong>)\u6240\u523b\u8680\u7eb3\u7c73\u67f1\u9525\u89d2\u4e3a11.5\u00b0<\/p>\n

d<\/strong>)\u6240\u523b\u8680\u7eb3\u7c73\u67f1\u9525\u89d2\u4e3a21\u00b0<\/p>\n

e<\/strong>) \u6240\u523b\u8680\u7eb3\u7c73\u67f1\u9525\u89d2\u968f\u7740\u57fa\u4f53RF\u529f\u7387\u7684\u5173\u7cfb\uff0c\u5f53\u529f\u7387\u5927\u4e8e\u7b49\u4e8e40W\u65f6\u523b\u8680\u89d2\u5448\u7ebf\u6027\u9012\u51cf\u5173\u7cfb\uff0c\u5f53\u529f\u7387\u8f83\u5c0f\u65f6\u5173\u7cfb\u4e0d\u660e\u663e<\/p>\n

f<\/strong>) \u4ece\u5355\u4e00\u7eb3\u7c73\u67f1\u4e2d\u7684\u7eb3\u7c73\u7a7a\u4f4d\u53d1\u51fa\u7684\u9971\u548c\u8367\u5149\u8ba1\u6570\u7387\u548c\u9525\u5f62\u89d2\u7684\u5173\u7cfb\uff1b\u504f\u5dee\u6765\u6e90\u4e8e10-20\u4e2a\u76f8\u540c\u89d2\u5ea6\u7eb3\u7c73\u67f1\u7684\u7ed3\u679c<\/p>\n

\u3010\u5c0f\u7ed3\u3011<\/strong><\/p>\n

\u5728ICP-RIE\u523b\u8680\u7cfb\u7edf\u4e2d\uff0c\u7814\u7a76\u4eba\u5458\u901a\u8fc7\u8c03\u8282\u523b\u8680\u6761\u4ef6\u7814\u53d1\u4e86\u4e00\u79cd\u4e86\u9009\u62e9\u6027\u7684\u4f9d\u636e\u6676\u9762\u65b9\u5411\u7684\u523b\u8680\u6280\u672f\u3002\u7814\u7a76\u4eba\u5458\u63a8\u6d4b\uff0c\u8fd9\u53ef\u80fd\u662f\u56e0\u4e3a\u901a\u8fc7\u8c03\u8282\u53cd\u5e94\u79bb\u5b50\u523b\u8680\u7684\u80fd\u91cf\uff0c\u4f7f\u5f97\u5176\u4e0e\u6676\u9762\u4e0a\u5316\u5b66\u53cd\u5e94\u80fd\u91cf\u52bf\u5792\u76f8\u5f53\uff0c\u4f7f\u5f97\u6676\u4f53\u7684\u523b\u8680\u901f\u7387\u5728\u4e0d\u540c\u65b9\u5411\u4e0a\u53d8\u5f97\u4e0d\u4e00\u6837\u3002\u7814\u7a76\u4eba\u5458\u5229\u7528\u6b64\u6280\u672f\u523b\u8680\u4e86\u9525\u89d2\u8fbe\u523021\u00b0\u7684\u5de8\u5927\u5757\u91d1\u521a\u77f3\u7eb3\u7c73\u67f1\u3002\u7528\u8be5\u67f1\u4f53\u5305\u88f9\u7eb3\u7c73\u7a7a\u4f4d\u540e\uff0c\u5c55\u73b0\u4e86\u9ad8\u5149\u5b50\u91c7\u96c6\u6548\u7387\u548c\u9ad8\u673a\u68b0\u5f3a\u5ea6\u3002\u7814\u7a76\u4eba\u5458\u76f8\u4fe1\u8be5\u65b9\u6cd5\u4e5f\u53ef\u9002\u7528\u4e8e\u5176\u4ed6\u5e72\u523b\u8680\u7cfb\u7edf\uff0c\u5176\u4ed6\u5355\u6676\u6750\u6599\u548c\u523b\u8680\u7ed3\u6784\u3002<\/p>\n

\u6587\u732e\u94fe\u63a5\uff1aCrystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond. Advanced Materials, 2018,\u00a0DOI:\u00a0<\/span>10.1002\/adma.201705501<\/span>.<\/a><\/strong><\/p>\n

\u672c\u6750\u6599\u7531\u6750\u6599\u4eba\u7f16\u8f91\u90e8\u5c0f\u65af\u540c\u5b66\u7f16\u8bd1\uff0c\u9648\u70b3\u65ed\u5ba1\u6838\u3002\u6750\u6599\u725b\u7f51\u4e13\u6ce8\u4e8e\u8ddf\u8e2a\u6750\u6599\u9886\u57df\u79d1\u6280\u53ca\u884c\u4e1a\u8fdb\u5c55\uff0c\u8fd9\u91cc\u6c47\u96c6\u4e86\u5404\u5927\u9ad8\u6821\u7855\u535a\u751f\u3001\u4e00\u7ebf\u79d1\u7814\u4eba\u5458\u4ee5\u53ca\u884c\u4e1a\u4ece\u4e1a\u8005\uff0c\u5982\u679c\u60a8\u5bf9\u4e8e\u8ddf\u8e2a\u6750\u6599\u9886\u57df\u79d1\u6280\u8fdb\u5c55\uff0c\u89e3\u8bfb\u9ad8\u6c34\u5e73\u6587\u7ae0\u6216\u662f\u8bc4\u8ff0\u884c\u4e1a\u6709\u5174\u8da3\uff0c\u70b9\u6211\u52a0\u5165\u7f16\u8f91\u90e8\u5927\u5bb6\u5ead<\/a>\u3002<\/p>\n

\u6b22\u8fce\u5927\u5bb6\u5230\u6750\u6599\u4eba\u5ba3\u4f20\u79d1\u6280\u6210\u679c\u5e76\u5bf9\u6587\u732e\u8fdb\u884c\u6df1\u5165\u89e3\u8bfb\uff0c\u6295\u7a3f\u90ae\u7bb1tougao@cailiaoren.com\u3002<\/p>\n

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