{"id":120795,"date":"2018-01-17T06:30:53","date_gmt":"2018-01-16T22:30:53","guid":{"rendered":"\/\/m.iemloyee.com\/?p=120795"},"modified":"2018-01-16T13:34:21","modified_gmt":"2018-01-16T05:34:21","slug":"%e8%a7%82%e7%82%b9%e4%b8%a8cvd%e6%b3%95%e5%88%b6%e5%a4%87%e7%9f%b3%e5%a2%a8%e7%83%af%e7%9a%84%e5%b7%a5%e8%89%ba%e6%b5%81%e7%a8%8b%e8%af%a6%e8%a7%a3","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=120795","title":{"rendered":"\u89c2\u70b9\u4e28CVD\u6cd5\u5236\u5907\u77f3\u58a8\u70ef\u7684\u5de5\u827a\u6d41\u7a0b\u8be6\u89e3"},"content":{"rendered":"

\u77f3\u58a8\u70ef\u7684\u4e3b\u8981\u5236\u5907\u65b9\u6cd5\u5305\u62ec\uff1a\u5fae\u673a\u68b0\u5206\u79bb\u6cd5\u3001\u6c27\u5316\u77f3\u58a8-\u8fd8\u539f\u6cd5\u3001\u53d6\u5411\u9644\u751f\u6cd5\u3001\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\u3001\u52a0\u70edSIC\u6cd5\u3001\u5916\u5ef6\u751f\u957f\u6cd5\u3001\u6eb6\u5242\u5265\u79bb\u6cd5<\/strong>\u7b49\uff0c\u5404\u79cd\u65b9\u6cd5\u5404\u6709\u5229\u5f0a\uff0c\u4eca\u5929\u6211\u4eec\u4e3b\u8981\u804a\u804a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\uff08CVD\u6cd5\uff09\u5236\u5907\u77f3\u58a8\u70ef\u7684\u5de5\u827a\u6d41\u7a0b<\/strong>\u3002<\/p>\n

\u6211\u4eec\u77e5\u9053\uff0c\u77f3\u58a8\u70ef\u7684\u53d1\u73b0\u6e90\u4e8e\u6700\u521d\u7528\u900f\u660e\u80f6\u5e26\u4ece\u77f3\u58a8\u6676\u4f53\u4e0a\u201c\u7c98\u201d\u51fa\u4e00\u7247\u77f3\u58a8\u70ef\uff0c\u4e00\u63d0\u8d77\u77f3\u58a8\uff0c\u5c0f\u4f19\u4f34\u4eec\u90fd\u4e0d\u964c\u751f\uff0c\u5e73\u5e38\u4f7f\u7528\u7684\u94c5\u7b14\u82af\u5c31\u662f\u77f3\u58a8\u3002\u4ece\u78b3\u6e90\u5230\u77f3\u58a8\u70ef\uff0c\u8981\u7ecf\u5386\u600e\u6837\u7684\u8fc7\u7a0b\uff0c\u5bf9\u4e8e\u77f3\u58a8\u70ef\u5c0f\u767d\u6765\u8bf4\uff0c\u80fd\u4e0d\u80fd\u5236\u5907\u77f3\u58a8\u70ef\uff0c\u5982\u4f55\u5236\u5907\u77f3\u58a8\u70ef\u5462\uff1f\u4eca\u5929\u5c0f\u7f16\u5c31\u4ece\u4e13\u4e1a\u7684\u89d2\u5ea6\u6765\u4e3a\u4f60\u89e3\u8bfbCVD\u6cd5\u5236\u5907\u77f3\u58a8\u70ef\u7684\u5965\u79d8\u3002<\/p>\n

\u4f17\u6240\u5468\u77e5\uff0c\u76f4\u63a5\u5265\u79bb\u6cd5\u5236\u5907\u77f3\u58a8\u70ef\u7684\u4ea7\u91cf\u4f4e\uff0c\u5de5\u5e8f\u590d\u6742\uff0c\u4e0d\u9002\u5b9c\u5b9e\u9645\u7684\u5de5\u4e1a\u9700\u6c42\u3002\u968f\u7740\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\u7684\u51fa\u73b0\uff0c\u77f3\u58a8\u70ef\u7684\u5de5\u4e1a\u5316\u751f\u4ea7\u53d8\u6210\u4e86\u53ef\u80fd\u3002<\/p>\n

\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\u6700\u65e9\u51fa\u73b0\u5728\u4e8c\u5341\u4e16\u7eaa\u516d\u5341\u5e74\u4ee3\uff0c\u4e3b\u8981\u7528\u6765\u5236\u5907\u9ad8\u7eaf\u5ea6\u3001\u9ad8\u6027\u80fd\u7684\u56fa\u4f53\u8584\u819c\u3002\u77f3\u58a8\u70ef\u7684\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7684\u539f\u7406<\/strong>\u662f\uff1a\u5c06\u4e00\u79cd\u542b\u78b3\u7684\u6c14\u6001\u7269\u8d28\u5728\u9ad8\u6e29\u548c\u9ad8\u771f\u7a7a\u7684\u73af\u5883\u4e0b\uff0c\u7528\u6c22\u6c14\u4f5c\u4e3a\u8fd8\u539f\u6027\u6c14\u4f53\uff0c\u901a\u5165\u5230\u7089\u5185\uff0c\u751f\u6210\u77f3\u58a8\u70ef\u3002<\/p>\n

\u77f3\u58a8\u70ef\u7528\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\u5236\u5907\u7684\u8bbe\u5907<\/strong>\u6709\uff1a\u7ba1\u5f0f\u7089\uff0c\u5fae\u6ce2\u7b49\u79bb\u5b50CVD\u8bbe\u5907\u3001\u5c04\u9891\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u8bbe\u5907<\/strong>\u7b49[1-3]\u3002<\/p>\n

CVD\u7ba1\u5f0f\u7089<\/strong>\uff1a\u8bbe\u5907\u7b80\u5355\uff0c\u64cd\u4f5c\u5bb9\u6613\uff0c\u4f46\u662f\u53cd\u5e94\u6e29\u5ea6\u9ad8\uff0c\u65f6\u95f4\u8f83\u957f\uff0c\u8017\u8d39\u80fd\u91cf\u8f83\u5927\uff0c\u65e0\u6cd5\u5236\u5907\u5927\u9762\u79ef\u7684\u77f3\u58a8\u70ef\uff1b\u6b64\u5916\uff0c\u7531\u4e8e\u6ca1\u6709\u538b\u529b\uff0c\u8584\u819c\u751f\u957f\u5bb9\u6613\u5f62\u6210\u8936\u76b1\uff0c\u51cf\u5c0f\u5e73\u6574\u5ea6\u3002<\/p>\n

\"\"\u56fe1 CVD\u7ba1\u5f0f\u7089<\/p>\n

\u5fae\u6ce2\u7b49\u79bb\u5b50CVD\u8bbe\u5907<\/strong>\uff1a\u662f\u5c06\u5fae\u6ce2\u53d1\u751f\u5668\u4ea7\u751f\u7684\u5fae\u6ce2\u7528\u6ce2\u5bfc\u7ba1\u7ecf\u9694\u79bb\u5668\u8fdb\u5165\u53cd\u5e94\u5668\uff0c\u5e76\u901a\u5165\u7532\u70f7\u548c\u6c22\u6c14\u7684\u6df7\u5408\u6c14\u4f53\uff0c\u4ece\u800c\u4ea7\u751f\u7532\u70f7-\u6c22\u6c14\u7b49\u79bb\u5b50\u4f53\uff0c\u5728\u57fa\u5e95\u8868\u9762\u8fdb\u884c\u6c89\u79ef\u3002\u6b64\u6cd5\u7531\u4e8e\u5177\u6709\u7b49\u79bb\u5b50\u4f53\u7684\u8f85\u52a9\u6c89\u79ef\uff0c\u4f7f\u5176\u6709\u6c89\u79ef\u6e29\u5ea6\u4f4e\uff0c\u65f6\u95f4\u77ed\u7b49\u4f18\u70b9\u3002<\/p>\n

 <\/p>\n

\"\"<\/p>\n

\u56fe2 \u5fae\u6ce2\u7b49\u79bb\u5b50CVD\u8bbe\u5907<\/p>\n

 <\/p>\n

\u78c1\u63a7\u6e85\u5c04CVD\u8bbe\u5907<\/strong>\uff1a\u78c1\u63a7\u6e85\u5c04CVD\u7cfb\u7edf\u5c5e\u4e8e\u51b7\u58c1\u8154CVD\u7cfb\u7edf\uff0c\u4e5f\u5c31\u662f\u8bf4\u5728\u53cd\u5e94\u4e2d\u53ea\u6709\u886c\u5e95\u5904\u662f\u6709\u6548\u7684\u52a0\u70ed\u533a\uff1b\u9ad8\u6e29\u4e0b\uff0c\u78b3\u6c22\u6c14\u4f53\u53ea\u5728\u886c\u5e95\u4e0a\u5206\u89e3\uff0c\u4e0d\u4f1a\u9020\u6210\u78b3\u8fc7\u591a\u800c\u4ea7\u751f\u7684\u6291\u5236\u77f3\u58a8\u70ef\u751f\u957f\u7684\u73b0\u8c61\u3002<\/p>\n

\"\"\u56fe3 \u78c1\u63a7\u6e85\u5c04CVD\u8bbe\u5907<\/p>\n

 <\/p>\n

1 CVD\u6cd5\u5236\u5907\u7684\u5de5\u827a\u6d41\u7a0b<\/strong><\/span><\/p>\n

CVD\u6cd5\u5236\u5907\u77f3\u58a8\u70ef\u7684\u57fa\u672c\u8fc7\u7a0b\u662f\uff1a\u628a\u57fa\u5e95\u91d1\u5c5e\u7b94\u7247\u653e\u5165\u7089\u4e2d\uff0c\u901a\u5165\u6c22\u6c14\u548c\u6c29\u6c14\u6216\u8005\u6c2e\u6c14\u4fdd\u62a4\u52a0\u70ed\u81f31000\u2103\u5de6\u53f3\uff0c\u7a33\u5b9a\u6e29\u5ea6\uff0c\u4fdd\u630120 min\u5de6\u53f3\uff1b\u7136\u540e\u505c\u6b62\u901a\u5165\u4fdd\u62a4\u6c14\u4f53\uff0c\u6539\u901a\u5165\u78b3\u6e90\uff08\u5982\u7532\u70f7\uff09\u6c14\u4f53\uff0c\u5927\u7ea630 min\uff0c\u53cd\u5e94\u5b8c\u6210\uff1b\u5207\u65ad\u7535\u6e90\uff0c\u5173\u95ed\u7532\u70f7\u6c14\u4f53\uff0c\u518d\u901a\u5165\u4fdd\u62a4\u6c14\u4f53\u6392\u51c0\u7532\u70f7\u6c14\u4f53\uff0c\u5728\u4fdd\u62a4\u6c14\u4f53\u7684\u73af\u5883\u4e0b\u76f4\u81f3\u7ba1\u5b50\u51b7\u5374\u5230\u5ba4\u6e29\uff0c\u53d6\u51fa\u91d1\u5c5e\u7b94\u7247\uff0c\u5f97\u5230\u91d1\u5c5e\u7b94\u7247\u4e0a\u7684\u77f3\u58a8\u70ef\u3002\u4e0b\u56fe\u4e3a\u77f3\u58a8\u70ef\u7684\u5236\u5907\u8fc7\u7a0b\u3002<\/p>\n

\"\"\u56fe4 CVD\u6cd5\u5236\u5907\u77f3\u58a8\u70ef\u7684\u57fa\u672c\u6d41\u7a0b<\/span><\/p>\n

2 CVD\u6cd5\u5236\u5907\u77f3\u58a8\u70ef\u7684\u5f71\u54cd\u56e0\u7d20<\/strong><\/span><\/p>\n

CVD\u6cd5\u5236\u5907\u77f3\u58a8\u70ef\u7684\u8fc7\u7a0b\u4e3b\u8981\u5305\u542b\u4e09\u4e2a\u91cd\u8981\u7684\u5f71\u54cd\u56e0\u7d20\uff1a\u886c\u5e95\u3001\u524d\u9a71\u4f53\u548c\u751f\u957f\u6761\u4ef6\u3002<\/p>\n

\uff081\uff09\u886c\u5e95\u662f\u751f\u957f\u77f3\u58a8\u70ef\u7684\u91cd\u8981\u6761\u4ef6\u3002\u76ee\u524d\u53d1\u73b0\u7684\u53ef\u4ee5\u7528\u4f5c\u77f3\u58a8\u70ef\u5236\u5907\u7684\u886c\u5e95\u91d1\u5c5e\u67098~10\u4e2a\u8fc7\u6e21\u91d1\u5c5e\uff08\u5982Fe\uff0cRu\uff0cCo\uff0cRh\uff0cIr\uff0cNi\uff0cPd\uff0cPt\uff0cCu\uff0cAu\uff09\uff0c\u548c\u5408\u91d1\uff08\u5982Co-Ni\uff0cAu-Ni\uff0cNi-Mo\uff0c\u4e0d\u9508\u94a2\uff09\u3002\u9009\u62e9\u7684\u4e3b\u8981\u4f9d\u636e\u6709\u91d1\u5c5e\u7684\u7194\u70b9\u3001\u6eb6\u78b3\u91cf\uff0c\u4ee5\u53ca\u662f\u5426\u6709\u7a33\u5b9a\u7684\u91d1\u5c5e\u78b3\u5316\u7269\u7b49\u3002\u8fd9\u4e9b\u56e0\u7d20\u51b3\u5b9a\u4e86\u77f3\u58a8\u70ef\u7684\u751f\u957f\u6e29\u5ea6\u3001\u751f\u957f\u673a\u5236\u548c\u4f7f\u7528\u7684\u8f7d\u6c14\u7c7b\u578b\u3002\u53e6\u5916\uff0c\u91d1\u5c5e\u7684\u6676\u4f53\u7c7b\u578b\u548c\u6676\u4f53\u53d6\u5411\u4e5f\u4f1a\u5f71\u54cd\u77f3\u58a8\u70ef\u7684\u751f\u957f\u8d28\u91cf\u3002<\/p>\n

\u4e0d\u540c\u7684\u57fa\u5e95\u6750\u6599\u901a\u8fc7CVD\u5236\u5907\u77f3\u58a8\u70ef\u7684\u673a\u7406\u5404\u4e0d\u76f8\u540c[3]\uff0c\u4e3b\u8981\u5206\u4e3a\u4e24\u79cd\u5236\u5907\u673a\u7406\uff1a<\/p>\n

1.\u6e17\u78b3\u6790\u78b3\u673a\u5236<\/strong>\uff0c\u5373\u9ad8\u6e29\u65f6\u88c2\u89e3\u540e\u7684\u78b3\u6e17\u5165\u57fa\u5e95\u4e2d\uff0c\u5feb\u901f\u964d\u6e29\u65f6\u5728\u8868\u9762\u5f62\u6210\u77f3\u58a8\u70ef\uff1b<\/p>\n

2.\u8868\u9762\u50ac\u5316\u673a\u5236<\/strong>\uff0c\u5373\u9ad8\u6e29\u65f6\u88c2\u89e3\u540e\u7684\u78b3\u63a5\u89e6\u7279\u5b9a\u91d1\u5c5e\u65f6\uff08\u5982\u94dc\uff09\uff0c\u5728\u8868\u9762\u5f62\u6210\u77f3\u58a8\u70ef\uff0c\u5e76\u4fdd\u62a4\u6837\u54c1\u6291\u5236\u8584\u819c\u7ee7\u7eed\u6c89\u79ef\uff0c\u56e0\u6b64\u8fd9\u79cd\u673a\u5236\u66f4\u5bb9\u6613\u5f62\u6210\u5355\u5c42\u77f3\u58a8\u70ef\u3002<\/p>\n

\u8fc7\u6e21\u91d1\u5c5e\u5728\u77f3\u58a8\u70ef\u7684CVD\u751f\u957f\u8fc7\u7a0b\u4e2d\u65e2\u4f5c\u4e3a\u751f\u957f\u57fa\u5e95\uff0c\u4e5f\u8d77\u50ac\u5316\u4f5c\u7528\u3002\u70c3\u7c7b\u6c14\u4f53\u5728\u91d1\u5c5e\u57fa\u4f53\u8868\u9762\u88c2\u89e3\u5f62\u6210\u77f3\u58a8\u70ef\u662f\u4e00\u4e2a\u590d\u6742\u7684\u50ac\u5316\u53cd\u5e94\u8fc7\u7a0b\uff0c\u4ee5\u94dc\u7b94\u4e0a\u77f3\u58a8\u70ef\u7684\u751f\u957f\u4e3a\u4f8b[4]\uff0c\u4e3b\u8981\u5305\u62ec\u4e09\u4e2a\u6b65\u9aa4\uff1a<\/p>\n

1)\u78b3\u524d\u9a71\u4f53\u7684\u5206\u89e3\uff1a\u4ee5\u7532\u70f7\u6c14\u4f53\u5728\u94dc\u7b94\u8868\u9762\u7684\u5206\u89e3\u4e3a\u4f8b\uff0cCH4\u5206\u5b50\u5438\u9644\u5728\u91d1\u5c5e\u57fa\u4f53\u8868\u9762\uff0c\u5728\u9ad8\u6e29\u4e0bC-H\u952e\u65ad\u88c2\uff0c\u4ea7\u751f\u5404\u79cd\u78b3\u788e\u7247CHx\u3002\u8be5\u8fc7\u7a0b\u4e2d\u7684\u8131\u6c22\u53cd\u5e94\u4e0e\u751f\u957f\u57fa\u4f53\u7684\u50ac\u5316\u6d3b\u6027\u6709\u5173\uff0c\u7531\u4e8e\u91d1\u5c5e\u94dc\u7684\u6d3b\u6cfc\u6027\u4e0d\u592a\u5f3a\uff0c\u5bf9\u7532\u70f7\u7684\u50ac\u5316\u8131\u6c22\u8fc7\u7a0b\u662f\u5f3a\u5438\u70ed\u53cd\u5e94\uff0c\u5b8c\u5168\u8131\u6c22\u4ea7\u751f\u78b3\u539f\u5b50\u7684\u80fd\u5792\u5f88\u9ad8\uff0c\u56e0\u6b64\uff0c\u7532\u70f7\u5206\u5b50\u7684\u88c2\u89e3\u4e0d\u5b8c\u5168\u3002\u76f8\u5173\u7814\u7a76\u8868\u660e\uff0c\u94dc\u8868\u9762\u4e0a\u70c3\u7c7b\u6c14\u4f53\u7684\u88c2\u89e3\u8131\u6c22\u4f5c\u7528\u5305\u62ec\u90e8\u5206\u8131\u6c22\u3001\u5076\u8054\u3001\u518d\u8131\u6c22\u7b49\u8fc7\u7a0b\uff0c\u5728\u94dc\u8868\u9762\u4e0d\u4f1a\u5f62\u6210\u5355\u5206\u6563\u5438\u9644\u7684\u78b3\u539f\u5b50\u3002<\/p>\n

2)\u77f3\u58a8\u70ef\u5f62\u6838\u9636\u6bb5\uff1a\u7532\u70f7\u5206\u5b50\u8131\u6c22\u4e4b\u540e\uff0c\u5728\u94dc\u8868\u9762\u7684\u78b3\u7269\u79cd\u76f8\u4e92\u805a\u96c6\uff0c\u751f\u6210\u65b0\u7684C-C\u952e\u3001\u56e2\u7c07\uff0c\u5f00\u59cb\u6210\u6838\u5f62\u6210\u77f3\u58a8\u70ef\u5c9b\u3002\u78b3\u539f\u5b50\u5bb9\u6613\u5728\u91d1\u5c5e\u7f3a\u9677\u4f4d\u7f6e(\u5982\u91d1\u5c5e\u53f0\u9636)\u5f62\u6838\uff0c\u56e0\u4e3a\u7f3a\u9677\u5904\u7684\u91d1\u5c5e\u539f\u5b50\u914d\u4f4d\u6570\u4f4e\uff0c\u6d3b\u6027\u8f83\u9ad8\u3002<\/p>\n

3)\u77f3\u58a8\u70ef\u9010\u6e10\u957f\u5927\u8fc7\u7a0b\uff1a\u968f\u7740\u94dc\u8868\u9762\u4e0a\u77f3\u58a8\u70ef\u5f62\u6838\u6570\u91cf\u7684\u589e\u52a0\uff0c\u4e4b\u540e\u4ea7\u751f\u7684\u78b3\u539f\u5b50\u6216\u56e2\u7c07\u4e0d\u65ad\u9644\u7740\u5230\u6210\u6838\u4f4d\u7f6e\uff0c\u4f7f\u77f3\u58a8\u70ef\u6676\u6838\u9010\u6e10\u957f\u5927\u76f4\u81f3\u76f8\u4e92\u201c\u7f1d\u5408\u201d\uff0c\u6700\u7ec8\u8fde\u63a5\u6210\u8fde\u7eed\u7684\u77f3\u58a8\u70ef\u8584\u819c\u3002<\/p>\n

\"\"\u56fe5 CVD\u6cd5\u5236\u5907\u77f3\u58a8\u70ef\u751f\u957f\u8fc7\u7a0b\uff08\u78b3\u6e90\u6c14\u4f53\u4e3a\u7532\u70f7\uff09<\/span><\/p>\n

 <\/p>\n

( 2 ) \u524d\u9a71\u4f53\u5305\u62ec\u78b3\u6e90\u548c\u8f85\u52a9\u6c14\u4f53\uff0c\u5176\u4e2d\u78b3\u6e90\u5305\u62ec\u56fa\u4f53\uff08\u5982\u542b\u78b3\u9ad8\u5206\u5b50\u6750\u6599\u7b49\uff09\uff0c\u6db2\u4f53\uff08\u5982\u65e0\u6c34\u4e59\u9187\u7b49\uff09\uff0c\u6c14\u4f53\uff08\u5982\u7532\u70f7\u3001\u4e59\u7094\u3001\u4e59\u70ef\u7b49\u70c3\u7c7b\u6c14\u4f53\uff09\u4e09\u5927\u7c7b\uff1b\u76ee\u524d\uff0c\u5b9e\u9a8c\u548c\u751f\u4ea7\u4e2d\u4e3b\u8981\u5c06\u7532\u70f7\u4f5c\u4e3a\u6c14\u6e90\uff0c\u5176\u6b21\u662f\u8f85\u52a9\u6c14\u4f53\u5305\u62ec\u6c22\u6c14\u3001\u6c29\u6c14\u548c\u6c2e\u6c14\u7b49\u6c14\u4f53\uff0c\u53ef\u4ee5\u51cf\u5c11\u8584\u819c\u7684\u8936\u76b1\uff0c\u589e\u52a0\u5e73\u6574\u5ea6\u548c\u964d\u4f4e\u975e\u6676\u78b3\u7684\u6c89\u79ef\uff1b\u9009\u62e9\u78b3\u6e90\u9700\u8981\u8003\u8651\u7684\u56e0\u7d20\u4e3b\u8981\u6709\u70c3\u7c7b\u6c14\u4f53\u7684\u5206\u89e3\u6e29\u5ea6\u3001\u5206\u89e3\u901f\u5ea6\u548c\u5206\u89e3\u4ea7\u7269\u7b49\u3002\u78b3\u6e90\u7684\u9009\u62e9\u5728\u5f88\u5927\u7a0b\u5ea6\u4e0a\u51b3\u5b9a\u4e86\u751f\u957f\u6e29\u5ea6\uff0c\u91c7\u7528\u7b49\u79bb\u5b50\u4f53\u8f85\u52a9\u7b49\u65b9\u6cd5\u4e5f\u53ef\u964d\u4f4e\u77f3\u58a8\u70ef\u7684\u751f\u957f\u6e29\u5ea6\u3002<\/p>\n

( 3 ) \u751f\u957f\u6761\u4ef6\u5305\u62ec\u538b\u529b\uff0c\u6e29\u5ea6\uff0c\u78b3\u63a5\u89e6\u9762\u79ef\u7b49\u3002\u5b83\u4eec\u5f71\u54cd\u7740\u77f3\u58a8\u70ef\u7684\u8d28\u91cf\u548c\u539a\u5ea6\u3002\u4ece\u6c14\u538b\u7684\u89d2\u5ea6\u53ef\u5206\u4e3a\u5e38\u538b\uff08105 Pa\uff09\u3001\u4f4e\u538b\uff0810-3 Pa\uff5e105 Pa\uff09\u548c\u8d85\u4f4e\u538b\uff08\uff1c10-3 Pa\uff09\uff1b\u8f7d\u6c14\u7c7b\u578b\u4e3a\u60f0\u6027\u6c14\u4f53\uff08\u6c26\u6c14\u3001\u6c29\u6c14\uff09\u6216\u6c2e\u6c14\uff0c\u4ee5\u53ca\u5927\u91cf\u4f7f\u7528\u7684\u8fd8\u539f\u6027\u6c14\u4f53\u6c22\u6c14\uff1b\u636e\u751f\u957f\u6e29\u5ea6\u4e0d\u540c\u53ef\u5206\u4e3a\u9ad8\u6e29\uff08\uff1e800\u2103\uff09\u3001\u4e2d\u6e29\uff08600\u2103\uff5e800\u2103\uff09\u548c\u4f4e\u6e29\uff08\uff1c600\u2103\uff09\uff0c\u4e3b\u8981\u53d6\u51b3\u4e8e\u78b3\u6e90\u7684\u5206\u89e3\u6e29\u5ea6\u3002<\/p>\n

3 \u77f3\u58a8\u70ef\u7684\u8f6c\u79fb<\/strong><\/span><\/p>\n

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\u6e7f\u5316\u5b66\u8150\u8680\u57fa\u5e95\u6cd5<\/strong><\/p>\n

\u6e7f\u5316\u5b66\u8150\u8680\u57fa\u5e95\u6cd5\u662f\u5e38\u7528\u7684\u8f6c\u79fb\u65b9\u6cd5\uff0c\u5178\u578b\u7684\u8f6c\u79fb\u8fc7\u7a0b\u4e3a\uff1a1)\u5728\u77f3\u58a8\u70ef\u8868\u9762\u65cb\u6d82\u4e00\u5b9a\u7684\u8f6c\u79fb\u4ecb\u8d28(\u5982\uff0c\u805a\u7532\u57fa\u4e19\u70ef\u9178\u7532\u916f(PMMA)\u3001\u805a\u4e8c\u7532\u57fa\u7845\u6c27\u70f7(PDMS))\u4f5c\u4e3a\u652f\u6491\u5c42\uff1b 2)\u6d78\u5165\u5230\u9002\u5f53\u7684\u5316\u5b66\u6eb6\u6db2\u4e2d\u8150\u8680\u91d1\u5c5e\u57fa\u5e95\uff1b3)\u635e\u81f3\u84b8\u998f\u6c34\u6e05\u6d17\u5e72\u51c0\u540e\u8f6c\u79fb\u81f3\u76ee\u6807\u57fa\u5e95\uff0c\u77f3\u58a8\u70ef\u4e00\u4fa7\u4e0e\u57fa\u5e95\u8d34\u5408\uff1b4)\u901a\u8fc7\u4e00\u5b9a\u7684\u624b\u6bb5\u9664\u53bb\u77f3\u58a8\u70ef\u8868\u9762\u7684\u652f\u6491\u5c42\u7269\u8d28(\u5982\uff0cPMMA\u53ef\u901a\u8fc7\u6eb6\u5242\u6eb6\u89e3\u6216\u9ad8\u6e29\u70ed\u5206\u89e3\u53bb\u9664[1]\uff0cPDMS\u76f4\u63a5\u63ed\u6389[2])\uff0c\u5f97\u5230\u9700\u8981\u7684\u77f3\u58a8\u70ef\u8584\u819c\u3002\u70ed\u91ca\u653e\u80f6\u5e26\u662f\u6700\u8fd1\u91c7\u7528\u7684\u65b0\u578b\u77f3\u58a8\u70ef\u8f6c\u79fb\u4ecb\u8d28\u3002\u5176\u7279\u70b9\u662f\u5e38\u6e29\u4e0b\u5177\u6709\u4e00\u5b9a\u7684\u7c98\u5408\u529b, \u5728\u7279\u5b9a\u6e29\u5ea6\u4ee5\u4e0a, \u7c98\u5408\u529b\u6025\u5267\u4e0b\u964d\u751a\u81f3\u6d88\u5931, \u8868\u73b0\u51fa\u201c\u70ed\u91ca\u653e\u201d\u7279\u6027\u3002\u57fa\u4e8e\u70ed\u91ca\u653e\u80f6\u5e26\u7684\u8f6c\u79fb\u8fc7\u7a0b\u4e0ePMMA\u8f6c\u79fb\u65b9\u6cd5\u7c7b\u4f3c, \u4e3b\u8981\u4f18\u70b9\u662f\u53ef\u5b9e\u73b0\u5927\u9762\u79ef\u77f3\u58a8\u70ef\u5411\u67d4\u6027\u76ee\u6807\u57fa\u4f53\u7684\u8f6c\u79fb(\u5982PET), \u5de5\u827a\u6d41\u7a0b\u6613\u4e8e\u6807\u51c6\u5316\u548c\u89c4\u6a21\u5316, \u6709\u671b\u5728\u900f\u660e\u5bfc\u7535\u8584\u819c\u7684\u5236\u5907\u65b9\u9762\u9996\u5148\u83b7\u5f97\u5e94\u7528, \u5982\u97e9\u56fd\u6210\u5747\u9986\u5927\u5b66\u7684\u7814\u7a76\u8005\u91c7\u7528\u8be5\u65b9\u6cd5\u6210\u529f\u5b9e\u73b0\u4e8630\u82f1\u5bf8\u77f3\u58a8\u70ef\u7684\u8f6c\u79fb[3]\u3002\u76f8\u6bd4\u4e8e\u201c\u70ed\u5e73\u538b\u201d\u5177\u6709\u66f4\u4f73\u7684\u8f6c\u79fb\u6548\u679c\u3002\u7136\u800c, \u201c\u70ed\u6eda\u538b\u201d\u6280\u672f\u76ee\u524d\u4e0d\u9002\u7528\u4e8e\u8106\u6027\u57fa\u4f53\u4e0a\u7684\u8f6c\u79fb, \u4f8b\u5982\u7845\u7247\u3001\u73bb\u7483\u7b49, \u56e0\u6b64\u9650\u5236\u4e86\u8be5\u65b9\u6cd5\u7684\u5e94\u7528\u8303\u56f4\u3002<\/p>\n

\"\"\u56fe6 CVD\u6cd5\u5236\u5907\u77f3\u58a8\u70ef\u6e7f\u6cd5\u523b\u8680\u8f6c\u79fb<\/span><\/p>\n

 <\/p>\n

\"\"\u56fe7 -1\u8f6c\u79fb\u4ecb\u8d28\u4e3aPMMA<\/span><\/p>\n

 <\/p>\n

\"\"\u56fe7-2 \u8f6c\u79fb\u4ecb\u8d28\u4e3aPDMS<\/span><\/p>\n

 <\/p>\n

\"\"\u56fe8 \u8f6c\u79fb\u4ecb\u8d28\u4e3a\u70ed\u91ca\u653e\u80f6\u5e26<\/span><\/p>\n

 <\/p>\n

\u8150\u8680\u57fa\u5e95\u6cd5\u4e5f\u5b58\u5728\u4e00\u5b9a\u7684\u5c40\u9650\u6027\uff0c\u4f8b\u5982\uff0c\u6d82\u8986\u7684\u6709\u673a\u652f\u6491\u5c42\u592a\u8584\uff0c\u8f6c\u79fb\u65f6\u5bb9\u6613\u4ea7\u751f\u8584\u819c\u6495\u88c2\uff0c\u5c24\u5176\u4e0d\u5229\u4e8e\u5927\u9762\u79ef\u77f3\u58a8\u70ef\u8584\u819c\u7684\u8f6c\u79fb\uff1b\u6d82\u8986\u7684\u6709\u673a\u652f\u6491\u5c42\u592a\u539a\uff0c\u5219\u5177\u6709\u4e00\u5b9a\u5f3a\u5ea6\uff0c\u77f3\u58a8\u70ef\u548c\u76ee\u6807\u57fa\u5e95\u4e0d\u80fd\u5145\u5206\u8d34\u5408\uff0c\u8f6c\u79fb\u4ecb\u8d28\u88ab\u6eb6\u89e3\u9664\u53bb\u65f6\u4f1a\u5bfc\u81f4\u77f3\u58a8\u70ef\u8584\u819c\u7834\u574f\u3002<\/p>\n

\u5e72\u6cd5\u8f6c\u79fb<\/strong><\/p>\n

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\u673a\u68b0\u5265\u79bb\u6280\u672f<\/strong><\/p>\n

\u97e9\u56fd\u7684\u7814\u7a76\u8005Yoon\u7b49[5]\u7528\u77f3\u58a8\u70ef\u548c\u73af\u6c27\u6811\u8102\u4e4b\u95f4\u7684\u4f5c\u7528\u529b\u6765\u5265\u79bbCVD\u6cd5\u751f\u957f\u5728\u94dc\u57fa\u5e95\u4e0a\u7684\u5355\u5c42\u77f3\u58a8\u70ef\u3002\u539f\u7406\u662f\uff1a\u9996\u5148\u5229\u7528CVD\u6cd5\u5728Cu\/SiO2\/Si\u57fa\u5e95\u4e0a\u5408\u6210\u5355\u5c42\u7684\u77f3\u58a8\u70ef\uff0c\u7136\u540e\u901a\u8fc7\u73af\u6c27\u7c98\u63a5\u6280\u672f\u5c06\u77f3\u58a8\u70ef\u548c\u76ee\u6807\u886c\u5e95\u8fde\u63a5\u8d77\u6765\uff0c\u901a\u8fc7\u65bd\u52a0\u4e00\u5b9a\u7684\u673a\u68b0\u529b\u53ef\u4ee5\u5c06\u77f3\u58a8\u70ef\u4ece\u94dc\u57fa\u4f53\u4e0a\u5265\u79bb\u4e0b\u6765\uff0c\u5e76\u4e14\u4e0d\u4f1a\u5bf9\u94dc\u886c\u5e95\u9020\u6210\u635f\u574f\uff0c\u5b9e\u73b0\u4e86\u65e0\u635f\u574f\u7684\u8f6c\u79fb\uff0c\u94dc\u57fa\u5e95\u53ef\u4ee5\u7528\u6765\u91cd\u590d\u751f\u957f\u77f3\u58a8\u70ef\u3002\u8fd9\u79cd\u65b9\u6cd5\u80fd\u591f\u5c06\u77f3\u58a8\u70ef\u4ece\u91d1\u5c5e\u886c\u5e95\u4e0a\u8f6c\u79fb\u4e0b\u6765\uff0c\u5e76\u4e14\u964d\u4f4e\u4e86\u6210\u672c\u3002<\/p>\n

\"\"\u56fe9 \u673a\u68b0\u5265\u79bb\u6cd5\u8f6c\u79fb\u77f3\u58a8\u70ef<\/span><\/p>\n

 <\/p>\n

4 \u77f3\u58a8\u70ef\u65e0\u8f6c\u79fb\u5236\u5907\u6280\u672f<\/strong><\/span><\/p>\n

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\u5728\u4e8c\u6c27\u5316\u7845\u57fa\u5e95\u4e0a\u77f3\u58a8\u70ef\u7684CVD\u5408\u6210\u8fc7\u7a0b\u662f\uff1a\u9996\u5148\u5bf9SiO2\u7247\u7528\u4e19\u916e\u3001\u53bb\u79bb\u5b50\u6c34\u8fdb\u884c\u8d85\u58f0\u6e05\u6d17\uff0c\u7136\u540e\u5c06SiO2\u57fa\u5e95\u7f6e\u4e8e\u7ba1\u5f0f\u7089\u7684\u6052\u6e29\u533a\u751f\u957f\uff0c\u8fdb\u884c\u957f\u65f6\u95f4\u7684\u77f3\u58a8\u70ef\u6c89\u79ef\u3002\u4f46\u662f\u7531\u4e8e\u53cd\u5e94\u662f\u65e0\u50ac\u5316\u7684\u6c89\u79ef\u8fc7\u7a0b\uff0c\u78b3\u6e90\u7684\u88c2\u89e3\u548c\u77f3\u58a8\u70ef\u7684\u6210\u6838\u4f1a\u53d7\u5230\u4e00\u5b9a\u7a0b\u5ea6\u7684\u9650\u5236\uff0c\u56e0\u6b64\u4e00\u822c\u4f1a\u91c7\u7528\u4e00\u5b9a\u7684CVD\u8f85\u52a9\u8fc7\u7a0b\u3002\u901a\u5e38\u7684\u8fc7\u7a0b\u4e3a\uff1a\u5bf9SiO2\u886c\u5e95\u8fdb\u884c\u4e00\u5b9a\u7684\u6d3b\u5316\u5904\u7406\uff0c\u6d3b\u5316\u8fc7\u7a0b\u4e3a\u5c06\u6e05\u6d17\u7684SiO2\u57fa\u5e95\u7f6e\u4e8e\u7ba1\u5f0f\u7089\u7684\u6052\u6e29\u533a\u4e2d\uff0c\u5728\u9ad8\u6e29800\u2103\u4e0b\u4fdd\u6e29\u4e00\u6bb5\u65f6\u95f4\uff0c\u7136\u540e\u51b7\u5374\u81f3\u5ba4\u6e29\uff0c\u4ee5\u9664\u53bb\u57fa\u5e95\u8868\u9762\u4e0a\u7684\u6709\u673a\u6b8b\u7559\u7269\uff0c\u5e76\u6fc0\u6d3b\u751f\u957f\u70b9\u3002\u4e8c\u662f\u5728\u57fa\u5e95\u4e0a\u975e\u76f4\u63a5\u63a5\u89e6\u5730\u8986\u76d6\u94dc\u7b94\uff0c\u5728\u77f3\u58a8\u70ef\u751f\u957f\u6e29\u5ea6\u4e0b\uff0c\u94dc\u91d1\u5c5e\u5347\u534e\u4ea7\u751f\u7684\u94dc\u84b8\u6c7d\u5bf9\u78b3\u6e90\u88c2\u89e3\u8d77\u50ac\u5316\u4f5c\u7528\u3002<\/p>\n

CVD\u6cd5\u5236\u5907\u77f3\u58a8\u70ef\u662f\u76ee\u524d\u6700\u7406\u60f3\uff0c\u4e5f\u662f\u6700\u5e7f\u6cdb\u7684\u5e94\u7528\u4e8e\u5de5\u4e1a\u5316\u751f\u4ea7\u7684\u5236\u5907\u6280\u672f\u3002<\/p>\n

\u53c2\u8003\u6587\u732e\uff1a<\/strong><\/p>\n

[1] Reina A, Son H, Jiao L, et al. Transferring and Identification of Single- and Few-Layer Graphene on Arbitrary Substrates[J]. Journal of Physical Chemistry C, 2008, 112(46):17741-17744.<\/p>\n

[2] Kim KS, Zhao Y, Jang H, et al. Large scale pattern growth of graphene films for stretch able transparent electrodes[J] .Nature,2009, 457(7230):706-710.<\/p>\n

[3] Bae S, Kim H, Lee Y, et al. Roll-to-roll production of 30-inch graphene films for transparent electrodes[J] .Nature Nanotechnology, 2010, 5(8):574-578.<\/p>\n

[4] Regan W, Alem N, Aleman B, et al. A direct transfer of layer area graphene[J] .Applied Physics Letters, 2010, 96(11):113012.<\/p>\n

[5] Yoon T, Shin W C, Kim T Y, et al. Direct measurement of adhesion energy of monolayer graphene as-grown on copper and its application to renewable transfer process. Nano Letters, 2012, 12(3): 1448\u4e001452.<\/p>\n

[6] Ismach A\uff0cDmzgalski C\uff0cPenwell S\uff0cet a1\uff0eDirect chemical Vapor deposition of grapheneon dielectric surfaces[J]\uff0eNano letters\uff0c2010\uff0c10(5)\uff1a1542-1548\uff0e<\/p>\n

[7] Su CY\uff0cLu AY\uff0c Wu CY\uff0cet a1. Direct formation of wafer scale graphene thin 1ayers on insulating substrates by chemical Vapor deposition[J]\uff0eNano 1etters\uff0c2011\uff0c11(9)\uff1a3612-3616\uff0e<\/p>\n

[8] Teng PY\uff0cLu CC\uff0cAkiyama-Hasegawa K\uff0cet a1\uff0eRemote Catalyzation for Direct Fonnation of Graphene Layers on 0xides[J]\uff0eNano Lett\uff0c2012\uff0c12(3)\uff1a1379-138<\/p>\n

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