{"id":117890,"date":"2017-12-21T06:30:05","date_gmt":"2017-12-20T22:30:05","guid":{"rendered":"\/\/m.iemloyee.com\/?p=117890"},"modified":"2017-12-19T13:24:45","modified_gmt":"2017-12-19T05:24:45","slug":"%e8%a7%82%e7%82%b9%e4%b8%a8%e7%9f%b3%e5%a2%a8%e7%83%af%e8%a6%81%e5%81%9a%e7%a1%85%e6%9d%90%e6%96%99%e7%9a%84%e6%8e%a5%e7%8f%ad%e4%ba%ba%ef%bc%9f%e7%a2%b3%e7%ba%b3%e7%b1%b3%e7%ae%a1%e8%a1%a8%e7%a4%ba","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=117890","title":{"rendered":"\u89c2\u70b9\u4e28\u77f3\u58a8\u70ef\u8981\u505a\u7845\u6750\u6599\u7684\u63a5\u73ed\u4eba\uff1f\u78b3\u7eb3\u7c73\u7ba1\u8868\u793a\u4e0d\u670d"},"content":{"rendered":"
2017\u5e741\u670820\u65e5\uff0c\u9876\u7ea7\u79d1\u5b66\u6742\u5fd7Nature\u520a\u767b\u4e86\u5317\u4eac\u5927\u5b66\u6559\u6388\u5f6d\u7ec3\u77db\u548c\u7269\u7406\u7535\u5b50\u5b66\u7814\u7a76\u6240\u526f\u6240\u957f\u5f20\u5fd7\u52c7\u8bfe\u9898\u7ec4\u5728\u78b3\u7eb3\u7c73\u7ba1\u7535\u5b50\u5b66\u9886\u57df\u53d6\u5f97\u7684\u4e16\u754c\u7ea7\u7a81\u7834\uff1a\u9996\u6b21\u5236\u5907\u51fa5 nm\u6805\u957f\u9ad8\u6027\u80fd\u78b3\u7eb3\u7c73\u7ba1\u6676\u4f53\u7ba1\uff0c\u5e76\u8bc1\u660e\u5176\u6027\u80fd\u8d85\u8d8a\u540c\u7b49\u5c3a\u5bf8\u7845\u57faCMOS\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff0c\u5c06\u6676\u4f53\u7ba1\u6027\u80fd\u63a8\u81f3\u7406\u8bba\u6781\u81f4\u3002<\/p>\n
2\u670827\u65e5\uff0c\u592e\u89c6\u65b0\u95fb\u9891\u9053\u64ad\u51fa\u4e86\u4e13\u9898\u8282\u76ee\u300a\u795e\u5947\u7684\u77f3\u58a8\u70ef\u300b\uff0c\u8282\u76ee\u4e2d\u63d0\u5230\uff0c\u77f3\u58a8\u70ef\u6709\u671b\u66ff\u4ee3\u7845\uff0c\u6210\u4e3a\u4e0b\u4e00\u4ee3\u82af\u7247\u7684\u4e3b\u8981\u6750\u6599\u3002\u5229\u7528\u77f3\u58a8\u70ef\u5236\u9020\u65b0\u4e00\u4ee3\u5668\u4ef6\uff0c\u4e5f\u6709\u671b\u8ba9\u6211\u56fd\u7684\u82af\u7247\u5236\u9020\u4e1a\u5b9e\u73b0\u5f2f\u9053\u8d85\u8f66\uff0c\u8fbe\u5230\u56fd\u9645\u5148\u8fdb\u6c34\u5e73\u3002<\/p>\n
\u4f17\u6240\u5468\u77e5\uff0c\u5168\u7403\u7684\u96c6\u6210\u7535\u8def\u4ea7\u4e1a\u4e00\u76f4\u5728\u6469\u5c14\u5b9a\u5f8b\u7684\u201c\u7167\u8000\u201d\u4e0b\u6cbf\u7740\u7845\u57fa\u7684\u8def\u7ebf\u524d\u884c\uff0c\u4f46\u5f53\u4e3b\u6d41\u7684CMOS\u6280\u672f\u53d1\u5c55\u523010 nm\u6280\u672f\u8282\u70b9\u4e4b\u540e\uff0c\u540e\u7eed\u53d1\u5c55\u8d8a\u6765\u8d8a\u53d7\u5230\u6765\u81ea\u7269\u7406\u89c4\u5f8b\u548c\u5236\u9020\u6210\u672c\u7684\u9650\u5236\uff0c\u6469\u5c14\u5b9a\u5f8b\u6709\u53ef\u80fd\u9762\u4e34\u7ec8\u7ed3\u300220\u591a\u5e74\u6765\uff0c\u79d1\u5b66\u754c\u548c\u4ea7\u4e1a\u754c\u4e00\u76f4\u5728\u63a2\u7d22\u5404\u79cd\u65b0\u6750\u6599\u548c\u65b0\u539f\u7406\u7684\u6676\u4f53\u7ba1\u6280\u672f\uff0c\u671f\u671b\u66ff\u4ee3\u7845\u57faCMOS\u6280\u672f\uff0c\u4f46\u5230\u76ee\u524d\u4e3a\u6b62\uff0c\u5e76\u6ca1\u6709\u673a\u6784\u80fd\u591f\u5b9e\u73b010\u7eb3\u7c73\u7684\u65b0\u578b\u5668\u4ef6\uff0c\u5e76\u4e14\u4e5f\u6ca1\u6709\u65b0\u578b\u5668\u4ef6\u80fd\u591f\u5728\u6027\u80fd\u4e0a\u771f\u6b63\u8d85\u8fc7\u6700\u597d\u7684\u7845\u57faCMOS\u5668\u4ef6\u3002<\/p>\n
\u78b3\u57fa\u8d85\u8d8a\u7845\u57fa\uff1f<\/strong><\/p>\n 2005\u5e74\uff0c\u56fd\u9645\u534a\u5bfc\u4f53\u6280\u672f\u7ebf\u8def\u56fe(ITRS)\u59d4\u5458\u4f1a\u9996\u6b21\u660e\u786e\u6307\u51fa\u57282020\u5e74\u524d\u540e\u7845\u57faCMOS\u6280\u672f\u5c06\u8fbe\u5230\u5176\u6027\u80fd\u6781\u9650\u3002\u540e\u6469\u5c14\u65f6\u4ee3\u7684\u96c6\u6210\u7535\u8def\u6280\u672f\u7684\u7814\u7a76\u53d8\u5f97\u65e5\u8d8b\u6025\u8feb\uff0c\u5f88\u591a\u4eba\u8ba4\u4e3a\u5fae\u7535\u5b50\u5de5\u4e1a\u5728\u8d70\u52307 nm\u6280\u672f\u8282\u70b9\u4e4b\u540e\u53ef\u80fd\u4e0d\u5f97\u4e0d\u9762\u4e34\u653e\u5f03\u7ee7\u7eed\u4f7f\u7528\u7845\u6750\u6599\u4f5c\u4e3a\u6676\u4f53\u7ba1\u5bfc\u7535\u6c9f\u9053\u3002\u5728\u4e3a\u6570\u4e0d\u591a\u7684\u53ef\u80fd\u66ff\u4ee3\u6750\u6599\u4e2d\uff0c\u78b3\u57fa\u7eb3\u7c73\u6750\u6599\u88ab\u516c\u8ba4\u4e3a\u6700\u6709\u53ef\u80fd\u66ff\u4ee3\u7845\u6750\u6599\u3002<\/p>\n 2008\u5e74ITRS\u65b0\u5174\u7814\u7a76\u6750\u6599\u548c\u65b0\u5174\u7814\u7a76\u5668\u4ef6\u5de5\u4f5c\u7ec4\u5728\u8003\u5bdf\u4e86\u6240\u6709\u53ef\u80fd\u7684\u7845\u57faCMOS\u66ff\u4ee3\u6280\u672f\u4e4b\u540e\uff0c\u660e\u786e\u5411\u534a\u5bfc\u4f53\u884c\u4e1a\u63a8\u8350\u91cd\u70b9\u7814\u7a76\u78b3\u57fa\u7535\u5b50\u5b66\uff0c\u4f5c\u4e3a\u672a\u67655~10\u5e74\u663e\u73b0\u5546\u4e1a\u4ef7\u503c\u7684\u4e0b\u4e00\u4ee3\u7535\u5b50\u6280\u672f\u3002\u7f8e\u56fd\u56fd\u5bb6\u79d1\u5b66\u57fa\u91d1\u59d4\u5458\u4f1a(NSF)\u5341\u4f59\u5e74\u6765\u9664\u4e86\u5728\u7f8e\u56fd\u56fd\u5bb6\u7eb3\u7c73\u6280\u672f\u8ba1\u5212\u4e2d\u7ee7\u7eed\u5bf9\u78b3\u7eb3\u7c73\u6750\u6599\u548c\u76f8\u5173\u5668\u4ef6\u7ed9\u4e88\u91cd\u70b9\u652f\u6301\u5916\uff0c\u57282008\u5e74\u8fd8\u4e13\u95e8\u542f\u52a8\u4e86\u201c\u8d85\u8fc7\u6469\u5c14\u5b9a\u5f8b\u7684\u79d1\u5b66\u4e0e\u5de5\u7a0b\u9879\u76ee\u201d\uff0c\u5176\u4e2d\u78b3\u57fa\u7535\u5b50\u5b66\u7814\u7a76\u88ab\u5217\u4e3a\u91cd\u4e2d\u4e4b\u91cd\u3002\u5176\u540e\u7f8e\u56fd\u4e0d\u65ad\u52a0\u5927\u5bf9\u78b3\u57fa\u7535\u5b50\u5b66\u7814\u7a76\u7684\u6295\u5165\uff0c\u7f8e\u56fd\u56fd\u5bb6\u7eb3\u7c73\u8ba1\u5212\u4ece2010\u5e74\u5f00\u59cb\u5c06\u201c2020\u5e74\u540e\u7684\u7eb3\u7c73\u7535\u5b50\u5b66\u201d\u8bbe\u7f6e\u4e3a3\u4e2a\u91cd\u4e2d\u4e4b\u91cd\u7684\u6210\u540d\u8ba1\u5212(signature initiatives)\u4e4b\u4e00\u3002\u9664\u7f8e\u56fd\u5916\uff0c\u6b27\u76df\u548c\u5176\u4ed6\u5404\u56fd\u653f\u5e9c\u4e5f\u9ad8\u5ea6\u91cd\u89c6\u78b3\u7eb3\u7c73\u6750\u6599\u548c\u76f8\u5173\u7535\u5b50\u5b66\u7684\u7814\u7a76\u548c\u5f00\u53d1\u5e94\u7528\uff0c\u5e03\u5c40\u548c\u7ee7\u7eed\u62a2\u5360\u4fe1\u606f\u6280\u672f\u6838\u5fc3\u9886\u57df\u7684\u5236\u9ad8\u70b9\u3002<\/p>\n \u78b3\u7eb3\u7c73\u7ba1\u6750\u6599\u4e2d\uff0c\u6700\u6709\u53ef\u80fd\u66ff\u4ee3\u7845\u7684\u6709\u4e24\u4e2a\uff0c\u78b3\u7eb3\u7c73\u7ba1\u548c\u77f3\u58a8\u70ef\u3002\u5728\u77f3\u58a8\u70ef\u83b7\u5f97\u8bfa\u8d1d\u5c14\u5956\u4e4b\u524d\uff0c\u78b3\u7eb3\u7c73\u7ba1\u4e00\u76f4\u88ab\u8ba4\u4e3a\u662f\u6700\u6709\u53ef\u80fd\u4ee3\u66ff\u7845\u7684\u534a\u5bfc\u4f53\u6750\u6599\uff0c\u800c\u5982\u4eca\uff0c\u7531\u4e8e\u77f3\u58a8\u70ef\u5728\u5168\u7403\u8303\u56f4\u5185\u7684\u72c2\u70ed\uff0c\u4f3c\u4e4e\u6709\u4ee3\u66ff\u78b3\u7eb3\u7c73\u7ba1\u4e4b\u52bf\uff0c\u90a3\u4e48\uff0c\u77f3\u58a8\u70ef\u548c\u78b3\u7eb3\u7c73\u7ba1\uff0c\u7a76\u7adf\u8c01\u80fd\u582a\u5f53\u5927\u4efb\u5462\uff1f<\/p>\n \u78b3\u7eb3\u7c73\u7ba1\u96c6\u6210\u7535\u8def\u7684\u7814\u53d1\u4f18\u52bf\u4e0e\u53d1\u5c55\u73b0\u72b6<\/strong><\/p>\n 1991\u5e74\uff0c\u65e5\u672cNEC\u516c\u53f8\u7684\u996d\u5c9b\u6f84\u7537\u5728\u9ad8\u5206\u8fa8\u900f\u5c04\u7535\u5b50\u663e\u5fae\u955c\u4e0b\u68c0\u9a8c\u77f3\u58a8\u7535\u5f27\u8bbe\u5907\u4e2d\u4ea7\u751f\u7684\u7403\u72b6\u78b3\u5206\u5b50\u65f6\uff0c\u610f\u5916\u53d1\u73b0\u4e86\u7531\u78b3\u5206\u5b50\u7ec4\u6210\u7684\u7ba1\u72b6\u540c\u8f74\u7eb3\u7c73\u7ba1\uff0c\u4e5f\u5c31\u662f\u73b0\u5728\u88ab\u79f0\u4f5c\u7684\u78b3\u7eb3\u7c73\u7ba1CNT\uff0c\u53c8\u540d\u5df4\u57fa\u7ba1\u3002<\/p>\n \u78b3\u7ba1\u6750\u6599\u5177\u6709\u6781\u4e3a\u4f18\u79c0\u7684\u7535\u5b66\u7279\u6027\u3002\u5ba4\u6e29\u4e0b\u78b3\u7ba1\u7684n\u578b\u548cp\u578b\u8f7d\u6d41\u5b50(\u7535\u5b50\u548c\u7a7a\u7a74)\u8fc1\u79fb\u7387\u5bf9\u79f0\uff0c\u5747\u53ef\u4ee5\u8fbe\u523010000cm2\/(V\u2022s)\u4ee5\u4e0a\uff0c\u8fdc\u8d85\u4f20\u7edf\u534a\u5bfc\u4f53\u6750\u6599\u3002\u53e6\u5916\u78b3\u7ba1\u7684\u76f4\u5f84\u4ec5\u67091\uff5e3 nm\uff0c\u66f4\u5bb9\u6613\u88ab\u6805\u6781\u7535\u538b\u975e\u5e38\u6709\u6548\u5f00\u542f\u548c\u5173\u65ad\u3002<\/p>\n \u78b3\u7eb3\u7c73\u7ba1\u76f8\u5bf9\u4e8e\u7845\u6750\u6599\u7684\u4f18\u70b9\uff1a<\/strong><\/p>\n 1)\u8f7d\u6d41\u5b50\u8f93\u8fd0\u662f\u4e00\u7ef4\u7684\u3002\u8fd9\u610f\u5473\u7740\u51cf\u5c11\u4e86\u5bf9\u8f7d\u6d41\u5b50\u6563\u5c04\u7684\u76f8\u7a7a\u95f4\uff0c\u5f00\u8f9f\u4e86\u5f39\u9053\u8f93\u8fd0\u7684\u53ef\u80fd\u6027\u3002\u76f8\u5e94\u5730\uff0c\u529f\u8017\u4f4e\u3002<\/p>\n 2)\u6240\u6709\u78b3\u539f\u5b50\u7684\u5316\u5b66\u952e\u90fd\u662f\u94fe\u63a5\u7684\uff0c\u7531\u6b64\uff0c\u6ca1\u6709\u5fc5\u8981\u8fdb\u884c\u5316\u5b66\u949d\u5316\u5de5\u827a\u4ee5\u6d88\u9664\u7c7b\u4f3c\u5b58\u5728\u4e8e\u7845\u8868\u9762\u7684\u60ac\u6302\u952e\u3002\u8fd9\u610f\u5473\u7740\u78b3\u7eb3\u7c73\u7ba1\u7535\u5b50\u4e0d\u4e00\u5b9a\u975e\u5f97\u4f7f\u7528\u4e8c\u6c27\u5316\u7845\u7edd\u7f18\u4f53\uff0c\u9ad8\u4ecb\u7535\u5e38\u6570\u548c\u6676\u4f53\u7edd\u7f18\u4f53\u90fd\u53ef\u4ee5\u76f4\u63a5\u4f7f\u7528\u3002<\/p>\n 3)\u5f3a\u5171\u4ef7\u952e\u7ed3\u6784\u80fd\u4f7f\u78b3\u7eb3\u7c73\u7ba1\u5177\u6709\u8f83\u9ad8\u7684\u673a\u68b0\u7a33\u5b9a\u6027\u548c\u70ed\u7a33\u5b9a\u6027\uff0c\u4e14\u5bf9\u7535\u8fc1\u79fb\u6709\u5f88\u597d\u7684\u62b5\u6297\u529b\uff0c\u53ef\u4ee5\u627f\u53d7\u7684\u7535\u6d41\u5bc6\u5ea6\u9ad8\u8fbe10 A\/cm\u3002<\/p>\n 4)\u5b83\u4eec\u7684\u5173\u952e\u5c3a\u5bf8\uff0c\u5373\u76f4\u5f84\uff0c\u662f\u7531\u5316\u5b66\u53cd\u5e94\u63a7\u5236\uff0c\u800c\u4e0d\u662f\u4f20\u7edf\u7684\u5236\u9020\u5de5\u827a\u3002<\/p>\n 5)\u539f\u5219\u4e0a\uff0c\u65e0\u8bba\u662f\u6709\u6e90\u5668\u4ef6(\u6676\u4f53\u7ba1)\u8fd8\u662f\u4e92\u8fde\u8054\u7ed3\u7ebf\uff0c\u90fd\u53ef\u4ee5\u5206\u522b\u7531\u534a\u5bfc\u4f53\u5c5e\u6027\u548c\u91d1\u5c5e\u5c5e\u6027\u7684\u78b3\u7eb3\u7c73\u7ba1\u5236\u6210\u3002<\/p>\n \u65af\u5766\u798f\u5927\u5b66\u7814\u7a76\u7ec4\u91c7\u7528\u5982(a)\u6240\u793a\u7684\u78b3\u7eb3\u7c73\u7ba1\u9635\u5217\u5236\u5907\u51fa\u4e86\u5982(b)\u6240\u793a\u7684\u4e16\u754c\u4e0a\u7b2c\u4e00\u4e2a\u78b3\u7eb3\u7c73\u7ba1\u8ba1\u7b97\u673a\uff1b(c)\u4e3b\u8981\u529f\u80fd\u5355\u5143\u7684\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c\u50cf<\/p>\n \u78b3\u7eb3\u7c73\u7ba1\u534a\u5bfc\u4f53\u5668\u4ef6\u7684\u7814\u7a76\u8fdb\u5c55\uff1a<\/strong><\/p>\n \u8fd1\u5e74\u6765\uff0c\u57fa\u4e8e\u78b3\u7eb3\u7c73\u7ba1\u7684\u78b3\u57fa\u7535\u5b50\u5b66\u7814\u7a76\u53d6\u5f97\u4e86\u98de\u901f\u53d1\u5c55\uff0c\u5e76\u9010\u6e10\u4ece\u57fa\u7840\u7814\u7a76\u8f6c\u5411\u5b9e\u9645\u5e94\u7528\u3002\u5f97\u76ca\u4e8e\u6750\u6599\u81ea\u8eab\u7684\u4f18\u826f\u6027\u8d28\u548c\u4e16\u754c\u8303\u56f4\u7684\u653f\u7b56\u548c\u8d44\u91d1\u652f\u6301\uff0c\u7814\u53d1\u4eba\u5458\u5728\u78b3\u7eb3\u7c73\u7ba1\u7684\u5668\u4ef6\u7269\u7406\u3001\u5668\u4ef6\u5236\u5907\u3001\u96c6\u6210\u65b9\u6cd5\u7b49\u65b9\u9762\u90fd\u53d6\u5f97\u4e86\u76f8\u5f53\u7684\u6210\u5c31\uff0c\u8fbe\u5230\u4e86\u5176\u4ed6\u7eb3\u7c73\u6750\u6599\u4ece\u672a\u8fbe\u5230\u8fc7\u7684\u9ad8\u5ea6\u3002<\/p>\n \u7814\u7a76\u8fdb\u5c55\u8868\u660e\u78b3\u57fa\u7535\u5b50\u5b66\u5668\u4ef6\u76f8\u6bd4\u4f20\u7edf\u7845\u57fa\u5668\u4ef6\u5177\u67095\uff5e10\u500d\u7684\u901f\u5ea6\u548c\u80fd\u8017\u4f18\u52bf\uff0c\u53ef\u4ee5\u5b9e\u73b05 nm\u4ee5\u4e0b\u7684\u534a\u5bfc\u4f53\u6280\u672f\u8282\u70b9\uff0c\u6ee1\u8db32020\u5e74\u4e4b\u540e\u65b0\u578b\u534a\u5bfc\u4f53\u82af\u7247\u7684\u53d1\u5c55\u9700\u6c42\u3002\u7814\u53d1\u4eba\u5458\u5df2\u7ecf\u5b9e\u73b0\u4e86\u5177\u6709\u5404\u79cd\u529f\u80fd\u7684\u57fa\u7840\u903b\u8f91\u5355\u5143\uff0c\u539f\u5219\u4e0a\u5c31\u53ef\u4ee5\u5229\u7528\u8fd9\u4e9b\u903b\u8f91\u5355\u5143\u5236\u5907\u51fa\u5177\u6709\u6781\u9ad8\u590d\u6742\u7a0b\u5ea6\u7684\u78b3\u57fa\u96c6\u6210\u7535\u8def\u3002<\/p>\n Science\u6742\u5fd7\u4e8e2013\u5e74\u53d1\u8868\u4e86\u7f8e\u56fd\u65af\u5766\u798f\u5927\u5b66\u7684\u7814\u7a76\u4eba\u5458\u91c7\u7528178\u4e2a\u78b3\u7eb3\u7c73\u7ba1\u6676\u4f53\u7ba1\u5236\u9020\u51fa\u7684\u7684\u8ba1\u7b97\u673a\u539f\u578b\u3002MIT Technology Review\u4e8e2014\u5e74\u62a5\u9053\u4e86\u7f8e\u56fdIBM\u516c\u53f8\u8868\u793a\u5c06\u57282020\u5e74\u4e4b\u524d\u5229\u7528\u78b3\u7eb3\u7c73\u7ba1\u5236\u5907\u51fa\u6bd4\u73b0\u6709\u82af\u7247\u5feb5\u500d\u7684\u534a\u5bfc\u4f53\u82af\u7247\u3002\u7f8e\u56fdIBM\u516c\u53f8\u4e8e\u76f8\u5173\u5a92\u4f53\u53d1\u8868\u7684\u7ed3\u679c\u8868\u660e\uff0c\u57fa\u4e8e\u78b3\u7eb3\u7c73\u7ba1\u7684\u534a\u5bfc\u4f53\u82af\u7247\u5728\u6027\u80fd\u548c\u80fd\u8017\u65b9\u9762\u90fd\u6bd4\u4f20\u7edf\u7845\u57fa\u82af\u7247\u6709\u663e\u8457\u6539\u5584\uff1a\u7845\u57fa\u534a\u5bfc\u4f53\u6280\u672f\u4ece7 nm\u7f29\u51cf\u52305 nm\u8282\u70b9\uff0c\u76f8\u5e94\u7684\u82af\u7247\u6027\u80fd\u5927\u7ea6\u670920%\u7684\u589e\u52a0\uff0c\u800c7 nm\u6280\u672f\u8282\u70b9\u4e0b\u7684\u78b3\u57fa\u534a\u5bfc\u4f53\u6280\u672f\u6bd4\u7845\u57fa7 nm\u7684\u6027\u80fd\u63d0\u9ad8300%\uff0c\u76f8\u5f5315\u4ee3\u7845\u57fa\u6280\u672f\u7684\u6539\u5584\u3002\u8fd9\u4e9b\u8fdb\u5c55\u4f7f\u534a\u5bfc\u4f53\u4ea7\u4e1a\u754c\u770b\u5230\u4e86\u78b3\u57fa\u7535\u5b50\u5b66\u65f6\u4ee3\u7684\u66d9\u5149\uff0c\u6709\u671b\u5c06\u6027\u80fd\u6301\u7eed\u63d0\u9ad8\u7684\u6469\u5c14\u5b9a\u5f8b\u5ef6\u7eed\u52302050\u5e74\u3002<\/p>\n \u4f46\u662f\uff0c\u78b3\u7eb3\u7c73\u7ba1\u4e5f\u6709\u9650\u5236\uff0c\u4eba\u5de5\u5236\u9020\u7684\u78b3\u7eb3\u7c73\u7ba1\u662f\u91d1\u5c5e\u7279\u6027\u548c\u534a\u5bfc\u4f53\u7279\u6027\u7684\u6df7\u5408\u4f53\uff0e\u8fd92\u79cd\u5c5e\u6027\u7684\u78b3\u7eb3\u7c73\u7ba1\u76f8\u4e92\u201c\u7c98\u8fde\u201d\u6210\u7ef3\u7d22\u72b6\u6216\u675f\u72b6\uff0c\u4f7f\u5f97\u78b3\u7eb3\u7c73\u7ba1\u7684\u7528\u9014\u5927\u6253\u6298\u6263\uff0c\u56e0\u4e3a\u53ea\u6709\u534a\u5bfc\u4f53\u7279\u6027\u7684\u7eb3\u7c73\u7ba1\u624d\u6709\u6676\u4f53\u7ba1\u6027\u80fd\u3002\u73b0\u6709\u7684\u5236\u5907\u65b9\u6cd5\u751f\u4ea7\u51fa\u7684\u78b3\u7eb3\u7c73\u7ba1\u5747\u4e3a\u5404\u79cd\u624b\u6027\u548c\u4e0d\u540c\u7ba1\u5f84\u7684\u6df7\u5408\uff0c\u624b\u6027\u548c\u7ba1\u5f84\u7684\u4e0d\u540c\uff0c\u76f4\u63a5\u5bfc\u81f4\u5bfc\u7535\u6027\u8d28\u7684\u4e0d\u540c\uff0c\u8fd9\u4f7f\u5f97\u78b3\u7eb3\u7c73\u7ba1\u5728\u5927\u90e8\u5206\u5b9e\u9645\u5e94\u7528\u5b58\u5728\u8bb8\u591a\u56f0\u96be\u3002<\/p>\n \u5f6d\u7ec3\u77db\u6559\u6388\u5728\u63a5\u53d7\u91c7\u8bbf\u65f6\u900f\u9732\uff0c\u76ee\u524dIBM\u5728\u78b3\u7eb3\u7c73\u7ba1\u7814\u7a76\u65b9\u5411\u4e0a\u91c7\u7528\u7684\u662f\u63ba\u6742\u5236\u5907\u65b9\u6cd5\uff0c\u800c\u5f6d\u7ec3\u77db\u4e0e\u5f20\u5fd7\u52c7\u8bfe\u9898\u7ec4\u91c7\u7528\u7684\u662f\u65e0\u63ba\u6742\u5236\u5907\u65b9\u6cd5\uff0c\u8fd9\u662f\u5168\u7403\u9996\u521b\u7684\uff0c\u4ed6\u4eec\u8bfe\u9898\u7ec4\u7ecf\u8fc710\u591a\u5e74\u7684\u7814\u7a76\uff0c\u5f00\u53d1\u51fa\u65e0\u63ba\u6742\u5236\u5907\u65b9\u6cd5\uff0c\u7814\u5236\u768410 nm\u78b3\u7eb3\u7c73\u7ba1\u9876\u6805CMOS\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff0c\u5176p\u578b\u548cn\u578b\u5668\u4ef6\u5728\u66f4\u4f4e\u5de5\u4f5c\u7535\u538b(0.4 V)\u4e0b\uff0c\u6027\u80fd\u5747\u8d85\u8fc7\u4e86\u76ee\u524d\u6700\u597d\u7684\u3001\u5728\u66f4\u9ad8\u5de5\u4f5c\u7535\u538b(0.7 V)\u4e0b\u5de5\u4f5c\u7684\u7845\u57faCMOS\u6676\u4f53\u7ba1\u3002\u73b0\u5728\uff0c\u4ed6\u4eec\u53c8\u514b\u670d\u4e86\u5c3a\u5bf8\u7f29\u5c0f\u7684\u5de5\u827a\u9650\u5236\uff0c\u6210\u529f\u5f00\u53d1\u51fa5 nm\u6805\u957f\u78b3\u7eb3\u7c73\u6676\u4f53\u7ba1\uff0c\u5176\u6027\u80fd\u63a5\u8fd1\u4e86\u7531\u91cf\u5b50\u529b\u5b66\u539f\u7406\u51b3\u5b9a\u7684\u7406\u8bba\u6781\u9650\u3002<\/p>\n \u77f3\u58a8\u70ef\u573a\u6548\u5e94\u6676\u4f53\u7ba1\u7684\u7814\u7a76\u73b0\u72b6\u548c\u8fdb\u5c55<\/strong><\/p>\n \u77f3\u58a8\u70ef\u662f\u4e00\u79cd\u4e8c\u7ef4\u78b3\u7ed3\u6784\u6750\u6599\uff0c\u56e0\u4e3a\u5176\u5177\u6709\u96f6\u7981\u5e26\u7279\u6027\uff0c\u5373\u4f7f\u5728\u5ba4\u6e29\u4e0b\u8f7d\u6d41\u5b50\u5728\u77f3\u58a8\u70ef\u4e2d\u7684\u5e73\u5747\u81ea\u7531\u7a0b\u548c\u76f8\u5e72\u957f\u5ea6\u4e5f\u53ef\u4e3a\u5fae\u7c73\u7ea7\uff0c\u6240\u4ee5\u662f\u4e00\u79cd\u6027\u80fd\u4f18\u5f02\u7684\u5bfc\u7535\u6750\u6599\u3002\u77f3\u58a8\u70ef\u573a\u6548\u5e94\u5668\u4ef6\u6700\u91cd\u8981\u7684\u6311\u6218\u4e4b\u4e00\u662f\u5982\u4f55\u589e\u52a0\u5e26\u9699\uff0c\u800c\u53c8\u4e0d\u964d\u4f4e\u5b83\u975e\u5e38\u9ad8\u7684\u8fc1\u79fb\u7387\u3002<\/p>\n \u77f3\u58a8\u70ef\u6676\u4f53\u7ba1\u4e0e\u4f20\u7edf\u7684\u7845\u534a\u5bfc\u4f53\u6676\u4f53\u7ba1\u76f8\u6bd4\uff0c\u6709\u4ee5\u4e0b\u7279\u70b9\uff1a<\/strong><\/p>\n (1)\u5728\u7535\u573a\u7684\u8c03\u63a7\u4e0b\uff0c\u77f3\u58a8\u70ef\u4e2d\u7684\u8f7d\u6d41\u5b50\u7c7b\u578b\u80fd\u591f\u5728\u7535\u5b50\u548c\u7a7a\u7a74\u95f4\u8fde\u7eed\u53d8\u5316\uff0c\u5177\u6709\u53cc\u6781\u578b\u5bfc\u7535\u6027\u3002\u56e0\u6b64GFET\u65e0\u6cd5\u50cf\u4f20\u7edf\u534a\u5bfc\u4f53\u6676\u4f53\u7ba1\u90a3\u6837\u88ab\u6709\u6548\u5730\u5173\u95ed,\u4e0d\u9002\u4e8e\u4f5c\u903b\u8f91\u5668\u4ef6\u3002\u4f46\u91c7\u53d6\u4e00\u4e9b\u65b0\u578b\u7684\u7ed3\u6784\u4e5f\u80fd\u5f97\u5230\u57fa\u4e8e\u77f3\u58a8\u70ef\u7684\u9ad8\u5f00\u5173\u7535\u6d41\u5668\u4ef6\uff1b<\/p>\n (2)\u77f3\u58a8\u70ef\u7684\u8f7d\u6d41\u5b50\u8fc1\u79fb\u7387\u5f88\u9ad8\uff0c\u800c\u4e14\u53ef\u88ab\u7535\u573a\u8c03\u63a7\uff0c\u5728\u9ad8\u9891\u9886\u57df\uff0c\u5c24\u5176\u5728\u5c04\u9891(RF)\u9886\u57df\u4e2d\u6709\u5f88\u5927\u7684\u5e94\u7528\u6f5c\u529b\u3002<\/p>\n (3)\u77f3\u58a8\u70ef\u672c\u8eab\u4e3a\u4e8c\u7ef4\u6750\u6599\uff0c\u6709\u5229\u4e8e\u7f29\u5c0f\u7535\u8def\u5c3a\u5bf8\u548c\u7535\u8def\u7684\u96c6\u6210\u3002CVD\u5236\u5907\u7684\u77f3\u58a8\u70ef\u53ef\u88ab\u8f6c\u79fb\u5230\u4efb\u610f\u886c\u5e95\u4e0a\uff0c\u6709\u5229\u4e8e\u5236\u5907\u77f3\u58a8\u70ef\u4e0e\u5176\u4ed6\u6750\u6599\u7684\u5f02\u8d28\u7ed3\uff0c\u7814\u7a76\u65b0\u7684\u7269\u7406\u73b0\u8c61\u548c\u65b0\u7684\u7535\u5b50\u5668\u4ef6\u3002<\/p>\n \u77f3\u58a8\u70ef\u4f18\u4e8e\u78b3\u7eb3\u7c73\u7ba1\u7684\u662f\uff0c\u5728\u5236\u9020\u78b3\u7eb3\u7c73\u7ba1\u7684\u5de5\u827a\u4e2d\uff0c\u4f1a\u751f\u6210\u91d1\u5c5e\u548c\u534a\u5bfc\u4f53\u6750\u6599\u7684\u78b3\u7eb3\u7c73\u7ba1\u6df7\u5408\u7269\uff0c\u5728\u5236\u4f5c\u590d\u6742\u7535\u8def\u65f6\uff0c\u78b3\u7eb3\u7c73\u7ba1\u5fc5\u987b\u7ecf\u8fc7\u4ed4\u7ec6\u7b5b\u9009\u548c\u5b9a\u4f4d\uff0c\u76ee\u524d\u8fd8\u6ca1\u6709\u5f00\u53d1\u51fa\u975e\u5e38\u597d\u7684\u65b9\u6cd5\uff0c\u800c\u8fd9\u5bf9\u77f3\u58a8\u70ef\u800c\u8a00\u5219\u8981\u5bb9\u6613\u5f97\u591a\u3002\u8fd9\u79cd\u72ec\u7279\u7684\u7535\u6027\u80fd\u4f7f\u77f3\u58a8\u70ef\u4f5c\u4e3a\u4e00\u79cd\u66ff\u4ee3\u6750\u6599\u5728\u8bb8\u591a\u65b0\u7684\u9886\u57df\u5f97\u5230\u5e94\u7528\u3002<\/p>\n \u9ad8\u7535\u5b50\/\u7a7a\u7a74\u8fc1\u79fb\u7387\u548c\u5bf9\u79f0\u7684\u80fd\u5e26\u7ed3\u6784\u4f7f\u5f97\u77f3\u58a8\u70ef\u975e\u5e38\u9002\u5408\u5236\u4f5c\u9ad8\u9891\u6676\u4f53\u7ba1\uff0c\u867d\u7136\u77f3\u58a8\u70ef\u5bfc\u7535\u80fd\u529b\u6781\u4f73\uff0c\u4f46\u5b83\u7f3a\u4e4f\u80fd\u9699\uff0c\u5373\u77f3\u58a8\u70ef\u4e2d\u6ca1\u6709\u201c\u7535\u5b50\u6001\u65e0\u6cd5\u5b58\u5728\u7684\u7981\u5e26\u201d\u7684\u80fd\u91cf\u8303\u56f4\uff0c\u9650\u5236\u4e86\u5b83\u4f5c\u4e3a\u5f00\u5173\u5668\u4ef6\u65b9\u9762\u7684\u5e94\u7528\uff0c\u800c\u77f3\u58a8\u70ef\u7eb3\u7c73\u5e26(GNR)\u53ef\u4ee5\u6253\u5f00\u77f3\u58a8\u70ef\u7684\u80fd\u9699\uff0c\u56e0\u6b64\uff0c\u7c7b\u534a\u5bfc\u4f53\u7684GNR\u5f15\u8d77\u4e86\u4eba\u4eec\u7684\u6781\u5927\u5173\u6ce8\uff0c\u6fc0\u53d1\u79d1\u5b66\u5bb6\u7814\u5236\u5168\u77f3\u58a8\u70ef\u7535\u8def\u7684\u5e7f\u6cdb\u5174\u8da3\u3002<\/p>\n \u636e\u62a5\u5bfc\uff0c\u66fc\u5207\u65af\u7279\u5927\u5b66Andre Geim\u5c0f\u7ec4\uff0c\u9664\u4e86\u5df2\u5f00\u53d1\u51fa\u4e8610 nm\u7ea7\u53ef\u5b9e\u9645\u8fd0\u884c\u7684\u77f3\u58a8\u70ef\u6676\u4f53\u7ba1\u5916\uff0c\u4ed6\u4eec\u5c1a\u672a\u516c\u5e03\u7684\u6700\u65b0\u7814\u7a76\u6210\u679c\uff0c\u5df2\u7814\u5236\u51fa\u957f\u5bbd\u5747\u4e3a1\u4e2a\u5206\u5b50\u7684\u66f4\u5c0f\u7684\u77f3\u58a8\u70ef\u6676\u4f53\u7ba1\uff0c\u8be5\u77f3\u58a8\u70ef\u6676\u4f53\u7ba1\u5b9e\u9645\u4e0a\u662f\u7531\u5355\u539f\u5b50\u7ec4\u6210\u7684\u6676\u4f53\u7ba1\u3002<\/p>\n 2008\u5e74IBM\u516c\u53f8\u7684Watson\u7814\u7a76\u4e2d\u5fc3\u5728\u4e16\u754c\u4e0a\u7387\u5148\u5236\u6210\u4f4e\u566a\u58f0\u77f3\u58a8\u70ef\u6676\u4f53\u7ba1\u3002\u666e\u901a\u7684\u7eb3\u7c73\u5668\u4ef6\u968f\u7740\u5c3a\u5bf8\u7684\u51cf\u5c0f\uff0c\u88ab\u79f0\u505a1\/f\u7684\u566a\u97f3\u4f1a\u8d8a\u6765\u8d8a\u660e\u663e\uff0c\u4f7f\u5668\u4ef6\u4fe1\u566a\u6bd4\u6076\u5316\uff0c\u8fd9\u79cd\u73b0\u8c61\u5c31\u662f\u201c\u8c6a\u683c\u89c4\u5219(Hooge’s Law)\u201d\u3002\u77f3\u58a8\u70ef\u3001\u78b3\u7eb3\u7c73\u7ba1\u4ee5\u53ca\u7845\u6750\u6599\u90fd\u4f1a\u4ea7\u751f\u8be5\u73b0\u8c61\uff0c\u56e0\u6b64\uff0c\u5982\u4f55\u51cf\u5c0f1\/f\u566a\u58f0\u6210\u4e3a\u5b9e\u73b0\u7eb3\u7c73\u5143\u4ef6\u7684\u5173\u952e\u95ee\u9898\u4e4b\u4e00\u3002IBM\u901a\u8fc7\u91cd\u53e02\u5c42\u77f3\u58a8\u70ef\uff0c\u8bd5\u5236\u6210\u529f\u4e86\u6676\u4f53\u7ba1\u3002\u7531\u4e8e2\u5c42\u77f3\u58a8\u70ef\u4e4b\u95f4\u751f\u6210\u4e86\u5f3a\u7535\u5b50\u7ed3\u5408\uff0c\u4ece\u800c\u63a7\u5236\u4e861\/f\u566a\u97f3\u3002IBM\u516c\u53f8\u7684Ming-YuLin\u7684\u53d1\u73b0\u8bc1\u660e\uff0c2\u5c42\u77f3\u58a8\u70ef\u6709\u671b\u5e94\u7528\u4e8e\u5404\u79cd\u5404\u6837\u7684\u9886\u57df\u3002<\/p>\n 2008\u5e745\u6708\u7f8e\u56fd\u4e54\u6cbb\u4e9a\u79d1\u6280\u5b66\u9662\u5fb7\u5e0c\u5c14\u4e0e\u9ebb\u7701\u7406\u5de5\u5b66\u9662\u6797\u80af\u5b9e\u9a8c\u5ba4\u5408\u4f5c\u5728\u5355\u4e00\u82af\u7247\u4e0a\u751f\u6210\u7684\u51e0\u767e\u4e2a\u77f3\u58a8\u70ef\u6676\u4f53\u7ba1\u9635\u5217\u3002<\/p>\n \u7845\u57fa\u7684\u5fae\u8ba1\u7b97\u673a\u5904\u7406\u5668\u5728\u5ba4\u6e29\u6761\u4ef6\u4e0b\u6bcf\u79d2\u949f\u53ea\u80fd\u6267\u884c\u4e00\u5b9a\u6570\u91cf\u7684\u64cd\u4f5c\uff0c\u7136\u800c\u7535\u5b50\u7a7f\u8fc7\u77f3\u58a8\u70ef\u51e0\u4e4e\u6ca1\u6709\u4efb\u4f55\u963b\u529b\uff0c\u6240\u4ea7\u751f\u7684\u70ed\u91cf\u4e5f\u975e\u5e38\u5c11\u3002\u6b64\u5916\uff0c\u77f3\u58a8\u70ef\u672c\u8eab\u5c31\u662f\u4e00\u4e2a\u826f\u597d\u7684\u5bfc\u70ed\u4f53\uff0c\u53ef\u4ee5\u5f88\u5feb\u5730\u6563\u53d1\u70ed\u91cf\u3002\u7531\u4e8e\u5177\u6709\u4f18\u5f02\u7684\u6027\u80fd\uff0c\u7531\u77f3\u58a8\u70ef\u5236\u9020\u7684\u7535\u5b50\u4ea7\u54c1\u8fd0\u884c\u7684\u901f\u5ea6\u8981\u5feb\u5f97\u591a\u3002<\/p>\n \u77f3\u58a8\u70ef\u5668\u4ef6\u5236\u6210\u7684\u8ba1\u7b97\u673a\u7684\u8fd0\u884c\u901f\u5ea6\u53ef\u8fbe\u5230\u592a\u8d6b\u5179\uff0c\u53731\u00d7106\u00a0<\/sup>kHz\u76841000\u500d\uff0c\u5982\u679c\u80fd\u8fdb\u4e00\u6b65\u5f00\u53d1\uff0c\u5176\u610f\u4e49\u4e0d\u8a00\u800c\u55bb\u3002<\/p>\n \u9664\u4e86\u8ba9\u8ba1\u7b97\u673a\u8fd0\u884c\u5f97\u66f4\u5feb\uff0c\u77f3\u58a8\u70ef\u5668\u4ef6\u8fd8\u80fd\u7528\u4e8e\u9700\u8981\u9ad8\u901f\u5de5\u4f5c\u7684\u901a\u4fe1\u6280\u672f\u548c\u6210\u50cf\u6280\u672f\u3002\u6709\u5173\u4e13\u5bb6\u8ba4\u4e3a\uff0c\u77f3\u58a8\u70ef\u5f88\u53ef\u80fd\u9996\u5148\u5e94\u7528\u4e8e\u9ad8\u9891\u9886\u57df\uff0c\u5982\u592a\u8d6b\u5179\u6ce2\u6210\u50cf\uff0c\u7528\u9014\u4e4b\u4e00\u662f\u7528\u6765\u63a2\u6d4b\u9690\u85cf\u7684\u6b66\u5668\u3002\u901f\u5ea6\u8fd8\u4e0d\u662f\u77f3\u58a8\u70ef\u7684\u552f\u4e00\u4f18\u70b9\uff0c\u7845\u4e0d\u80fd\u5206\u5272\u6210\u5c0f\u4e8e10 nm\u7684\u5c0f\u7247\uff0c\u5426\u5219\u5176\u5c06\u5931\u53bb\u8bf1\u4eba\u7684\u7535\u5b50\u6027\u80fd\u3002\u4e0e\u7845\u76f8\u6bd4\uff0c\u77f3\u58a8\u70ef\u5206\u5272\u62101 nm\u5c0f\u7247\u65f6\uff0c\u5176\u57fa\u672c\u7269\u7406\u6027\u80fd\u5e76\u4e0d\u6539\u53d8\uff0c\u800c\u4e14\u5176\u7535\u5b50\u6027\u80fd\u8fd8\u6709\u53ef\u80fd\u5f02\u5e38\u53d1\u6325\u3002<\/p>\n \u7ed3\u8bba\uff1a\u7845\u6750\u6599\u9e7f\u6b7b\u8c01\u624b\u8fd8\u672a\u53ef\u77e5<\/strong><\/p>\n 1)\u7845\u7535\u5b50\u6750\u6599\u7684\u53d1\u5c55\u5df2\u63a5\u8fd1\u9876\u5cf0\uff0c\u78b3\u7eb3\u7c73\u7ba1\u548c\u77f3\u58a8\u70ef\u6709\u6bd4\u7845\u6750\u6599\u5668\u4ef6\u66f4\u5c0f\u7684\u5c3a\u5bf8\u548c\u66f4\u4f18\u826f\u7684\u7535\u5b66\u6027\u8d28\uff0c\u5f88\u6709\u53ef\u80fd\u5728\u672a\u6765\u53d6\u4ee3\u7845\u6750\u6599\u3002<\/p>\n 2)\u78b3\u7eb3\u7c73\u7ba1\u6027\u8d28\u4f18\u826f\u800c\u4e14\u53d1\u73b0\u8f83\u65e9\uff0c\u4eba\u4eec\u5bf9\u5176\u5236\u53d6\u53ca\u6784\u5efa\u5668\u4ef6\u7684\u65b9\u6cd5\u7684\u7814\u7a76\u6bd4\u8f83\u6df1\u5165\uff0c\u5e76\u53d6\u5f97\u4e86\u4e00\u4e9b\u6210\u679c\uff0c\u8db3\u4ee5\u8bc1\u660e\u78b3\u7eb3\u7c73\u7ba1\u6709\u6784\u5efa\u5b9e\u7528\u5fae\u7535\u5b50\u5668\u4ef6\u7684\u6761\u4ef6\uff0c\u4f46\u4f20\u7edf\u7684\u6784\u5efa\u5668\u4ef6\u7684\u65b9\u6cd5\u5b58\u5728\u4e00\u4e9b\u95ee\u9898\uff0c\u800c\u4e14\u5bf9\u4e0d\u540c\u78b3\u7eb3\u7c73\u7ba1\u7684\u5206\u79bb\u662f\u6700\u5927\u7684\u6311\u6218\uff0c\u5b9e\u73b0\u78b3\u7eb3\u7c73\u7ba1\u96c6\u6210\u7535\u8def\u4ecd\u9700\u4e00\u5b9a\u65f6\u95f4\u7684\u63a2\u7d22\u3002<\/p>\n 3)\u77f3\u58a8\u70ef\u4e0e\u78b3\u7eb3\u7c73\u7ba1\u4e00\u6837\u5177\u6709\u4f18\u826f\u7684\u6027\u8d28\uff0c\u800c\u4e14\u6784\u5efa\u5668\u4ef6\u65f6\u4e0d\u5fc5\u7ecf\u5386\u590d\u6742\u7684\u5206\u79bb\u8fc7\u7a0b\uff0c\u6bd4\u78b3\u7eb3\u7c73\u7ba1\u5b9e\u7528\u6027\u66f4\u5f3a\uff0c\u5728\u5236\u5907\u4e0a\u4e5f\u53d6\u5f97\u4e86\u4e00\u5b9a\u7684\u7a81\u7834\uff0c\u4f46\u5176\u53d1\u73b0\u8f83\u665a\uff0c\u5728\u5668\u4ef6\u5236\u5907\u4e0a\u8fd8\u6709\u5f85\u63a2\u7d22\u3002\u5728\u672a\u6765\uff0c\u4e8c\u8005\u53ef\u80fd\u5171\u540c\u6210\u4e3a\u6784\u6210\u96c6\u6210\u7535\u8def\u7684\u4e3b\u5bfc\u6750\u6599\u3002<\/p>\n<\/p>\n
<\/p>\n
<\/p>\n