{"id":108055,"date":"2017-10-31T06:30:02","date_gmt":"2017-10-30T22:30:02","guid":{"rendered":"\/\/m.iemloyee.com\/?p=108055"},"modified":"2017-10-30T22:11:09","modified_gmt":"2017-10-30T14:11:09","slug":"%e8%a7%82%e7%82%b9%e5%88%86%e5%ad%90%e6%9d%9f%e5%a4%96%e5%bb%b6","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=108055","title":{"rendered":"\u5e72\u8d27\uff1a\u5206\u5b50\u675f\u5916\u5ef6\u8981\u70b9\u89e3\u6790"},"content":{"rendered":"

\u4e00\u3001\u5206\u5b50\u675f\u5916\u5ef6\u00a0(Molecular\u00a0Beam\u00a0Epitaxy\uff0cMBE)\u7b80\u4ecb<\/strong><\/span><\/p>\n

\u5728\u8d85\u9ad8\u771f\u7a7a\u73af\u5883\u4e0b\uff0c\u00a0\u4f7f\u5177\u6709\u4e00\u5b9a\u70ed\u80fd\u7684\u4e00\u79cd\u6216\u591a\u79cd\u5206\u5b50\u00a0(\u539f\u5b50<\/i><\/em>)<\/i><\/em> \u675f\u6d41\u55b7\u5c04\u5230\u6676\u4f53\u886c\u5e95\u00a0\uff0c\u5728\u886c\u5e95\u8868\u9762\u53d1\u751f\u53cd\u5e94\u7684\u8fc7\u7a0b<\/p>\n

\uff0c\u5c71\u4e8e\u5206\u5b50\u5728\u00a0“\u98de\u884c”\u8fc7\u7a0b\u4e2d\u51e0\u4e4e\u4e0e\u73af\u5883\u6c14\u4f53\u65e0\u78b0\u649e\u00a0\uff0c\u4ee5\u5206\u00a0\u5b50\u675f\u7684\u5f62\u5f0f\u5c04\u5411\u886c\u5e95\u00a0\uff0c\u8fdb\u884c\u5916\u5ef6\u751f\u957f\uff0c \u6545\u6b64\u800c\u5f97\u540d\u3002<\/p>\n

\u5c5e\u6027:\u00a0\u4e00\u79cd\u771f\u7a7a\u84b8\u9540\u65b9\u6cd5<\/p>\n

\u59cb\u521b:\u00a020\u4e16\u7eaa70\u5e74\u4ee3\u521d\u671f\uff0c\u7f8e\u56fdBell\u5b9e\u9a8c\u5ba4<\/p>\n

\u5e94\u7528:\u00a0\u5916\u5ef6\u751f\u957f\u539f\u5b50\u7ea7\u7cbe\u786e\u63a7\u5236\u7684\u8d85\u8584\u591a\u5c42\u00a0\u4e8c\u7ef4\u7ed3\u6784\u6750\u6599\u548c\u5668\u4ef6(\u8d85\u54c1\u683c\u3001\u91cf\u5b50\u9631\u3001\u8c03\u5236\u63ba\u6742\u5f02\u8d28\u7ed3\u3001\u91cf\u5b50\u9634:\u6fc0\u5149\u5668\u00a0\u3001\u9ad8\u7535\u5b50\u8fc1\u79fb\u7387\u6676\u4f53\u7ba1\u7b49)\u00a0;\u7ed3\u5408\u5176\u4ed6\u5de5\u827a\uff0c\u8fd8\u53ef\u5236\u5907\u4e00\u7ef4\u548c\u00a0\u96f6\u7ef4\u7684\u7eb3\u7c73\u6750\u6599(\u91cf\u5b50\u7ebf\u3001\u91cf\u5b50\u70b9\u7b49\uff09\u3002<\/p>\n

MBE\u00a0\u7684\u5178\u578b\u7279\u70b9:<\/strong><\/p>\n

(1) \u4ece\u6e90\u7089\u55b7\u51fa\u7684\u5206\u5b50\uff08\u539f\u5b50\uff09\u4ee5\u00a0“\u5206\u5b50\u675f”\u00a0\u6d41\u5f62\u5f0f\u76f4\u7ebf\u00a0\u5230\u8fbe\u886c\u5e95\u8868\u9762\u3002\u901a\u8fc7\u77f3\u82f1\u6676\u4f53\u819c\u539a\u4eea\u76d1\u6d4b\uff0c \u53ef\u4e25\u683c\u63a7\u5236\u751f\u957f\u901f\u7387\u3002<\/p>\n

(2)\u5206\u5b50\u675f\u5916\u5ef6\u7684\u751f\u957f\u901f\u7387\u8f83\u6162\u00a0\uff0c\u5927\u7ea60.01-1nm\/<\/i><\/em>s<\/i><\/em>\u3002\u53ef\u5b9e\u73b0\u5355\u539f\u5b50(\u5206\u5b50)\u5c42\u5916\u5ef6\u00a0\uff0c\u5177\u6709\u6781\u597d\u7684\u819c\u539a\u53ef\u63a7\u6027\u00a0\u3002<\/p>\n

(3) \u901a\u8fc7\u8c03\u8282\u675f\u6e90\u548c\u886c\u5e95\u4e4b\u95f4\u7684\u6321\u677f\u7684\u5f00\u95ed\u00a0\uff0c\u53ef\u4e25\u683c\u63a7\u5236\u819c\u7684\u6210\u5206\u548c\u6742\u8d28\u6d53\u5ea6\u00a0\uff0c\u4e5f\u53ef\u5b9e\u73b0\u9009\u62e9\u6027\u5916\u5ef6\u751f\u957f\u3002<\/p>\n

(4)\u975e\u70ed\u5e73\u8861\u751f\u957f\u00a0\uff0c\u886c\u5e95\u6e29\u5ea6\u53ef\u4f4e\u4e8e\u5e73\u8861\u6001\u6e29\u5ea6 \u00a0\uff0c\u5b9e\u73b0\u4f4e\u6e29\u751f\u957f\u00a0\uff0c\u53ef\u6709\u6548\u51cf\u5c11\u4e92\u6269\u6563\u548c\u81ea\u63ba\u00a0\u6742\u3002<\/p>\n

(5) \u914d\u5408\u53cd\u5c04\u9ad8\u80fd\u7535\u5b50\u884d\u5c04(\u00a0RHEED\u00a0) \u7b49\u88c5\u7f6e\u00a0\uff0c\u53ef\u5b9e\u73b0\u539f\u4ef7\u89c2\u5bdf\u3001\u5b9e\u65f6\u76d1\u6d4b\u3002<\/p>\n

\u751f\u957f\u901f\u7387\u6bd4\u8f83\u6162\u00a0\uff0c\u65e2\u662fMBE\u7684\u4e00\u4e2a\u4f18\u70b9\u00a0\uff0c\u540c\u65f6\u4e5f\u662f\u5b83\u7684\u4e0d\u8db3\uff0c\u4e0d\u9002\u4e8e\u539a\u819c\u751f\u957f\u548c\u5927\u91cf\u751f\u4ea7\u00a0\u3002<\/p>\n

\u4e8c\u3001\u7845\u5206\u5b50\u675f\u5916\u5ef6<\/span><\/h4>\n

1\u00a0\u57fa\u672c\u6982\u51b5<\/strong><\/p>\n

\u7845\u5206\u5b50\u675f\u5916\u5ef6\u5305\u62ec\u540c\u8d28\u5916\u5ef6\u00a0\uff0c\u5f02\u8d28\u5916\u5ef6\u00a0\u3002<\/p>\n

\u7845\u5206\u5b50\u675f\u5916\u5ef6\u662f\u901a\u8fc7\u539f\u5b50\u3001\u5206\u5b50\u6216\u79bb\u5b50\u7684\u7269\u7406\u6dc0\u79ef\u00a0\uff0c\u5728\u9002\u5f53\u52a0\u70ed\u7684\u7845\u886c\u5e95\u4e0a\u8fdb\u884c\u7845(\u6216\u4e0e\u7845\u76f8\u5173\u6750\u6599)\u7684\u5916\u5ef6\u751f\u957f\u3002<\/p>\n

(1) \u5916\u5ef6\u671f\u95f4\u00a0\uff0c\u886c\u5e95\u5904\u4e8e\u8f83\u4f4e\u6e29\u5ea6\u00a0\u3002<\/p>\n

(\u00a02\u00a0) \u540c\u65f6\u63ba\u6742\u3002<\/p>\n

(3) \u7cfb\u7edf\u7ef4\u6301\u9ad8\u771f\u7a7a\u3002<\/p>\n

(4)\u7279\u522b\u6ce8\u610f\u539f\u5b50\u7ea7\u5e72\u51c0\u7684\u8868\u9762\u3002<\/p>\n

\"\"\u56fe1 \u7845MBE\u7684\u5de5\u4f5c\u539f\u7406\u793a\u610f\u56fe<\/strong><\/p>\n

2 \u7845\u5206\u5b50\u675f\u5916\u5ef6\u7684\u53d1\u5c55\u5386\u53f2\u80cc\u666f<\/strong><\/p>\n

\u76f8\u5bf9\u4e8eCVD\u7f3a\u70b9\u800c\u53d1\u5c55\u8d77\u6765\u3002<\/p>\n

CVD\u7f3a\u9677\u00a0:\u00a0\u886c\u5e95\u9ad8\u6e29\u00a0\uff0c1050oC\u00a0\uff0c\u5411\u63ba\u6742\u4e25\u91cd(\u8ddf\u9ad8\u6e29\u6709\u5173)\u00a0\u3002\u00a0\u539f\u59cb\u7684\u5206\u5b50\u675f\u5916\u5ef6\u00a0:\u00a0\u7845\u886c\u5e95\u52a0\u70ed\u81f3\u9002\u5f53\u6e29\u5ea6\uff0c\u771f\u7a7a\u4e0b\u4f7f\u7845\u84b8\u53d1\u00a0\u5230\u7845\u886c\u5e95\u4e0a\u00a0\uff0c\u8fdb\u884c\u5916\u5ef6\u751f\u957f\u3002<\/p>\n

\u751f\u957f\u51c6\u5219\u00a0:\u00a0\u5165\u5c04\u5206\u5b50\u5145\u5206\u8fd0\u52a8\uff0c\u8fbe\u5230\u886c\u5e95\u7684\u70ed\u00a0\u8868\u9762\u00a0\uff0c\u5e76\u4ee5\u5355\u6676\u5f62\u5f0f\u6392\u5217\u3002<\/p>\n

3 \u7845\u5206\u5b50\u675f\u5916\u5ef6\u7684\u91cd\u8981\u6027<\/strong><\/p>\n

\u7845MBE\u662f\u5728\u4e00\u4e2a\u4e25\u683c\u63a7\u5236\u7684\u4f4e\u6e29\u7cfb\u7edf\u4e2d\u8fdb\u884c\u00a0\u3002<\/p>\n

(1) \u80fd\u5f88\u597d\u5730\u63a7\u5236\u6742\u8d28\u6d53\u5ea6\u00a0\uff0c\u8fbe\u5230\u539f\u5b50\u7ea7\u00a0\u3002\u975e\u63ba\u6742\u6d53\u5ea6\u53ef\u63a7\u5728<3\u00d71013<\/sup>\/cm3<\/sup>\u3002<\/p>\n

(2) \u5916\u5ef6\u53ef\u5728\u65e0\u7f3a\u9677\u7684\u6700\u4f73\u6761\u4ef6\u4e0b\u8fdb\u884c\u00a0\u3002<\/p>\n

(3)\u00a0\u5916\u5ef6\u5c42\u539a\u5ea6\u53ef\u63a7\u5236\u5728\u5355\u539f\u5b50\u5c42\u7684\u539a\u5ea6\u5185\u00a0\uff0c\u8fdb\u884c\u8d85\u6676\u683c\u5916\u5ef6\uff0c\u51e0nm~\u51e0\u5341nm\uff0c\u4ece\u800c\u53ef\u5b9e\u73b0\u4eba\u5de5\u8bbe\u8ba1\u00a0\uff0c\u5e76\u5236\u5907\u6027\u80fd\u4f18\u5f02\u7684\u65b0\u529f\u80fd\u6750\u6599\u3002<\/p>\n

(4) \u7845\u7684\u540c\u8d28\u5916\u5ef6\uff0c\u7c7b\u7845\u7684\u5f02\u8d28\u5916\u5ef6\u00a0\u3002<\/p>\n

4\u00a0\u5916\u5ef6\u751f\u957f\u8bbe\u5907<\/strong><\/p>\n

\u53d1\u5c55\u65b9\u5411\u00a0:\u53ef\u9760\u6027\u3001\u9ad8\u6027\u80fd\u548c\u591a\u529f\u80fd<\/p>\n

\u7f3a\u70b9:\u00a0\u4ef7\u683c\u9ad8\u00a0\u3001\u590d\u6742\uff0c\u8fd0\u884c\u8d39\u7528\u9ad8\u00a0\u3002<\/p>\n

\u9002\u7528\u8303\u56f4\u00a0:\u00a0\u53ef\u7528\u4e8e\u7845MBE\u00a0\uff0c\u5316\u5408\u7269MBE\u00a0\uff0cIII-V\u65cfMBE\u00a0\uff0c\u91d1\u5c5e\u534a\u5bfc\u4f53\u7684\u00a0MBE\u6b63\u5728\u53d1\u5c55\u4e2d\u3002<\/p>\n

\u57fa\u672c\u7684\u5171\u540c\u7279\u70b9\u00a0:<\/p>\n

(1) \u57fa\u672c\u7684\u8d85\u9ad8\u771f\u7a7a\u7cfb\u7edf\u00a0\uff0c\u5916\u5ef6\u5ba4\u00a0\uff0c\u52aa\u68ee\u52a0\u70ed\u5ba4\uff1b<\/p>\n

(2) \u5206\u6790\u624b\u6bb5\u00a0\uff0cLEED\u00a0\u3001SIMS\uff0c\u9633EED\u7b49\uff1b<\/p>\n

(3) \u8fdb\u6837\u5ba4\u3002<\/p>\n

\"\"<\/p>\n

\u56fe2 \u7845\u5206\u5b50\u675f\u5916\u5ef6\u7cfb\u7edf\u793a\u610f\u56fe<\/strong><\/p>\n

(1)\u7535\u5b50\u675f\u8f70\u51fb\u7845\u9776\u8868\u9762\uff0c\u4ece\u800c\u5bb9\u6613\u4ea7\u751f\u7845\u5206\u5b50\u675f\u3002\u4e3a\u4e86\u907f\u514d\u7845\u5206\u5b50\u675f\u6563\u53d1\u5230\u65c1\u8fb9\u53bb\u800c\u5f15\u8d77\u4e0d\u826f\u5f71\u54cd\u00a0\uff0c\u5927\u9762\u79ef\u5c4f\u5c4f\u853d\u548c\u51c6\u76f4\u662f\u5fc5\u9700\u7684\u00a0\u3002<\/p>\n

(2) \u7535\u963b\u52a0\u70ed\u7684\u7845\u9634\u6781\u4ea7\u751f\u4e0d\u4e86\u5f3a\u5206\u5b50\u675f\uff0c\u00a0\u5176\u5b83\u7684\u77f3\u58a8\u67d1\u9505\u6709Si-C\u73b7\u6c61\uff0c\u6700\u597d\u7684\u529e\u6cd5\u662f\u7535\u5b50\u675f\u84b8\u53d1\u4ea7\u751f\u7845\u6e90\u3002\u56e0\u4e3a\uff0c\u7845MBE\u67d0\u4e9b\u90e8\u5206\u6e29\u5ea6\u8f83\u9ad8\u00a0\uff0c\u4fbf\u4e8e\u84b8\u53d1\u00a0\uff0c\u7845\u7684\u4f4e\u84b8\u53d1\u538b\u8981\u6c42\u84b8\u53d1\u6e90\u5177\u6709\u8f83\u9ad8\u6e29\u5ea6\u3002\u84b8\u53d1\u540c\u65f6\uff0c\u8981\u5bf9\u675f\u6d41\u5bc6\u5ea6\u548c\u626b\u63cf\u53c2\u6570\u8fdb\u884c\u63a7\u5236\u3002\u4f7f\u5f97\u7845\u7194\u5751\u6b63\u597d\u5904\u5728\u7845\u68d2\u5185\u00a0\uff0c\u7845\u68d2\u6210\u4e3a\u9ad8\u7eaf\u67d1\u68a2\u3002<\/p>\n

\u76d1\u6d4b\u5206\u5b50\u675f\u6d41\u6709\u4ee5\u4e0b\u51e0\u79cd:<\/strong><\/p>\n

(1) \u77f3\u82f1\u6676\u4f53\u5e38\u7528\u00a0\u4e8e\u76d1\u6d4b\u675f\u6d41\u00a0\uff0c\u675f\u6d41\u5c4f\u853d\u548c\u51b7\u5374\u9002\u5f53\uff0c\u53ef\u5f97\u6ee1\u610f\u7ed3\u679c\uff0c\u4f46\u566a\u97f3\u5f71\u54cd\u7a33\u5b9a\u6027\u3002\u51e0\u4e2a\u03bcm\u540e\u00a0\uff0c\u77f3\u82f1\u6676\u4f53\u4fbf\u5931\u53bb\u4e86\u7ebf\u6027\u3002\u8c03\u6362\u9891\u7e41\uff0c\u4e3b\u7cfb\u7edf\u7ecf\u5e38\u5145\u6c14\uff0c\u8fd9\u4e0d\u5229\u4e8e\u5de5\u4f5c\u00a0\u3002<\/p>\n

(2)\u5c0f\u578b\u79bb\u5b50\u8868\u00a0\uff0c\u6d4b\u5206\u5b50\u675f\u6d41\u538b\u00a0\uff0c\u800c\u4e0d\u662f\u6d4b\u5206\u5b50\u675f\u6d41\u901a\u91cf\u3002\u00a0\u7531\u4e8e\u7cfb\u7edf\u90e8\u4ef6\u4e0a\u7684\u6dc0\u79ef\u800c\u4f7f\u5176\u504f\u79bb\u6807\u51c6\u00a0\u3002<\/p>\n

(3) \u4f4e\u80fd\u7535\u5b50\u675f\u00a0\uff0c\u6a2a\u7a7f\u5206\u5b50\u675f\u00a0\uff0c\u5229\u7528\u6240\u63a2\u6d4b\u7269\u79cd\u7684\u7535\u5b50\u6fc0\u53d1\u8367\u5149\u3002\u539f\u5b50\u88ab\u6fc0\u53d1\u5e76\u5f88\u5feb\u8870\u9000\u5230\u57fa\u6001\u4ea7\u751fuv\u8367\u5149\uff0c\u5149\u5b66\u805a\u7126\u540e\u8367\u5149\u5bc6\u5ea6\u6b63\u6bd4\u4e8e\u675f\u6d41\u5bc6\u5ea6\u3002\u53ef\u505a\u7845\u6e90\u7684\u53cd\u9988\u63a7\u5236\u3002\u4e0d\u8db3\u4e4b\u5904:\u00a0\u5207\u65ad\u7535\u5b50\u675f\uff0c\u5927\u90e8\u5206\u7ea2\u5916\u8367\u5149\u548c\u80cc\u666f\u8f90\u5c04\u4e5f\u4f1a\u4f7f\u4fe1\u566a\u6bd4\u6076\u5316\u5230\u4e0d\u7a33\u5b9a\u7684\u7a0b\u5ea6\u3002\u00a0\u5b83\u53ea\u6d4b\u539f\u5b50\u7c7b\uff0c\u4e0d\u80fd\u6d4b\u5206\u5b50\u7c7b\u7269\u8d28\u3002<\/p>\n

(4) \u539f\u5b50\u5438\u6536\u8c31\u00a0\uff0c\u76d1\u6d4b\u63ba\u6742\u539f\u5b50\u7684\u675f\u6d41\u5bc6\u5ea6\u00a0\u3002<\/p>\n

\u7528\u65ad\u7eed\u675f\u6d41\u00a0\uff0c\u5bf9Si\u3001Ga\u5206\u522b\u7528251.6nm\uff0c294.4nm\u5149\u8f90\u5c04\u8fdb\u884c\u63a2\u6d4b\uff0c\u5149\u675f\u7a7f\u8fc7\u539f\u5b50\u675f\u6240\u5438\u6536\u5f3a\u5ea6\u8f6c\u6362\u6210\u539f\u5b50\u675f\u5bc6\u5ea6\uff0c\u5e76\u5f97\u5230\u76f8\u5e94\u6bd4\u7387\u3002<\/p>\n

\u5206\u5b50\u675f\u5916\u5ef6\u00a0(\u00a0MBE\u00a0) \u886c\u5e95\u5e95\u5ea7\u662f\u4e00\u4e2a\u96be\u70b9\u00a0\u3002<\/p>\n

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