{"id":101820,"date":"2017-09-13T17:19:37","date_gmt":"2017-09-13T09:19:37","guid":{"rendered":"\/\/m.iemloyee.com\/?p=101820"},"modified":"2017-09-15T20:27:16","modified_gmt":"2017-09-15T12:27:16","slug":"%e4%bd%a0%e6%83%b3%e7%9f%a5%e9%81%93%e7%9a%84xps%e7%9a%84%e9%82%a3%e7%82%b9%e4%ba%8b","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=101820","title":{"rendered":"\u4f60\u60f3\u77e5\u9053\u7684XPS\u7684\u90a3\u70b9\u4e8b"},"content":{"rendered":"
\u672c\u6587\u8f6c\u8f7d\u81ea\u6e05\u534e\u5927\u5b66\u6df1\u5733\u7814\u7a76\u751f\u9662\u6750\u6599\u4e0e\u5668\u4ef6\u68c0\u6d4b\u4e2d\u5fc3\uff0c\u5b83\u6709\u591a\u725b\uff0c\u8bf7\u770b\u6b64\u6587\uff1a<\/p>\n
\u6e05\u534e\u6df1\u7814\u9662\u68c0\u6d4b\u4e2d\u5fc3\u4e28\u4e00\u5e74\u652f\u6491\u767e\u7bc7SCI\u7684\u5b9e\u529b\u62c5\u5f53<\/span><\/p>\n X-\u5149\u7535\u5b50\u80fd\u8c31\u4eea (X-ray Photoelectron Spectroscopy \u7b80\u79f0XPS)\uff0c\u53c8\u79f0\u5316\u5b66\u5206\u6790\u7528\u7535\u5b50\u8c31(ESCA)\uff0c\u662f\u4e00\u79cd\u5e38\u89c4\u7684\u8868\u9762\u8868\u5f81\u624b\u6bb5\uff0c\u9664\u4e86\u53ef\u8868\u5f81\u6750\u6599\u7684\u7ec4\u6210\u6210\u5206\u3001\u5404\u7ec4\u6210\u6210\u5206\u6240\u5904\u7684\u5316\u5b66\u72b6\u6001\uff0c\u8fd8\u53ef\u5b9a\u91cf\u7684\u8868\u5f81\u6bcf\u79cd\u5316\u5b66\u72b6\u6001\u7684\u76f8\u5bf9\u542b\u91cf\uff0c\u4f7f\u5f97XPS\u5e7f\u6cdb\u5730\u5e94\u7528\u4e8e\u6750\u6599\u7814\u7a76\u7684\u5404\u4e2a\u9886\u57df\u3002<\/p>\n XPS\u57fa\u672c\u539f\u7406<\/strong><\/p>\n XPS\u5229\u7528X-\u5c04\u7ebf\u7167\u5c04\u6837\u54c1\u8868\u9762\uff0c\u5e38\u7528\u7684X-\u5c04\u7ebf\u6e90\u662fAl-K\u03b1\u5c04\u7ebf\u5355\u8272\u6e90\uff0c\u80fd\u91cf\u4e3a1486.6eV\uff0c\u6fc0\u53d1\u539f\u5b50\u5185\u5c42\u80fd\u7ea7\u7535\u5b50\u8dc3\u8fc1\uff0c\u9003\u9038\u51fa\u6837\u54c1\u8868\u9762\uff0c\u7531\u4e8e\u5149\u7535\u5b50\u643a\u5e26\u6837\u54c1\u7684\u7279\u5f81\u4fe1\u606f\uff08\u5143\u7d20\u4fe1\u606f\u3001\u5316\u5b66\u6001\u4fe1\u606f\u7b49\uff09\uff0c\u901a\u8fc7\u6d4b\u91cf\u9003\u9038\u7535\u5b50\u7684\u52a8\u80fd\uff0c\u5c31\u53ef\u4ee5\u5f97\u77e5\u6837\u54c1\u4e2d\u7684\u5143\u7d20\u7ec4\u6210\u548c\u5316\u5b66\u6001\u4fe1\u606f\u3002\u00a0\u00a0<\/p>\n \u56fe1\uff1a\u5149\u7535\u5b50\u6fc0\u53d1\u793a\u610f\u56fe \u00a0 \u00a0\u56fe2\uff1a\u5178\u578b\u5149\u7535\u5b50\u8c31\uff08Au\uff09<\/p>\n XPS\u4eea\u5668\u8bbe\u5907<\/strong><\/p>\n \u56fe3 \u00a0PHI 5000 Versaprobe \u2161\u8bbe\u5907<\/p>\n \u5728 ULVAC-PHI \u6700\u8fd1\u671f\u7684 PHI \u00a05000 Versaprobe \u4eea\u5668\u4e0a\uff0c Versaprobe \u8fd9\u4e2a\u5b57, \u672c\u8eab\u5c31\u53ef\u62c6\u6210 Versa (\u591a\u6837\u7684) \u4e0e probe (\u675f\u6591\u6e90)\u4e24\u4e2a\u5b57\uff0c \u5176\u8bbe\u8ba1\u7684\u539f\u610f\u4e5f\u5c31\u5982\u5b57\u9762\u201d\u591a\u6837\u675f\u6591\u6e90\u201d\u6240\u8868\u8fbe, \u4eea\u5668\u5148\u662f\u4ee5X-\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31\u4e3a\u6838\u5fc3\uff0c \u518d\u9884\u7559\u4e86\u591a\u4e2a\u65b9\u4f4d\u7684\u7aef\u53e3\u4ee5\u63d0\u4f9b\u7814\u7a76\u4eba\u5458 \u9009\u62e9\u52a0\u5165\u5404\u79cd\u7684\u5206\u6790\u6e90\u3002\u4e0b\u56fe4\u30015\u5c31\u793a\u610f\u4e86 Versaprobe \u6240\u9884\u7559\u7684\u5404\u4e2a\u7aef\u53e3\u7684\u65b9\u4f4d, \u53ca\u5404\u7aef\u53e3\u5206\u522b\u53ef\u52a0\u4e0a\u7684\u5206\u6790\u6e90\u7684\u4fe1\u606f\u3002\u4e4b\u540e\u672c\u6587\u5c06\u9488\u5bf9\u6bcf\u4e00\u4e2a\u6807\u51c6\u6216\u9009\u9879\u7684\u5206\u6790\u6e90\u4f5c\u51fa\u7b80\u5355\u7684\u56fe\u6587\u89e3\u91ca\u3002<\/p>\n \u56fe4 \u00a0Versaprobe\u4eea\u5668\u4e0a\u7aef\u53e3\u65b9\u4f4d\u793a\u610f\u56fe<\/p>\n \u56fe5 \u5404\u7aef\u53e3\u53ef\u52a0\u4e0a\u7684\u5206\u6790\u6e90.\u00a0<\/p>\n \u9664\u4eea\u5668\u6807\u51c6\u914d\u5907\u7684 Focus Scanning X-ray Source (\u805a\u7126\u626b\u7784\u5f0fX-\u5c04\u7ebf\u6e90) \uff0cArgon sputter ion gun (\u6c29\u79bb\u5b50\u67aa)\u4e0eLow Energy Electron Neutralizer (\u4f4e\u80fd\u91cf\u7535\u5b50\u4e2d\u548c\u67aa)\u4e4b\u5916\uff0c \u8fd8\u4f9b\u7814\u7a76\u4eba\u5458\u53ef\u9009\u62e9\u7684\u5305\u62ec\u6709 Hot\/Cold Stage (\u52a0\u70ed\u51b7\u5374\u6837\u54c1\u53f0)\uff0cUHV sample preparation chambers (\u8d85\u9ad8\u771f\u7a7a\u9884\u62bd\u4e0e\u6c14\u4f53\u53cd\u5e94\u5ba4)\uff0c Ar2500 GCIB\u56e2\u7c07Ar\u79bb\u5b50\u67aa\uff0cUV light source for UPS (\u7d2b\u5916\u5149\u5149\u7535\u5b50\u80fd\u8c31)\uff0cDual anode X-ray source (\u53cc\u9633\u6781X-\u5c04\u7ebf\u6e90) \u4e0e\u53ca Electron gun for AES (\u7535\u5b50\u67aa\u4ee5\u4f5c\u4fc4\u6b47\u7535\u5b50\u80fd\u8c31\u5206\u6790)\u3002<\/p>\n \u805a\u7126\u5f0f\u626b\u7784X-\u5c04\u7ebf\u6e90 (Focus X-ray Source) \u2013 Versaprobe\u6807\u51c6\u914d\u5907<\/p>\n<\/li>\n<\/ul>\n \u4ee5 ULVAC-PHI \u4e13\u5229\u8bbe\u8ba1\u7684\u626b\u7784\u5f0f X-\u5c04\u7ebf, \u8ba9\u5149\u7535\u5b50\u80fd\u8c31\u4e5f\u53ef\u4ee5\u4f5c\u51fa\u6709\u6548\u7387\u7684\u5fae\u533a\u5206\u6790\u3002<\/p>\n \u56fe6 \u00a0Versaprobe\u4e0a\u805a\u7126\u626b\u7784 X-\u5c04\u7ebf\u7684\u8bbe\u7f6e\u4ea7\u751f\u8fc7\u7a0b<\/p>\n * JP Patents P3752252, P3754696 (\u65e5\u672c\u4e13\u5229\u53f7\u7801)<\/p>\n * US Patents 5,331,513; 5,444,242 (\u7f8e\u56fd\u4e13\u5229\u53f7\u7801)<\/p>\n * EP Patents 0590308B1, 1170778A3, 1220280A3 (\u6b27\u6d32\u4e13\u5229\u53f7\u7801)<\/p>\n \u56fe7 \u00a0 \u5229\u7528\u626b\u7784X-\u5c04\u7ebf\u6240\u4ea7\u751f\u7684\u4e8c\u6b21\u7535\u5b50\u6210\u50cf, \u5e76\u5bf9\u7f3a\u61be\u70b9\u4f5c\u51fa\u5fae\u533a\u5206\u6790\u5f97\u51fa\u6765\u51c6\u786e\u7684XPS\u56fe\u8c31\u7ed3\u679c. \u6837\u54c1\u4e3aPET\uff0c\u5e76\u5f97\u51fa\u6c61\u67d3\u7269\u4e3a\u6c1f(F)\u3002<\/p>\n \u6c29\u79bb\u5b50\u67aa (Ar Sputter ion gun) \u2013 Versaprobe\u6807\u51c6\u914d\u5907<\/p>\n<\/li>\n<\/ul>\n \u6c29\u79bb\u5b50\u67aa\u7684\u4e3b\u8981\u529f\u7528\u4e3a\u6837\u54c1\u6e05\u6d01\uff0c\u6df1\u5ea6(\u7eb5\u6df1)\u5206\u6790\u53ca\u6837\u54c1\u4e2d\u548c\u7b49\u3002<\/p>\n \u56fe8Versaprobe\u4e0a\u6240\u4f7f\u7528\u7684 FIG-5 \u578b\u53f7\u79bb\u5b50\u67aa\uff0c \u540e\u65b9\u6c14\u74f6\u4e3a\u6c29\u6c14 (Ar)<\/p>\n \u56fe9 \u00a0\u5728Ni\/Cr\u8584\u6a21\u4e0a, \u6267\u884cZalar\u7eb5\u6df1\u5206\u6790\u7684\u7ed3\u679c\uff0c\u5c42\u7ed3\u6784\u968f\u7740\u6c29\u79bb\u5b50\u67aa\u7684\u6e85\u5c04\u4e00\u5c42\u4e00\u5c42\u90fd\u53ef\u4ee5\u6e05\u695a\u7684\u4f7f\u7528XPS\u5206\u6790\u51fa\u6765\u3002<\/p>\n \u4e2d\u548c\u67aa (Electron Neutralizer) \u2013 Versaprobe\u6807\u51c6\u914d\u5907<\/p>\n<\/li>\n<\/ul>\n \u4f4e\u80fd\u91cf\u7684\u7535\u5b50\u67aa \u4ee5\u63a5\u8fd1\u6f02\u6d6e\u7684\u72b6\u6001\u518d\u914d\u4e0a\u4f4e\u80fd\u91cf\u7684\u6c29\u79bb\u5b50\u540c\u65f6\u8fdb\u884c\u6837\u54c1\u7684\u4e2d\u548c\u4f5c\u7528\u3002<\/p>\n <\/p>\n \u56fe10 \u00a0ULVAC-PHI \u6240\u4e13\u5229\u8bbe\u8ba1\u7684\u53cc\u6e90\u4e2d\u548c\u7cfb\u7edf.<\/p>\n * JP Patent P3616714 (\u65e5\u672c\u4e13\u5229\u53f7\u7801)<\/p>\n * US Patent 5,990,476 (\u7f8e\u56fd\u4e13\u5229\u53f7\u7801)<\/p>\n * EP Patent 0848247B1 (\u6b27\u6d32\u4e13\u5229\u53f7\u7801)<\/p>\n \u7d2b\u5916\u5149\u5149\u6e90\u7ec4\u4ef6 (UV Light source) \u2013 Versaprobe\u9009\u9879\u914d\u5907<\/p>\n<\/li>\n<\/ul>\n \u5728Versaprobe\u4e0a\uff0c\u8fd8\u53ef\u4ee5\u914d\u4e0a\u7d2b\u5916\u5149\u6e90\u3002\u4e00\u822c\u662f\u4f7f\u7528\u9ad8\u7eaf\u5ea6\u6c26\u6c14\u6765\u4ea7\u751f\uff0c \u7d2b\u5916\u5149\u6e90\u5728\u6253\u5728\u6837\u54c1\u4e0a\u7684\u65f6\u5019\uff0c \u540c\u6837\u4f1a\u4ea7\u751f\u5149\u7535\u5b50\uff0c\u800c\u4e14\u7d2b\u5916\u5149\u672c\u8eab\u566a\u58f0\u6bd4\u8f83\u4f4e, \u4e14\u6240\u4ea7\u751f\u7684\u5149\u7535\u5b50\u91cf\u4e5f\u66f4\u591a\uff0c\u53ef\u4ee5\u5e94\u7528\u5728\u7814\u7a76\u6750\u6599\u7684\u4ef7\u5e26\u7ed3\u6784 (Valence Band) \u548c \u529f\u51fd\u6570 (Work Function)\u65b9\u9762\u3002<\/p>\n \u56fe11 \u7d2b\u5916\u5149\u4ea7\u751f\u7ec4\u4ef6\u56fe\u7247<\/p>\n \u56fe12\u6807\u51c6\u91d1\u6837\u54c1\u4e0a\u7684UPS\u56fe\u8c31\u4e0e\u529f\u51fd\u6570\u7684\u8ba1\u7b97<\/p>\n \u4fc4\u6b47\u7535\u5b50\u80fd\u8c31\u7535\u5b50\u6e90\u7ec4\u4ef6 (Electron Gun for Auger Electron Spectroscopy) \u2013 Versaprobe\u9009\u9879\u914d\u5907<\/p>\n<\/li>\n<\/ul>\n \u4fc4\u6b47\u7535\u5b50\u67aa\u662f\u53e6\u4e00\u5728Versaprobe\u4e0a\u7684\u9009\u9879\u88c5\u5907\u3002<\/p>\n \u56fe13 \u00a0\u4fc4\u6b47\u7535\u5b50\u67aa\u56fe\u7247<\/p>\n \u56fe14\u5728Versaprobe\u4e0a\u5bf9\u6807\u51c6\u91d1(Au)\uff0c\u94f6(Ag) \u548c \u94dc(Cu) \u6240\u83b7\u5f97\u7684\u4fc4\u6b47\u56fe\u8c31<\/p>\n XPS\u57fa\u672c\u5e94\u7528-\u5b9a\u6027\u4e0e\u5b9a\u91cf\u5206\u6790<\/strong><\/p>\n \u5143\u7d20\u5b9a\u6027\u5206\u6790\uff1a\u4e0d\u540c\u7684\u539f\u5b50\u5916\u5c42\u7535\u5b50\u6240\u5904\u7684\u80fd\u7ea7\u4e0d\u540c\uff0c\u5176\u952e\u5408\u80fd\u81ea\u7136\u4e5f\u4e0d\u4e00\u6837\uff1b\u56e0\u800c\u901a\u8fc7\u626b\u63cf\u6837\u54c1\u8868\u9762\u98de\u51fa\u7684\u5149\u5b50\u52a8\u80fd\uff0c\u6839\u636e\u52a8\u80fd\u548c\u952e\u5408\u80fd\u7684\u5173\u7cfb\uff1a<\/p>\n<\/li>\n<\/ul>\n B\uff0eE=h\u03bd-K.E-WF<\/p>\n B\uff0eE—\u952e\u5408\u80fd<\/p>\n h\u03bd—X\u5149\u52a8\u80fd\uff081486.6eV\uff09<\/p>\n K.E—\u7279\u5f81\u5149\u7535\u5b50\u52a8\u80fd<\/p>\n WF—\u8c31\u4eea\u529f\u51fd\u6570<\/p>\n \u6d4b\u5b9a\u6837\u54c1\u5149\u7535\u5b50\u7684\u952e\u5408\u80fd\uff1b\u5373\u901a\u8fc7\u91c7\u96c6\u6837\u54c1\u8868\u9762\u5168\u8c31\u56fe\uff0c\u6839\u636e\u8c31\u5cf0\u952e\u5408\u80fd\u6240\u5904\u7684\u4f4d\u7f6e\uff0c\u6765\u786e\u5b9a\u7684\u6837\u54c1\u7684\u7ec4\u6210\uff1b\u4ee5ULVAC-PHI\u7684\u6570\u636e\u5904\u7406\u8f6f\u4ef6MultiPak\u4e3a\u4f8b\uff0c\u8be5\u8f6f\u4ef6\u96c6\u6210\u4e86\u5143\u7d20\u7684\u952e\u5408\u80fd\u7684\u6807\u51c6\u8c31\u5e93\uff0c\u5177\u5907\u5143\u7d20\u81ea\u52a8\u8bc6\u522b\u529f\u80fd\uff0c\u65b9\u4fbf\u5143\u7d20\u7684\u5b9a\u6027\u5206\u6790\u3002<\/p>\n \u56fe15a\uff09 \u00a0\u6837\u54c1\u8868\u9762SXI\u56fe<\/p>\n \u56fe15 b\uff09off stain\u6210\u5206\u8c31 \u00a0 \u00a0 \u56fe15 c\uff09on stain\u6210\u5206\u8c31<\/p>\n \u5316\u5b66\u6001\u5206\u6790\uff1a\u539f\u5b50\u4e2d\u5185\u5c42\u80fd\u7ea7\u7535\u5b50\u6240\u5904\u7684\u5316\u5b66\u73af\u5883\u4e0d\u540c\uff0c\u5728\u5149\u7535\u5b50\u7ed3\u5408\u80fd\u4e0a\u4f1a\u51fa\u73b0\u8c31\u5cf0\u7684\u5316\u5b66\u4f4d\u79fb\uff1b\u901a\u8fc7\u5bf9\u67d0\u4e2a\u7279\u5b9a\u7684\u5143\u7d20\u8fdb\u884c\u7cbe\u7ec6\u8c31\u7684\u626b\u63cf\uff0c\u5c31\u53ef\u5f97\u77e5\u8be5\u5143\u7d20\u6240\u5904\u7684\u5316\u5b66\u73af\u5883\uff1b\u4e0b\u56fe\u662f\u5178\u578b\u7684C1s\u8c31\uff0c\u4ece\u8c31\u56fe\u4e2d\u5f88\u5bb9\u6613\u770b\u5230\u5143\u7d20C\u81f3\u5c11\u6709\u56db\u79cd\u4e0d\u540c\u7684\u952e\u5408\u72b6\u6001\uff0c\u5373CH\uff0cC-O\uff0cO=C-O\uff0c\ud835\uded1-\ud835\uded1*\u3002\u540c\u6837\u5730\uff0cULVAC-PHI\u7684\u6570\u636e\u5904\u7406\u8f6f\u4ef6MultiPak\u4e5f\u96c6\u6210\u4e86\u5143\u7d20\u7684\u5316\u5b66\u4f4d\u79fb\u4fe1\u606f\uff0c\u540c\u65f6\u914d\u5408\u5f3a\u5927\u7684\u6570\u636e\u62df\u5408\u529f\u80fd\uff0c\u4fbf\u4e8e\u5143\u7d20\u7684\u5316\u5b66\u6001\u8bc6\u522b\u3002<\/p>\n 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