{"id":101758,"date":"2017-09-20T06:30:56","date_gmt":"2017-09-19T22:30:56","guid":{"rendered":"\/\/m.iemloyee.com\/?p=101758"},"modified":"2017-09-13T20:01:56","modified_gmt":"2017-09-13T12:01:56","slug":"%e8%a7%82%e7%82%b9%e5%af%b9%e6%af%94%e5%ad%a6%e4%b9%a0%e6%89%ab%e6%8f%8f%e9%9a%a7%e9%81%93%e6%98%be%e5%be%ae%e9%95%9cstm%e4%b8%8e%e5%8e%9f%e5%ad%90%e5%8a%9b%e6%98%be%e5%be%ae%e9%95%9cafm%ef%bc%81","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=101758","title":{"rendered":"\u89c2\u70b9|\u5bf9\u6bd4\u5b66\u4e60\u626b\u63cf\u96a7\u9053\u663e\u5fae\u955c(STM)\u4e0e\u539f\u5b50\u529b\u663e\u5fae\u955c(AFM)\uff01"},"content":{"rendered":"<p><span style=\"color: #0000ff;\"><strong>1 STM<\/strong><\/span><\/p>\n<p><strong>1.1 STM<\/strong><strong>\u5de5\u4f5c\u539f\u7406<\/strong><\/p>\n<p>\u626b\u63cf\u96a7\u9053\u663e\u5fae\u955c\u7684\u57fa\u672c\u539f\u7406\u662f\u5c06\u539f\u5b50\u7ebf\u5ea6\u7684\u6781\u7ec6\u63a2\u9488\u548c\u88ab\u7814\u7a76\u7269\u8d28\u7684\u8868\u9762\u4f5c\u4e3a\u4e24\u4e2a\u7535\u6781\uff0c\u5f53\u6837\u54c1\u4e0e\u9488\u5c16\u7684\u8ddd\u79bb\u975e\u5e38\u63a5\u8fd1(\u901a\u5e38\u5c0f\u4e8e1nm)\u65f6\uff0c\u5728\u5916\u52a0\u7535\u573a\u7684\u4f5c\u7528\u4e0b\uff0c\u7535\u5b50\u4f1a\u7a7f\u8fc7\u4e24\u4e2a\u7535\u6781\u4e4b\u95f4\u7684\u52bf\u5792\u6d41\u5411\u53e6\u4e00\u7535\u6781\u3002<\/p>\n<p>\u5c16\u9510\u91d1\u5c5e\u63a2\u9488\u5728\u6837\u54c1\u8868\u9762\u626b\u63cf\uff0c\u5229\u7528\u9488\u5c16-\u6837\u54c1\u95f4\u7eb3\u7c73\u95f4\u9699\u7684\u91cf\u5b50\u96a7\u9053\u6548\u5e94\u5f15\u8d77<strong>\u96a7\u9053\u7535\u6d41\u4e0e\u95f4\u9699\u5927\u5c0f\u5448\u6307\u6570\u5173\u7cfb<\/strong>\uff0c\u83b7\u5f97<strong>\u539f\u5b50\u7ea7\u6837\u54c1\u8868\u9762\u5f62\u8c8c\u7279\u5f81\u56fe\u8c61<\/strong>\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101768\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/\u56fe\u72471-1.jpg\" alt=\"\" width=\"600\" height=\"566\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/\u56fe\u72471-1.jpg 600w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/\u56fe\u72471-1-300x283.jpg 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p style=\"text-align: center;\">\u56fe1 STM\u7684\u57fa\u672c\u539f\u7406\u56fe<\/p>\n<p><strong>1.2 STM<\/strong><strong>\u5de5\u4f5c\u6a21\u5f0f<\/strong><\/p>\n<p>\u6839\u636e\u9488\u5c16\u4e0e\u6837\u54c1\u95f4\u76f8\u5bf9\u8fd0\u52a8\u65b9\u5f0f\u7684\u4e0d\u540c\uff0cSTM\u6709\u4e24\u79cd\u5de5\u4f5c\u6a21\u5f0f\uff1a<strong>\u6052\u7535\u6d41\u6a21\u5f0f\uff08<\/strong><strong>a<\/strong><strong>\uff09<\/strong>\u548c<strong>\u6052\u9ad8\u6a21\u5f0f\uff08<\/strong><strong>b<\/strong><strong>\uff09<\/strong>\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101773\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/\u56fe\u72472-3.jpg\" alt=\"\" width=\"600\" height=\"289\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/\u56fe\u72472-3.jpg 600w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/\u56fe\u72472-3-300x145.jpg 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p>&nbsp;<\/p>\n<p style=\"text-align: center;\">\uff08a\uff09\u6052\u7535\u6d41\u6a21\u5f0f\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 \uff08b\uff09\u6052\u9ad8\u5ea6\u6a21\u5f0f<\/p>\n<p style=\"text-align: center;\">\u56fe2 STM\u626b\u63cf\u6a21\u5f0f\u793a\u610f\u56fe<\/p>\n<p>\u6052\u7535\u6d41\u6a21\u5f0f\uff1a\u626b\u63cf\u65f6\uff0c\u5728\u504f\u538b\u4e0d\u53d8\u7684\u60c5\u51b5\u4e0b\uff0c\u59cb\u7ec8\u4fdd\u6301<strong>\u96a7\u9053\u7535\u6d41\u6052\u5b9a<\/strong>\u3002<\/p>\n<p>\u6052\u9ad8\u6a21\u5f0f\uff1a\u59cb\u7ec8\u63a7\u5236\u9488\u5c16\u5728\u6837\u54c1\u8868\u9762<strong>\u67d0\u4e00\u6c34\u5e73\u9ad8\u5ea6<\/strong>\u4e0a\u626b\u63cf\uff0c\u968f\u6837\u54c1\u8868\u9762\u9ad8\u4f4e\u8d77\u4f0f\uff0c<strong>\u96a7\u9053\u7535\u6d41\u4e0d\u65ad\u53d8\u5316<\/strong>\u3002\u6240\u5f97\u5230\u7684STM\u56fe\u50cf\u4e0d\u4ec5\u52fe\u753b\u51fa\u6837\u54c1\u8868\u9762\u539f\u5b50\u7684<strong>\u51e0\u4f55\u7ed3\u6784<\/strong>\uff0c\u800c\u4e14\u8fd8\u53cd\u6620\u4e86<strong>\u539f\u5b50\u7684\u7535\u5b50\u7ed3\u6784\u7279\u5f81<\/strong>\u3002<\/p>\n<p>\u6052\u7535\u6d41\u6a21\u5f0f\u662f\u626b\u63cf\u96a7\u9053\u663e\u5fae\u955c\u6700\u5e38\u7528\u7684\u4e00\u79cd\u5de5\u4f5c\u6a21\u5f0f\u3002\u4ee5\u6052\u7535\u6d41\u6a21\u5f0f\u5de5\u4f5c\u65f6\uff0c\u7531\u4e8eSTM\u7684\u9488\u5c16\u662f\u968f\u7740\u6837\u54c1\u8868\u9762\u7684\u8d77\u4f0f\u800c\u4e0a\u4e0b\u8fd0\u52a8\uff0c\u56e0\u6b64\u4e0d\u4f1a\u56e0\u8868\u9762\u8d77\u4f0f\u592a\u5927\u800c\u78b0\u649e\u5230\u6837\u54c1\u8868\u9762\uff0c\u6240\u4ee5\u6052\u7535\u6d41\u6a21\u5f0f<strong>\u9002\u4e8e\u89c2\u5bdf\u8868\u9762\u8d77\u4f0f\u8f83\u5927\u7684\u6837\u54c1<\/strong>\u3002<\/p>\n<p>\u6052\u9ad8\u6a21\u5f0f\u5de5\u4f5c\u65f6\uff0c\u7531\u4e8e\u9488\u5c16\u7684\u9ad8\u5ea6\u6052\u5b9a\u4e0d\u53d8\uff0c\u6240\u4ee5<strong>\u4ec5\u9002\u7528\u4e8e\u89c2\u5bdf\u8868\u9762\u8d77\u4f0f\u4e0d\u5927\u7684\u6837\u54c1<\/strong>\u3002\u4f46\u5728\u6052\u9ad8\u6a21\u5f0f\u4e0b\u5de5\u4f5c\uff0c\u83b7\u53d6STM\u56fe\u50cf\u5feb\uff0c\u4e14\u80fd\u6709\u6548\u5730\u51cf\u5c11\u566a\u97f3\u548c\u70ed\u6f02\u79fb\u5bf9\u96a7\u9053\u7535\u6d41\u7684\u5e72\u6270\uff0c\u63d0\u9ad8\u5206\u8fa8\u7387\u3002<\/p>\n<p><strong>1.3 STM<\/strong><strong>\u7279\u70b9<\/strong><\/p>\n<p><strong>\u00a0<img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101761\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/3-35.jpg\" alt=\"\" width=\"600\" height=\"394\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/3-35.jpg 600w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/3-35-300x197.jpg 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/strong><\/p>\n<p style=\"text-align: center;\">\u56fe3 STM\u4e0eTEM\u3001SEM\u3001FIM\u53caAES\u7684\u7279\u6027\u6bd4\u8f83<\/p>\n<p>\u4e0eTEM\u3001SEM\u7b49\u5206\u6790\u6280\u672f\u76f8\u6bd4\uff0c\u626b\u63cf\u96a7\u9053\u663e\u5fae\u955c\u5177\u6709\u5982\u4e0b\u7279\u70b9\uff1a<\/p>\n<p>1\uff09STM<strong>\u7ed3\u6784\u7b80\u5355<\/strong>\u3002<\/p>\n<p>2\uff09\u5176\u5b9e\u9a8c\u53ef\u5728<strong>\u591a\u79cd\u73af\u5883<\/strong>\u4e2d\u8fdb\u884c\uff1a\u5982\u5927\u6c14\u3001\u8d85\u9ad8\u771f\u7a7a\u6216\u6db2\u4f53\uff08\u5305\u62ec\u5728\u7edd\u7f18\u6db2\u4f53\u548c\u7535\u89e3\u6db2\u4e2d\uff09\u3002<\/p>\n<p>3\uff09<strong>\u5de5\u4f5c\u6e29\u5ea6\u8303\u56f4\u8f83\u5bbd<\/strong>\uff0c\u53ef\u5728mK\u52301100K\u8303\u56f4\u5185\u53d8\u5316\u3002\u8fd9\u662f\u76ee\u524d\u4efb\u4f55\u4e00\u79cd\u663e\u5fae\u6280\u672f\u90fd\u4e0d\u80fd\u540c\u65f6\u505a\u5230\u7684\u3002<\/p>\n<p>4\uff09<strong>\u5206\u8fa8\u7387\u9ad8<\/strong>\uff0c\u626b\u63cf\u96a7\u9053\u663e\u5fae\u955c\u5728\u6c34\u5e73\u548c\u5782\u76f4\u5206\u8fa8\u7387\u53ef\u4ee5\u5206\u522b\u8fbe\u52300.1nm\u548c0.01nm\u3002\u56e0\u6b64\u53ef\u76f4\u63a5\u89c2\u5bdf\u5230\u6750\u6599\u8868\u9762\u7684\u5355\u4e2a\u539f\u5b50\u548c\u539f\u5b50\u5728\u6750\u6599\u8868\u9762\u4e0a\u7684\u4e09\u7ef4\u7ed3\u6784\u56fe\u50cf\u3002<\/p>\n<p>5\uff09\u5728\u89c2\u6d4b\u6750\u6599\u8868\u9762\u7ed3\u6784\u7684\u540c\u65f6\uff0c\u53ef\u5f97\u5230\u6750\u6599\u8868\u9762\u7684<strong>\u626b\u63cf\u96a7\u9053\u8c31\uff08<\/strong><strong>STS<\/strong><strong>\uff09<\/strong>\uff0c\u4ece\u800c\u53ef\u4ee5\u7814\u7a76\u6750\u6599\u8868\u9762\u5316\u5b66\u7ed3\u6784\u548c\u7535\u5b50\u72b6\u6001\u3002<\/p>\n<p>6\uff09\u4e0d\u80fd\u63a2\u6d4b\u6df1\u5c42\u4fe1\u606f\uff0c<strong>\u65e0\u6cd5\u76f4\u63a5\u89c2\u5bdf\u7edd\u7f18\u4f53<\/strong>\u3002<\/p>\n<p><strong>1.4 STM<\/strong><strong>\u5e94\u7528<\/strong><\/p>\n<p>\u5229\u7528\u626b\u63cf\u96a7\u9053\u663e\u5fae\u955c\u53ef\u76f4\u63a5\u89c2\u6d4b\u6750\u6599<strong>\u8868\u9762\u539f\u5b50<\/strong>\u662f\u5426\u5177\u6709\u5468\u671f\u6027\u7684<strong>\u8868\u9762\u7ed3\u6784\u7279\u5f81<\/strong>\uff0c<strong>\u8868\u9762\u7684\u91cd\u6784<\/strong>\u548c<strong>\u7ed3\u6784\u7f3a\u9677<\/strong>\u7b49\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101762\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/4-35.jpg\" alt=\"\" width=\"600\" height=\"432\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/4-35.jpg 600w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/4-35-300x216.jpg 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p style=\"text-align: center;\">\u56fe4 \u5728\u7535\u89e3\u6db2\u4e2d\u5f97\u5230\u7684\u786b\u9178\u6839\u79bb\u5b50\u5438\u9644\u5728\u94dc\u5355\u6676(111)\u8868\u9762\u7684STM\u56fe\u50cf<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101763\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/5-32.jpg\" alt=\"\" width=\"600\" height=\"465\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/5-32.jpg 600w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/5-32-300x233.jpg 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p style=\"text-align: center;\">\u56fe5 \u5229\u7528\u7eb3\u7c73\u52a0\u5de5\u6280\u672f\u5728\u77f3\u58a8\u8868\u9762\u901a\u8fc7\u642c\u8fc1\u78b3\u539f\u5b50\u800c\u7ed8\u5236\u51fa\u7684\u4e16\u754c\u4e0a\u6700\u5c0f\u7684\u4e2d\u56fd\u5730\u56fe<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101764\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/6-19.jpg\" alt=\"\" width=\"600\" height=\"280\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/6-19.jpg 600w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/6-19-300x140.jpg 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p style=\"text-align: center;\">\uff08a\uff09Si(100)-2\u00d71\u8868\u9762 \u8868\u9762\u5c3a\u5bf8\u4e3a6.0nm\u00d76.0nm\u00a0\u00a0\u00a0 \uff08b\uff09Si(100)-2\u00d71\u8868\u9762 \u5c3a\u5bf8\u4e3a10.6nm\u00d710.6nm<\/p>\n<p style=\"text-align: center;\">\u56fe6 \u7845\u8868\u9762\u7684\u539f\u5b50\u56fe\u50cf<\/p>\n<p>\u56fe\uff08a\uff09\u4e2d\u53ef\u770b\u5230Si(100)-2\u00d71\u8868\u9762\u4e0a\u6709\u4e24\u4e2aSi\u539f\u5b50\u7ec4\u6210\u7684\u4e8c\u805a\u4f53\u7ed3\u6784\u4ee5\u53ca\u7531\u8fd9\u4e9b\u4e8c\u805a\u4f53\u5f62\u6210\u7684\u4e8c\u805a\u4f53\u5217\u3002\u56fe\uff08b\uff09\u4e2d\u53ef\u89c2\u5bdf\u5230Si(100)-2\u00d71\u8868\u9762\u4e0a\u7684\u5355\u539f\u5b50\u53f0\u9636\u548c\u4e0d\u540c\u79cd\u7c7b\u7684\u5355\u539f\u5b50\u7f3a\u9677\u3002<\/p>\n<p><span style=\"color: #0000ff;\"><strong>2 AFM<\/strong><\/span><\/p>\n<p><strong>2.1 AFM<\/strong><strong>\u5de5\u4f5c\u539f\u7406<\/strong><\/p>\n<p>\u539f\u5b50\u529b\u663e\u5fae\u955c\u662f\u4e00\u79cd\u7c7b\u4f3c\u4e8e\u626b\u63cf\u96a7\u9053\u663e\u5fae\u955c\u7684\u663e\u5fae\u6280\u672f\uff0c\u5b83\u4eec\u7684\u4e3b\u8981\u4e0d\u540c\u70b9\u662f\u626b\u63cf\u96a7\u9053\u663e\u5fae\u955c\u68c0\u6d4b\u7684\u662f<strong>\u9488\u5c16\u548c\u6837\u54c1\u95f4\u7684\u96a7\u9053\u7535\u6d41<\/strong>\uff0c\u800c\u539f\u5b50\u529b\u663e\u5fae\u955c\u68c0\u6d4b\u7684\u662f<strong>\u9488\u5c16\u548c\u6837\u54c1\u95f4\u7684\u529b<\/strong>\u3002<\/p>\n<p>AFM\u53ef\u4ee5\u7814\u7a76\u7edd\u7f18\u4f53\u6837\u54c1\u7684\u8868\u9762\u7ed3\u6784\u3002AFM\u5206\u8fa8\u7387\uff1a\u6a2a\u54110.15nm\uff0c\u7eb5\u54110.05nm\u3002STM\u5206\u8fa8\u7387\uff1a\u6a2a\u54110.1nm\uff0c\u7eb5\u54110.01nm\u3002<\/p>\n<p>AFM\u4e0d\u4f46\u53ef\u6d4b\u6837\u54c1\u7684\u8868\u9762\u5f62\u8c8c\uff0c\u8fbe\u5230\u63a5\u8fd1\u539f\u5b50\u5206\u8fa8\u7387\uff0c\u8fd8\u53ef\u6d4b\u91cf\u8868\u9762\u539f\u5b50\u95f4\u7684\u529b\uff0c\u6d4b\u91cf\u8868\u9762\u7684<strong>\u5f39\u6027\uff0c\u5851\u6027\uff0c\u786c\u5ea6\uff0c\u7c98\u7740\u529b\uff0c\u6469\u64e6\u529b<\/strong>\u7b49\u6027\u8d28\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101770\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/\u56fe\u72477-1.jpg\" alt=\"\" width=\"600\" height=\"589\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/\u56fe\u72477-1.jpg 600w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/\u56fe\u72477-1-300x295.jpg 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p style=\"text-align: center;\">\u56fe7 AFM\u7684\u5de5\u4f5c\u539f\u7406<\/p>\n<p><strong>2.2 AFM<\/strong><strong>\u5de5\u4f5c\u6a21\u5f0f<\/strong><\/p>\n<p>\u5728\u539f\u5b50\u529b\u663e\u5fae\u955c\u6210\u50cf\u6a21\u5f0f\u4e2d\uff0c\u6839\u636e\u9488\u5c16\u4e0e\u6837\u54c1\u95f4\u4f5c\u7528\u529b\u7684\u4e0d\u540c\u6027\u8d28\u53ef\u5206\u4e3a\uff1a<strong>\u63a5\u89e6\u6a21\u5f0f\uff0c\u975e\u63a5\u89e6\u6a21\u5f0f\uff0c\u8f7b\u6572\u6a21\u5f0f\u3002<\/strong><\/p>\n<p><strong>1) <\/strong><strong>\u63a5\u89e6\u6210\u50cf\u6a21\u5f0f<\/strong>\uff1a\u9488\u5c16\u5728\u626b\u63cf\u8fc7\u7a0b\u4e2d\u59cb\u7ec8\u540c\u6837\u54c1\u8868\u9762\u63a5\u89e6\u3002\u9488\u5c16\u548c\u6837\u54c1\u95f4\u7684\u76f8\u4e92\u4f5c\u7528\u529b\u4e3a\u63a5\u89e6\u539f\u5b50\u95f4\u7535\u5b50\u7684\u5e93\u4ed1\u6392\u65a5\u529b\uff08\u5176\u529b\u5927\u5c0f\u4e3a10<sup>-8<\/sup>~10<sup>-6<\/sup>N\uff09\u3002\u4f18\u70b9\u4e3a\u56fe\u50cf\u7a33\u5b9a\uff0c\u5206\u8fa8\u7387\u9ad8\uff0c\u7f3a\u70b9\u4e3a\u7531\u4e8e\u9488\u5c16\u548c\u6837\u54c1\u95f4\u7c98\u9644\u529b\u7684\u4f5c\u7528\u7b49\u56e0\u7d20\u5f71\u54cd\uff0c\u53ef\u5f71\u54cd\u6210\u50cf\u8d28\u91cf\u3002<\/p>\n<p><strong>2) <\/strong><strong>\u975e\u63a5\u89e6\u6210\u50cf\u6a21\u5f0f<\/strong>\uff1a\u5f53\u9488\u5c16\u5728\u6837\u54c1\u8868\u9762\u626b\u63cf\u65f6\uff0c\u59cb\u7ec8\u4fdd\u6301\u4e0d\u4e0e\u6837\u54c1\u8868\u9762\u63a5\u89e6\uff08\u4e00\u822c\u4fdd\u63015~20nm\u7684\u8ddd\u79bb\uff09\u3002\u5728\u975e\u63a5\u89e6\u6a21\u5f0f\u4e2d\uff0c \u9488\u5c16\u4e0e\u6837\u54c1\u95f4\u7684\u4f5c\u7528\u529b\u662f\u957f\u7a0b\u529b\u2014\u2014\u8303\u5fb7\u534e\u5438\u5f15\u529b\u3002\u7531\u4e8e\u9488\u5c16\u59cb\u7ec8\u4e0d\u4e0e\u6837\u54c1\u8868\u9762\u63a5\u89e6\uff0c\u56e0\u800c\u907f\u514d\u4e86\u63a5\u89e6\u6a21\u5f0f\u4e2d\u9047\u5230\u7684\u4e00\u4e9b\u95ee\u9898\u3002\u7f3a\u70b9\u662f\u7531\u4e8e\u8303\u5fb7<\/p>\n<p>\u534e\u529b\u975e\u5e38\u5c0f\uff0c\u56e0\u6b64\u6bd4\u63a5\u89e6\u6a21\u5f0f\u7684\u5206\u8fa8\u7387\u8f83\u4f4e\uff0c\u5e76\u4e14\u4e0d\u9002\u5408\u4e8e\u6db2\u4f53\u4e2d\u6210\u50cf\u3002<\/p>\n<p><strong>3) <\/strong><strong>\u8f7b\u6572\u6210\u50cf\u6a21\u5f0f<\/strong>\uff1a\u540c\u975e\u63a5\u89e6\u6a21\u5f0f\u76f8\u4f3c\uff0c \u5728\u9488\u5c16\u626b\u63cf\u8fc7\u7a0b\u4e2d\uff0c\u5fae\u60ac\u81c2\u4e5f\u662f\u632f\u8361\u7684\uff0c\u5176\u632f\u5e45\u6bd4\u975e\u63a5\u89e6\u6a21\u5f0f\u66f4\u5927\uff0c\u540c\u65f6\u9488\u5c16\u5728\u632f\u8361\u65f6\u95f4\u65ad\u5730\u4e0e\u6837\u54c1\u63a5\u89e6\u3002\u4f18\u70b9\u662f\u5206\u8fa8\u7387\u9ad8\uff08\u8fd1\u4e4e\u7b49\u540c\u63a5\u89e6\u6a21\u5f0f\uff09\uff1b\u53ef\u5e94\u7528\u4e8e\u67d4\u8f6f\u3001\u6613\u788e\u548c\u7c98\u9644\u6027\u6837\u54c1\uff1b\u7531\u4e8e\u4f5c\u7528\u529b\u662f\u5782\u76f4\u7684\uff0c\u6750\u6599\u8868\u9762\u53d7\u6a2a\u5411\u6469\u64e6\u529b\u3001<\/p>\n<p>\u538b\u7f29\u529b\u3001\u526a\u5207\u529b\u7684\u5f71\u54cd\u8f83\u5c0f\u3002<\/p>\n<p><strong>2.3 AFM<\/strong><strong>\u5e94\u7528\u4e3e\u4f8b<\/strong><\/p>\n<p>\u7531\u4e8e\u539f\u5b50\u529b\u663e\u5fae\u955c\u5bf9\u6240\u5206\u6790\u6837\u54c1\u7684\u5bfc\u7535\u6027\u65e0\u8981\u6c42\uff0c\u56e0\u6b64\u4f7f\u5176\u5728\u8bf8\u591a\u6750\u6599\u9886\u57df\u4e2d\u5f97\u5230\u4e86\u5e7f\u6cdb\u5e94\u7528\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101765\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/8-11.jpg\" alt=\"\" width=\"600\" height=\"315\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/8-11.jpg 600w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/8-11-300x158.jpg 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p style=\"text-align: center;\">\u56fe8 ITO\u8584\u819c<\/p>\n<p>\u900f\u660e\u5bfc\u7535\u7684ITO\u8584\u819c\uff0c\u968f\u7740\u6210\u819c\u65b9\u6cd5\u3001\u819c\u539a\u3001\u57fa\u5e95\u6e29\u5ea6\u7b49\u6210\u819c\u6761\u4ef6\u53d8\u5316\uff0c \u800c\u8868\u9762\u5f62\u8c8c\u4e0d\u540c\u3002\u5c06\u819c\u539a120nm\uff08\u5de6\uff09\u4e0e450nm\uff08\u53f3\uff09\u7684ITO\u8584\u819c\u8fdb\u884c\u6bd4\u8f83\u65f6\uff0c\u968f\u7740\u819c\u539a\u7684\u589e\u52a0\uff0c\u6bcf\u4e2a\u7ed3\u6676\u9897\u7c92\u660e\u663e\u5730\u957f\u5927\u3002\u53e6\u5916\uff0c\u660e\u663e\u5730\u89c2\u5bdf\u5230\u6e85\u5c04\u751f\u957f\u6cd5\u7279\u6709\u7684\u6676\u7c92\uff0d\u4e9a\u6676\u7c92\u7ed3\u6784\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101766\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/9-7.jpg\" alt=\"\" width=\"600\" height=\"632\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/9-7.jpg 600w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/9-7-285x300.jpg 285w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p style=\"text-align: center;\">\u56fe9 \u7259\u9f7f\u7684\u8702\u7a9d\u72b6\u7ed3\u6784<\/p>\n<p>\u89c2\u5bdf\u88ab\u9178\u8150\u8680\u7684\u7259\u9f7f\u91c9\u8d28\u8868\u9762\u3002\u7531\u4e8e\u91c9\u8d28\u7684\u78f7\u7070\u77f3\u7ed3\u6676\u7684\u5dee\u522b\uff0c\u8150\u8680\u51fa\u7c97\u7cd9\u7684\u8702\u7a9d\u72b6\u8868\u9762\u3002\u5728\u4e0e\u53e3\u8154\u5185\u4e2d\u7c7b\u4f3c\u7684\u6c34\u6eb6\u6db2\u4e2d\u89c2\u5bdf\u3002\uff08\u4f7f\u7528\u57f9\u517b\u76bf\u578b\u7684\u6db2\u4f53\u6c60\uff09<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101772\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/10-6.jpg\" alt=\"\" width=\"600\" height=\"361\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/10-6.jpg 600w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/10-6-300x181.jpg 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p>&nbsp;<\/p>\n<p style=\"text-align: center;\">\u56fe10 \u529b-\u8ddd\u79bb\u66f2\u7ebf<\/p>\n<p>\u539f\u5b50\u529b\u663e\u5fae\u955c\u53ef\u4f5c\u4e3a\u7eb3\u7c73\u7ea7\u7684\u201c\u538b\u75d5\u5668\u201d\uff0c\u7528\u6765\u6d4b\u91cf\u6750\u6599\u7684\u5f39\u6027\u3001\u5851\u6027\u3001\u786c\u5ea6\u7b49\u6027\u8d28\u3002<\/p>\n<p>\u672c\u6587\u8f6c\u81ea\u7f51\u7edc\u3002<\/p>\n<p>\u672c\u6587\u7531\u6750\u6599\u725bdeer\u7f16\u8f91\u6574\u7406\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>1 STM 1.1 STM\u5de5\u4f5c\u539f\u7406 \u626b\u63cf\u96a7\u9053\u663e\u5fae\u955c\u7684\u57fa\u672c\u539f\u7406\u662f\u5c06\u539f\u5b50\u7ebf\u5ea6\u7684\u6781\u7ec6\u63a2\u9488\u548c\u88ab\u7814\u7a76\u7269\u8d28\u7684\u8868\u9762\u4f5c\u4e3a\u4e24\u4e2a\u7535\u6781\uff0c\u5f53\u6837\u54c1\u4e0e\u9488\u5c16\u7684\u8ddd\u79bb\u975e\u5e38\u63a5\u8fd1(\u901a\u5e38\u5c0f\u4e8e1nm)\u65f6&#8230;<\/p>\n","protected":false},"author":3706,"featured_media":101760,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[234],"tags":[2290,2289],"class_list":["post-101758","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-guandian","tag-afm","tag-stm"],"_links":{"self":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts\/101758"}],"collection":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/users\/3706"}],"replies":[{"embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=101758"}],"version-history":[{"count":4,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts\/101758\/revisions"}],"predecessor-version":[{"id":101874,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/posts\/101758\/revisions\/101874"}],"wp:featuredmedia":[{"embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=\/wp\/v2\/media\/101760"}],"wp:attachment":[{"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=101758"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=101758"},{"taxonomy":"post_tag","embeddable":true,"href":"\/\/m.iemloyee.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=101758"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}