{"id":101325,"date":"2017-09-14T06:30:03","date_gmt":"2017-09-13T22:30:03","guid":{"rendered":"\/\/m.iemloyee.com\/?p=101325"},"modified":"2017-09-12T22:51:15","modified_gmt":"2017-09-12T14:51:15","slug":"%e5%ad%a6%e6%9c%af%e5%b9%b2%e8%b4%a7%e4%b8%a8plasma-etching-%e5%a4%84%e7%90%86%e6%9d%90%e6%96%99%e7%9a%84%e5%8e%9f%e7%90%86%e5%8f%8a%e5%ba%94%e7%94%a8","status":"publish","type":"post","link":"\/\/m.iemloyee.com\/?p=101325","title":{"rendered":"\u5b66\u672f\u5e72\u8d27\u4e28Plasma etching \u5904\u7406\u6750\u6599\u7684\u539f\u7406\u53ca\u5e94\u7528"},"content":{"rendered":"<p><span style=\"color: #0000ff;\"><strong>\u4e00\u3001\u4ec0\u4e48\u662fPlasma<\/strong><strong>\uff08\u7b49\u79bb\u5b50\uff09<\/strong><\/span><\/p>\n<p>Plasma \u5c31\u662f\u7b49\u79bb\u5b50\uff08\u5728\u53f0\u6e7e\u79f0\u4e3a\u7535\u6d46\uff09\uff0c\u662f\u7531\u6c14\u4f53\u7535\u79bb\u540e\u4ea7\u751f\u7684\u6b63\u8d1f\u5e26\u7535\u79bb\u5b50\u4ee5\u53ca\u5206\u5b50\uff0c\u539f\u5b50\u548c\u539f\u5b50\u56e2\u7ec4\u6210\u3002\u53ea\u6709\u5728\u5f3a\u7535\u573a\u4f5c\u7528\u4e0b\u96ea\u5d29\u7535\u79bb\u53d1\u751f\u65f6\uff0cplasma\u624d\u4f1a\u4ea7\u751f\u3002<\/p>\n<p>\u6b64\u5916\uff0c\u6c14\u4f53\u4ece\u5e38\u6001\u5230\u7b49\u79bb\u5b50\u7684\u8f6c\u53d8\uff0c\u4e5f\u662f\u4ece\u7edd\u7f18\u4f53\u5230\u534a\u5bfc\u4f53\u7684\u8f6c\u53d8\u3002\u5728\u6211\u4eec\u7684\u73b0\u5b9e\u751f\u6d3b\u4e2d\u4e5f\u5b58\u5728plasma\uff0c\u6bd4\u56fe\u8bf4\u8367\u5149\u706f\uff0c\u95ea\u7535\uff0c\u592a\u9633\u90fd\u662f\u7b49\u79bb\u5b50\u3002<\/p>\n<p><span style=\"color: #0000ff;\"><strong>\u4e8c\u3001\u4ec0\u4e48\u662fetching<\/strong><strong>\uff08\u523b\u8680\uff09<\/strong><\/span><\/p>\n<p>\u523b\u8680\u662f\u534a\u5bfc\u4f53\u5236\u9020\u3001\u5fae\u7535\u5b50IC\u5236\u9020\u4ee5\u53ca\u5fae\u7eb3\u5236\u9020\u5de5\u827a\u4e2d\u7684\u4e00\u4e2a\u91cd\u8981\u7684\u6b65\u9aa4\uff0c\u662f\u4e0e\u5149\u523b\u76f8\u8054\u7cfb\u7684\u56fe\u5f62\u5316\u5904\u7406\u7684\u4e3b\u8981\u5de5\u827a\u3002\u523b\u8680\u72ed\u4e49\u7406\u89e3\u5c31\u662f\u5149\u523b\u8150\u8680\uff0c\u5148\u901a\u8fc7\u5149\u523b\u5c06\u5149\u523b\u80f6\u8fdb\u884c\u5149\u523b\u66dd\u5149\u5904\u7406\uff0c\u7136\u540e\u901a\u8fc7\u5176\u5b83\u65b9\u5f0f\u8fdb\u884c\u8150\u8680\uff0c\u5904\u7406\u6389\u6240\u9700\u9664\u53bb\u7684\u90e8\u5206\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101335\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/1-60.jpg\" alt=\"\" width=\"700\" height=\"367\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/1-60.jpg 700w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/1-60-300x157.jpg 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/><\/p>\n<p style=\"text-align: center;\"><strong>\u56fe1<\/strong><strong>\uff1a\u523b\u8680\u6280\u672f\u7684\u5206\u7c7b<\/strong><\/p>\n<p>\u5e7f\u4e49\u4e0a\u6765\u8bb2\uff0c\u523b\u8680\u662f\u901a\u8fc7\u6eb6\u6db2\u3001\u53cd\u5e94\u79bb\u5b50\u6216\u5176\u5b83\u673a\u68b0\u65b9\u5f0f\u6765\u5265\u79bb\u3001\u53bb\u9664\u6750\u6599\u7684\u4e00\u79cd\u7edf\u79f0\uff0c\u6210\u4e3a\u5fae\u52a0\u5de5\u5236\u9020\u7684\u4e00\u79cd\u666e\u9002\u53eb\u6cd5\u3002\u523b\u8680\u6280\u672f\u4e3b\u8981\u5206\u4e3a\u6e7f\u6cd5\u523b\u8680\u4e0e\u5e72\u6cd5\u523b\u8680\uff08\u5982\u56fe1\uff09\u3002 \u6e7f\u6cd5\u523b\u8680\u5305\u62ec\u6709\uff1a\u5316\u5b66\u523b\u8680\u548c\u7535\u89e3\u523b\u8680\uff1b\u5e72\u6cd5\u523b\u8680\u6709\uff1a\u79bb\u5b50\u675f\u6e85\u5c04\u523b\u8680\uff08\u7269\u7406\u4f5c\u7528\uff09\u3001\u7b49\u79bb\u5b50\u523b\u8680\uff08\u5316\u5b66\u4f5c\u7528\uff09\u548c\u53cd\u5e94\u79bb\u5b50\u523b\u8680\uff08\u7269\u7406\u5316\u5b66\u4f5c\u7528\uff09\u3002<\/p>\n<p>\u6e7f\u6cd5\u523b\u8680\u548c\u5e72\u6cd5\u523b\u8680\u662f\u4e24\u7c7b\u5b8c\u5168\u4e0d\u540c\u523b\u8680\u65b9\u6cd5\u3002\u6e7f\u6cd5\u523b\u8680\u662f\u4f7f\u7528\u7279\u5b9a\u7684\u6eb6\u6db2\u4e0e\u9700\u8981\u88ab\u523b\u8680\u7684\u8584\u819c\u6750\u6599\u8fdb\u884c\u5316\u5b66\u53cd\u5e94\uff0c\u9009\u62e9\u6027\u7684\u523b\u8680\u6389\u8be5\u8584\u819c\u5c42\u4e0a\u672a\u63a9\u6a21\u7684\u533a\u57df\uff0c\u6bd4\u5982\u5e38\u7528\u7684\u91d1\u5c5e\u79bb\u5b50\u523b\u8680\u6cd5\u5c31\u5c5e\u4e8e\u6e7f\u6cd5\u523b\u8680\u3002\u800c\u5e72\u6cd5\u523b\u8680\u4e00\u822c\u6307\u7b49\u79bb\u5b50\u8868\u9762\u523b\u8680(plasma surface etching)\uff0c\u6750\u6599\u8868\u9762\u901a\u8fc7\u53cd\u5e94\u6c14\u4f53\u7535\u79bb\u6210\u7b49\u79bb\u5b50\u7b49\u81ea\u7531\u57fa\u56e2\u4e0e\u6750\u6599\u53d1\u751f\u53cd\u5e94\u4ece\u800c\u8fdb\u884c\u9009\u62e9\u6027\u5730\u523b\u8680\uff0c\u88ab\u523b\u8680\u7684\u6750\u6599\u8f6c\u5316\u4e3a\u6c14\u76f8\u5e76\u88ab\u771f\u7a7a\u6cf5\u6392\u51fa\uff0c\u5904\u7406\u540e\u7684\u6750\u6599\u5fae\u89c2\u6bd4\u8868\u9762\u79ef\u589e\u52a0\u5e76\u5177\u6709\u826f\u597d\u4eb2\u6c34\u6027\u3002<\/p>\n<p style=\"text-align: center;\"><strong>\u88681<\/strong><strong>\uff1a\u6e7f\u6cd5\u523b\u8680\u548c\u5e72\u6cd5\u523b\u8680\u6027\u80fd\u5bf9\u6bd4<\/strong><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101340\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/\u88681-1.jpg\" alt=\"\" width=\"700\" height=\"463\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/\u88681-1.jpg 700w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/\u88681-1-300x198.jpg 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/><\/p>\n<p><strong style=\"line-height: inherit;\">\u00a0<\/strong><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101336\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/2-37.jpg\" alt=\"\" width=\"499\" height=\"435\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/2-37.jpg 499w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/2-37-300x262.jpg 300w\" sizes=\"(max-width: 499px) 100vw, 499px\" \/><\/p>\n<p style=\"text-align: center;\"><strong>\u56fe2<\/strong><strong>\uff1a\u4e09\u79cd\u523b\u8680\u7c7b\u578b<\/strong><\/p>\n<p>\u6ce8\uff1a\u6e7f\u6cd5\u523b\u8680\u5f15\u8d77\u4fa7\u8680\uff0c\u4f7f\u5f97\u523b\u8680\u4e0d\u80fd\u7cbe\u786e\u63a7\u5236\u5c3a\u5bf8\uff0c\u800c\u5e72\u6cd5\u523b\u8680\uff08\u7b49\u79bb\u5b50\u523b\u8680\uff09\u5219\u53ef\u4ee5\u9009\u62e9\u6027\u523b\u8680\u3002\u523b\u8680\u7c7b\u578b\u6709\u4e09\u79cd\uff0c\u5206\u522b\u662f\u5404\u5411\u540c\u6027\u523b\u8680(\u56fe2a)\u3001\u659c\u5411\u523b\u8680(\u56fe2b)\u548c\u5782\u76f4\u523b\u8680\/\u5404\u5411\u5f02\u6027\u523b\u8680(\u56fe2c).<\/p>\n<p>(a).\u5404\u5411\u540c\u6027\u523b\u8680<\/p>\n<p>(b).\u659c\u5411\u523b\u8680\uff1b<\/p>\n<p>(c).\u5404\u5411\u540c\u6027\u523b\u8680\u3002<\/p>\n<p><span style=\"color: #0000ff;\"><strong>\u4e09\u3001plasma etching <\/strong><strong>\u7684\u523b\u8680<\/strong><\/span><\/p>\n<p><strong>1.<\/strong><strong>\u523b\u8680\u673a\u7406<\/strong><\/p>\n<p>\u7b49\u79bb\u5b50\u523b\u8680\u662f\u91c7\u7528\u9ad8\u9891\u8f89\u5149\u653e\u7535\u53cd\u5e94\uff0c\u4f7f\u53cd\u5e94\u6c14\u4f53\u6fc0\u6d3b\u6210\u6d3b\u6027\u7c92\u5b50\uff0c\u5982\u539f\u5b50\u6216\u6e38\u79bb\u57fa\uff0c\u8fd9\u4e9b\u6d3b\u6027\u7c92\u5b50\u6269\u6563\u5230\u9700\u523b\u8680\u7684\u90e8\u4f4d\uff0c\u5728\u90a3\u91cc\u4e0e\u88ab\u523b\u8680\u6750\u6599\u8fdb\u884c\u53cd\u5e94\uff0c\u5f62\u6210\u6325\u53d1\u6027\u53cd\u5e94\u7269\u800c\u88ab\u53bb\u9664\u3002<\/p>\n<p>\u5bf9\u7845\u57fa\u6750\u6599\u7684\u57fa\u672c\u523b\u8680\u539f\u7406\u662f\u7528\u201c\u7845-\u5364\u201d\u952e\u4ee3\u66ff\u201c\u7845-\u7845\u201d\u952e\uff0c\u4ece\u800c\u4ea7\u751f\u6325\u53d1\u6027\u7684\u7845\u5364\u5316\u5408\u7269\u3002\u523b\u8680\u7845\u57fa\u6750\u6599\u7684\u523b\u8680\u6c14\u4f53\u6709CF<sub>4<\/sub>\u3001C<sub>2<\/sub>F<sub>6<\/sub>\u548cSF<sub>6<\/sub><\/p>\n<p>\u7b49\u3002\u5176\u4e2d\u6700\u5e38\u7528\u7684\u662fCF<sub>4<\/sub>\u3002CF<sub>4<\/sub>\u672c\u8eab\u4e0d\u4f1a\u76f4\u63a5\u523b\u8680\u7845\u3002\u7b49\u79bb\u5b50\u4e2d\u7684\u9ad8\u80fd\u7535\u5b50\u649e\u51fbCF<sub>4<\/sub>\u5206\u5b50\u4f7f\u4e4b\u88c2\u89e3\u6210CF<sub>3<\/sub>\u3001CF<sub>2<\/sub>\u3001C\u548cF,\u8fd9\u4e9b\u90fd\u662f\u5177\u6709\u6781\u5f3a\u5316\u5b66\u53cd\u5e94\u6027\u7684\u539f\u5b50\u56e2\u3002CF<sub>4<\/sub>\u7b49\u79bb\u5b50\u5bf9Si\u548cSiO<sub>2<\/sub>\u6709\u5f88\u9ad8\u7684\u523b\u8680\u9009\u62e9\u6bd4\uff0c\u6240\u4ee5\u5f88\u9002\u5408\u523b\u8680SiO<sub>2<\/sub>\u4e0a\u7684\u591a\u6676Si\u3002\uff08\u6ce8\uff1a\u523b\u8680\u9009\u62e9\u6bd4S=E<sub>1<\/sub>\/E<sub>2<\/sub>\uff0c\u8868\u793a\u5728\u540c\u4e00\u523b\u8680\u6761\u4ef6\u4e0b\uff0c\u88ab\u523b\u8680\u6750\u6599\u7684\u523b\u8680\u901f\u7387\u4e0e\u53e6\u4e00\u79cd\u6750\u6599\u7684\u523b\u8680\u901f\u7387\u7684\u6bd4\uff09\u5728CF<sub>4<\/sub>\u4e2d\u63ba\u5165\u5c11\u91cf\u7684\u5176\u4ed6\u6c14\u4f53\u53ef\u6539\u53d8\u523b\u8680\u7684\u9009\u62e9\u6bd4\u3002\u63ba\u5165\u5c11\u91cf\u6c27\u6c14\u53ef\u63d0\u9ad8\u5bf9Si\u7684\u523b\u8680\u901f\u7387\uff1b\u63ba\u5165\u5c11\u91cf\u7684\u6c22\u6c14\u5219\u53ef\u63d0\u9ad8\u5bf9SiO<sub>2<\/sub>\u7684\u523b\u8680\u901f\u7387\u3002<\/p>\n<p><strong>2.<\/strong><strong>\u7b49\u79bb\u5b50\u523b\u8680\u57fa\u672c\u8fc7\u7a0b<\/strong><\/p>\n<p>\u6c14\u4f53\u2192\u79bb\u5316\u6210\u6d3b\u6027\u7c92\u5b50\u2192\u6269\u6563\u5e76\u5438\u9644\u5230\u5e26\u523b\u8680\u8868\u9762\u2192\u8868\u9762\u6269\u6563\u2192\u4e0e\u8868\u9762\u819c\u53cd\u5e94\u2192\u4ea7\u7269\u89e3\u5438\u9644\u2192\u79bb\u5f00\u7845\u7247\u8868\u9762\u5e76\u6392\u9664\u8154\u5ba4\u3002<\/p>\n<p>\u56fe3\u662f\u7b49\u79bb\u5b50\u523b\u8680\u7cfb\u7edf\u7684\u6784\u9020\u56fe\u3002\u5728\u4f4e\u538b\u60c5\u51b5\u4e0b\uff0c\u53cd\u5e94\u6c14\u4f53\u5728\u5c04\u9891\u529f\u7387\u7684\u6fc0\u53d1\u4e0b\uff0c\u4ea7\u751f\u7535\u79bb\u5e76\u5f62\u6210\u7b49\u79bb\u5b50\uff0c\u7b49\u79bb\u5b50\u662f\u7531\u5e26\u7535\u7684\u7535\u5b50\u548c\u79bb\u5b50\u7ec4\u6210\uff0c\u53cd\u5e94\u8154\u4f53\u91cd\u7684\u6c14\u4f53\u5728\u7535\u5b50\u7684\u649e\u51fb\u4e0b\uff0c\u9664\u4e86\u8f6c\u53d8\u6210\u79bb\u5b50\u5916\uff0c\u8fd8\u80fd\u5438\u6536\u80fd\u529b\u5e76\u5f62\u6210\u5927\u91cf\u7684\u6d3b\u6027\u57fa\u56e2\u3002\u6d3b\u6027\u53cd\u5e94\u57fa\u56e2\u548c\u88ab\u523b\u8680\u7269\u8d28\u8868\u9762\u5f62\u6210\u5316\u5b66\u53cd\u5e94\u5e76\u5f62\u6210\u6325\u53d1\u6027\u7684\u53cd\u5e94\u751f\u6210\u7269\uff0c\u53cd\u5e94\u751f\u6210\u7269\u8131\u79bb\u88ab\u523b\u8680\u7269\u8d28\u8868\u9762\uff0c\u5e76\u88ab\u771f\u7a7a\u7cfb\u7edf\u62bd\u51fa\u8154\u4f53\u3002\u4ee5CF<sub>x<\/sub>\u53cd\u5e94\u6c14\u4f53\u523b\u8680\u7845\u4e3a\u4f8b\uff0c\u4e0b\u56fe\u662f\u7b49\u79bb\u5b50\u523b\u8680\u53cd\u5e94\u7684\u539f\u7406\u56fe\u53ca\u53cd\u5e94\u65b9\u7a0b\u5f0f\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101337\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/3-30.jpg\" alt=\"\" width=\"700\" height=\"579\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/3-30.jpg 700w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/3-30-300x248.jpg 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/><\/p>\n<p style=\"text-align: center;\"><strong>\u56fe<\/strong><strong>3<\/strong><strong>\uff1a\u7b49\u79bb\u5b50\u523b\u8680\u7cfb\u7edf\u6784\u9020\u56fe<\/strong><\/p>\n<p>&nbsp;<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101338\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/4-30.jpg\" alt=\"\" width=\"700\" height=\"434\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/4-30.jpg 700w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/4-30-300x186.jpg 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/><\/p>\n<p style=\"text-align: center;\"><strong>\u56fe4<\/strong><strong>\uff1a\u523b\u8680\u8fc7\u7a0b\u53cd\u5e94\u539f\u7406\u56fe\u00a0(a).\u7ecf\u8fc7\u4e00\u6b21\u5faa\u73af\u949d\u5316\u7684\u6b65\u9aa4\uff1b(b).\u7ecf\u8fc7\u4e00\u6b21\u5faa\u73af\u523b\u8680\u7684\u6b65\u9aa4\uff1b(c).\u7ecf\u5386\u56db\u6b21\u5faa\u73af\u523b\u8680\u540e\u7684\u8f6e\u5ed3\uff1b(d).\u53c2\u4e0e\u53cd\u5e94\u8fc7\u7a0b\u7684\u8be6\u7ec6\u5316\u5b66\u65b9\u7a0b\u5f0f\u3002<\/strong><\/p>\n<p>\u5355\u6676\u7845\u4ee5\u5916\u7684\u8bb8\u591a\u6750\u6599\u4e5f\u53ef\u4ee5\u901a\u8fc7\u7b49\u79bb\u5b50\u523b\u8680\u65b9\u6cd5\u8fdb\u884c\u5904\u7406\uff0c\u6bd4\u5982\uff1a\u591a\u6676\u7845\u3001\u6c2e\u5316\u7845(SiN<sub>x<\/sub>)\u3001\u6c27\u5316\u7845\u3001\u73bb\u7483\u3001\u5316\u5408\u7269\u534a\u5bfc\u4f53\u3001\u91d1\u5c5e\u3001\u7845\u5316\u7269\u548c\u805a\u5408\u7269\u7b49\u3002\u5904\u7406\u4e0d\u540c\u7684\u6750\u6599\u7528\u5230\u7684\u53cd\u5e94\u6c14\u4f53\u4e5f\u4e0d\u4e00\u6837\uff0c\u4e5f\u53ef\u4ee5\u7528\u4e2a\u6df7\u5408\u6c14\u4f53\u6765\u5f97\u5230\u7279\u5b9a\u7684\u523b\u8680\u9009\u62e9\u6bd4\u3002\u88682\u662f\u4e0d\u540c\u6750\u6599\u6240\u7528\u5230\u7684\u53cd\u5e94\u6c14\u4f53\u3002<\/p>\n<p style=\"text-align: center;\"><strong>\u88682<\/strong><strong>\uff1a\u7b49\u79bb\u5b50\u523b\u8680\u4e2d\u4e0d\u540c\u6750\u6599\u6240\u7528\u5230\u7684\u53cd\u5e94\u6c14\u4f53<\/strong><strong><br \/>\n<img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101341\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/\u88682-1.jpg\" alt=\"\" width=\"700\" height=\"312\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/\u88682-1.jpg 700w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/\u88682-1-300x134.jpg 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/><\/strong><\/p>\n<p><span style=\"color: #0000ff;\"><strong>\u56db\u3001\u7b49\u79bb\u5b50\u523b\u8680\u7684\u5e94\u7528\u6848\u4f8b<\/strong><\/span><\/p>\n<p>\u7b49\u79bb\u5b50\u523b\u8680\u4e3b\u8981\u5e94\u7528\u5728\u5fae\u7535\u5b50\u5236\u4f5c\u5de5\u827a\u4e2d\uff0c\u6240\u6709\u4e3b\u8981\u7684\u5904\u7406\u5bf9\u8c61\u662f\u7845\uff0c\u7528\u4e8e\u7cbe\u786e\u56fe\u5f62\u8f6c\u79fb\u3002\u6b64\u5916\u5176\u8fd8\u5e7f\u6cdb\u5e94\u7528\u4e8e\u7b49\u79bb\u5b50\u523b\u8680\u5e73\u677f\u3001\u8584\u819c\u523b\u8680\u4ee5\u53ca\u7ea4\u7ef4\u523b\u8680\u4e2d\u3002<\/p>\n<p><strong>1.<\/strong><strong>\u7cbe\u786e\u56fe\u5f62\u8f6c\u79fb<\/strong><\/p>\n<p>\u5728\u5fae\u7535\u5b50\u5236\u9020\u5de5\u827a\u4e2d\uff0c\u5149\u523b\u56fe\u5f62\u5fc5\u987b\u6700\u7ec8\u8f6c\u79fb\u5230\u5149\u523b\u80f6\u4e0b\u9762\u7ec4\u6210\u5668\u4ef6\u7684\u5404\u8584\u819c\u5c42\u4e0a\uff0c\u8fd9\u79cd\u56fe\u5f62\u7684\u8f6c\u79fb\u662f\u91c7\u7528\u523b\u8680\u5de5\u827a\u5b8c\u6210\u7684\u3002\u4f46\u662f\u6e7f\u6cd5\u523b\u8680\u7684\u5bbd\u5ea6\u5c40\u9650\u4e8e3\u03bcm\u4ee5\u4e0a\uff0c\u56e0\u6b64\u8981\u5b9e\u73b0\u8d85\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\u751f\u4ea7\u4e2d\u7684\u5fae\u7ec6\u56fe\u5f62\u9ad8\u4fdd\u771f\u5730\u4ece\u5149\u523b\u6a21\u677f\u8f6c\u79fb\u5230\u7845\u7247\u4e0a\u4e0d\u53ef\u66ff\u4ee3\u7684\u5de5\u827a\u53ea\u80fd\u91c7\u7528\u7b49\u79bb\u5b50\u523b\u8680\u3002<\/p>\n<p>\u5728\u7b49\u79bb\u5b50\u523b\u8680\u5de5\u827a\u4e2d\uff0c\u9996\u5148\u662f\u5728\u628a\u7845\u6676\u7247\u4e0a\u9762\u6d82\u62b9\u4e00\u5c42\u5149\u654f\u7269\u8d28\uff0c\u5e76\u5728\u5149\u654f\u7269\u8d28\u4e0a\u76d6\u4e0a\u5177\u6709\u4e00\u5b9a\u56fe\u5f62\u7684\u91d1\u5c5e\u6a21\u677f\u3002\u7136\u540e\u8fdb\u884c\u7d2b\u5916\u66dd\u5149\uff0c\u4f7f\u90e8\u5206\u6676\u7247\u7684\u8868\u9762\u88f8\u9732\u51fa\u6765\uff0c\u63a5\u7740\u518d\u628a\u8fd9\u79cd\u5f85\u52a0\u5de5\u7684\u7845\u6676\u7247\u653e\u7f6e\u5230\u5177\u6709\u5316\u5b66\u6d3b\u6027\u7684\u4f4e\u6e29\u7b49\u79bb\u5b50\u4e2d\uff0c\u8fdb\u884c\u7b49\u79bb\u5b50\u523b\u8680\u3002\u8fd9\u79cd\u5177\u6709\u5316\u5b66\u6d3b\u6027\u7684\u7b49\u79bb\u5b50\u4e00\u822c\u91c7\u7528\u6c2f\u6c14\u6216\u78b3\u6c1f\u6c14\u4f53\u7535\u79bb\u4ea7\u751f\uff0c\u542b\u6709\u7535\u5b50\u548c\u79bb\u5b50\u548c\u5176\u4ed6\u6d3b\u6027\u81ea\u7531\u57fa\uff08\u5982\u2022Cl\u3001\u2022Cl<sub>2<\/sub>\u3001\u2022F\u3001\u2022CF\u7b49\uff09\u3002\u8fd9\u4e9b\u6d3b\u6027\u57fa\u56e2\u6c89\u79ef\u5230\u88f8\u9732\u7684\u7845\u6676\u7247\u4e0a\u65f6\uff0c\u4e0e\u7845\u539f\u5b50\u53cd\u5e94\u751f\u6210\u6325\u53d1\u6027\u7684\u6c2f\u5316\u7845\u6216\u6c1f\u5316\u7845\u5206\u5b50\uff0c\u4ece\u800c\u5bf9\u6676\u7247\u8fdb\u884c\u5404\u5411\u5f02\u6027\u523b\u8680\u3002\u53e6\u4e00\u65b9\u9762\uff0c\u4e3a\u4e86\u63a7\u5236\u8f70\u51fb\u5230\u6676\u7247\u4e0a\u79bb\u5b50\u7684\u80fd\u91cf\u5206\u5e03\u548c\u89d2\u5ea6\u5206\u5e03\uff0c\u8fd8\u901a\u5e38\u5c06\u6676\u7247\u653e\u7f6e\u5728\u4e00\u4e2a\u65bd\u52a0\u5c04\u9891\u6216\u8109\u51b2\u504f\u538b\u7684\u7535\u6781\u4e0a\u9762\uff0c\u5728\u6676\u7247\u7684\u4e0a\u65b9\u5c06\u5f62\u6210\u4e00\u4e2a\u975e\u7535\u4e2d\u6027\u7684\u7b49\u79bb\u5b50\u533a\uff0c\u5373\u9798\u5c42-\u7b49\u79bb\u5b50\u4e2d\u7684\u79bb\u5b50\u5728\u9798\u5c42\u7535\u573a\u7684\u4f5c\u7528\u4e0b\uff0c\u8f70\u51fb\u5230\u88f8\u9732\u7684\u6676\u7247\u8868\u9762\u4e0a\uff0c\u5e76\u4e0e\u8868\u9762\u5c42\u7684\u7845\u539f\u5b50\u8fdb\u884c\u649e\uff0c\u4f7f\u5176\u6e85\u5c04\u51fa\u6765\uff0c\u4ece\u800c\u5b9e\u73b0\u5bf9\u6676\u7247\u7684\u5404\u5411\u5f02\u6027\u523b\u8680\u3002\u76ee\u524d\u5728\u4e00\u4e9b\u53d1\u8fbe\u56fd\u5bb6\u7684\u5b9e\u9a8c\u5ba4\u91cc\uff0c\u523b\u8680\u7ebf\u5bbd\u5df2\u7ecf\u7a81\u78340.1\u03bcm\uff0c\u5e76\u5f00\u59cb\u8003\u8651\u6311\u6218\u7eb3\u7c73\u82af\u7247\u7684\u52a0\u5de5\u6280\u672f\u3002<\/p>\n<p><strong>2.\u7b49\u79bb\u5b50\u523b\u8680\u5e73\u677f<\/strong><\/p>\n<p>\u4e24\u4e2a\u5927\u5c0f\u548c\u4f4d\u7f6e\u5bf9\u79f0\u7684\u5e73\u884c\u91d1\u5c5e\u677f\u4f5c\u4e3a\u7b49\u79bb\u5b50\u53d1\u751f\u7684\u7535\u6781\uff0c\u5e73\u677f\u653e\u7f6e\u4e8e\u63a5\u5730\u7684\u9634\u6781\u4e0a\u9762\uff0cRF\u4fe1\u53f7\u52a0\u5728\u53cd\u5e94\u5668\u7684\u4e0a\u7535\u6781\u3002\u7531\u4e8e\u7b49\u79bb\u5b50\u7535\u52bf\u603b\u662f\u9ad8\u4e8e\u5730\u7535\u52bf\uff0c\u56e0\u800c\u662f\u4e00\u79cd\u5e26\u80fd\u79bb\u5b50\u8fdb\u884c\u8f70\u51fb\u7684\u7b49\u79bb\u5b50\u523b\u8680\u6a21\u5f0f\uff0c\u8fdb\u884c\u5404\u5411\u5f02\u6027\u523b\u8680\uff0c\u53ef\u5f97\u51e0\u4e4e\u5782\u76f4\u7684\u4fa7\u8fb9\u3002\u53e6\u5916\uff0c\u65cb\u8f6c\u6676\u5706\u76d8\u53ef\u589e\u52a0\u523b\u8680\u7684\u5747\u5300\u6027\u3002\u8be5\u7cfb\u7edf\u53ef\u8bbe\u8ba1\u6210\u6279\u91cf\u548c\u5355\u4e2a\u6676\u5706\u53cd\u5e94\u5ba4\uff0c\u53ef\u5bf9\u523b\u8680\u53c2\u6570\u7cbe\u5bc6\u63a7\u5236\uff0c\u4ee5\u5f97\u5230\u5747\u5300\u523b\u8680\u3002<\/p>\n<p><strong>3.\u8584\u819c\u523b\u8680<\/strong><\/p>\n<p>\u523b\u8680\u6280\u672f\u662f\u7535\u5b50\u4fe1\u606f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loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-101339\" src=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/5-27.jpg\" alt=\"\" width=\"700\" height=\"249\" srcset=\"\/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/5-27.jpg 700w, \/\/m.iemloyee.com\/wp-content\/uploads\/2017\/09\/5-27-300x107.jpg 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/><\/p>\n<p style=\"text-align: center;\"><strong>\u56fe<\/strong><strong>5<\/strong><strong>\uff1a<\/strong><strong>POM<\/strong><strong>\u805a\u5408\u7269\u6750\u6599\u7b49\u79bb\u5b50\u523b\u8680\u524d\u540e\u7684<\/strong><strong>SEM<\/strong><strong>\u56fe<\/strong><\/p>\n<p>\u6b64\u5916\uff0c\u7b49\u79bb\u5b50\u523b\u8680\u4e5f\u53ef\u4ee5\u5e94\u7528\u4e8e\u805a\u5408\u7269\u7684\u523b\u8680\uff0c\u56fe5\u5c55\u793a\u4e86\u7b49\u79bb\u5b50\u523b\u8680POM\u805a\u5408\u7269\u6750\u6599\u524d\u540e\u7684SEM\u56fe\u3002\u7ecf\u8fc7\u7b49\u79bb\u5b50\u523b\u8680\u540e\uff0cPOM\u805a\u5408\u7269\u7684\u8868\u9762\u53d8\u5f97\u84ec\u677e\u591a\u5b54\uff0c\u5927\u5927\u7684\u589e\u52a0\u4e86\u6bd4\u8868\u9762\u79ef\u3002<\/p>\n<p>\u00a0 \u5728\u5fae\u52a0\u5de5\u5de5\u827a\u4e2d\uff0c\u7b49\u79bb\u5b50\u6280\u672f\u4e5f\u4f1a\u5bfc\u81f4\u4e00\u4e9b\u8d1f\u9762\u7684\u95ee\u9898\u3002\u5668\u4ef6\u635f\u4f24\u5c31\u662f\u7b49\u79bb\u5b50\u523b\u8680\u4e2d\u7684\u524d\u6cbf\u95ee\u9898\u4e4b\u4e00\uff0c\u5176\u4ed6\u7684\u524d\u6cbf\u95ee\u9898\u8fd8\u6709\u5c18\u57c3\u6c61\u67d3\uff0c\u79bb\u5b50\u8fdf\u6ede\u548c\u5fae\u8d1f\u8377\u6548\u5e94\u3001\u5c0f\u4ecb\u7535\u5e38\u6570\u7684\u7535\u4ecb\u8d28\u548c\u9759\u7535\u5939\u5934\u7b49\u3002\u5728\u7b49\u79bb\u5b50\u52a0\u5de5\u4e2d\uff0c\u7531\u4e8e\u9ad8\u80fd\u91cf\u79bb\u5b50\u3001\u7535\u5b50\u548c\u5149\u5b50\u8f70\u51fb\uff0c\u5728\u5668\u4ef6\u4e2d\u5f15\u8d77\u7f3a\u9677\uff0c\u975e\u5b9a\u57df\u6676\u683c\u3001\u60ac\u7a7a\u952e\u7b49\uff0c\u6539\u53d8\u4e86\u5668\u4ef6\u7684\u673a\u68b0\u548c\u7535\u6027\u80fd\uff0c\u8fd9\u79cd\u6548\u5e94\u79f0\u4e3a\u5668\u4ef6\u635f\u4f24\u3002\u56e0\u6b64\uff0c\u5728\u4f7f\u7528\u7b49\u79bb\u5b50\u523b\u8680\u662f\u9700\u8981\u6ce8\u610f\u8fd9\u65b9\u9762\u7ed9\u5668\u4ef6\u5e26\u6765\u7684\u4e0d\u826f\u5f71\u54cd\u3002<\/p>\n<p><span style=\"color: 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